专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US07863580B2 Electron beam apparatus and an aberration correction optical apparatus 有权
标题翻译：电子束装置和像差校正光学装置
公开(公告)号：US07863580B2
公开(公告)日：2011-01-04
申请号：US11760235
申请日：2007-06-08
申请人： Masahiro Hatakeyama , Takeshi Murakami , Nobuharu Noji , Mamoru Nakasuji , Hirosi Sobukawa , Satoshi Mori , Tsutomu Karimata , Yuichiro Yamazaki , Ichirota Nagahama
发明人： Masahiro Hatakeyama , Takeshi Murakami , Nobuharu Noji , Mamoru Nakasuji , Hirosi Sobukawa , Satoshi Mori , Tsutomu Karimata , Yuichiro Yamazaki , Ichirota Nagahama
IPC分类号： G21K1/08 , H01J3/14 , H01J3/26
CPC分类号： H01J37/153 , H01J37/065 , H01J2237/061 , H01J2237/06375 , H01J2237/083 , H01J2237/1534 , H01J2237/24592 , H01J2237/28
摘要： An electron beam apparatus for providing an evaluation of a sample, such as a semiconductor wafer, that includes a micro-pattern with a minimum line width not greater than 0.1 μm with high throughput. A primary electron beam generated by an electron gun is irradiated onto a sample and secondary electrons emanating from the sample are formed into an image on a detector by an image projection optical system. An electron gun 61 has a cathode 1 and a drawing electrode 3, and an electron emission surface 1a of the cathode defines a concave surface. The drawing electrode 3 has a convex surface 3a composed of a partial outer surface of a second sphere facing the electron emission surface 1a of the cathode and an aperture 73 formed through the convex surface for passage of the electrons. An aberration correction optical apparatus comprises two identically sized multi-polar Wien filters arranged such that their centers are in alignment with a ¼ plane position and a ¾ plane position, respectively, along an object plane-image plane segment in the aberration correction optical apparatus, and optical elements having bidirectional focus disposed in an object plane position, an intermediate image-formation plane position and an image plane position, respectively, in the aberration correction optical apparatus.
摘要翻译：一种用于提供诸如半导体晶片的样品的评估的电子束装置，其包括具有不大于0.1μm的最小线宽的微图案，具有高生产量。由电子枪产生的一次电子束照射在样品上，从样品发出的二次电子通过图像投影光学系统形成检测器上的图像。电子枪61具有阴极1和牵伸电极3，阴极的电子发射表面1a限定凹面。拉制电极3具有由与阴极的电子发射表面1a相对的第二球体的局部外表面和由电子通过凸面形成的孔73构成的凸面3a。像差校正光学装置包括两个相同尺寸的多极维纳滤光器，其布置成使得它们的中心分别沿着像差校正光学装置中的物平面图像平面段与¼平面位置和¾平面位置对准，以及分别设置在像差校正光学装置中的物平面位置，中间图像形成面位置和像面位置的具有双向焦点的光学元件。

