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    • 10. 发明授权
    • Silicon-based high speed optical wiring board
    • 硅基高速光布线板
    • US06862378B2
    • 2005-03-01
    • US10279408
    • 2002-10-24
    • Mark KarnacewiczJohn William OsenbachAlexandru Paunescu
    • Mark KarnacewiczJohn William OsenbachAlexandru Paunescu
    • G02B6/42G02B6/26
    • G02B6/4204G02B6/4201
    • An optical wire board which utilizes a silicon substrate as the base for both the optical subassembly and the electrical RF transmitting circuit. An optical fiber is preferably passively aligned to the active optical device mounted on the optical subassembly using a V-groove etched into the silicon (and may include a lens or other optical element positioned between the fiber and the active device). An integrated circuit for coupling the active optical device to external contacts is preferably flip-chip mounted to the silicon substrate upon pads disposed on precisely defined edges around a cavity etched beneath the circuit, the inclusion of the cavity beneath the electrical circuit functioning to minimize the dielectric loading effect of the silicon substrate on the integrated circuit.
    • 一种利用硅衬底作为光学子组件和RF射频发射电路的基底的光线板。 光纤优选被动地与安装在光学子组件上的有源光学器件对准,使用蚀刻到硅中的V沟槽(并且可以包括位于光纤和有源器件之间的透镜或其它光学元件)。 用于将有源光学器件耦合到外部触点的集成电路优选地被倒装芯片安装到硅衬底上,所述焊盘设置在蚀刻在电路下面的空腔周围的精确限定的边缘上,包括在电路下面的空腔, 硅衬底对集成电路的介电负载效应。