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1. 发明授权

US08187902B2 High performance sensors and methods for forming the same 有权
标题翻译：高性能传感器及其形成方法
公开(公告)号：US08187902B2
公开(公告)日：2012-05-29
申请号：US12170190
申请日：2008-07-09
申请人： Marc S. Weinberg , Mirela G. Bancu , James A. Bickford , Jonathan J. Bernstein , Richard Elliott
发明人： Marc S. Weinberg , Mirela G. Bancu , James A. Bickford , Jonathan J. Bernstein , Richard Elliott
IPC分类号： H01L21/00 , G01P15/125 , G01C19/56
CPC分类号： G01C19/574 , G01C19/5719 , Y10T156/1039 , Y10T428/2495
摘要： A sensor includes a proof mass suspended by a suspension beam, the suspension beam having a thickness less than a thickness of the proof mass.
摘要翻译：传感器包括由悬挂梁悬挂的检验质量块，悬挂梁的厚度小于检验质量块的厚度。

2. 发明申请

US20100005884A1 High Performance Sensors and Methods for Forming the Same 有权
标题翻译：高性能传感器及其形成方法
公开(公告)号：US20100005884A1
公开(公告)日：2010-01-14
申请号：US12170190
申请日：2008-07-09
申请人： Marc S. Weinberg , Mirela G. Bancu , James A. Bickford , Jonathan J. Bernstein , Richard Elliott
发明人： Marc S. Weinberg , Mirela G. Bancu , James A. Bickford , Jonathan J. Bernstein , Richard Elliott
IPC分类号： G01P3/46 , B32B7/02 , B44C3/08
CPC分类号： G01C19/574 , G01C19/5719 , Y10T156/1039 , Y10T428/2495
摘要： A sensor includes a proof mass suspended by a suspension beam, the suspension beam having a thickness less than a thickness of the proof mass.
摘要翻译：传感器包括由悬挂梁悬挂的检验质量块，悬挂梁的厚度小于检验质量块的厚度。

3. 发明授权

US5767405A Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout 失效
标题翻译：具有压电读数的梳齿驱动微机械音叉陀螺仪
公开(公告)号：US5767405A
公开(公告)日：1998-06-16
申请号：US584377
申请日：1996-01-11
申请人： Jonathan J. Bernstein , Marc S. Weinberg
发明人： Jonathan J. Bernstein , Marc S. Weinberg
IPC分类号： G01C19/5719 , H03H9/02 , G01P9/04
CPC分类号： G01C19/5719 , H03H9/02259 , H03H2009/02496 , H03H2009/02511
摘要： A microfabricated, tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive and driven finger electrodes associated with each of two vibrating elements. The vibrating elements are supported in a rotatable assembly between first and second support electrodes which are in turn suspended by flexures for rotation about an axis passing through the flexures and through a point midway between the vibrating elements. Additional masses are formed onto the vibrating elements to improve overall sensor sensitivity. Sense electrodes for detecting capacitive changes between the support beams and the substrate are positioned on the substrate beneath each end of the support beams. In an alternative embodiment, piezoelectric sense capacitors are disposed on the flexures for detecting rotation of the support electrodes. Drive electronics are connected between the driven fingers of the vibrating elements and the drive electrode fingers which mesh with them to cause vibration. Excitation is provided between the support electrodes and the sense electrodes. Any change in signal resulting from rotation of the assembly and the resulting variation in capacitance between the support electrodes and the sense electrodes or within the piezoelectric capacitors is sensed as a measure of inertial rate. A torque loop may be additionally formed using the sense electrodes in order to re-torque the assembly to a neutral position in a torque-to-balance loop.
摘要翻译：一种微型的音叉速率敏感结构和驱动电子设备，其中振动力通过与两个振动元件中的每一个相关联的一组啮合驱动和被驱动的手指电极而传递。振动元件被支撑在第一和第二支撑电极之间的可旋转组件中，第一和第二支撑电极又通过弯曲部悬挂，以便绕穿过弯曲部的轴线并通过振动元件之间的中心点旋转。附加的质量形成在振动元件上以提高传感器的灵敏度。用于检测支撑梁和基板之间的电容变化的感测电极定位在支撑梁的每个端部下方的基板上。在替代实施例中，压电感测电容器设置在挠曲件上以检测支撑电极的旋转。驱动电子设备连接在振动元件的被驱动的指状物和与其啮合的驱动电极指状物以引起振动。在支撑电极和感测电极之间提供激励。由组件的旋转引起的信号的任何变化以及所产生的支撑电极和感测电极之间或压电电容器内的电容变化被感测为惯性速率的量度。可以使用感测电极另外形成扭矩环，以便在扭矩平衡回路中将组件重新扭转到中立位置。

