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1. 发明授权

US08815064B2 Ozone generator 有权
标题翻译：臭氧发生器
公开(公告)号：US08815064B2
公开(公告)日：2014-08-26
申请号：US13393484
申请日：2010-11-26
申请人： Masaaki Kato , Rie Kawaguchi , Takamichi Kishi
发明人： Masaaki Kato , Rie Kawaguchi , Takamichi Kishi
IPC分类号： C25B1/13 , C25B13/02 , C25B13/08 , C25B11/12 , C25B9/08 , C01B13/11 , C02F1/461 , C25B11/04 , C02F103/02
CPC分类号： C25B13/02 , C01B13/11 , C01B2201/24 , C01B2201/34 , C02F1/4618 , C02F2001/46138 , C02F2103/02 , C02F2201/46115 , C25B1/13 , C25B9/08 , C25B11/0478 , C25B13/08 , Y02E60/366
摘要： The present invention provides an ozone generator comprising an anode and a cathode provided on each side of a fluororesin type cation exchange membrane, the anode being a conductive diamond electrode having conductive diamond on the surface, wherein water is supplied to an anode compartment, DC current is supplied between the anode and the cathode to electrolyze water to evolve ozone from the anode compartment and hydrogen from a cathode compartment, the conductive diamond electrode comprising a substrate having a plurality of convexo-concave and a conductive diamond film coated on the surface of the substrate is applied as the conductive diamond electrode, and a close packed layer of ion exchange resin particles or the fluororesin type cation exchange membrane with notch is closely adhered to the surface of the anode side of the fluororesin type cation exchange membrane.
摘要翻译：本发明提供了一种臭氧发生器，其包括在氟树脂型阳离子交换膜的每一侧上设置的阳极和阴极，所述阳极是在表面上具有导电金刚石的导电金刚石电极，其中水被供应到阳极室，DC电流被供应在阳极和阴极之间以电解水以从阳极室释放臭氧并从阴极室释放氢，导电金刚石电极包括具有多个凸凹和导电金刚石薄膜的基底，该基底涂覆在衬底被用作导电金刚石电极，并且紧密填充层的离子交换树脂颗粒或具有凹口的氟树脂型阳离子交换膜紧密附着在氟树脂型阳离子交换膜的阳极侧的表面上。

2. 发明申请

US20120168302A1 OZONE GENERATOR 有权
标题翻译：臭氧发生器
公开(公告)号：US20120168302A1
公开(公告)日：2012-07-05
申请号：US13393484
申请日：2010-11-26
申请人： Masaaki Kato , Rie Kawaguchi , Takamichi Kishi
发明人： Masaaki Kato , Rie Kawaguchi , Takamichi Kishi
IPC分类号： C25B9/10
CPC分类号： C25B13/02 , C01B13/11 , C01B2201/24 , C01B2201/34 , C02F1/4618 , C02F2001/46138 , C02F2103/02 , C02F2201/46115 , C25B1/13 , C25B9/08 , C25B11/0478 , C25B13/08 , Y02E60/366
摘要： The present invention provides an ozone generator comprising an anode and a cathode provided on each side of a fluororesin type cation exchange membrane, the anode being a conductive diamond electrode having conductive diamond on the surface, wherein water is supplied to an anode compartment, DC current is supplied between the anode and the cathode to electrolyze water to evolve ozone from the anode compartment and hydrogen from a cathode compartment, the conductive diamond electrode comprising a substrate having a plurality of convexo-concave and a conductive diamond film coated on the surface of the substrate is applied as the conductive diamond electrode, and a close packed layer of ion exchange resin particles or the fluororesin type cation exchange membrane with notch is closely adhered to the surface of the anode side of the fluororesin type cation exchange membrane.
摘要翻译：本发明提供了一种臭氧发生器，其包括在氟树脂型阳离子交换膜的每一侧上设置的阳极和阴极，所述阳极是在表面上具有导电金刚石的导电金刚石电极，其中水被供应到阳极室，DC电流被供应在阳极和阴极之间以电解水以从阳极室释放臭氧并从阴极室释放氢，导电金刚石电极包括具有多个凸凹和导电金刚石薄膜的基底，该基底涂覆在衬底被用作导电金刚石电极，并且紧密填充层的离子交换树脂颗粒或具有凹口的氟树脂型阳离子交换膜紧密附着在氟树脂型阳离子交换膜的阳极侧的表面上。