2. 发明申请

US20080067377A1 ELECTRON BEAM APPARATUS AND AN ABERRATION CORRECTION OPTICAL APPARATUS 有权
标题翻译：电子束装置和抛光校正光学装置
公开(公告)号：US20080067377A1
公开(公告)日：2008-03-20
申请号：US11760235
申请日：2007-06-08
申请人： Masahiro Hatakeyama , Takeshi Murakami , Nobuharu Noji , Mamoru Nakasuji , Hirosi Sobukawa , Satoshi Mori , Tsutomu Karimata
发明人： Masahiro Hatakeyama , Takeshi Murakami , Nobuharu Noji , Mamoru Nakasuji , Hirosi Sobukawa , Satoshi Mori , Tsutomu Karimata
IPC分类号： G21K7/00
CPC分类号： H01J37/153 , H01J37/065 , H01J2237/061 , H01J2237/06375 , H01J2237/083 , H01J2237/1534 , H01J2237/24592 , H01J2237/28
摘要： An electron beam apparatus for providing an evaluation of a sample, such as a semiconductor wafer, that includes a micro-pattern with a minimum line width not greater than 0.1 μm with high throughput. A primary electron beam generated by an electron gun is irradiated onto a sample and secondary electrons emanating from the sample are formed into an image on a detector by an image projection optical system. An electron gun 61 has a cathode 1 and a drawing electrode 3, and an electron emission surface 1a of the cathode defines a concave surface. The drawing electrode 3 has a convex surface 3a composed of a partial outer surface of a second sphere facing the electron emission surface 1a of the cathode and an aperture 73 formed through the convex surface for passage of the electrons. An aberration correction optical apparatus comprises two identically sized multi-polar Wien filters arranged such that their centers are in alignment with a 1/4 plane position and a ¾ plane position, respectively, along an object plane-image plane segment in the aberration correction optical apparatus, and optical elements having bidirectional focus disposed in an object plane position, an intermediate image-formation plane position and an image plane position, respectively, in the aberration correction optical apparatus.
摘要翻译：一种用于提供诸如半导体晶片的样品的评估的电子束装置，其包括具有不大于0.1μm的最小线宽的微量图案，具有高生产量。由电子枪产生的一次电子束照射在样品上，从样品发出的二次电子通过图像投影光学系统形成检测器上的图像。电子枪61具有阴极1和拉伸电极3，阴极的电子发射表面1a限定凹面。拉制电极3具有由面对阴极的电子发射表面1a的第二球体的部分外表面和由电子通过凸面形成的孔73构成的凸面3a。像差校正光学装置包括两个相同大小的多极维恩滤波器，其布置成使得它们的中心分别与像差校正光学中的物平面图像平面段的1/4平面位置和¾平面位置对准装置和具有分别设置在像差校正光学装置中的物平面位置，中间图像形成平面位置和图像平面位置的双向焦点的光学元件。

3. 发明授权

US08067732B2 Electron beam apparatus 有权
标题翻译：电子束装置
公开(公告)号：US08067732B2
公开(公告)日：2011-11-29
申请号：US11996701
申请日：2006-07-24
申请人： Mamoru Nakasuji , Takeshi Murakami , Tohru Satake , Tsutomi Karimata , Toshifumi Kimba , Matsutaro Miyamoto , Hiroshi Sobukawa , Satoshi Mori , Yuichiro Yamazaki , Ichirota Nagahama
发明人： Mamoru Nakasuji , Takeshi Murakami , Tohru Satake , Tsutomi Karimata , Toshifumi Kimba , Matsutaro Miyamoto , Hiroshi Sobukawa , Satoshi Mori , Yuichiro Yamazaki , Ichirota Nagahama
IPC分类号： G01N23/00
CPC分类号： H01J37/05 , H01J37/147 , H01J37/153 , H01J37/26 , H01J2237/057
摘要： An electron beam emitted from an electron gun (G) forms a reduced image on a sample (S) through a non-dispersion Wien-filter (5-1), an electromagnetic deflector (11-1), a beam separator (12-1), and a tablet lens (17-1) as an objective lens. The beam separator (12-1) is configured such that a distance by which a secondary electron beam passes through the beam separator is approximately three times longer than a distance by which a primary electron beam passes through the beam separator. Therefore, even if a magnetic field in the beam separator is set to deflect the primary electron beam by a small angle equal to or less than approximately 10 degrees, the secondary electron beam can be deflected by approximately 30 degrees, so that the primary and secondary electron beams are sufficiently separated. Also, since the primary electron beam is deflected by a small angle, less aberration occurs in the primary electron beam. Accordingly, since a light path length of a primary electro-optical system, it is possible to reduce the influence of space charge and the occurrence of deflection aberration.
摘要翻译：从电子枪（G）发射的电子束通过非分散维恩滤波器（5-1），电磁偏转器（11-1），光束分离器（12- 1）和作为物镜的平板电脑镜头（17-1）。束分离器（12-1）被构造成使得二次电子束通过分束器的距离比一次电子束通过分束器的距离大约三倍。因此，即使将分束器中的磁场设定为使一次电子束偏转等于或小于约10度的小角度，二次电子束可以偏转大约30度，使得初级和次级电子束充分分离。此外，由于一次电子束以小角度偏转，所以在一次电子束中产生较小的像差。因此，由于一次电光学系统的光路长度，可以减小空间电荷的影响和偏转像差的发生。

