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1. 发明授权

US5705287A Magnetic recording disk with metal nitride texturing layer 失效
标题翻译：带有金属氮化物纹理层的磁记录盘
公开(公告)号：US5705287A
公开(公告)日：1998-01-06
申请号：US309274
申请日：1994-09-20
申请人： Mary Frances Doerner , James Harvey Kaufman , Serhat Metin , Seyyed Mohammad Taghi Mirzamaani , Anthony Wai Wu
发明人： Mary Frances Doerner , James Harvey Kaufman , Serhat Metin , Seyyed Mohammad Taghi Mirzamaani , Anthony Wai Wu
IPC分类号： G11B5/66 , G11B5/64 , G11B5/72 , G11B5/73 , G11B5/738 , G11B5/84 , G11B5/70
CPC分类号： G11B5/7325 , G11B5/72 , G11B5/8404
摘要： A thin film cobalt alloy magnetic recording disk has a metal nitride layer located between the disk substrate and the top surface of the disk to provide texturing of the disk at the head-disk interface. The texturing layer is made up of generally contiguous clusters of aluminum nitride (AlN) with rounded upper surfaces that are formed on top of the substrate and under the conventional Cr underlayer. The AlN texturing layer is formed by sputtering an Al target in the presence of N.sub.2 gas. The subsequently sputter-deposited Cr underlayer, cobalt alloy magnetic layer and protective amorphous carbon overcoat replicate the upper surface of the contiguous AlN clusters, resulting in a textured surface at the head-disk interface. The AlN texturing layer may also be sputter deposited above the magnetic layer in the middle of the protective carbon overcoat. The density and size of the AlN clusters in the texturing layer, and thus the texture of the completed disk at the head-disk interface, are controlled by the amount of N.sub.2, the sputtering power and pressure, and the substrate temperature.
摘要翻译：薄膜钴合金磁记录盘具有位于盘基板和盘顶部之间的金属氮化物层，以在磁头 - 磁盘接口处提供盘的纹理化。纹理层由通常连续的氮化铝（AlN）簇组成，其具有圆形的上表面，其形成在衬底的顶部和在常规Cr底层下方。 AlN纹理层通过在N 2气体存在下溅射Al靶而形成。随后溅射沉积的Cr底层，钴合金磁性层和保护性无定形碳外涂层复制邻接的AlN簇的上表面，导致在磁头 - 磁盘界面处的纹理表面。 AlN纹理层也可以在保护性碳覆盖层中间的磁性层上方溅射沉积。纹理层中的AlN簇的密度和尺寸以及由此在磁头 - 磁盘接口处完成的磁盘的纹理受到N2的量，溅射功率和压力以及衬底温度的控制。

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