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    • 6. 发明申请
    • SILPHENYLENE-CONTAINING PHOTOCURABLE COMPOSITION, PATTERN FORMATION METHOD USING SAME, AND OPTICAL SEMICONDUCTOR ELEMENT OBTAINED USING THE METHOD
    • 含有苯甲烯的光致抗蚀剂组合物,使用其的图案形成方法和使用该方法获得的光学半导体元件
    • US20110311788A1
    • 2011-12-22
    • US13163174
    • 2011-06-17
    • Shohei TAGAMITakato SakuraiHideto Kato
    • Shohei TAGAMITakato SakuraiHideto Kato
    • B32B3/10G03F7/30G03F7/004
    • G03F7/0005C08G59/306C08L63/00C08L2312/06G03F7/0755Y10T428/24802C08L83/04
    • Provided is a silphenylene-containing photocurable composition including: (A) a specific silphenylene having both terminals modified with alicyclic epoxy groups, and (C) a photoacid generator that generates acid upon irradiation with light having a wavelength of 240 to 500 nm. Also provided is a pattern formation method including: (i) forming a film of the photocurable composition on a substrate, (ii) exposing the film through a photomask with light having a wavelength of 240 to 500 nm, and if necessary, performing heating following the exposure, and (iii) developing the film in a developing liquid, and if necessary, performing post-curing at a temperature within a range from 120 to 300° C. following the developing. Further provided is an optical semiconductor element obtained by performing pattern formation using the method. The composition is capable of very fine pattern formation across a broad range of wavelengths, and following pattern formation, yields a film that exhibits a high degree of transparency and superior light resistance. The composition may also include: (B) a specific epoxy group-containing organosilicon compound.
    • 本发明提供一种含有亚苯基苯的光固化性组合物,其含有:(A)具有两个末端被脂环族环氧基改性的特定的硅亚苯基,(C)光照酸产生剂,其在波长240〜500nm的光照射下产生酸。 还提供了一种图案形成方法,包括:(i)在基板上形成光固化性组合物的膜,(ii)用波长为240〜500nm的光使膜通过光掩模曝光,如果需要,进行加热 曝光,和(iii)在显影液中显影该膜,如有必要,在显影后在120-300℃的温度下进行后固化。 还提供了通过使用该方法进行图案形成而获得的光学半导体元件。 组合物能够在宽波长范围内形成非常精细的图案,并且在图案形成之后,产生显示出高透明度和优异耐光性的膜。 组合物还可以包括:(B)特定的含环氧基的有机硅化合物。
    • 10. 发明申请
    • NOVEL POLYIMIDE SILICONE, PHOTOSENSITIVE RESIN COMPOSITION CONTAINING THE NOVEL POLYIMIDE SILICONE, AND METHOD FOR PATTERN FORMATION
    • 新型聚酰亚胺硅氧烷,含有新型聚酰亚胺硅氧烷的感光性树脂组合物,以及形成图案的方法
    • US20100233619A1
    • 2010-09-16
    • US12722068
    • 2010-03-11
    • Shohei TAGAMITakanobu TakedaMichihiro SugoHideto Kato
    • Shohei TAGAMITakanobu TakedaMichihiro SugoHideto Kato
    • G03F7/004C08G77/04G03F7/20
    • C08G77/455C08G73/106C08K5/34922C08L63/00C08L79/08C08L83/10G03F7/0382G03F7/0387
    • A polyimide silicone having in the molecule a phenolic hydroxy group in which a part or all of hydrogen atoms are substituted with an acid labile group is provided. The polyimide silicone comprises the unit represented by the formula (1): wherein X is a tetravalent group at least a part of which is a tetravalent organic group represented by the formula (2): wherein R1 is a monovalent hydrocarbon group, R2 is a trivalent group, and n is an integer of 1 to 120 on average; and Y is a divalent organic group at least a part of which is a divalent organic group having a phenolic hydroxy group in which a part or all of hydrogen atoms are substituted with an acid labile group represented by the formula (3): wherein R3 and R4 are a hydrogen atom or an alkyl group, and R5 is an alkyl group, an aryl group, or an aralkyl group. R3 and R4, R3 and R5, or R4 and R5 may be bonded to each other to form a ring together with the carbon atom or the carbon atom and the oxygen atom to which they are bonded with the proviso that the R3, R4, and R5 are independently an alkylene group.
    • 提供了在分子中具有一部分或全部氢原子被酸不稳定基团取代的酚羟基的聚酰亚胺硅氧烷。 聚酰亚胺硅氧烷包括由式(1)表示的单元:其中X是四价基团,其中至少一部分是由式(2)表示的四价有机基团:其中R 1是单价烃基,R 2是 三价基​​,平均为n为1〜120的整数。 Y为二价有机基团,其中至少一部分为具有酚羟基的二价有机基团,其中部分或全部氢原子被式(3)表示的酸不稳定基团取代:其中R3和 R4是氢原子或烷基,R5是烷基,芳基或芳烷基。 R 3和R 4,R 3和R 5或R 4和R 5可以彼此键合以与碳原子或碳原子和它们所键合的氧原子一起形成环,条件是R3,R4和 R5独立地是亚烷基。