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1. 发明授权

US08704430B2 Piezoceramic multilayer actuator with high reliability 有权
标题翻译：压电陶瓷多层致动器具有高可靠性
公开(公告)号：US08704430B2
公开(公告)日：2014-04-22
申请号：US12376346
申请日：2007-08-06
申请人： Bernhard Döllgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
发明人： Bernhard Döllgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
IPC分类号： H01L41/083
CPC分类号： H01L41/273 , H01L41/0838
摘要： A piezoceramic multilayer actuator has a first sub-stack (12, 14, 16) with a plurality of piezoceramic layers (22) and at least one internal electrode (24, 26), the piezoceramic layers (22) and the at least one internal electrode (24, 26) being laminated in an alternating manner, a second sub-stack (12, 14, 16) has a plurality of piezoceramic layers (22) and at least one internal electrode (24, 26), the piezoceramic layers (22) and the at least one internal electrode (24, 26) being laminated in an alternating manner, and a connection layer (40) arranged between the first sub-stack (12, 14, 16) and the second sub-stack (12, 14, 16), wherein the connection layer (40) is set up by a multitude of single connection points or connection lines (44) or other connection regions.
摘要翻译：压电陶瓷多层致动器具有具有多个压电陶瓷层（22）和至少一个内部电极（24,26）的第一子堆叠（12,14,16），所述压电陶瓷层（22）和所述至少一个内部电极（24,26）以交替的方式层压，第二子堆叠（12,14,16）具有多个压电陶瓷层（22）和至少一个内部电极（24,26），所述压电陶瓷层 22）和所述至少一个内部电极（24,26）以交替的方式层叠，以及布置在所述第一子堆叠（12,14）和所述第二子堆叠（12）之间的连接层（40），14,16），其中所述连接层（40）由多个单个连接点或连接线（44）或其它连接区域设置。

2. 发明授权

US07948150B2 Piezoceramic multilayer actuator and method of manufacturing a piezoceramic multilayer actuator 有权
标题翻译：压电陶瓷多层致动器和制造压电陶瓷多层致动器的方法
公开(公告)号：US07948150B2
公开(公告)日：2011-05-24
申请号：US12031385
申请日：2008-02-14
申请人： Bernhard Döllgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
发明人： Bernhard Döllgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
IPC分类号： H01L41/053
CPC分类号： H01L41/273 , H01L41/0838 , H01L41/1876
摘要： A piezoceramic multilayer actuator (10) includes a plurality of green layers, wherein the green layers are to be converted to piezoceramic layers (12) with a piezoceramic material in a subsequent step of heating. A security layer material mixture with a second material (32) and particles (30) embedded in the second material (32) is provided, wherein the particles (30) have a third material different from the first material and different from the second material (32). The security layer material mixture is laminated between two piezoceramic layers (12), thereby forming a green stack. The green stack is heated to a sintering temperature, wherein the green layers are converted to the piezoceramic layers (12), and wherein a chemical reaction of the third material degrades the mechanical connection of the piezoceramic layers (12) by the security layer (20).
摘要翻译：压电陶瓷多层致动器（10）包括多个绿色层，其中在随后的加热步骤中，将绿色层用压电陶瓷材料转换成压电陶瓷层（12）。提供了具有第二材料（32）和嵌入第二材料（32）中的颗粒（30）的安全层材料混合物，其中所述颗粒（30）具有不同于第一材料并且不同于第二材料 32）。将安全层材料混合物层压在两个压电陶瓷层（12）之间，由此形成一个绿色叠层。将绿色叠层加热至烧结温度，其中绿色层转变为压电陶瓷层（12），并且其中第三材料的化学反应降低了压电陶瓷层（12）与安全层（20）的机械连接）。