3. 发明授权

US08187449B2 Cleaning method by electrolytic sulfuric acid and manufacturing method of semiconductor device 有权
标题翻译：电解硫酸的清洗方法及半导体装置的制造方法
公开(公告)号：US08187449B2
公开(公告)日：2012-05-29
申请号：US12459133
申请日：2009-06-26
申请人： Hiroki Domon , Yusuke Ogawa , Masaaki Kato , Takamichi Kishi , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
发明人： Hiroki Domon , Yusuke Ogawa , Masaaki Kato , Takamichi Kishi , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
IPC分类号： C25B1/28
CPC分类号： C11D11/007 , C11D7/08 , C11D11/0047 , C25B1/285 , G03F7/423 , H01L21/31133
摘要： The cleaning method by electrolytic sulfuric acid and the manufacturing method of semiconductor device comprising: the process in which the first sulfuric acid solution is supplied from outside to the sulfuric acid electrolytic cell to form the first electrolytic sulfuric acid containing oxidizing agent in the sulfuric acid electrolytic cell; the process in which the second sulfuric acid solution, which is higher in concentration than said the first sulfuric acid solution previously supplied, is supplied from outside to said sulfuric acid electrolytic cell; said the second sulfuric acid solution and the first electrolytic sulfuric acid are mixed in said sulfuric acid electrolytic cell; and electrolysis is performed to form the cleaning solution comprising the second electrolytic sulfuric acid containing sulfuric acid and oxidation agent in said sulfuric acid electrolytic cell and the process in which cleaning treatment is performed for the cleaning object with said cleaning solution.
摘要翻译：电解硫酸的清洗方法以及半导体装置的制造方法，其特征在于，包括：从硫酸电解槽向外部供给第一硫酸溶液，在硫酸电解液中形成含有第一电解硫酸的氧化剂的工序细胞; 其中比所述先前供应的所述第一硫酸溶液浓度高的第二硫酸溶液从外部供应到所述硫酸电解池的过程; 所述第二硫酸溶液和所述第一电解硫酸在所述硫酸电解池中混合; 并且进行电解以在所述硫酸电解池中形成包含含有硫酸和氧化剂的第二电解硫酸的清洗溶液，以及对所述清洁溶液进行清洁对象的清洁处理的处理。

4. 发明申请

US20090325390A1 Cleaning method by electrolytic sulfuric acid and manufacturing method of semiconductor device 有权
标题翻译：电解硫酸的清洗方法及半导体装置的制造方法
公开(公告)号：US20090325390A1
公开(公告)日：2009-12-31
申请号：US12459133
申请日：2009-06-26
申请人： Hiroki Domon , Yusuke Ogawa , Masaaki Kato , Takamichi Kishi , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
发明人： Hiroki Domon , Yusuke Ogawa , Masaaki Kato , Takamichi Kishi , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
IPC分类号： H01L21/20 , C25B1/22 , C11D7/34
CPC分类号： C11D11/007 , C11D7/08 , C11D11/0047 , C25B1/285 , G03F7/423 , H01L21/31133
摘要： The cleaning method by electrolytic sulfuric acid and the manufacturing method of semiconductor device comprising: the process in which the first sulfuric acid solution is supplied from outside to the sulfuric acid electrolytic cell to form the first electrolytic sulfuric acid containing oxidizing agent in the sulfuric acid electrolytic cell; the process in which the second sulfuric acid solution, which is higher in concentration than said the first sulfuric acid solution previously supplied, is supplied from outside to said sulfuric acid electrolytic cell; said the second sulfuric acid solution and the first electrolytic sulfuric acid are mixed in said sulfuric acid electrolytic cell; and electrolysis is performed to form the cleaning solution comprising the second electrolytic sulfuric acid containing sulfuric acid and oxidation agent in said sulfuric acid electrolytic cell and the process in which cleaning treatment is performed for the cleaning object with said cleaning solution.
摘要翻译：电解硫酸的清洗方法以及半导体装置的制造方法，其特征在于，包括：从硫酸电解槽向外部供给第一硫酸溶液，在硫酸电解液中形成含有第一电解硫酸的氧化剂的工序细胞; 其中比所述先前供应的所述第一硫酸溶液浓度高的第二硫酸溶液从外部供应到所述硫酸电解池的过程; 所述第二硫酸溶液和所述第一电解硫酸在所述硫酸电解池中混合; 并且进行电解以在所述硫酸电解池中形成包含含有硫酸和氧化剂的第二电解硫酸的清洗溶液，以及对所述清洁溶液进行清洁对象的清洁处理的处理。