4. 发明申请

US20090218506A1 ELECTRON BEAM APPARATUS 有权
标题翻译：电子束设备
公开(公告)号：US20090218506A1
公开(公告)日：2009-09-03
申请号：US11996701
申请日：2006-07-24
申请人： Mamoru Nakasuji , Takeshi Murakami , Tohru Satake , Tsutomu Karimata , Toshifumi Kimba , Matsutaro Miyamoto , Hiroshi Sobukawa , Satoshi Mori
发明人： Mamoru Nakasuji , Takeshi Murakami , Tohru Satake , Tsutomu Karimata , Toshifumi Kimba , Matsutaro Miyamoto , Hiroshi Sobukawa , Satoshi Mori
IPC分类号： H01J1/50 , A61N5/00 , H01J3/14
CPC分类号： H01J37/05 , H01J37/147 , H01J37/153 , H01J37/26 , H01J2237/057
摘要： An electron beam emitted from an electron gun (G) forms a reduced image on a sample (S) through a non-dispersion Wien-filter (5-1), an electromagnetic deflector (11-1), a beam separator (12-1), and a tablet lens (17-1) as an objective lens. The beam separator (12-1) is configured such that a distance by which a secondary electron beam passes through the beam separator is approximately three times longer than a distance by which a primary electron beam passes through the beam separator. Therefore, even if a magnetic field in the beam separator is set to deflect the primary electron beam by a small angle equal to or less than approximately 10 degrees, the secondary electron beam can be deflected by approximately 30 degrees, so that the primary and secondary electron beams are sufficiently separated. Also, since the primary electron beam is deflected by a small angle, less aberration occurs in the primary electron beam. Accordingly, since a light path length of a primary electro-optical system, it is possible to reduce the influence of space charge and the occurrence of deflection aberration.
摘要翻译：从电子枪（G）发射的电子束通过非分散维恩滤波器（5-1），电磁偏转器（11-1），光束分离器（12- 1）和作为物镜的平板电脑镜头（17-1）。束分离器（12-1）被构造成使得二次电子束通过分束器的距离比一次电子束通过分束器的距离大约三倍。因此，即使将分束器中的磁场设定为使一次电子束偏转等于或小于约10度的小角度，二次电子束可以偏转大约30度，使得初级和次级电子束充分分离。此外，由于一次电子束以小角度偏转，所以在一次电子束中产生较小的像差。因此，由于一次电光学系统的光路长度，可以减小空间电荷的影响和偏转像差的发生。

5. 发明授权

US09340693B2 Actinic ray curable inkjet ink and image recording method using same 有权
标题翻译：光化学射线固化喷墨油墨和使用其的图像记录方法
公开(公告)号：US09340693B2
公开(公告)日：2016-05-17
申请号：US14004729
申请日：2012-03-27
申请人： Akio Maeda , Satoshi Mori , Masashi Ikeda , Toshiyuki Takabayashi , Takashi Iwata , Hirotaka Iijima
发明人： Akio Maeda , Satoshi Mori , Masashi Ikeda , Toshiyuki Takabayashi , Takashi Iwata , Hirotaka Iijima
IPC分类号： B41J2/01 , C09D11/38 , C09D11/101 , B41J11/00 , C09D11/12 , B41M7/00
CPC分类号： C09D11/38 , B41J11/0015 , B41M7/0081 , C09D11/101 , C09D11/12
摘要： The purpose of the present invention is to provide an actinic ray curable inkjet ink which, in an inkjet printing method, is capable of having both high pinning characteristics and high ejection characteristics. In order to achieve the above purpose, this actinic ray curable inkjet ink includes an actinic ray curable compound, ketone wax, and ester wax, and reversibly goes through a sol-gel phase transition depending on the temperature.
摘要翻译：本发明的目的是提供一种能够具有高钉扎特性和高喷射特性的喷墨印刷方法的光化射线固化型喷墨油墨。为了达到上述目的，该光化射线固化型喷墨油墨包括光化学射线固化性化合物，酮蜡，酯蜡，根据温度可逆地经历溶胶 - 凝胶相变。

