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1. 发明授权

US08076651B2 Specimen stage apparatus and specimen stage positioning control method 有权
标题翻译：试样台装置和试样台定位控制方法
公开(公告)号：US08076651B2
公开(公告)日：2011-12-13
申请号：US12415720
申请日：2009-03-31
申请人： Masahiro Koyama , Hironori Ogawa , Nobuo Shibata , Masaru Matsushima , Toshinori Kobayashi , Shuichi Nakagawa
发明人： Masahiro Koyama , Hironori Ogawa , Nobuo Shibata , Masaru Matsushima , Toshinori Kobayashi , Shuichi Nakagawa
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J37/28 , H01J2237/0216 , H01J2237/202 , H01J2237/2485 , H01L21/68
摘要： A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.
摘要翻译：试样台装置具有制动结构，其可以产生足以停止试样台的制动力，同时保持可移动台不增加其重量。试样台装置具有固定在X基座上并表示X方向的导向结构的X导件，由X导向件限制的X台沿X方向移动的X导件，具有固定到X台的可动部的X致动器， X制动器固定在X底座上并表示X台的制动结构。控制器执行定位控制，其中通过将X制动器推压到X工作台的底面上来产生制动力，以在试样台停止之后停止试样台并关闭X致动器的伺服控制。

2. 发明申请

US20090250625A1 SPECIMEN STAGE APPARATUS AND SPECIMEN STAGE POSITIONING CONTROL METHOD 有权
标题翻译：样本级设备和样本定位控制方法
公开(公告)号：US20090250625A1
公开(公告)日：2009-10-08
申请号：US12415720
申请日：2009-03-31
申请人： Masahiro KOYAMA , Hironori Ogawa , Nobuo Shibata , Masaru Matsushima , Toshinori Kobayashi , Shuichi Nakagawa
发明人： Masahiro KOYAMA , Hironori Ogawa , Nobuo Shibata , Masaru Matsushima , Toshinori Kobayashi , Shuichi Nakagawa
IPC分类号： G21K5/10
CPC分类号： H01J37/20 , H01J37/28 , H01J2237/0216 , H01J2237/202 , H01J2237/2485 , H01L21/68
摘要： A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.
摘要翻译：试样台装置具有制动结构，其可以产生足以停止试样台的制动力，同时保持可移动台不增加其重量。试样台装置具有固定在X基座上并表示X方向的导向结构的X导件，由X导向件限制的X台沿X方向移动的X导件，具有固定到X台的可动部的X致动器， X制动器固定在X底座上并表示X台的制动结构。控制器执行定位控制，其中通过将X制动器推压到X工作台的底面上来产生制动力，以在试样台停止之后停止试样台并关闭X致动器的伺服控制。

3. 发明授权

US08823309B2 Stage device 有权
标题翻译：舞台装置
公开(公告)号：US08823309B2
公开(公告)日：2014-09-02
申请号：US13391962
申请日：2010-09-17
申请人： Hironori Ogawa , Masahiro Koyama , Nobuo Shibata , Masaru Matsushima , Shuichi Nakagawa , Katsunori Onuki , Yoshimasa Fukushima
发明人： Hironori Ogawa , Masahiro Koyama , Nobuo Shibata , Masaru Matsushima , Shuichi Nakagawa , Katsunori Onuki , Yoshimasa Fukushima
IPC分类号： G03B27/42 , H01L21/027
CPC分类号： H01J37/20 , H01J2237/20228 , H01J2237/20278
摘要： Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.
摘要翻译：公开了一种可以应用于诸如用于检查和/或评估半导体的长度测量SEM的装置的较小和较轻的平台装置，其中可以减小磁场对电子束的影响。直线电动机110,111,112,113分别设置在基座104的四侧，与电子束突出位置（台装置的中心）分开。基座104的尺寸基本上等于由顶台101和可移动冲程的尺寸确定的最小尺寸。线性电动机定子110,112被构造为具有开口面分别位于舞台装置外侧的“C”形结构。此外，可移动工作台通过由非磁性材料构成的线性引导件107,109或由非磁性材料构成的滚子机构联接到顶台。