5. 发明申请

US20100084259A1 OPERATION METHOD OF OZONIZER AND OZONIZER APPARATUS USED THEREFOR 审中-公开
标题翻译：其使用的臭氧和臭氧设备的操作方法
公开(公告)号：US20100084259A1
公开(公告)日：2010-04-08
申请号：US12573156
申请日：2009-10-05
申请人： Masaaki Kato , Rie Kawaguchi
发明人： Masaaki Kato , Rie Kawaguchi
IPC分类号： C01B13/11 , C25B9/10
CPC分类号： C25B1/13 , C01B13/115 , C01B2201/12 , C01B2201/22 , C01B2201/24 , C01B2201/32 , C01B2201/34 , C01B2201/62 , C25B9/10 , C25B15/02 , H01M4/8605 , Y02E60/366
摘要： The present invention offers an operation method of an ozonizer and an ozonizer apparatus to improve ozone gas purity and to achieve long and safety electrolysis operation in such manner that, during normal operation of the ozonizer, ozone gas is generated at the anode in the anode compartment and hydrogen gas is generated at the cathode in the cathode compartment; and only when the ozonizer is stopped and operation is switched to protective current operation during which minute electric current is supplied to protect said anode, oxygen-containing gas is supplied to said cathode compartment after electrolyte and hydrogen gas in said cathode compartment are all drained out, so that said cathode is made function as a gas electrode for oxygen reduction reaction, using said cathode as a reversible electrode with two functions as a gas generation electrode and a gas electrode, thereby during normal operation, ozone is generated efficiently, and during the protective current operation, when safety is a key issue, hydrogen gas is not generated at the cathode and mingling of hydrogen gas into ozone gas generated at the anode is prevented.
摘要翻译：本发明提供一种臭氧发生器和臭氧发生装置的操作方法，以改善臭氧气体的纯度并实现长时间和安全的电解操作，使得在臭氧发生器的正常操作期间，在阳极室的阳极处产生臭氧气体在阴极室的阴极产生氢气; 并且只有当臭氧发生器停止并且操作切换到保护电流操作时，在该保护电流操作期间供应微小的电流以保护所述阳极，则在所述阴极室中的电解液和氢气全部被排出之后，含氧气体被供应到所述阴极室使得所述阴极被用作用于氧还原反应的气体电极，使用所述阴极作为具有两个功能的可逆电极作为气体发生电极和气体电极，从而在正常操作期间有效地产生臭氧，并且在保护电流操作，当安全是关键问题时，在阴极处不产生氢气，并且防止氢气混入阳极产生的臭氧气体中。

6. 发明授权

US08277623B2 Conductive diamond electrode and ozone generator using the same 有权
标题翻译：导电金刚石电极和臭氧发生器使用相同
公开(公告)号：US08277623B2
公开(公告)日：2012-10-02
申请号：US12803101
申请日：2010-06-18
申请人： Masaaki Kato , Rie Kawaguchi
发明人： Masaaki Kato , Rie Kawaguchi
IPC分类号： C25B11/12 , B01J19/08
CPC分类号： C25B1/13 , C02F1/46109 , C02F1/4672 , C02F1/78 , C02F2001/46147 , C02F2201/46115 , C02F2201/4617 , C02F2201/46195 , C25B9/08 , C25B11/0421 , C25B11/0447
摘要： The present invention relates to a conductive diamond electrode, comprising a substrate having a plurality of convex and concave part disposed over the entire surface of the conductive diamond electrode, and a diamond film coated on the surface of said substrate, wherein the width of each convex part of said convex and concave part is in a range from 0.2 mm to 1 mm. The present invention can provide a conductive diamond electrode, applying a thin film of conductive diamond and a thick substrate, being less expensive than a self-supported type conductive diamond electrode and also having mechanical strength enough to be used in the zero-gap electrolysis, functioning stably for a long time with smooth water supply or gas liberation, and an ozone generator using the conductive diamond electrode.
摘要翻译：导电金刚石电极技术领域本发明涉及一种导电金刚石电极，其包括具有设置在导电金刚石电极的整个表面上的多个凸部和凹部的基板和涂覆在所述基板的表面上的金刚石膜，所述凸部和凹部的一部分在0.2mm至1mm的范围内。本发明可以提供导电金刚石电极，施加导电金刚石和厚基片的薄膜，其比自支撑型导电金刚石电极便宜，并且还具有足以用于零间隙电解的机械强度，长时间稳定地运行，平稳的供水或气体释放，以及使用导电金刚石电极的臭氧发生器。

