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    • 9. 发明授权
    • Collimator and spectrophotometer
    • 准直仪和分光光度计
    • US07114232B2
    • 2006-10-03
    • US11114875
    • 2005-04-26
    • Takeo YamadaTomoyuki Kobayashi
    • Takeo YamadaTomoyuki Kobayashi
    • G02B27/30B23P17/00B21D39/03B23K20/00
    • G01J3/12G01J3/02G01J3/0208G02B5/00G02B27/30Y10T29/49789Y10T29/49826
    • A collimator obtained by the alternate stacking of metal sheets 1 (40 μm thick) having holes 4 with a width of 2200 μm in the center thereof, and metal sheets 2 (10 μm thick) devoid of holes (the metal sheets 1 with the holes 4 are shown in the state in which they exist before being cut in the manner described below, the metal sheets 1 in the upper portion of the figure and the metal sheets in the bottom portion are not connected with each other in the finished product). The opposite sides are held by metal pressing sheets 3 that are 2 mm thick. These metal sheets and pressing sheets are bonded by means of diffusion bonding based on thermocompression bonding. The portions with the vertical through-holes 4 (40 μm×2000 μm) thus become light-transmitting portions, the metal sheets 2 serve as partitions between adjacent holes 4, and light collimated to a width of 40 μm can ultimately pass through. A compact collimator having high wavelength resolution without wavelength dependence can thus be achieved.
    • 金属片1(厚度为40μm)的中心具有宽度为2200μm的金属片1(厚度为40μm)的金属片2(具有孔的金属片1) 在图4所示的切割前,图中上部的金属片1和底部的金属片在成品中不相互连接)示出了图4的状态。 相对的两侧由2mm厚的金属加压片3保持。 这些金属片和加压片通过基于热压接的扩散接合而结合。 垂直通孔4(40mumx2000mum)的部分因此变为透光部分,金属片2用作相邻孔4之间的隔板,并且准直到40μm的宽度的光可以最终通过。 因此可以实现具有高波长分辨率而不具有波长依赖性的紧凑型准直器。
    • 10. 发明授权
    • Wafer holding hand
    • 晶圆握手
    • US06216883B1
    • 2001-04-17
    • US09462308
    • 2000-01-06
    • Tomoyuki KobayashiJunji Takehara
    • Tomoyuki KobayashiJunji Takehara
    • H47F500
    • H01L21/68707Y10S414/141
    • A wafer holding hand of the present invention is constituted so that two fixed clamps (2) and one movable clamp (6) are provided on a finger (1). The movable clamp (6) is supported by a plate spring (8) via a clamp holder (7), and the plate spring (8) is fixed to the slider (9). The slider (9) is driven by an air cylinder (10). The fixed clamp (2) is hook shaped, and the movable clamp (6) is drum shaped. A wafer W is held at three points by the movable clamp (6) and the two fixed clamps (2), and a force is applied to the movable clamp (6) by the plate spring (8) so as to hold the wafer W.
    • 本发明的晶片保持手构成为在手指(1)上设置两个固定夹(2)和一个可移动夹(6)。 可动夹具(6)通过夹持器(7)由板簧(8)支撑,板簧(8)固定在滑块(9)上。 滑块(9)由气缸(10)驱动。 固定夹具(2)是钩形的,可动夹具(6)是鼓形的。 通过可动夹具(6)和两个固定夹具(2)将晶片W保持在三个点处,并且通过板簧(8)将力施加到可动夹具(6),以便将晶​​片W 。