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1. 发明授权

US07515018B2 Acoustic resonator 有权
标题翻译：声谐振器
公开(公告)号：US07515018B2
公开(公告)日：2009-04-07
申请号：US11513895
申请日：2006-08-31
申请人： Martin Handtmann , Jyrki Kaitila , Andreas Meckes , Lueder Elbrecht
发明人： Martin Handtmann , Jyrki Kaitila , Andreas Meckes , Lueder Elbrecht
IPC分类号： H03H9/00
CPC分类号： H03H9/585 , H03H9/0095 , H03H9/589 , H03H9/605
摘要： An acoustic resonator is described, the acoustic resonator comprising a stack of a first and a second piezoelectric body, wherein said first and second piezoelectric bodies have substantially the same spatial piezoelectric orientation, an intermediate intermediate electrode being arranged between said first and said second piezoelectric body forming a first terminal of said acoustic resonator, and first and second electrodes, wherein said first electrode is arranged such that said first piezoelectric body is arranged between said first electrode and said intermediate electrode, wherein said second electrode is arranged such that said second piezoelectric body is arranged between said second electrode and said intermediate electrode, and wherein said first and said second electrode are electrically connected to each other forming a second terminal of said acoustic resonator.
摘要翻译：描述了声谐振器，声谐振器包括第一和第二压电体的堆叠，其中所述第一和第二压电体具有基本上相同的空间压电取向，中间中间电极设置在所述第一和第二压电体之间形成所述声谐振器的第一端子，以及第一和第二电极，其中所述第一电极被布置成使得所述第一压电体布置在所述第一电极和所述中间电极之间，其中所述第二电极被布置成使得所述第二压电体布置在所述第二电极和所述中间电极之间，并且其中所述第一和所述第二电极彼此电连接，形成所述声共振器的第二端子。

2. 发明申请

US20080055020A1 Acoustic Resonator 有权
标题翻译：声谐振器
公开(公告)号：US20080055020A1
公开(公告)日：2008-03-06
申请号：US11513895
申请日：2006-08-31
申请人： Martin Handtmann , Jyrki Kaitila , Andreas Meckes , Lueder Elbrecht
发明人： Martin Handtmann , Jyrki Kaitila , Andreas Meckes , Lueder Elbrecht
IPC分类号： H03H9/58
CPC分类号： H03H9/585 , H03H9/0095 , H03H9/589 , H03H9/605
摘要： An acoustic resonator is described, the acoustic resonator comprising a stack of a first and a second piezoelectric body, wherein said first and second piezoelectric bodies have substantially the same spatial piezoelectric orientation, an intermediate intermediate electrode being arranged between said first and said second piezoelectric body forming a first terminal of said acoustic resonator, and first and second electrodes, wherein said first electrode is arranged such that said first piezoelectric body is arranged between said first electrode and said intermediate electrode, wherein said second electrode is arranged such that said second piezoelectric body is arranged between said second electrode and said intermediate electrode, and wherein said first and said second electrode are electrically connected to each other forming a second terminal of said acoustic resonator.
摘要翻译：描述了声谐振器，声谐振器包括第一和第二压电体的堆叠，其中所述第一和第二压电体具有基本上相同的空间压电取向，中间中间电极设置在所述第一和第二压电体之间形成所述声谐振器的第一端子，以及第一和第二电极，其中所述第一电极被布置成使得所述第一压电体布置在所述第一电极和所述中间电极之间，其中所述第二电极被布置成使得所述第二压电体布置在所述第二电极和所述中间电极之间，并且其中所述第一和所述第二电极彼此电连接，形成所述声共振器的第二端子。

3. 发明申请

US20090096549A1 Apparatus with acoustically coupled BAW resonators and a method for matching impedances 有权
标题翻译：具有声耦合BAW谐振器的装置和用于匹配阻抗的方法
公开(公告)号：US20090096549A1
公开(公告)日：2009-04-16
申请号：US11871665
申请日：2007-10-12
申请人： Robert Thalhammer , Martin Handtmann , Jyrki Kaitila , Winfried Nessler , Lueder Elbrecht
发明人： Robert Thalhammer , Martin Handtmann , Jyrki Kaitila , Winfried Nessler , Lueder Elbrecht
IPC分类号： H03H9/58 , H01L41/22
CPC分类号： H03H9/584 , H03H9/0004 , H03H9/0095 , H03H9/60 , Y10T29/42
摘要： An apparatus includes a first bulk acoustic wave (BAW) device including a first impedance and a second BAW device including a second impedance, wherein the first and second impedances are different and the first and second BAW devices are acoustically coupled.
摘要翻译：一种装置包括包括第一阻抗的第一体声波（BAW）装置和包括第二阻抗的第二BAW装置，其中第一和第二阻抗不同，并且第一和第二BAW装置是声学耦合的。