4. 发明授权

US5349855A Comb drive micromechanical tuning fork gyro 失效
标题翻译：梳齿驱动微机械音叉陀螺仪
公开(公告)号：US5349855A
公开(公告)日：1994-09-27
申请号：US870414
申请日：1992-04-07
申请人： Jonathan J. Bernstein , Marc S. Weinberg
发明人： Jonathan J. Bernstein , Marc S. Weinberg
IPC分类号： G01C19/5719 , G01P15/08 , H03H9/02 , G01P9/04
CPC分类号： G01C19/5719 , G01P15/0802 , G01R33/0286 , H03H9/02259 , G01P2015/0814 , H03H2009/02354 , H03H2009/02496
摘要： A microfabricated tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive and driven finger electrodes associated with each of two vibrating elements. The vibrating elements are supported in a rotatable assembly between first and second support electrodes which are in turn suspended by flexures for rotation about an axis passing through the flexures and through a point midway between the vibrating elements. Additional masses are formed onto the vibrating elements to improve overall sensor sensitivity. Sense electrodes for detecting capacitive changes between the support electrodes and the sense electrodes are positioned at each end of the support electrodes. Drive electronics are connected between the driven fingers of the vibrating elements and the drive electrode fingers which mesh with them to cause vibration. Excitation is provided between the support electrodes and the sense electrodes. Any change in signal resulting from rotation of the assembly and the resulting variation in capacitance between the support electrodes and the sense electrodes is sensed as a measure of inertial rate. A torque loop may be additionally formed using the sense electrodes in order to re-torque the assembly to a neutral position in a torque-to-balance loop.
摘要翻译：微调音叉速率敏感结构和驱动电子设备，其中振动力通过与两个振动元件中的每一个相关联的一组啮合驱动和被驱动的手指电极而传递。振动元件被支撑在第一和第二支撑电极之间的可旋转组件中，第一和第二支撑电极又通过弯曲部悬挂，以便绕穿过弯曲部的轴线并通过振动元件之间的中心点旋转。附加的质量形成在振动元件上以提高传感器的灵敏度。用于检测支撑电极和感测电极之间的电容变化的感测电极位于支撑电极的每个端部。驱动电子设备连接在振动元件的被驱动的指状物和与其啮合的驱动电极指状物以引起振动。在支撑电极和感测电极之间提供激励。由组件的旋转引起的信号的任何改变以及所产生的支撑电极和感测电极之间的电容变化被感测为惯性速率的量度。可以使用感测电极另外形成扭矩环，以便在扭矩平衡回路中将组件重新扭转到中立位置。

