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    • 7. 发明授权
    • Plasma reaction vessel, and method of producing the same
    • 等离子体反应容器及其制造方法
    • US07727487B2
    • 2010-06-01
    • US10544527
    • 2004-02-12
    • Yuichiro ImanishiShinichi MiwaFumio AbeYukio Miyairi
    • Yuichiro ImanishiShinichi MiwaFumio AbeYukio Miyairi
    • B01J19/08
    • B01D53/92F01N3/0892F01N3/2825F01N3/2828F01N2240/28Y10T29/49345
    • In the plasma reaction vessel (1) of the invention, two or more laminate-structures (6) having ceramic formed bodies (3, 4) in which a plasma generating electrode (2) capable of generating plasma is formed in two-tape-form, and an electrically continuous film-like electrically conductive electrode (5) held between the two ceramic formed bodies (3, 4) are formed in such a manner as to form a plasma generating space (7) containing mutual laminate planes therein. Of the electrically conductive electrodes (5), adjacent ones are capable of having electric discharge produced therebetween so as to generate the plasma in the plasma generating space (7) and of generating uniform stabilized plasma at low electric power, it being possible to reduce a passage resistance to a gas passing therein.
    • 在本发明的等离子体反应容器(1)中,具有陶瓷成形体(3,4)的两层以上的层压结构体(6),其中能够产生等离子体的等离子体产生电极(2) 形成,并且以这样的方式形成保持在两个陶瓷成形体(3,4)之间的电连续的膜状导电电极(5),以形成其中包含相互层叠平面的等离子体产生空间(7)。 在导电电极(5)中,相邻的导电电极(5)能够在其间产生放电,以在等离子体产生空间(7)中产生等离子体并且在低功率下产生均匀稳定的等离子体,可以减少 对通过其中的气体的通道阻力。