6. 发明申请

US20130247049A1 CONTROL APPARATUS AND METHOD OF STARTING CONTROL APPARATUS 审中-公开
标题翻译：控制装置和启动控制装置的方法
公开(公告)号：US20130247049A1
公开(公告)日：2013-09-19
申请号：US13782347
申请日：2013-03-01
申请人： Satoshi Aoki , Naoya Morita , Naoya Ohashi , Tamon Sadasue , Satoshi Mori
发明人： Satoshi Aoki , Naoya Morita , Naoya Ohashi , Tamon Sadasue , Satoshi Mori
IPC分类号： G06F9/44
CPC分类号： G06F9/44 , G06F9/4411 , H04N1/00915 , H04N1/00928
摘要： A control apparatus may include a processor configured to execute one or more programs in order to control a control target, and an accepting unit configured to accept a user input. The processor may start a first program to cause the accepting unit to function at a time of starting the control apparatus, and thereafter start a second program for executing a function selected by the user input accepted by the accepting unit, amongst a plurality of functions executable by the control target, with preference over programs for executing other functions.
摘要翻译：控制装置可以包括被配置为执行一个或多个程序以便控制控制目标的处理器和被配置为接受用户输入的接受单元。处理器可以启动第一程序以使得接受单元在启动控制装置时起作用，然后在多个功能中启动用于执行由接受单元接受的用户输入选择的功能的第二程序通过控制目标，优先于执行其他功能的程序。

7. 发明申请

US20090110273A1 Image Processing Device and Image Processing Program 审中-公开
标题翻译：图像处理设备和图像处理程序
公开(公告)号：US20090110273A1
公开(公告)日：2009-04-30
申请号：US12280520
申请日：2007-07-09
申请人： Tomotaka Shinoda , Toshihiro Mitaka , Satoshi Mori , Naoki Watanabe , Hideki Ito
发明人： Tomotaka Shinoda , Toshihiro Mitaka , Satoshi Mori , Naoki Watanabe , Hideki Ito
IPC分类号： G06K9/36 , G06K9/00
CPC分类号： H04N1/60 , G06T5/009 , G06T5/40 , G06T2207/10024 , G06T2207/30004 , H04N1/6075
摘要： An inspection apparatus includes an imaging device and an image processing device. The imaging device photographs a specimen and outputs a color image of the specimen to the image processing device. The image processing device subjects the color image of the specimen to negative-positive reversal. After detecting a mode value of the hue of the color image having been subjected to negative-positive reversal, the image processing device changes the hue of the color image in accordance with a difference between a boundary value of two predefined hues and the detected mode value. In accordance with the change of the hue, a plurality of target pixels different in the saturation is extracted and the saturation and the intensity of each pixel are changed, or the gradation of each pixel is converted so that the plurality of target pixels becomes most distant from one another in a color space.
摘要翻译：检查装置包括成像装置和图像处理装置。成像装置拍摄样本并将样本的彩色图像输出到图像处理装置。图像处理装置使样本的彩色图像呈负反转。在检测到经过负反转的彩色图像的色相的模式值之后，图像处理装置根据两个预定色调的边界值与检测到的模式值之间的差异来改变彩色图像的色调。根据色调的变化，提取饱和度不同的多个目标像素，并且改变每个像素的饱和度和强度，或者转换每个像素的灰度，使得多个目标像素变得最远在一个色彩空间中彼此之间。

