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1. 发明申请

US20090122317A1 Spectroscopy Method and Spectroscope 失效
标题翻译：光谱法和光谱仪
公开(公告)号：US20090122317A1
公开(公告)日：2009-05-14
申请号：US11991542
申请日：2006-09-06
申请人： Masafumi Ito , Norihiko Nishizawa , Masaru Hori , Toshio Goto , Hiroyuki Kano
发明人： Masafumi Ito , Norihiko Nishizawa , Masaru Hori , Toshio Goto , Hiroyuki Kano
IPC分类号： G01N21/31 , G02B6/26
CPC分类号： G01N21/39 , G01J3/02 , G01J3/0218 , G01J3/0224 , G01J3/10 , G01J3/42 , G01J2001/4242 , G01N2201/0697 , G02B6/2861
摘要： To achieve an apparatus capable of measuring a light absorption coefficient f a sample with high sensitivity. A ring down spectroscope uses a wavelength-variable femtosecond soliton pulse light source 1. Pulse light is input to a loop optical fiber 6 through a first light waveguide 4 and a wavelength selective switch 5. Ring down pulse light is input to a homodyne detector through the wavelength selective switch 5. On the other hand, pulse light propagating in the first light waveguide 4 is split and input to light waveguides constituting a second light waveguide 20 through an optical directional coupler 8 and a first optical switching element 12. The pulse light propagating in the second light waveguide 20 is input to the homodyne detector as reference light and used for synchronous detection. The plural light waveguides constituting the second light waveguide 20 differ in optical length in accordance with the length of the optical fiber 6, and can slightly change the optical length.
摘要翻译：实现能够以高灵敏度测量样品的光吸收系数f的装置。环形光谱仪使用波长可变飞秒激光脉冲光源1.脉冲光通过第一光波导4和波长选择开关5输入到环形光纤6中。环形脉冲光通过波长选择开关5.另一方面，在第一光波导4中传播的脉冲光通过光学定向耦合器8和第一光开关元件12被分离并输入到构成第二光波导20的光波导上。脉冲光在第二光波导20中传播的信号被输入到零差检测器作为参考光，并用于同步检测。构成第二光波导路20的多个光波导根据光纤6的长度的光学长度不同，并且可以稍微改变光学长度。

2. 发明授权

US08351039B2 Spectroscopy method and spectroscope 有权
标题翻译：光谱法和光谱仪
公开(公告)号：US08351039B2
公开(公告)日：2013-01-08
申请号：US12926027
申请日：2010-10-21
申请人： Masafumi Ito , Norihiko Nishizawa , Masaru Hori , Toshio Goto , Hiroyuki Kano
发明人： Masafumi Ito , Norihiko Nishizawa , Masaru Hori , Toshio Goto , Hiroyuki Kano
IPC分类号： G01N21/00
CPC分类号： G01N21/39 , G01J3/02 , G01J3/0218 , G01J3/0224 , G01J3/10 , G01J3/42 , G01J2001/4242 , G01N2201/0697 , G02B6/2861
摘要： A spectroscopy method, includes guiding pulse laser light to an optical fiber, which mutually reacts with a sample to be measured of a light absorptance characteristic, outputting ring down pulse light obtained through light absorption of the sample, measuring an absorptance characteristic of the sample based on an attenuation characteristic of the ring down pulse light, and setting the pulse laser light as wide-spectrum laser light, setting the optical fiber as a strong dispersive optical fiber, and increasing a pulse width of the ring down pulse light to measure a wavelength absorptance characteristic based on a ring down attenuation constant of a pulse train with respect to a time sequence corresponding to a wavelength.
摘要翻译：光谱学方法包括将脉冲激光引导到与待测样品相互反应的光吸收特性的光纤，输出通过样品的光吸收获得的环形脉冲光，测量样品的吸收特性根据环形脉冲光的衰减特性，将脉冲激光设定为宽光谱激光，将光纤设为强分散光纤，增加环形脉冲光的脉冲宽度，测定波长基于相对于对应于波长的时间序列的脉冲序列的衰减衰减常数的吸收特性。