3. 发明申请

US20080218028A1 Piezoceramic Multilayer Actuator and Method of Manufacturing a Piezoceramic Multilayer Actuator 有权
标题翻译：压电陶瓷多层致动器和制造压电陶瓷多层致动器的方法
公开(公告)号：US20080218028A1
公开(公告)日：2008-09-11
申请号：US12031385
申请日：2008-02-14
申请人： Bernhard Dollgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
发明人： Bernhard Dollgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
IPC分类号： H01L41/083 , H01L41/187 , H01L41/24
CPC分类号： H01L41/273 , H01L41/0838 , H01L41/1876
摘要： In a method of manufacturing a piezoceramic multilayer actuator (10), a plurality of green layers is provided, wherein the green layers are to be converted to piezoceramic layers (12) with a piezoceramic material in a subsequent step of heating. A security layer material mixture with a second material (32) and particles (30) embedded in the second material (32) is provided, wherein the particles (30) have a third material different from the first material and different from the second material (32). The security layer material mixture is laminated between two piezoceramic layers (12), thereby forming a green stack. The green stack is heated to a sintering temperature, wherein the green layers are converted to the piezoceramic layers (12), and wherein a chemical reaction of the third material degrades the mechanical connection of the piezoceramic layers (12) by the security layer (20).
摘要翻译：在制造压电陶瓷多层致动器（10）的方法中，提供多个生坯层，其中在随后的加热步骤中，将绿色层用压电陶瓷材料转换成压电陶瓷层（12）。提供了具有第二材料（32）和嵌入第二材料（32）中的颗粒（30）的安全层材料混合物，其中所述颗粒（30）具有不同于第一材料并且不同于第二材料 32）。将安全层材料混合物层压在两个压电陶瓷层（12）之间，由此形成一个绿色叠层。将绿色叠层加热至烧结温度，其中绿色层转变为压电陶瓷层（12），并且其中第三材料的化学反应降低了压电陶瓷层（12）与安全层（20）的机械连接）。

4. 发明授权

US07843114B2 Piezoceramic multilayer actuator and method of manufacturing a piezoceramic multilayer actuator 有权
标题翻译：压电陶瓷多层致动器和制造压电陶瓷多层致动器的方法
公开(公告)号：US07843114B2
公开(公告)日：2010-11-30
申请号：US12032509
申请日：2008-02-15
申请人： Bernhard Döllgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
发明人： Bernhard Döllgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
IPC分类号： H01L41/04
CPC分类号： H01L41/273 , H01L41/0838
摘要： A piezoceramic multilayer actuator (10) has a plurality of piezoceramic layers (12) and a security layer (20) disposed between two piezoceramic layers (12). The piezoceramic layers (12) have a piezoceramic first material sintered at a sintering temperature. The security layer (20) has a second material (32) and particles (30) at least partially embedded in the second material (32). The particles (30) have a third material different from the first material and different from the second material (32). An adhesion between the third material and the first material is weaker than an adhesion between the second material (32) and the first material.
摘要翻译：压电陶瓷多层致动器（10）具有多个压电陶瓷层（12）和设置在两个压电陶瓷层（12）之间的安全层（20）。压电陶瓷层（12）具有在烧结温度下烧结的压电陶瓷第一材料。安全层（20）具有至少部分地嵌入第二材料（32）中的第二材料（32）和颗粒（30）。颗粒（30）具有不同于第一材料并且不同于第二材料（32）的第三材料。第三材料和第一材料之间的粘附力弱于第二材料（32）和第一材料之间的粘合力。

5. 发明申请

US20100194247A1 PIEZOCERAMIC MULTILAYER ACTUATOR WITH HIGH RELIABILITY 有权
标题翻译：具有高可靠性的PIEZOCERAMIC MULTILERER执行器
公开(公告)号：US20100194247A1
公开(公告)日：2010-08-05
申请号：US12376346
申请日：2007-08-06
申请人： Bernhard Döllgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
发明人： Bernhard Döllgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
IPC分类号： H01L41/083
CPC分类号： H01L41/273 , H01L41/0838
摘要： A piezoceramic multilayer actuator has a first sub-stack (12, 14, 16) with a plurality of piezoceramic layers (22) and at least one internal electrode (24, 26), the piezoceramic layers (22) and the at least one internal electrode (24, 26) being laminated in an alternating manner, a second sub-stack (12, 14, 16) has a plurality of piezoceramic layers (22) and at least one internal electrode (24, 26), the piezoceramic layers (22) and the at least one internal electrode (24, 26) being laminated in an alternating manner, and a connection layer (40) arranged between the first sub-stack (12, 14, 16) and the second sub-stack (12, 14, 16), wherein the connection layer (40) is set up by a multitude of single connection points or connection lines (44) or other connection regions.
摘要翻译：压电陶瓷多层致动器具有具有多个压电陶瓷层（22）和至少一个内部电极（24,26）的第一子堆叠（12,14,16），所述压电陶瓷层（22）和所述至少一个内部电极（24,26）以交替的方式层压，第二子堆叠（12,14,16）具有多个压电陶瓷层（22）和至少一个内部电极（24,26），所述压电陶瓷层 22）和所述至少一个内部电极（24,26）以交替的方式层叠，以及布置在所述第一子堆叠（12,14）和所述第二子堆叠（12）之间的连接层（40），14,16），其中所述连接层（40）由多个单个连接点或连接线（44）或其它连接区域设置。