5. 发明授权

US06257059B1 Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation 有权
标题翻译：微型音叉陀螺仪和相关的三轴惯性测量系统可以感测到平面外的旋转
公开(公告)号：US06257059B1
公开(公告)日：2001-07-10
申请号：US09405721
申请日：1999-09-24
申请人： Marc S. Weinberg , Jonathan J. Bernstein , Gregory A. Kirkos , Tommy W. Lee , Anthony Petrovich
发明人： Marc S. Weinberg , Jonathan J. Bernstein , Gregory A. Kirkos , Tommy W. Lee , Anthony Petrovich
IPC分类号： G01C1900
CPC分类号： G01C19/5719
摘要： A micromechanical tuning fork gyroscope has an input axis out of the plane of the structure. In one embodiment, capacitor plates are provided in parallel strips beneath two apertured, planar proof masses suspended from a substrate by a support structure. The proof masses are paired and set in opposed vibrational motion by an electrostatic comb drive. In response to an input angular rate about the out-of-plane input axis, the proof masses translate with respect to the striped capacitors, thereby varying the capacitance between the capacitor strips and the proof masses as a function of the input rate. In another embodiment, proof mass combs of a comb drive are meshed between fixed drive combs which are electrically excited in pairs 180° out of phase. As the proof masses translate in response to an angular input, the distance between the proof mass combs and the fixed combs varies, thereby varying the capacitance between the combs resulting in an unbalanced voltage on the proof masses that is detected as an indication of input rate. The out-of-plane tuning fork gyroscope can be combined with two in-plane tuning fork gyroscopes to provide a complete three-axis inertial measurement unit from a single wafer or on a single chip.
摘要翻译：微机械音叉陀螺仪具有离开结构平面的输入轴。在一个实施例中，电容器板以平行的条带设置在由支撑结构从衬底悬挂的两个有孔的平坦的防护块下方。证明质量通过静电梳驱动器配对并设置在相反的振动运动中。响应于关于平面外输入轴的输入角速率，证明质量相对于条纹电容器平移，从而根据输入速率改变电容器条和证明质量块之间的电容。在另一个实施例中，梳状驱动器的校准质量梳被啮合在固定的驱动梳之间，它们被成对180度异相电激励。当证明质量响应于角度输入时，证明质量梳与固定梳之间的距离发生变化，从而改变梳子之间的电容，导致作为输入速率的指示被检测到的校验质量块上的不平衡电压。外置音叉陀螺仪可以与两个平面内的音叉陀螺仪相结合，从单个晶片或单个芯片提供完整的三轴惯性测量单元。

6. 发明授权

US5731703A Micromechanical d'arsonval magnetometer 失效
标题翻译：微机械直流磁力计
公开(公告)号：US5731703A
公开(公告)日：1998-03-24
申请号：US550923
申请日：1995-10-31
申请人： Jonathan J. Bernstein , Marc S. Weinberg
发明人： Jonathan J. Bernstein , Marc S. Weinberg
IPC分类号： G01R33/02 , G01R33/00
CPC分类号： G01R33/02
摘要： A micromechanical D'Arsonval magnetometer for sensing magnetic fields at low frequency with high sensitivity for operation near the resonant frequency of a micromechanical structure comprising a movable proof mass supported by torsion flexures, a conductive winding formed on the movable proof mass, at least one bridge electrode spanning the movable proof mass, a source for electrically biasing the movable proof mass relative to the bridge electrode(s), and a drive for electrically driving the conductive winding. Magnetic fields in the plane of the proof mass perpendicular to an axis of rotation formed by the torsion flexures interact with current passing through the conductive winding so as to torque the proof mass about the axis of rotation, whereby the resulting rotation is sensed through capacitors formed between the proof mass and the bridge electrode(s). The present invention micromechanical D'Arsonval magnetometer can be operated either open or closed loop. An open loop embodiment allows the proof mass to twist solely under the influence of the magnetic fields, while a closed loop embodiment restrains the proof mass motion. The loop can be closed by constructing additional electrodes or by using the existing bridge electrode(s) for both sensing and rebalancing.
摘要翻译：一种微机械D'Arsonval磁强计，用于感测低频的磁场，具有高灵敏度，用于在微机械结构的谐振频率附近操作，包括由扭转挠曲支撑的可移动的检测质量，形成在可移动检验质量块上的导电绕组，至少一个桥电极跨越可移动检测质量块，用于相对于桥接电极电动偏置可移动检验质量块的源和用于电驱动导电绕组的驱动器。垂直于由扭转弯曲形成的旋转轴的检测质量平面中的磁场与通过导电绕组的电流相互作用，以便绕着旋转轴线扭转检验质量块，从而通过形成的电容感测所得的旋转在检测质量块和桥接电极之间。本发明的微机械D'Arsonval磁力计可以在开环或闭环操作。开环实施例允许检测质量单独在磁场的影响下扭转，而闭环实施例限制了证明质量运动。可以通过构造附加电极或通过使用现有的桥接电极来进行感测和重新平衡来闭合环路。