4. 发明申请

US20120145920A1 Stage Device 有权
标题翻译：舞台装置
公开(公告)号：US20120145920A1
公开(公告)日：2012-06-14
申请号：US13391962
申请日：2010-09-17
申请人： Hironori Ogawa , Masahiro Koyama , Nobuo Shibata , Masaru Matsushima , Shuichi Nakagawa , Katsunori Onuki , Yoshimasa Fukushima
发明人： Hironori Ogawa , Masahiro Koyama , Nobuo Shibata , Masaru Matsushima , Shuichi Nakagawa , Katsunori Onuki , Yoshimasa Fukushima
IPC分类号： G21K5/10 , H02K41/02
CPC分类号： H01J37/20 , H01J2237/20228 , H01J2237/20278
摘要： Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.
摘要翻译：公开了一种可以应用于诸如用于检查和/或评估半导体的长度测量SEM的装置的较小和较轻的平台装置，其中可以减小磁场对电子束的影响。直线电动机110,111,112,113分别设置在基座104的四侧，与电子束突出位置（台装置的中心）分开。基座104的尺寸基本上等于由顶台101和可移动冲程的尺寸确定的最小尺寸。线性电动机定子110,112被构造为具有开口面分别位于舞台装置外侧的“C”形结构。此外，可移动工作台通过由非磁性材料构成的线性引导件107,109或由非磁性材料构成的滚子机构联接到顶台。

5. 发明申请

US20120070066A1 CHARGED PARTICLE BEAM DEVICE AND EVALUATION METHOD USING THE CHARGED PARTICLE BEAM DEVICE 有权
标题翻译：充电颗粒光束装置和使用充电颗粒光束装置的评估方法
公开(公告)号：US20120070066A1
公开(公告)日：2012-03-22
申请号：US13375085
申请日：2010-06-03
申请人： Hiroyuki Kitsunai , Seiichiro Kanno , Masaru Matsushima , Shuichi Nakagawa , Go Miya
发明人： Hiroyuki Kitsunai , Seiichiro Kanno , Masaru Matsushima , Shuichi Nakagawa , Go Miya
IPC分类号： G06K9/00
CPC分类号： H01L21/6831 , H01J37/145 , H01J37/28 , H01J2237/2817 , H01L22/12
摘要： The charged particle beam device has a problem that a symmetry of equipotential distribution is disturbed near the outer edge of a specimen, an object being evaluated, causing a charged particle beam to deflect there. An electrode plate installed inside the specimen holding mechanism of electrostatic attraction type is formed of an inner and outer electrode plates arranged concentrically. The outer electrode plate is formed to have an outer diameter larger than that of the specimen. The dimensions of the electrode plates are determined so that an overlapping area of the outer electrode plate and the specimen is substantially equal to an area of the inner electrode plate. The inner electrode plate is impressed with a voltage of a positive polarity with respect to a reference voltage and of an arbitrary magnitude, and the outer electrode is impressed with a voltage of a negative polarity and of an arbitrary magnitude.
摘要翻译：带电粒子束装置具有在试样的外边缘附近等待电位分布的对称性被扰乱的问题，被评估的物体导致带电粒子束在那里偏转。安装在静电吸引型的检体保持机构内的电极板由同心配置的内外电极板形成。外电极板的外径大于样品的外径。确定电极板的尺寸，使得外部电极板和试样的重叠面积基本上等于内部电极板的面积。内部电极板相对于参考电压和任意大小施加正极性的电压，并且外部电极施加负极性和任意大小的电压。

6. 发明授权

US08653455B2 Charged particle beam device and evaluation method using the charged particle beam device 有权
标题翻译：带电粒子束装置和使用带电粒子束装置的评估方法
公开(公告)号：US08653455B2
公开(公告)日：2014-02-18
申请号：US13375085
申请日：2010-06-03
申请人： Hiroyuki Kitsunai , Seiichiro Kanno , Masaru Matsushima , Shuichi Nakagawa , Go Miya
发明人： Hiroyuki Kitsunai , Seiichiro Kanno , Masaru Matsushima , Shuichi Nakagawa , Go Miya
IPC分类号： G01N23/00
CPC分类号： H01L21/6831 , H01J37/145 , H01J37/28 , H01J2237/2817 , H01L22/12
摘要： The charged particle beam device has a problem that a symmetry of equipotential distribution is disturbed near the outer edge of a specimen, an object being evaluated, causing a charged particle beam to deflect there. An electrode plate installed inside the specimen holding mechanism of electrostatic attraction type is formed of an inner and outer electrode plates arranged concentrically. The outer electrode plate is formed to have an outer diameter larger than that of the specimen. The dimensions of the electrode plates are determined so that an overlapping area of the outer electrode plate and the specimen is substantially equal to an area of the inner electrode plate. The inner electrode plate is impressed with a voltage of a positive polarity with respect to a reference voltage and of an arbitrary magnitude, and the outer electrode is impressed with a voltage of a negative polarity and of an arbitrary magnitude.
摘要翻译：带电粒子束装置具有在试样的外边缘附近等待电位分布的对称性被扰乱的问题，被评估的物体导致带电粒子束在那里偏转。安装在静电吸引型的检体保持机构内的电极板由同心配置的内外电极板形成。外电极板的外径大于样品的外径。确定电极板的尺寸，使得外部电极板和试样的重叠面积基本上等于内部电极板的面积。内部电极板相对于参考电压和任意大小施加正极性的电压，并且外部电极施加负极性和任意大小的电压。

