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1. 发明授权

US06389707B1 Wafer container having electrically conductive kinematic coupling groove to detect the presence of the wafer container on a support surface, the support surface, and method 有权
标题翻译：具有导电运动耦合槽的晶片容器用于检测在支撑表面上的晶片容器的存在，支撑表面和方法
公开(公告)号：US06389707B1
公开(公告)日：2002-05-21
申请号：US09641153
申请日：2000-08-17
申请人： Martin Peiter , Clinton Haris
发明人： Martin Peiter , Clinton Haris
IPC分类号： G01B730
CPC分类号： H01L21/67379 , H01L21/67259
摘要： In a transportation system (100, 200) for wafers, a wafer container (100) has kinematic coupling grooves, and a support surface (200) has kinematic coupling pins. Grooves and pins are at least partially electrically conductive to allow monitoring the correct position of the container by measuring electrical resistance, as well as to allow signal exchange to and from the container (100). The kinematic coupling pins have first and second surface areas that are electrically isolated.
摘要翻译：在用于晶片的运输系统（100,200）中，晶片容器（100）具有运动耦合槽，并且支撑表面（200）具有运动耦合销。槽和销至少部分导电，以允许通过测量电阻来监测容器的正确位置，并且允许与容器（100）的信号交换。运动耦合销具有电隔离的第一和第二表面区域。

2. 发明授权

US06914006B2 Wafer scribing method and wafer scribing device 有权
标题翻译：晶圆划片方法和晶圆划线装置
公开(公告)号：US06914006B2
公开(公告)日：2005-07-05
申请号：US10016633
申请日：2001-10-30
申请人： Martin Peiter , Eckhard Marx , Karl E. Mautz
发明人： Martin Peiter , Eckhard Marx , Karl E. Mautz
IPC分类号： B23K26/38 , H01L21/00 , H01L21/301 , H01L21/304 , H01L23/544 , H01L21/302
CPC分类号： H01L21/67282 , B23K26/389 , B23K2101/40 , H01L21/3043 , H01L21/6836 , H01L23/544 , H01L2221/68327 , H01L2223/54453 , H01L2223/54493 , H01L2924/0002 , H01L2924/3025 , H01L2924/00
摘要： The present invention relates to a scribing method for wafers (11), wherein a defined beam (12) is directed onto the wafer (11) by means of a beam generator means (10) so as to remove some wafer material from a wafer region. The invention also relates to a wafer-scribing device including a wafer mount (31) and a beam generator means (10) by means of which at least one defined beam can be directed onto the wafer (11).The inventive method is distinguished by the by the further step of generating a first radiation pulse having a predeterminable energy density and used to create a comparatively deep pit (18) in the wafer (11).The inventive wafer scribing means is distinguished by the provision that a radiation pulse can be generated by means of which a comparatively deep pit (18) can be created in the wafer (11).
摘要翻译：本发明涉及一种用于晶片（11）的划线方法，其中通过光束发生器装置（10）将限定的光束（12）引导到晶片（11）上，以便从晶片区域中去除一些晶片材料。本发明还涉及包括晶片安装件（31）和光束发生器装置（10）的晶片划线装置，通过该装置可以将至少一个限定的光束引导到晶片（11）上。本发明的方法通过进一步的步骤来产生具有可预定能量密度的第一辐射脉冲，并用于在晶片（11）中产生比较深的凹坑（18）。本发明的晶片划线装置的区别在于可以产生辐射脉冲，借此可以在晶片（11）中产生相对较深的凹坑（18）。

3. 发明授权

US06877944B2 Configuration for transporting a semiconductor wafer carrier 失效
标题翻译：用于传输半导体晶片载体的配置
公开(公告)号：US06877944B2
公开(公告)日：2005-04-12
申请号：US10424174
申请日：2003-04-25
申请人： Martin Peiter
发明人： Martin Peiter
IPC分类号： B65G49/07 , H01L21/00 , H01L21/677 , B65G1/00
CPC分类号： H01L21/67775 , H01L21/67724 , H01L21/67727 , H01L21/67736 , Y10S414/14
摘要： For bay type structures of semiconductor wafer transport systems, a configuration includes interbay rail tracks and intrabay rail tracks mounted on each other, vehicles of the interbay system and carrier transfer cars of the intrabay system moving freely bi-directional inside the bay area without obstructing each other. The carrier transfer car is configured such that a wafer carrier can be directly loaded from the vehicle to the load port of a processing machine. The configuration simplifies and accelerates the transfer and enhances the flexibility of vehicles in wafer transport.
摘要翻译：对于半导体晶片传送系统的间隔型结构，配置包括彼此安装的间隔轨道和内部轨道轨道，室间系统的车辆和伞形系统的载体传送车厢在海湾区域内自由地双向移动，而不阻碍每个其他。载体转移车被构造成使得晶片载体可以从车辆直接加载到加工机器的负载端口。该配置简化并加速了传输，并提高了车辆在晶片传输中的灵活性。