6. 发明申请

US20080224572A1 PIEZOCERAMIC MULTILAYER ACTUATOR AND METHOD OF MANUFACTURING A PIEZOCERAMIC MULTILAYER ACTUATOR 有权
标题翻译： PIEZOCERAMIC MULTILAYER执行器和制造PIEZOCERAMIC MULTILERER执行器的方法
公开(公告)号：US20080224572A1
公开(公告)日：2008-09-18
申请号：US12032465
申请日：2008-02-15
申请人： Bernhard Dollgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
发明人： Bernhard Dollgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
IPC分类号： H01L41/04 , H01L41/24
CPC分类号： H01L41/0838 , H01L41/273 , Y10T29/42
摘要： A piezoceramic multilayer actuator (10) has a plurality of piezoceramic layers (12), a security layer (20) and a plurality of inner electrodes (16, 18). The piezoceramic layers (12) has a piezoceramic first material sintered at a sintering temperature. The security layer (20) has a second material and is disposed between two piezoceramic layers (12). Each of the plurality of inner electrodes (16, 18) has a third material and is deposited between two piezoceramic layers (12). The degree of sintering of the second material is lower than the degree of sintering of the third material.
摘要翻译：压电陶瓷多层致动器（10）具有多个压电陶瓷层（12），安全层（20）和多个内部电极（16,18）。压电陶瓷层（12）具有在烧结温度下烧结的压电陶瓷第一材料。安全层（20）具有第二材料并且设置在两个压电陶瓷层（12）之间。多个内部电极（16,18）中的每一个具有第三材料并且沉积在两个压电陶瓷层（12）之间。第二材料的烧结程度低于第三材料的烧结程度。

7. 发明授权

US07851974B2 Piezoceramic multilayer actuator manufactured according to particular sintering parameters and corresponding method of manufacturing 有权
标题翻译：按照特定烧结参数制造的压电陶瓷多层致动器及相应的制造方法
公开(公告)号：US07851974B2
公开(公告)日：2010-12-14
申请号：US12032465
申请日：2008-02-15
申请人： Bernhard Döllgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
发明人： Bernhard Döllgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
IPC分类号： H01L41/04 , H01L41/08
CPC分类号： H01L41/0838 , H01L41/273 , Y10T29/42
摘要： A piezoceramic multilayer actuator (10) has a plurality of piezoceramic layers (12), a security layer (20) and a plurality of inner electrodes (16, 18). The piezoceramic layers (12) has a piezoceramic first material sintered at a sintering temperature. The security layer (20) has a second material and is disposed between two piezoceramic layers (12). Each of the plurality of inner electrodes (16, 18) has a third material and is deposited between two piezoceramic layers (12). The degree of sintering of the second material is lower than the degree of sintering of the third material.
摘要翻译：压电陶瓷多层致动器（10）具有多个压电陶瓷层（12），安全层（20）和多个内部电极（16,18）。压电陶瓷层（12）具有在烧结温度下烧结的压电陶瓷第一材料。安全层（20）具有第二材料并且设置在两个压电陶瓷层（12）之间。多个内部电极（16,18）中的每一个具有第三材料并且沉积在两个压电陶瓷层（12）之间。第二材料的烧结程度低于第三材料的烧结程度。