3. 发明申请

US20110063609A1 Spectroscopy method and spectroscope 有权
标题翻译：光谱法和光谱仪
公开(公告)号：US20110063609A1
公开(公告)日：2011-03-17
申请号：US12926027
申请日：2010-10-21
申请人： Masafumi Ito , Norihiko Nishizawa , Masaru Hori , Toshio Goto , Hiroyuki Kano
发明人： Masafumi Ito , Norihiko Nishizawa , Masaru Hori , Toshio Goto , Hiroyuki Kano
IPC分类号： G01J3/42 , G01N21/25
CPC分类号： G01N21/39 , G01J3/02 , G01J3/0218 , G01J3/0224 , G01J3/10 , G01J3/42 , G01J2001/4242 , G01N2201/0697 , G02B6/2861
摘要： A spectroscopy method, includes guiding pulse laser light to an optical fiber, which mutually reacts with a sample to be measured of a light absorptance characteristic, outputting ring down pulse light obtained through light absorption of the sample, measuring an absorptance characteristic of the sample based on an attenuation characteristic of the ring down pulse light, and setting the pulse laser light as wide-spectrum laser light, setting the optical fiber as a strong dispersive optical fiber, and increasing a pulse width of the ring down pulse light to measure a wavelength absorptance characteristic based on a ring down attenuation constant of a pulse train with respect to a time sequence corresponding to a wavelength.
摘要翻译：光谱学方法包括将脉冲激光引导到与待测样品相互反应的光吸收特性的光纤，输出通过样品的光吸收获得的环形脉冲光，测量样品的吸收特性根据环形脉冲光的衰减特性，将脉冲激光设定为宽光谱激光，将光纤设为强分散光纤，增加环形脉冲光的脉冲宽度，测定波长基于相对于对应于波长的时间序列的脉冲序列的衰减衰减常数的吸收特性。

4. 发明授权

US07855788B2 Spectroscopy method and spectroscope 失效
标题翻译：光谱法和光谱仪
公开(公告)号：US07855788B2
公开(公告)日：2010-12-21
申请号：US11991542
申请日：2006-09-06
申请人： Masafumi Ito , Norihiko Nishizawa , Masaru Hori , Toshio Goto , Hiroyuki Kano
发明人： Masafumi Ito , Norihiko Nishizawa , Masaru Hori , Toshio Goto , Hiroyuki Kano
IPC分类号： G01B9/02 , G01J3/45
CPC分类号： G01N21/39 , G01J3/02 , G01J3/0218 , G01J3/0224 , G01J3/10 , G01J3/42 , G01J2001/4242 , G01N2201/0697 , G02B6/2861
摘要： To achieve an apparatus capable of measuring a light absorption coefficient f a sample with high sensitivity. A ring down spectroscope uses a wavelength-variable femtosecond soliton pulse light source 1. Pulse light is input to a loop optical fiber 6 through a first light waveguide 4 and a wavelength selective switch 5. Ring down pulse light is input to a homodyne detector through the wavelength selective switch 5. On the other hand, pulse light propagating in the first light waveguide 4 is split and input to light waveguides constituting a second light waveguide 20 through an optical directional coupler 8 and a first optical switching element 12. The pulse light propagating in the second light waveguide 20 is input to the homodyne detector as reference light and used for synchronous detection. The plural light waveguides constituting the second light waveguide 20 differ in optical length in accordance with the length of the optical fiber 6, and can slightly change the optical length.
摘要翻译：实现能够以高灵敏度测量样品的光吸收系数f的装置。环形光谱仪使用波长可变飞秒激光脉冲光源1.脉冲光通过第一光波导4和波长选择开关5输入到环形光纤6中。环形脉冲光通过波长选择开关5.另一方面，在第一光波导4中传播的脉冲光通过光学定向耦合器8和第一光开关元件12被分离并输入到构成第二光波导20的光波导上。脉冲光在第二光波导20中传播的信号被输入到零差检测器作为参考光，并用于同步检测。构成第二光波导路20的多个光波导根据光纤6的长度的光学长度不同，并且可以稍微改变光学长度。