7. 发明授权

US08822952B2 Charged particle beam apparatus having noise absorbing arrangements 有权
标题翻译：具有噪声吸收装置的带电粒子束装置
公开(公告)号：US08822952B2
公开(公告)日：2014-09-02
申请号：US13883764
申请日：2011-10-14
申请人： Daisuke Muto , Masanori Watanabe , Masaru Matsushima , Shuichi Nakagawa , Masahiro Akatsu , Yusuke Tanba , Satoshi Okada
发明人： Daisuke Muto , Masanori Watanabe , Masaru Matsushima , Shuichi Nakagawa , Masahiro Akatsu , Yusuke Tanba , Satoshi Okada
IPC分类号： H01J37/16 , H01J37/28 , H01J37/26 , G10K11/172
CPC分类号： H01J37/261 , G10K11/172 , H01J37/16 , H01J37/28 , H01J2237/0216
摘要： Charged particle beam apparatus arrangements in which either a first noise absorber which provides noise absorbing performance specialized for a first frequency range including the natural frequency of the charged particle beam apparatus as reference, or a second noise absorber which provides noise absorbing performance specialized for a second frequency range including the frequency of acoustic standing waves generated within the cover as reference, or both of the first and second noise absorbers is/are disposed within a cover of the charged particle beam apparatus.
摘要翻译：带电粒子束装置，其中提供专门用于包括带电粒子束装置的固有频率的第一频率范围的噪声吸收性能的第一噪声吸收器作为参考，或者提供专门用于第二个噪声吸收性能的第二噪声吸收器包括在作为参考的盖子内产生的声驻波的频率或第一和第二噪声吸收器两者的频率范围被设置在带电粒子束装置的盖内。

8. 发明申请

US20130228686A1 CHARGED PARTICLE BEAM APPARATUS 有权
标题翻译：充电颗粒光束装置
公开(公告)号：US20130228686A1
公开(公告)日：2013-09-05
申请号：US13883764
申请日：2011-10-14
申请人： Daisuke Muto , Masanori Watanabe , Masaru Matsushima , Shuichi Nakagawa , Masahiro Akatsu , Yusuke Tanba , Satoshi Okada
发明人： Daisuke Muto , Masanori Watanabe , Masaru Matsushima , Shuichi Nakagawa , Masahiro Akatsu , Yusuke Tanba , Satoshi Okada
IPC分类号： H01J37/26
CPC分类号： H01J37/261 , G10K11/172 , H01J37/16 , H01J37/28 , H01J2237/0216
摘要： Currently, there is no noise-proof cover, particularly noise-proof cover used in a clean room, which absorbs noise by a structure specialized for an estimated frequency of noise produced by environmental noise. Therefore, efficient noise absorption is still difficult.Accordingly, the invention provides a charged particle beam apparatus in which either a first noise absorber which provides noise absorbing performance specialized for a first frequency range including the natural frequency of the charged particle beam apparatus as reference, or a second noise absorber which provides noise absorbing performance specialized for a second frequency range including the frequency of acoustic standing waves generated within the cover as reference, or both of the first and second noise absorbers is/are disposed within a cover of the charged particle beam apparatus.
摘要翻译：目前，没有防噪音的盖子，特别是在洁净室中使用的防噪声罩，其通过专门针对由环境噪声产生的噪声估计频率的结构吸收噪声。因此，高效的噪声吸收仍然是困难的。因此，本发明提供一种带电粒子束装置，其中提供专门用于包括带电粒子束装置的固有频率的第一频率范围的噪声吸收性能的第一噪声吸收器或者提供噪声吸收的第二噪声吸收器专门用于包括在作为参考的盖子内产生的声驻波的频率或者第一和第二噪声吸收器两者的第二频率范围的性能被布置在带电粒子束装置的盖内。