8. 发明申请

US20110017177A1 Monolithic piezoactuator with transition region and safety layer, and use of the piezoactuator 审中-公开
标题翻译：具有过渡区域和安全层的单片压电致动器，以及压电致动器的使用
公开(公告)号：US20110017177A1
公开(公告)日：2011-01-27
申请号：US12445955
申请日：2007-10-23
申请人： Masahiro Inagaki , Harald Johannes Kastl , Takami Sakamoto , Carsten Schuh
发明人： Masahiro Inagaki , Harald Johannes Kastl , Takami Sakamoto , Carsten Schuh
IPC分类号： F02M51/00 , H01L41/083 , H02N2/04 , H01S4/00
CPC分类号： H01L41/0838 , F02M51/0603 , Y10T29/49002
摘要： A piezoactuator of monolithic multilayer design with an overall stack has at least one piezoelectrically active partial stack with piezoceramic layers arranged one above another and electrode layers arranged between these layers, at least one piezoelectrically inactive terminating region arranged above the partial stack, and at least one transition region arranged between the partial stack and the terminating region. The transition region has piezoceramic layers arranged one above another and electrode layers arranged between the piezoceramic layers and the piezoceramic layers and the electrode layers are arranged on one another such that there the electric fields that can be coupled into the piezoceramic layers are changed by electrical driving of the electrode layers successively in the transition region stack direction from piezoceramic layer to piezoceramic layer, and the partial stack has a safety layer towards the transition region, wherein a crack is preferably formed in the case of mechanical overloading.
摘要翻译：具有整体堆叠的单片多层设计的压电致动器具有至少一个压电活性部分叠层，其中压电陶瓷层布置在另一个之上，并且布置在这些层之间的电极层，至少一个布置在部分叠层之上的压电非活化终止区域，以及至少一个过渡区域布置在部分堆叠和终止区域之间。过渡区域具有一层压电陶瓷层，并且布置在压电陶瓷层和压电陶瓷层之间的电极层彼此排列，使得可以耦合到压电陶瓷层中的电场通过电驱动而改变的电极层在过渡区堆叠方向上连续地从压电陶瓷层到压电陶瓷层，并且部分叠层具有朝向过渡区域的安全层，其中在机械过载的情况下优选形成裂纹。

9. 发明申请

US20080218029A1 PIEZOCERAMIC MULTILAYER ACTUATOR AND METHOD OF MANUFACTURING A PIEZOCERAMIC MULTILAYER ACTUATOR 有权
标题翻译： PIEZOCERAMIC MULTILAYER执行器和制造PIEZOCERAMIC MULTILERER执行器的方法
公开(公告)号：US20080218029A1
公开(公告)日：2008-09-11
申请号：US12032509
申请日：2008-02-15
申请人： Bernhard Dollgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
发明人： Bernhard Dollgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
IPC分类号： H01L41/083 , H02N2/00 , H01L41/187 , B32B37/06
CPC分类号： H01L41/273 , H01L41/0838
摘要： A piezoceramic multilayer actuator (10) has a plurality of piezoceramic layers (12) and a security layer (20) disposed between two piezoceramic layers (12). The piezoceramic layers (12) have a piezoceramic first material sintered at a sintering temperature. The security layer (20) has a second material (32) and particles (30) at least partially embedded in the second material (32). The particles (30) have a third material different from the first material and different from the second material (32). An adhesion between the third material and the first material is weaker than an adhesion between the second material (32) and the first material.
摘要翻译：压电陶瓷多层致动器（10）具有多个压电陶瓷层（12）和设置在两个压电陶瓷层（12）之间的安全层（20）。压电陶瓷层（12）具有在烧结温度下烧结的压电陶瓷第一材料。安全层（20）具有至少部分地嵌入第二材料（32）中的第二材料（32）和颗粒（30）。颗粒（30）具有不同于第一材料并且不同于第二材料（32）的第三材料。第三材料和第一材料之间的粘附力弱于第二材料（32）和第一材料之间的粘合力。

10. 发明申请

US20100019620A1 PIEZOCERAMIC MULTILAYER ACTUATOR AND METHOD FOR ITS PRODUCTION 有权
标题翻译： PIEZOCERAMIC MULTILAYER执行器及其生产方法
公开(公告)号：US20100019620A1
公开(公告)日：2010-01-28
申请号：US12520888
申请日：2007-12-19
申请人： Harald Johannes Kastl , Christian Reichinger , Carsten Schuh
发明人： Harald Johannes Kastl , Christian Reichinger , Carsten Schuh
IPC分类号： H01L41/04 , H01L41/22
CPC分类号： H01L41/0533 , H01L41/0838 , H01L41/23 , H01L41/273 , Y10T29/42
摘要： In a piezoelectric multilayer actuator (1) having micromechanical relief zones (30) and an insulation layer (40) as well as in a method for producing said actuator, as a result of the micromechanical relief zones (30), poling cracks are concentrated in these relief regions (30). This makes it possible to provide the sections I, II, III of the multilayer actuator (1) with an insulation layer (40) which only has an extension behaviour similar to the multilayer actuator (1) without poling cracks.
摘要翻译：在具有微机械卸载区（30）和绝缘层（40）的压电多层致动器（1）中以及用于制造所述致动器的方法中，由于微机械卸载区（30），极化裂纹集中在这些浮雕区域（30）。这使得可以向多层致动器（1）的部分I，II，III提供仅具有类似于多层致动器（1）的延伸行为的绝缘层（40），而不会发生极化的裂纹。

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