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    • 4. 发明授权
    • Lateral collection architecture for SLS detectors
    • SLS检测器的横向收集架构
    • US08178863B2
    • 2012-05-15
    • US12476226
    • 2009-06-01
    • William E. TennantGerard J. SullivanMark Field
    • William E. TennantGerard J. SullivanMark Field
    • H01L29/06
    • H01L31/035236B82Y20/00H01L27/1446H01L31/03529H01L31/101Y02E10/50
    • Lateral collection architecture for a photodetector is achieved by depositing electrically conducting SLS layers onto a planar substrate and diffusing dopants of a carrier type opposite that of the layers through the layers at selected regions to disorder the superlattice and create diode junctions oriented transversely to the naturally enhanced lateral mobility of photogenerated charge carriers within the superlattice. The diode junctions are terminated at a top surface of the photodetector within an SLS layer of wide bandgap material to minimize unwanted currents. A related architecture disorders the superlattice of topmost SLS layers by diffusing therethrough a dopant configured as a grid and penetrating to a lower SLS layer having the same carrier type as the dopant and opposite that of the topmost layers to isolate pixels within the topmost layers. Ohmic contacts may be deposited on doped regions, pixels, and substrate to provide desired external connections.
    • 光电探测器的横向收集结构是通过将平面衬底上的导电SLS层沉积在平坦衬底上并且将选定区域中的层的相反层的载流子类型的掺杂物扩散到超选择区域,从而扰乱超晶格并产生横向于自然增强的二极管结 在超晶格内的光生电荷载流子的横向迁移率。 二极管结终止在宽带隙材料的SLS层内的光电检测器的顶表面处,以最小化不需要的电流。 相关的结构通过扩散配置成栅格的掺杂剂并穿透到具有与掺杂剂相同的载流子类型并与顶层相反的下部SLS层,使顶层SLS层的超晶格失真,从而隔离最顶层中的像素。 欧姆接触可以沉积在掺杂区域,像素和衬底上以提供期望的外部连接。
    • 5. 发明申请
    • LATERAL COLLECTION ARCHITECTURE FOR SLS DETECTORS
    • SLS检测器的横向收集架构
    • US20110294252A1
    • 2011-12-01
    • US13205403
    • 2011-08-08
    • William E. TennantGerard J. SullivanMark Field
    • William E. TennantGerard J. SullivanMark Field
    • H01L31/18
    • H01L31/035236B82Y20/00H01L27/1446H01L31/03529H01L31/101Y02E10/50
    • Lateral collection architecture for a photodetector is achieved by depositing electrically conducting SLS layers onto a planar substrate and diffusing dopants of a carrier type opposite that of the layers through the layers at selected regions to disorder the superlattice and create diode junctions oriented transversely to the naturally enhanced lateral mobility of photogenerated charge carriers within the superlattice. The diode junctions are terminated at a top surface of the photodetector within an SLS layer of wide bandgap material to minimize unwanted currents. A related architecture disorders the superlattice of topmost SLS layers by diffusing therethrough a dopant configured as a grid and penetrating to a lower SLS layer having the same carrier type as the dopant and opposite that of the topmost layers to isolate pixels within the topmost layers. Ohmic contacts may be deposited on doped regions, pixels, and substrate to provide desired external connections.