9. 发明授权

US08835883B2 Charged particle radiation device and soundproof cover 有权
标题翻译：带电粒子辐射装置和隔音罩
公开(公告)号：US08835883B2
公开(公告)日：2014-09-16
申请号：US13703926
申请日：2011-06-03
申请人： Daisuke Muto , Masanori Watanabe , Hiroshi Tsuji , Masaru Matsushima
发明人： Daisuke Muto , Masanori Watanabe , Hiroshi Tsuji , Masaru Matsushima
IPC分类号： G10K11/16 , G21K5/00 , H01J37/28
CPC分类号： G10K11/16 , G21K5/00 , H01J37/28 , H01J2237/0216
摘要： A charged particle radiation device includes a sample chamber in which a sample stage adapted to mount a sample is installed, a charged particle radiation irradiation section adapted to irradiate the sample with a charged particle radiation to observe and fabricate the sample, sidewalls installed on a periphery of the sample chamber and the charged particle radiation irradiation section, a ceiling board installed on a plane located in an upper part of the sidewalls, and a sound absorbing structure section disposed below the ceiling board, and including a plurality of hole sections and a hollow section communicated with the hole sections. The sound absorbing structure section has an absorption band including a frequency band of a standing wave generated in a space surrounded by the sidewalls and the ceiling board. Further, a soundproof cover may include the sidewalls, ceiling board and sound absorbing structure.
摘要翻译：带电粒子辐射装置包括：样品室，其中安装有用于安装样品的样品台;带电粒子辐射照射部分，适于用带电粒子辐射照射样品以观察和制造样品，安装在外围的侧壁所述样品室和所述带电粒子辐射照射部分，安装在位于所述侧壁的上部的平面上的顶板和设置在所述顶板下方的吸声结构部分，并且包括多个孔部分和中空部部分与孔部分连通。吸声结构部分具有吸收带，该吸收带包括在由侧壁和天花板板围住的空间中产生的驻波的频带。此外，隔音罩可以包括侧壁，天花板和吸音结构。

10. 发明申请

US20120006401A1 PROTECTIVE SHEET FOR SOLAR CELL MODULE, AND SOLAR CELL MODULE USING SAME 审中-公开
标题翻译：太阳能电池模块的保护片和使用相同的太阳能电池模块
公开(公告)号：US20120006401A1
公开(公告)日：2012-01-12
申请号：US13255017
申请日：2010-03-05
申请人： Yasunari Takanashi , Masaru Matsushima
发明人： Yasunari Takanashi , Masaru Matsushima
IPC分类号： H01L31/0203 , C09J7/02 , B32B7/12 , B32B9/00
CPC分类号： B32B27/36 , B32B7/12 , B32B27/08 , B32B27/304 , B32B27/306 , B32B27/32 , B32B27/34 , B32B2255/10 , B32B2255/20 , B32B2307/546 , B32B2307/554 , B32B2307/712 , B32B2307/7242 , B32B2307/732 , B32B2367/00 , B32B2457/12 , H01L31/0481 , H01L31/049 , Y02E10/50 , Y10T428/2817
摘要： The invention relates to a solar cell module protective sheet which has two or more gas barrier films, each provided with a deposited layer formed of an inorganic oxide on at least one surface of a base film, in which a material constituting the solar cell module protective sheet is formed of a material transmitting light rays of a wavelength contributing to the generation of electric power, and the solar cell module protective sheet is used as a front sheet, a solar cell module using the solar cell module protective sheet, and the like. According to the invention, it is possible to provide a solar cell module protective sheet having high dampproofness and enabling stable long-term use of a solar cell when the solar cell module protective sheet is used as a front sheet or a back sheet of the solar cell module, and a solar cell module using the solar cell module protective sheet.
摘要翻译：本发明涉及一种具有两个或更多个阻气膜的太阳能电池模块保护片，每个隔热膜在基膜的至少一个表面上设置有由无机氧化物形成的沉积层，其中构成太阳能电池模块保护的材料片材由透射有助于产生电力的波长的光线的材料形成，太阳能电池模块保护片用作前片，使用太阳能电池模块保护片的太阳能电池模块等。根据本发明，当太阳能电池模块保护片用作太阳能电池板的前片或背板时，可以提供具有高阻尼性的太阳能电池模块保护片，并且能够稳定地长期使用太阳能电池电池模块和使用太阳能电池组件保护片的太阳能电池组件。

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