4. 发明授权

US07786826B2 Apparatus with acoustically coupled BAW resonators and a method for matching impedances 有权
标题翻译：具有声耦合BAW谐振器的装置和用于匹配阻抗的方法
公开(公告)号：US07786826B2
公开(公告)日：2010-08-31
申请号：US11871665
申请日：2007-10-12
申请人： Robert Thalhammer , Martin Handtmann , Jyrki Kaitila , Winfried Nessler , Lueder Elbrecht
发明人： Robert Thalhammer , Martin Handtmann , Jyrki Kaitila , Winfried Nessler , Lueder Elbrecht
IPC分类号： H03H9/54 , H03H7/38
CPC分类号： H03H9/584 , H03H9/0004 , H03H9/0095 , H03H9/60 , Y10T29/42
摘要： An apparatus includes a first bulk acoustic wave (BAW) device including a first impedance and a second BAW device including a second impedance, wherein the first and second impedances are different and the first and second BAW devices are acoustically coupled.
摘要翻译：一种装置包括包括第一阻抗的第一体声波（BAW）装置和包括第二阻抗的第二BAW装置，其中第一和第二阻抗不同，并且第一和第二BAW装置是声学耦合的。

5. 发明授权

US08330325B1 Bulk acoustic resonator comprising non-piezoelectric layer 有权
标题翻译：包含非压电层的体声波谐振器
公开(公告)号：US08330325B1
公开(公告)日：2012-12-11
申请号：US13161946
申请日：2011-06-16
申请人： Dariusz Burak , Jyrki Kaitila , Alexandre Shirakawa , Martin Handtmann , Phil Nikkel
发明人： Dariusz Burak , Jyrki Kaitila , Alexandre Shirakawa , Martin Handtmann , Phil Nikkel
IPC分类号： H03H9/15 , H03H9/125
CPC分类号： H03H9/173 , H03H9/585
摘要： In a representative embodiment, a bulk acoustic wave (BAW) resonator structure comprises: a first electrode disposed over a substrate; a first piezoelectric layer disposed over the first electrode; a second electrode disposed over the first piezoelectric layer, wherein c-axis orientations of crystals of the first piezoelectric layer are substantially aligned with one another; a second piezoelectric layer disposed over the second electrode; a non-piezoelectric layer; and a third electrode disposed over the second piezoelectric layer.
摘要翻译：在代表性的实施例中，体声波（BAW）谐振器结构包括：设置在基板上的第一电极; 设置在所述第一电极上的第一压电层; 设置在所述第一压电层上的第二电极，其中所述第一压电层的晶体的c轴取向基本上彼此对准; 设置在所述第二电极上的第二压电层; 非压电层; 以及设置在第二压电层上的第三电极。

6. 发明授权

US07786825B2 Bulk acoustic wave device with coupled resonators 有权
标题翻译：具有耦合谐振器的体声波器件
公开(公告)号：US07786825B2
公开(公告)日：2010-08-31
申请号：US11756521
申请日：2007-05-31
申请人： Martin Handtmann , Jyrki Kaitila
发明人： Martin Handtmann , Jyrki Kaitila
IPC分类号： H03H9/58
CPC分类号： H03H9/605 , H03H9/0095 , H03H9/584 , H03H9/589 , H03H9/60
摘要： A bulk acoustic wave device includes first and second resonators, which are acoustically coupled and electrically connected in parallel.
摘要翻译：体声波器件包括第一和第二谐振器，它们是声学耦合的并且并联电连接。

7. 发明授权

US08018303B2 Bulk acoustic wave device 有权
标题翻译：体声波装置
公开(公告)号：US08018303B2
公开(公告)日：2011-09-13
申请号：US11871711
申请日：2007-10-12
申请人： Martin Handtmann , Jyrki Kaitila , Robert Thalhammer , Bernhard Gebauer
发明人： Martin Handtmann , Jyrki Kaitila , Robert Thalhammer , Bernhard Gebauer
IPC分类号： H03H9/54
CPC分类号： H03H9/585 , H03H9/0095 , H03H9/583 , H03H9/584 , H03H9/589 , H03H9/60
摘要： An apparatus includes a stacked crystal filter and a bulk acoustic wave resonator, which are acoustically coupled.
摘要翻译：一种装置包括声耦合的堆叠晶体滤波器和体声波谐振器。