5. 发明申请

US20130027697A1 MULTI-MICRO HOLLOW CATHODE LIGHT SOURCE AND ATOMIC ABSORPTION SEPCTROMETER 有权
标题翻译：多微型中空灯泡光源和原子吸收式SEPCTROMETER
公开(公告)号：US20130027697A1
公开(公告)日：2013-01-31
申请号：US13578171
申请日：2011-02-08
申请人： Masaru Hori , Masafumi Ito , Takayuki Ohta , Hiroyuki Kano , Koji Yamakawa
发明人： Masaru Hori , Masafumi Ito , Takayuki Ohta , Hiroyuki Kano , Koji Yamakawa
IPC分类号： H01J61/09 , G01J3/00
CPC分类号： H01J65/046 , G01N21/3103 , H05H1/2406 , H05H2001/2412
摘要： The multi-micro hollow cathode light source has a cathode plate, an insulation plate, an anode plate, and metal pieces. The insulation plate is sandwiched by the cathode plate and the anode plate. The cathode plate is made of copper. The centers of the cathode plate, insulation plate, and anode plate, are provided with holes, respectively. The holes form a penetrating though-hole. Linear slots are disposed in the cathode plate continuously extending from the hole in a cross shape. Each slot penetrates the cathode plate. Four metal pieces made of materials different from one another are inserted and buried in the four slots.
摘要翻译：多微孔中空阴极光源具有阴极板，绝缘板，阳极板和金属片。绝缘板由阴极板和阳极板夹持。阴极板由铜制成。阴极板，绝缘板和阳极板的中心分别设有孔。孔形成贯穿孔。线状槽设置在从十字形状连续延伸的阴极板中。每个槽都穿过阴极板。四个由彼此不同的材料制成的金属片插入并埋在四个槽中。

6. 发明授权

US08638034B2 Multi-micro hollow cathode light source and atomic absorption sepctrometer 有权
标题翻译：多微空心阴极光源和原子吸收分光光度计
公开(公告)号：US08638034B2
公开(公告)日：2014-01-28
申请号：US13578171
申请日：2011-02-08
申请人： Masaru Hori , Masafumi Ito , Takayuki Ohta , Hiroyuki Kano , Koji Yamakawa
发明人： Masaru Hori , Masafumi Ito , Takayuki Ohta , Hiroyuki Kano , Koji Yamakawa
IPC分类号： H01J17/16
CPC分类号： H01J65/046 , G01N21/3103 , H05H1/2406 , H05H2001/2412
摘要： The multi-micro hollow cathode light source has a cathode plate, an insulation plate, an anode plate, and metal pieces. The insulation plate is sandwiched by the cathode plate and the anode plate. The cathode plate is made of copper. The centers of the cathode plate, insulation plate, and anode plate, are provided with holes, respectively. The holes form a penetrating though-hole. Linear slots are disposed in the cathode plate continuously extending from the hole in a cross shape. Each slot penetrates the cathode plate. Four metal pieces made of materials different from one another are inserted and buried in the four slots.
摘要翻译：多微孔中空阴极光源具有阴极板，绝缘板，阳极板和金属片。绝缘板由阴极板和阳极板夹持。阴极板由铜制成。阴极板，绝缘板和阳极板的中心分别设有孔。孔形成贯穿孔。线状槽设置在从十字形状连续延伸的阴极板中。每个槽都穿过阴极板。四个由彼此不同的材料制成的金属片插入并埋在四个槽中。