7. 发明申请

US20100320082A1 Conductive diamond electrode and ozone generator using the same 有权
标题翻译：导电金刚石电极和臭氧发生器使用相同
公开(公告)号：US20100320082A1
公开(公告)日：2010-12-23
申请号：US12803101
申请日：2010-06-18
申请人： Masaaki Kato , Rie Kawaguchi
发明人： Masaaki Kato , Rie Kawaguchi
IPC分类号： C25B11/12 , C25B9/08
CPC分类号： C25B1/13 , C02F1/46109 , C02F1/4672 , C02F1/78 , C02F2001/46147 , C02F2201/46115 , C02F2201/4617 , C02F2201/46195 , C25B9/08 , C25B11/0421 , C25B11/0447
摘要： The present invention relates to a conductive diamond electrode, comprising a substrate having a plurality of convex and concave part disposed over the entire surface of the conductive diamond electrode, and a diamond film coated on the surface of said substrate, wherein the width of each convex part of said convex and concave part is in a range from 0.2 mm to 1 mm. The present invention can provide a conductive diamond electrode, applying a thin film of conductive diamond and a thick substrate, being less expensive than a self-supported type conductive diamond electrode and also having mechanical strength enough to be used in the zero-gap electrolysis, functioning stably for a long time with smooth water supply or gas liberation, and an ozone generator using the conductive diamond electrode.
摘要翻译：导电金刚石电极技术领域本发明涉及一种导电金刚石电极，其包括具有设置在导电金刚石电极的整个表面上的多个凸部和凹部的基板和涂覆在所述基板的表面上的金刚石膜，所述凸部和凹部的一部分在0.2mm至1mm的范围内。本发明可以提供导电金刚石电极，施加导电金刚石和厚基片的薄膜，其比自支撑型导电金刚石电极便宜，并且还具有足以用于零间隙电解的机械强度，长时间稳定地运行，平稳的供水或气体释放，以及使用导电金刚石电极的臭氧发生器。

8. 发明申请

US20110073489A1 CLEANING LIQUID, CLEANING METHOD, CLEANING SYSTEM, AND METHOD FOR MANUFACTURING MICROSTRUCTURE 审中-公开
标题翻译：清洁液，清洁方法，清洁系统和制造微结构的方法
公开(公告)号：US20110073489A1
公开(公告)日：2011-03-31
申请号：US12880450
申请日：2010-09-13
申请人： Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi , Masaaki Kato , Yusuke Ogawa , Hiroki Domon
发明人： Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi , Masaaki Kato , Yusuke Ogawa , Hiroki Domon
IPC分类号： C25F1/00 , C25F7/00
CPC分类号： H01L21/31133 , G03F7/423 , H01L21/67051
摘要： According to embodiments, a cleaning liquid includes an oxidizing substance and hydrofluoric acid and exhibiting acidity. A cleaning method is disclosed. The method includes producing an oxidizing solution including an oxidizing substance by one selected from electrolyzing a sulfuric acid solution, electrolyzing hydrofluoric acid added to a sulfuric acid solution, and mixing a sulfuric acid solution with aqueous hydrogen peroxide. The method includes supplying the oxidizing solution and hydrofluoric acid to a surface of an object to be cleaned.
摘要翻译：根据实施方案，清洗液体包含氧化物质和氢氟酸并具有酸性。公开了一种清洁方法。该方法包括：通过选择电解硫酸溶液，电解加入到硫酸溶液中的氢氟酸，并将硫酸溶液与过氧化氢水溶液混合，制备包含氧化物质的氧化溶液。该方法包括将氧化溶液和氢氟酸供给到待清洁物体的表面。