8. 发明授权

US07825749B2 Integrated coupled resonator filter and bulk acoustic wave devices 有权
标题翻译：集成耦合谐振滤波器和体声波器件
公开(公告)号：US07825749B2
公开(公告)日：2010-11-02
申请号：US11756583
申请日：2007-05-31
申请人： Robert Thalhammer , Martin Handtmann , Jyrki Kaitila
发明人： Robert Thalhammer , Martin Handtmann , Jyrki Kaitila
IPC分类号： H03H9/60 , H01L41/22
CPC分类号： H03H9/0095 , H03H3/04 , H03H9/564 , H03H9/584 , H03H9/589 , H03H9/605 , H03H2003/0471 , Y10T29/42
摘要： A method for manufacturing a filter device is provided. The filter device comprises a coupled resonator at a first site, a shunt resonator at a second site and a series resonator at a third site, the coupled resonator comprising a first and a second resonator. The method comprising a step of providing a substrate with a piezoelectric layer sandwiched between a first electrode and a first part of a second electrode at the first site and the second site, the piezoelectric layer sandwiched between the first electrode and a second part of the second electrode at the third site. The method further comprising the step of forming a coupling layer on the second electrode, the step of forming a further piezoelectric layer sandwiched between a further first electrode and a further second electrode at the third site and the step of removing the coupling layer at the second and third sites.
摘要翻译：提供一种制造过滤装置的方法。滤波器装置包括在第一位置处的耦合谐振器，在第二位置处的并联谐振器和在第三位置的串联谐振器，所述耦合谐振器包括第一和第二谐振器。该方法包括以下步骤：在第一位置和第二位置处提供夹在第一电极和第二电极的第一部分之间的压电层的衬底，压电层夹在第一电极和第二电极的第二部分之间电极在第三个位置。该方法还包括在第二电极上形成耦合层的步骤，在第三位置处形成夹在另外的第一电极和另外的第二电极之间的另外的压电层的步骤以及在第二位置处去除耦合层的步骤和第三个网站。

9. 发明申请

US20090096550A1 Bulk acoustic wave device 有权
标题翻译：体声波装置
公开(公告)号：US20090096550A1
公开(公告)日：2009-04-16
申请号：US11871711
申请日：2007-10-12
申请人： Martin Handtmann , Jyrki Kaitila , Robert Thalhammer , Bernhard Gebauer
发明人： Martin Handtmann , Jyrki Kaitila , Robert Thalhammer , Bernhard Gebauer
IPC分类号： H03H9/58
CPC分类号： H03H9/585 , H03H9/0095 , H03H9/583 , H03H9/584 , H03H9/589 , H03H9/60
摘要： An apparatus includes a stacked crystal filter and a bulk acoustic wave resonator, which are acoustically coupled.
摘要翻译：一种装置包括声耦合的堆叠晶体滤波器和体声波谐振器。

10. 发明申请

US20080297280A1 Integrated Coupled Resonator Filter and Bulk Acoustic Wave Devices 有权
标题翻译：集成耦合谐振滤波器和体声波器件
公开(公告)号：US20080297280A1
公开(公告)日：2008-12-04
申请号：US11756583
申请日：2007-05-31
申请人： Robert Thalhammer , Martin Handtmann , Jyrki Kaitila
发明人： Robert Thalhammer , Martin Handtmann , Jyrki Kaitila
IPC分类号： H03H9/60 , H01L41/22
CPC分类号： H03H9/0095 , H03H3/04 , H03H9/564 , H03H9/584 , H03H9/589 , H03H9/605 , H03H2003/0471 , Y10T29/42
摘要： A method for manufacturing a filter device is provided. The filter device comprises a coupled resonator at a first site, a shunt resonator at a second site and a series resonator at a third site, the coupled resonator comprising a first and a second resonator. The method comprising a step of providing a substrate with a piezoelectric layer sandwiched between a first electrode and a first part of a second electrode at the first site and the second site, the piezoelectric layer sandwiched between the first electrode and a second part of the second electrode at the third site. The method further comprising the step of forming a coupling layer on the second electrode, the step of forming a further piezoelectric layer sandwiched between a further first electrode and a further second electrode at the third site and the step of removing the coupling layer at the second and third sites.
摘要翻译：提供一种制造过滤装置的方法。滤波器装置包括在第一位置处的耦合谐振器，在第二位置处的并联谐振器和在第三位置的串联谐振器，所述耦合谐振器包括第一和第二谐振器。该方法包括以下步骤：在第一位置和第二位置处提供夹在第一电极和第二电极的第一部分之间的压电层的基板，压电层夹在第一电极和第二电极的第二部分之间电极在第三个位置。该方法还包括在第二电极上形成耦合层的步骤，在第三位置处形成夹在另外的第一电极和另外的第二电极之间的另外的压电层的步骤以及在第二位置处去除耦合层的步骤和第三个网站。

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