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    • 1. 发明授权
    • Carrier apparatus using ultrasonic actuator
    • 使用超声波执行器的载体设备
    • US5199701A
    • 1993-04-06
    • US605071
    • 1990-10-29
    • Masaharu ShioyaTakahiro Mizushina
    • Masaharu ShioyaTakahiro Mizushina
    • H01L41/09
    • H02N2/001H02N2/026H02N2/103
    • This carrier apparatus employs an ultrasonic actuator comprising a piezoelectric actuator made of a piezoelectric element which extends and contracts in the radial direction of a cylindrical vibrator in the inner space of the cylindrical vibrator as a power source. This ultrasonic actuator elastically deforms the cross section of the peripheral wall of the cylindrical vibrator into an elliptical shape by the extension and contraction of the piezoelectric actuator, and transmits a driving force in a tangential direction to an article pressed on a predetermined position on the outer peripheral surface of the cylindrical body by utilizing the circumferential and radial transformations (or displacements) generated on the outer peripheral surface of the cylindrical vibrator upon elastic deformation of the elliptical shape.
    • 该载体装置采用超声波致动器,该超声波致动器包括由作为动力源的圆柱形振动器的内部空间中的圆柱形振动器的径向延伸并收缩的压电元件构成的压电致动器。 该超声波致动器通过压电致动器的伸缩而将圆柱形振动器的周壁的横截面弹性变形为椭圆形状,并且将沿切线方向的驱动力传递到压在外侧的预定位置的物品 通过利用在椭圆形弹性变形时在圆柱形振动器的外圆周表面上产生的圆周和径向变换(或位移),圆柱体的圆周表面。