4. 发明授权

US07035003B2 Microscope arrangement for inspecting a substrate 失效
标题翻译：用于检查基板的显微镜装置
公开(公告)号：US07035003B2
公开(公告)日：2006-04-25
申请号：US10991517
申请日：2004-11-19
申请人： Martin Peiter , Mandy Vogel
发明人： Martin Peiter , Mandy Vogel
IPC分类号： G02B21/26 , G02B21/00
CPC分类号： G02B21/26 , G02B21/0016
摘要： A microscope measuring arrangement for inspecting a substrate includes a microscope, an illuminating system, preferably a sight glass, a holder, a substrate pallet and a rotary apparatus and/or tilting apparatus. The substrate pallet can be moved between at least two positions, which lie in the visual ranges respectively of the microscope and the sight glass. The substrate is first subject to an oblique light inspection for finding defect positions by the rotary and/or tilting apparatus. Without having to remove the substrate from the substrate pallet, the microscope to undertake a high-resolution inspection for classifying the defect at the defect position found.
摘要翻译：用于检查基板的显微镜测量装置包括显微镜，照明系统，优选观察镜，保持器，基板托盘和旋转装置和/或倾斜装置。基板托盘可以在至少两个位置之间移动，这两个位置分别位于显微镜和观察窗的视觉范围内。首先对基板进行倾斜光检查，以通过旋转和/或倾斜装置找到缺陷位置。不需要从基板托盘移除基板，显微镜要进行高分辨率检查，以便在找到的缺陷位置对缺陷进行分类。

5. 发明授权

US06866200B2 Semiconductor device identification apparatus 失效
标题翻译：半导体器件识别装置
公开(公告)号：US06866200B2
公开(公告)日：2005-03-15
申请号：US10816142
申请日：2004-04-02
申请人： Eckhard Marx , Martin Peiter
发明人： Eckhard Marx , Martin Peiter
IPC分类号： G01B11/02 , G01B11/06 , H01L21/00 , G06K19/06 , G06K7/00
CPC分类号： H01L21/67294 , G01B11/02 , G01B11/0608
摘要： A three-dimensional image of a semiconductor device identification pattern is obtained by measuring the distance of at least one sensor to the surface of the semiconductor device. The apparatus includes a source of radiation for deriving the distance from properties of the reflected light. A unit for determining the distance and an image processing unit are used to establish the three-dimensional picture. Positional information can be achieved in a scanning movement from motors being controlled by a control unit. By applying a threshold value, a two-dimensional image is derived and by a pattern recognition algorithm, the identification pattern can be analyzed.
摘要翻译：通过测量至少一个传感器到半导体器件的表面的距离来获得半导体器件识别图案的三维图像。该装置包括用于导出与反射光的特性的距离的辐射源。用于确定距离的单元和图像处理单元用于建立三维图像。在通过控制单元控制的电动机的扫描运动中可以实现位置信息。通过应用阈值，导出二维图像，并且通过模式识别算法，可以分析识别模式。

6. 发明申请

US20050122578A1 Microscope arrangement for inspecting a substrate 失效
标题翻译：用于检查基板的显微镜装置
公开(公告)号：US20050122578A1
公开(公告)日：2005-06-09
申请号：US10991517
申请日：2004-11-19
申请人： Martin Peiter , Mandy Vogel
发明人： Martin Peiter , Mandy Vogel
IPC分类号： G02B21/00 , G02B21/26 , G02B21/06
CPC分类号： G02B21/26 , G02B21/0016
摘要： A microscope measuring arrangement for inspecting a substrate comprises a microscope, an illuminating system, preferably a sight glass, a holder, a substrate pallet and a rotary apparatus and/or tilting apparatus. The substrate pallet can be moved between at least two positions, which lie in the visual ranges 11, 21 respectively of the microscope and the sight glass. The substrate can firstly be subjected by means of the rotary and/or tilting apparatus 71, 72 to an oblique light inspection for finding defect positions. Without having to remove the substrate from the substrate pallet, it is subsequently possible to use the microscope to undertake a high-resolution inspection for the purpose of classifying the defect at the defect position found.
摘要翻译：用于检查基板的显微镜测量装置包括显微镜，照明系统，优选视镜，保持器，基板托盘和旋转装置和/或倾斜装置。基板托盘可以在分别位于显微镜和观察窗的视觉范围11,21中的至少两个位置之间移动。首先可以通过旋转和/或倾斜装置71,72对基板进行倾斜光检查，以找出缺陷位置。无需从基板托盘上移除基板，随后可以使用显微镜进行高分辨率检查，以便在发现的缺陷位置对缺陷进行分类。

7. 发明授权

US06881914B2 Apparatus and method for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs 失效
标题翻译：用于处理，存储和重新装载诸如半导体晶片或CD的盘形物品的载体的装置和方法
公开(公告)号：US06881914B2
公开(公告)日：2005-04-19
申请号：US10298831
申请日：2002-11-18
申请人： Michael Lering , Reiner Missale , Martin Peiter
发明人： Michael Lering , Reiner Missale , Martin Peiter
IPC分类号： B08B7/00 , H01L21/00 , H01L21/304 , H01L21/677 , B65G49/07 , B07C5/344
CPC分类号： H01L21/67236 , H01L21/67207 , H01L21/67271 , Y10S414/137
摘要： An apparatus for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs, has at least one cleaning unit and at least one storage unit for the carriers containing the disk-shaped items. The apparatus further has at least one sorting unit for the disk-shaped items. The cleaning unit, the storage unit and the sorting apparatus are integral component parts of the apparatus and are operated by a common automatic control.
摘要翻译：用于处理，存储和重新装载诸如半导体晶片或CD的盘形物品的载体的装置具有至少一个清洁单元和至少一个用于包含盘形物品的载体的存储单元。该装置还具有用于盘形物品的至少一个分选单元。清洁单元，存储单元和分类设备是设备的组成部分，并且通过公共自动控制来操作。

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