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    • 1. 发明申请
    • Cleaning agent composition, cleaning and production methods for semiconductor wafer, and semiconductor wafer
    • 用于半导体晶片和半导体晶片的清洁剂组合物,清洁和制造方法
    • US20070010411A1
    • 2007-01-11
    • US10538929
    • 2003-12-10
    • Masahiro AmemiyaYoshio Tanaka
    • Masahiro AmemiyaYoshio Tanaka
    • C11D7/32
    • C11D1/722C11D3/30C11D11/0047H01L21/02052
    • A cleaning agent composition comprising a nonionic surfactant represented by the following formula (1): R1O(EO)x(PO)yH (I)(wherein R1 represents a linear or branched alkyl group having from 6 to 20 carbon atoms or a linear or branched alkenyl group having from 6 to 20 carbon atoms, EO represents an oxyethylene group, PO represents an oxypropylene group, EO and PO each is bonded by random addition or block addition, x number of EOs and y number of POs are arranged in an arbitrary order, x and y each independently represents an integer of 1 to 20, and x/(x+y) is 0.5 or more) and a quaternary ammonium hydroxide) is provided. Also, cleaning and production methods for semiconductor wafer using the cleaning agent composition and semiconductor wafer produced by the production method are provided.
    • 一种清洁剂组合物,其包含由下式(1)表示的非离子表面活性剂:R 1 O(EO)x(PO)y H(I)(其中R 1表示具有6至20个碳原子的直链或支链烷基或直链或支链烷基 具有6至20个碳原子的支链烯基,EO表示氧化乙烯基,PO表示氧化丙烯基,EO和PO各自通过随机添加或嵌段加成键合,x数量的E和y数量的PO排列成任意的 顺序,x和y各自独立地表示1〜20的整数,x /(x + y)为0.5以上)和氢氧化季铵。 此外,提供了使用通过制造方法制造的清洁剂组合物和半导体晶片的半导体晶片的清洁和制造方法。
    • 5. 发明授权
    • Process for preparing ferromagnetic particles comprising metallic iron
    • 制备包含金属铁的铁磁颗粒的方法
    • US4456475A
    • 1984-06-26
    • US516432
    • 1983-07-25
    • Shigeo HiraiToshinobu SueyoshiMasahiro Amemiya
    • Shigeo HiraiToshinobu SueyoshiMasahiro Amemiya
    • H01F1/06
    • H01F1/065
    • A process for preparing ferromagnetic particles comprising metallic iron as the major component by oxidizing Fe(OH).sub.2 in an aqueous medium adjusted to a pH of not less than 11 with gaseous oxygen to produce particles of .alpha.-FeOOH, optionally followed by dehydration of the .alpha.-FeOOH particles under heating to produce particles of .alpha.-Fe.sub.2 O.sub.3, and reducing the .alpha.-FeOOH or .alpha.-Fe.sub.2 O.sub.3 particles under heating, characterized in that (1) the aqueous medium at the oxidation step comprises at least one metal compound chosen from compounds of alkaline earth metals, zinc and aluminum and (2) the coating of a silicon compound is applied to the .alpha.-FeOOH or .alpha.-Fe.sub.2 O.sub.3 particles before the reduction step, whereby the ferromagnetic particles of metallic iron having enhanced magnetic characteristics are obtained.
    • 通过用气态氧将调节至pH不低于11的水性介质中的Fe(OH)2氧化以产生α-FeO​​OH颗粒,制备包含金属铁作为主要成分的铁磁颗粒的方法,任选地随后脱水 α-FeO​​OH颗粒在加热下产生α-Fe 2 O 3颗粒,并在加热下还原α-FeO​​OH或α-Fe2O3颗粒,其特征在于:(1)氧化步骤中的水性介质包含至少一种选自化合物 的碱土金属,锌和铝,和(2)在还原步骤之前,将α-FeO​​OH或α-Fe2O3颗粒涂覆到硅化合物上,由此获得具有增强的磁特性的金属铁的铁磁颗粒。