    • 光电探测器的横向收集结构是通过将平面衬底上的导电SLS层沉积在平坦衬底上并且将选定区域中的层的相反层的载流子类型的掺杂物扩散到超选择区域,从而扰乱超晶格并产生横向于自然增强的二极管结 在超晶格内的光生电荷载流子的横向迁移率。 二极管结终止在宽带隙材料的SLS层内的光电检测器的顶表面处,以最小化不需要的电流。 相关的结构通过扩散配置成栅格的掺杂剂并穿透到具有与掺杂剂相同的载流子类型并与顶层相反的下部SLS层,使顶层SLS层的超晶格失真,从而隔离最顶层中的像素。 欧姆接触可以沉积在掺杂区域,像素和衬底上以提供期望的外部连接。
    • 7. 发明申请
    • LATERAL COLLECTION ARCHITECTURE FOR SLS DETECTORS
    • SLS检测器的横向收集架构
    • US20100301309A1
    • 2010-12-02
    • US12476226
    • 2009-06-01
    • William E. TennantGerard J. SullivanMark Field
    • William E. TennantGerard J. SullivanMark Field
    • H01L31/0352H01L21/3205
    • H01L31/035236B82Y20/00H01L27/1446H01L31/03529H01L31/101Y02E10/50
    • Lateral collection architecture for a photodetector is achieved by depositing electrically conducting SLS layers onto a planar substrate and diffusing dopants of a carrier type opposite that of the layers through the layers at selected regions to disorder the superlattice and create diode junctions oriented transversely to the naturally enhanced lateral mobility of photogenerated charge carriers within the superlattice. The diode junctions are terminated at a top surface of the photodetector within an SLS layer of wide bandgap material to minimize unwanted currents. A related architecture disorders the superlattice of topmost SLS layers by diffusing therethrough a dopant configured as a grid and penetrating to a lower SLS layer having the same carrier type as the dopant and opposite that of the topmost layers to isolate pixels within the topmost layers. Ohmic contacts may be deposited on doped regions, pixels, and substrate to provide desired external connections.
    • 光电探测器的横向收集结构是通过将平面衬底上的导电SLS层沉积在平坦衬底上并且将选定区域中的层的相反层的载流子类型的掺杂物扩散到超选择区域,从而扰乱超晶格并产生横向于自然增强的二极管结 在超晶格内的光生电荷载流子的横向迁移率。 二极管结终止在宽带隙材料的SLS层内的光电检测器的顶表面处,以最小化不需要的电流。 相关的结构通过扩散配置成栅格的掺杂剂并穿透到具有与掺杂剂相同的载流子类型并与顶层相反的下部SLS层,使顶层SLS层的超晶格失真,从而隔离最顶层中的像素。 欧姆接触可以沉积在掺杂区域,像素和衬底上以提供期望的外部连接。
    • 8. 发明授权
    • Lateral collection architecture for SLS detectors
    • SLS检测器的横向收集架构
    • US08697554B2
    • 2014-04-15
    • US13205403
    • 2011-08-08
    • William E. TennantGerard J. SullivanMark Field
    • William E. TennantGerard J. SullivanMark Field
    • H01L21/425
    • H01L31/035236B82Y20/00H01L27/1446H01L31/03529H01L31/101Y02E10/50
    • Lateral collection architecture for a photodetector is achieved by depositing electrically conducting SLS layers onto a planar substrate and diffusing dopants of a carrier type opposite that of the layers through the layers at selected regions to disorder the superlattice and create diode junctions oriented transversely to the naturally enhanced lateral mobility of photogenerated charge carriers within the superlattice. The diode junctions are terminated at a top surface of the photodetector within an SLS layer of wide bandgap material to minimize unwanted currents. A related architecture disorders the superlattice of topmost SLS layers by diffusing therethrough a dopant configured as a grid and penetrating to a lower SLS layer having the same carrier type as the dopant and opposite that of the topmost layers to isolate pixels within the topmost layers. Ohmic contacts may be deposited on doped regions, pixels, and substrate to provide desired external connections.
    • 光电探测器的横向收集结构是通过将平面衬底上的导电SLS层沉积在平坦衬底上并且将选定区域中的层的相反层的载流子类型的掺杂物扩散到超选择区域,从而扰乱超晶格并产生横向于自然增强的二极管结 在超晶格内的光生电荷载流子的横向迁移率。 二极管结终止在宽带隙材料的SLS层内的光电检测器的顶表面处,以最小化不需要的电流。 相关的结构通过扩散配置成栅格的掺杂剂并穿透到具有与掺杂剂相同的载流子类型并与顶层相反的下部SLS层,使顶层SLS层的超晶格失真,从而隔离最顶层中的像素。 欧姆接触可以沉积在掺杂区域,像素和衬底上以提供期望的外部连接。