7. 发明申请

US20090310134A1 Multi Micro-Hollow Cathode Light Source and Multi-Atomic Simulataneous Absorption Spectrum Analyzer 审中-公开
标题翻译：多微空心阴极光源和多原子模拟吸收光谱分析仪
公开(公告)号：US20090310134A1
公开(公告)日：2009-12-17
申请号：US12225385
申请日：2006-11-02
申请人： Masaru Hori , Masafumi Ito , Takayuki Ohta , Hiroyuki Kano
发明人： Masaru Hori , Masafumi Ito , Takayuki Ohta , Hiroyuki Kano
IPC分类号： H01J61/09 , G01J3/28
CPC分类号： G01N21/67 , G01J3/10 , H01J61/09 , H01J61/16 , H01J61/64
摘要： [Object] To achieve a compact point light source exhibiting multielement emission spectra with which multi elements can be simultaneously analyzed.[Solving Means] The light source includes a glass vessel 40 containing He gas; a plurality of micro hollow pipes 11 that are cylindrical with a diameter of 1 mm or less and made of copper or a copper alloy; an anode mesh 32 provided at ends of the micro hollow pipes 11 with an insulating spacer 33 between the anode mesh 32 and the ends; a metal wire 14 provided in the micro hollow pipe 11, the metal wire being made of an element corresponding to a desired light-source spectrum.
摘要翻译：实现能够同时分析多元素的多元素发射光谱的小型点光源。 [解决方案]光源包括含有He气体的玻璃容器40; 多个微细中空管11，其为直径为1mm以下的圆筒形，由铜或铜合金制成; 阳极网32设置在微型中空管11的端部处，绝缘间隔件33位于阳极网32和端部之间; 设置在微型中空管11中的金属线14，金属线由对应于期望的光源光谱的元件制成。

8. 发明授权

US06501082B1 Plasma deposition apparatus and method with controller 失效
标题翻译：等离子体沉积设备及方法与控制器
公开(公告)号：US06501082B1
公开(公告)日：2002-12-31
申请号：US09527562
申请日：2000-03-16
申请人： Toshio Goto , Masaru Hori , Masafumi Ito , Nobuo Ishii , Satoru Kawakami
发明人： Toshio Goto , Masaru Hori , Masafumi Ito , Nobuo Ishii , Satoru Kawakami
IPC分类号： G21K510
CPC分类号： H01J37/32192 , H01J37/3233 , H01J37/32623
摘要： A controlled plasma deposition system and method are provided including a vacuum vessel. An electron adding mass spectrometer is connected to a vacuum vessel for carrying out a gas treatment for a semi-conductor wafer. In the mass spectrometer, a gas in the vacuum vessel is incorporated, and electrons are added to the particles in the gas. Then the value of negative ions obtained by ionizing the particles, for example specific radicals, is measured. Once measured, the information is forwarded to a controller that may optimize the plasma deposition method.
摘要翻译：提供了包括真空容器的受控等离子体沉积系统和方法。将电子加入质谱仪连接到用于对半导体晶片进行气体处理的真空容器。在质谱仪中，并入真空容器中的气体，并将电子加到气体中的颗粒中。然后测量通过电离粒子，例如特定基团获得的负离子的值。一旦测量，信息被转发到可优化等离子体沉积方法的控制器。