9. 发明申请

US20090321272A1 Sulfuric acid electrolysis process 有权
标题翻译：硫酸电解过程
公开(公告)号：US20090321272A1
公开(公告)日：2009-12-31
申请号：US12459161
申请日：2009-06-26
申请人： Masaaki Kato , Yusuke Ogawa , Hiroki Domon , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
发明人： Masaaki Kato , Yusuke Ogawa , Hiroki Domon , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
IPC分类号： C25B15/00
CPC分类号： C25B1/285
摘要： Sulfuric acid electrolysis process wherein; a temperature of electrolyte containing sulfuric acid to be supplied to an anode compartment and a cathode compartment is controlled to 30 degree Celsius or more; a flow rate F1 (L/min.) of the electrolyte containing sulfuric acid to be supplied to said anode compartment is controlled to 1.5 times or more (F1/Fa≧1.5) a flow rate Fa (L/min.) of gas formed on an anode side as calculated from Equation (1) shown below and a flow rate F2(L/min.) of said electrolyte containing sulfuric acid to be supplied to said cathode compartment is controlled to 1.5 times or more (F2/Fc≧1.5) a flow rate Fe (L/min.) of gas formed on a cathode side as calculated from Equation (2) shown below. Fa=(I×S×R×T)/(4×Faraday constant) Equation (I) Fe=(I×S×R×T)/(2×Faraday constant) Equation (2) I: Electrolytic current (A)S: Time: 60 second (Fixed)R: Gas constant (0.082 1·atm/K/mol)K: Absolute temperature (273.15 degree Celsius+T degree Celsius)T: Electrolysis temperature (degree Celsius)Faraday constant: (C/mol)
摘要翻译：硫酸电解法其中; 供给阳极室和阴极室的含有硫酸的电解质的温度控制在30摄氏度以上; 将供给到阳极室的含有硫酸的电解质的流量F1（L / min）控制为气体的流量Fa（L / min）的1.5倍以上（F1 / Fa> 1.5）形成在阳极侧，由下述式（1）算出，将含有供给阴极室的硫酸的电解质的流量F2（L / min）控制在1.5倍以上（F2 / Fc> = 1.5）由下面所示的等式（2）计算的在阴极侧形成的气体的流速Fe（L / min）。 Fa =（IxSxRxT）/（4xFaraday常数）等式（I）Fe =（IxSxRxT）/（2xFaraday常数）等式（2）I：电解电流（A）S：时间：60秒（固定）R：气体常数（0.082 1.atm / K / mol）K：绝对温度（273.15摄氏度+ T摄氏度）T：电解温度（摄氏度）法拉第常数：（C / mol）

10. 发明申请

US20080025886A1 Hydrogen combustion system 失效
标题翻译：氢燃烧系统
公开(公告)号：US20080025886A1
公开(公告)日：2008-01-31
申请号：US11878054
申请日：2007-07-20
申请人： Akiyoshi Manabe , Masaaki Kato , Kazumasa Mochizuki , Masakazu Mimura
发明人： Akiyoshi Manabe , Masaaki Kato , Kazumasa Mochizuki , Masakazu Mimura
IPC分类号： B01J8/06
CPC分类号： F23D14/22 , F23C2900/9901 , F23D91/02
摘要： A hydrogen combustion system comprising: an external cylinder 1 constituting the exterior of a double tube construction; an internal cylinder 2 formed by a porous metal plate constituting the interior of said double tube construction; hydrogen combustion catalyst 4 supported with precious metals on spherical ceramic support surface, formed in pellet state, being packed in said internal cylinder 2; an insert pipe 3 formed by porous metal plate inserted in the center of said internal cylinder 2; pre-heating heaters 5 installed between said insert pipe 3 and said internal cylinder 2 to preheat said hydrogen combustion catalyst 4 to ambient atmosphere of over catalytic reaction temperatures; a hydrogen introducing port 8 connecting to said insert pipe 3; an air introducing port 9 provided at the bottom of said external cylinder 1 in the area between said external cylinder 1 and said internal cylinder 2, wherein air for hydrogen combustion is introduced by the drift effect resulting from the differential pressure generated between the packed layer of hydrogen combustion catalyst and the outside, by thermal convection, achieving safe combustion treatment of hydrogen in simple construction, small size and high treatment efficiency.
摘要翻译：一种氢燃烧系统，包括：构成双管结构的外部的外筒1; 由构成所述双管结构内部的多孔金属板形成的内筒2; 氢气燃烧催化剂4由贵金属负载在球形陶瓷支撑表面上，以颗粒状形成，装在所述内筒2中; 由插入在所述内筒2的中心的多孔金属板形成的插入管3; 预热加热器5安装在所述插入管3和所述内筒2之间，以将所述氢燃烧催化剂4预热到过度催化反应温度的环境气氛; 连接到所述插入管3的氢气引入口8; 设置在外筒1的底部的外筒1和内筒2之间的空气引入口9，其中用于氢气燃烧的空气通过由填充层氢燃烧催化剂和外部，通过热对流，在施工简单，体积小，处理效率高的条件下实现氢的安全燃烧处理。

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