8. 发明授权

US07288397B2 Nicotianamine aminotransferase and gene therefor 失效
标题翻译：尼古丁胺氨基转移酶及其基因
公开(公告)号：US07288397B2
公开(公告)日：2007-10-30
申请号：US11013391
申请日：2004-12-17
申请人： Satoshi Mori , Hiromi Nakanishi , Michiko Takahashi
发明人： Satoshi Mori , Hiromi Nakanishi , Michiko Takahashi
IPC分类号： C12N9/10 , C12N15/82 , C12N1/00 , C12N5/04
CPC分类号： C12N15/8271 , C12N9/1096 , C12N15/8261 , Y02A40/146
摘要： A protein having an amino acid sequence represented by SEQ ID NO: 2 or 4 or an amino acid sequence having said amino acid sequence with a single or plural amino acids deleted, replaced or added, and having the nicotianamine aminotransferase activity, a gene encoding said protein as well as utilization thereof for enhancement of ability of absorbing insoluble iron in soil and for improvement of resistance to iron deficiency are provided.
摘要翻译：具有SEQ ID NO：2或4所示的氨基酸序列的蛋白质或具有缺失，替换或添加的单个或多个氨基酸并具有烟酰胺氨基转移酶活性的具有所述氨基酸序列的氨基酸序列的编码所述提供蛋白质以及其用于增强土壤中不溶性铁吸收能力和提高耐铁缺乏能力的用途。

9. 发明授权

US06198475B1 Touch operation information output device 失效
标题翻译：触摸操作信息输出设备
公开(公告)号：US06198475B1
公开(公告)日：2001-03-06
申请号：US09102904
申请日：1998-06-23
申请人： Yoshimasa Kunimatsu , Minoru Morikawa , Satoshi Mori , Chikao Nagasaka , Masato Nishikawa
发明人： Yoshimasa Kunimatsu , Minoru Morikawa , Satoshi Mori , Chikao Nagasaka , Masato Nishikawa
IPC分类号： G09G500
CPC分类号： G06F3/0488
摘要： A touch operation information output apparatus is provided in a position at which a driver can operate it, and detects a touched position with respect to the input pad and outputs its coordinate data to the display device. Here, protruding brackets are provided at 16 positions on the input pad. A first group of protruding brackets that are in 4 positions at a center of the input pad are formed in a “+” shape, a second group of protruding brackets that are in four corners of the input pad are formed in an “L” shape and a third group of protruding brackets are formed in a “T” shape. Because of this, the driver can recognize the touched position with respect to the touch operation information output apparatus and blind operation becomes possible.
摘要翻译：触摸操作信息输出装置设置在驾驶员能够操作的位置，并且检测相对于输入焊盘的触摸位置，并将其坐标数据输出到显示装置。这里，突出的支架设置在输入板上的16个位置处。在输入焊盘的中心位于4个位置的第一组突出托架形成为“+”形状，在输入焊盘的四个角中的第二组突出托架形成为“L”形状并且第三组突出托架形成为“T”形。因此，驾驶员可以识别触摸操作信息输出装置的触摸位置，并且可以进行盲目操作。

10. 发明授权

US06078119A Bearingless rotary machine 失效
标题翻译：无轴承旋转机
公开(公告)号：US06078119A
公开(公告)日：2000-06-20
申请号：US199338
申请日：1998-11-25
申请人： Tadashi Satoh , Masaru Ohsawa , Satoshi Mori
发明人： Tadashi Satoh , Masaru Ohsawa , Satoshi Mori
IPC分类号： F16C39/06 , H02K7/09 , H02K11/04 , H02K17/16 , F16C32/04
CPC分类号： F16C32/0497 , F16C32/0444 , H02K11/33 , H02K7/09
摘要： An object of the present invention is to provide a bearingless rotary machine which is capable of stably controlling the levitated position of a rotor of an induction motor even if the rotor comprises a squirrel-cage type rotor that is simple in structure and can easily be manufactured.A bearingless rotary machine has a rotor having secondary current paths and a stator spaced from the rotor by a gap. The stator has two kinds of windings for imparting a rotating and a levitating and supporting force to the rotor. The rotary machine has a magnetic field command calculator, magnetic flux distribution detecting means and correcting means for adjusting the detected control magnetic flux distribution to coincide with the magnetic field distribution command.
摘要翻译：本发明的目的是提供一种能够稳定地控制感应电动机的转子的悬浮位置的无轴承旋转机械，即使转子包括结构简单且容易制造的鼠笼式转子。无轴承旋转机具有具有次级电流路径的转子和与转子间隔开的定子。定子具有两种绕组，用于向转子施加旋转和悬浮和支撑力。旋转机具有磁场指令计算器，磁通分布检测装置和校正装置，用于调整检测到的控制磁通量分布以与磁场分布指令一致。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式