9. 发明授权

US09041937B2 Interference measurement device and measurement method 有权
标题翻译：干涉测量装置及测量方法
公开(公告)号：US09041937B2
公开(公告)日：2015-05-26
申请号：US13577044
申请日：2011-02-02
申请人： Masaru Hori , Masafumi Ito , Yasuhiro Higashijima , Takayuki Ohta
发明人： Masaru Hori , Masafumi Ito , Yasuhiro Higashijima , Takayuki Ohta
IPC分类号： G01B11/02 , G01B9/02 , G01K11/00
CPC分类号： G01B9/02023 , G01B9/02058 , G01B9/0209 , G01K11/00
摘要： [Problem to be Solved] To improve the measurement accuracy of an interference measurement device which utilizes interference of light.[Means for Solution] An interference measurement device includes a light source 10 for emitting supercontinuum light (SC light), an optical fiber coupler 11 for splitting the SC light into measurement light and reference light, a dispersion compensation element 12, a drive unit 13 for moving the dispersion compensation element 12, and light-receiving means 14 for measuring an interference waveform produced as a result of interference between the measurement light and the reference light. A measurement object 15 to be measured is an Si substrate having a thickness of 800 μm. The dispersion compensation element 12 is an Si substrate having a thickness of 780 μm. Namely, the dispersion compensation element 12 is formed of the same material as that of the measurement object 15 and is 20 μm thinner than the measurement object 15. The interference caused by reflection on the back surface of the measurement object 15 and reflection on the back surface of the dispersion compensation element 12 has a narrow peak width because wavelength dispersion is cancelled almost completely. Thus, the accuracy in measuring the peak position improves. As a result, the accuracy in measuring temperature, etc., improves.
摘要翻译： [待解决的问题]提高利用干扰的干涉测量装置的测量精度。解决方案干扰测量装置包括用于发射超连续光（SC灯）的光源10，用于将SC光分解为测量光和参考光的光纤耦合器11，色散补偿元件12，驱动单元13 用于移动色散补偿元件12和用于测量作为测量光和参考光之间的干涉的结果而产生的干涉波形的光接收装置14。待测量的测量对象15是厚度为800μm的Si衬底。色散补偿元件12是厚度为780μm的Si衬底。也就是说，色散补偿元件12由与测量对象15相同的材料形成，并且比测量对象15薄20μm。由测量对象15的背面上的反射引起的干涉和背面的反射由于波长色散几乎完全消除，所以色散补偿元件12的表面具有窄的峰宽。因此，测量峰值位置的精度提高。结果，测量温度等的精度提高。

10. 发明申请

US20120300218A1 INTERFERENCE MEASUREMENT DEVICE AND MEASUREMENT METHOD 有权
标题翻译：干扰测量装置和测量方法
公开(公告)号：US20120300218A1
公开(公告)日：2012-11-29
申请号：US13577044
申请日：2011-02-02
申请人： Masaru Hori , Masafumi Ito , Yasuhiro Higashijima , Takayuki Ohta
发明人： Masaru Hori , Masafumi Ito , Yasuhiro Higashijima , Takayuki Ohta
IPC分类号： G01B9/02 , G01B11/06
CPC分类号： G01B9/02023 , G01B9/02058 , G01B9/0209 , G01K11/00
摘要： [Problem to be Solved]To improve the measurement accuracy of an interference measurement device which utilizes interference of light.[Means for Solution]An interference measurement device includes a light source 10 for emitting supercontinuum light (SC light), an optical fiber coupler 11 for splitting the SC light into measurement light and reference light, a dispersion compensation element 12, a drive unit 13 for moving the dispersion compensation element 12, and light-receiving means 14 for measuring an interference waveform produced as a result of interference between the measurement light and the reference light. A measurement object 15 to be measured is an Si substrate having a thickness of 800 μm. The dispersion compensation element 12 is an Si substrate having a thickness of 780 μm. Namely, the dispersion compensation element 12 is formed of the same material as that of the measurement object 15 and is 20 μm thinner than the measurement object 15. The interference caused by reflection on the back surface of the measurement object 15 and reflection on the back surface of the dispersion compensation element 12 has a narrow peak width because wavelength dispersion is cancelled almost completely. Thus, the accuracy in measuring the peak position improves. As a result, the accuracy in measuring temperature, etc., improves.
摘要翻译： [待解决的问题]提高利用干扰的干涉测量装置的测量精度。解决方案干扰测量装置包括用于发射超连续光（SC灯）的光源10，用于将SC光分解为测量光和参考光的光纤耦合器11，色散补偿元件12，驱动单元13 用于移动色散补偿元件12和用于测量作为测量光和参考光之间的干涉的结果而产生的干涉波形的光接收装置14。待测量的测量对象15是厚度为800μm的Si衬底。色散补偿元件12是厚度为780μm的Si衬底。也就是说，色散补偿元件12由与测量对象15相同的材料形成，并且比测量对象15薄20μm。由测量对象15的背面上的反射引起的干涉和背面的反射由于波长色散几乎完全消除，所以色散补偿元件12的表面具有窄的峰宽。因此，测量峰值位置的精度提高。结果，测量温度等的精度提高。

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