7. 发明授权

US5496436A Comb drive micromechanical tuning fork gyro fabrication method 失效
标题翻译：梳齿驱动微机械陀螺陀螺制造方法
公开(公告)号：US5496436A
公开(公告)日：1996-03-05
申请号：US259989
申请日：1994-06-15
申请人： Jonathan J. Bernstein , Marc S. Weinberg
发明人： Jonathan J. Bernstein , Marc S. Weinberg
IPC分类号： G01C19/5719 , G01P15/08 , H03H9/02 , H01L21/3065 , H01L21/00
CPC分类号： G01C19/5719 , G01P15/0802 , G01R33/0286 , H03H9/02259 , G01P2015/0814 , H03H2009/02354 , H03H2009/02496
摘要： A microfabricated, tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive and driven finger electrodes associated with each of two vibrating elements. The vibrating elements are supported in a rotatable assembly between first and second support electrodes which are in turn suspended by flexures for rotation about an axis passing through the flexures and through a point midway between the vibrating elements. Additional masses are formed onto the vibrating elements to improve overall sensor sensitivity. Sense electrodes for detecting capacitive changes between the support electrodes and the sense electrodes are positioned at each end of the support electrodes. Drive electronics are connected between the driven fingers of the vibrating elements and the drive electrode fingers which mesh with them to cause vibration. Excitation is provided between the support electrodes and the sense electrodes. Any change in signal resulting from rotation of the assembly and the resulting variation in capacitance between the support electrodes and the sense electrodes is sensed as a measure of inertial rate. A torque loop may be additionally formed using the sense electrodes in order to re-torque the assembly to a neutral position in a torque-to-balance loop.
摘要翻译：一种微型的音叉速率敏感结构和驱动电子设备，其中振动力通过与两个振动元件中的每一个相关联的一组啮合驱动和被驱动的手指电极而传递。振动元件被支撑在第一和第二支撑电极之间的可旋转组件中，第一和第二支撑电极又通过弯曲部悬挂，以便绕穿过弯曲部的轴线并通过振动元件之间的中心点旋转。附加的质量形成在振动元件上以提高传感器的灵敏度。用于检测支撑电极和感测电极之间的电容变化的感测电极位于支撑电极的每个端部。驱动电子设备连接在振动元件的被驱动的指状物和与其啮合的驱动电极指状物以引起振动。在支撑电极和感测电极之间提供激励。由组件的旋转引起的信号的任何改变以及所产生的支撑电极和感测电极之间的电容变化被感测为惯性速率的量度。可以使用感测电极另外形成扭矩环，以便在扭矩平衡回路中将组件重新扭转到中立位置。

8. 发明授权

US08586871B2 Interconnect schemes, and materials and methods for producing the same 有权
标题翻译：互连方案，以及用于生产它的材料和方法
公开(公告)号：US08586871B2
公开(公告)日：2013-11-19
申请号：US13185866
申请日：2011-07-19
申请人： Jonathan J. Bernstein , Brian R. Smith , Thomas E. Boydston
发明人： Jonathan J. Bernstein , Brian R. Smith , Thomas E. Boydston
IPC分类号： H05K1/09
CPC分类号： H05K1/0275 , H05K3/125 , H05K2201/0224 , H05K2201/09881 , H05K2203/013
摘要： An interconnect scheme includes a conductive ink forming a plurality of conductive regions, and a dielectric ink occupying spaces between the conductive regions. The conductive ink and the dielectric ink have substantially identical optical, acoustic, and x-ray absorption properties, thereby making the interconnect scheme tamper-resistant and/or difficult to identify and reverse-engineer using conventional detection methods.
摘要翻译：互连方案包括形成多个导电区域的导电油墨和占据导电区域之间的空间的电介质油墨。导电油墨和电介质油墨具有基本上相同的光学，声学和x射线吸收特性，从而使得互连方案具有防篡改和/或难以使用常规检测方法进行识别和反向工程。

9. 发明申请

US20110150667A1 MEMS ELECTROSTATIC FLUIDIC PUMPS AND VALVES 有权
标题翻译： MEMS静电流体泵和阀
公开(公告)号：US20110150667A1
公开(公告)日：2011-06-23
申请号：US12971654
申请日：2010-12-17
申请人： Jonathan J. Bernstein
发明人： Jonathan J. Bernstein
IPC分类号： H02K44/00 , F04B49/06
CPC分类号： F04B19/006 , B01L3/5027 , F04B9/10 , F16K99/0001 , F16K99/0017 , F16K99/0051 , F16K2099/0094
摘要： In various embodiments, a pump is provided that includes a microfluidic channel and a plurality of electrodes for electrostatically translating a target fluid along the channel from an inlet to an outlet. In other embodiments, a valve includes a microfluidic channel, a reservoir in fluidic communication with the channel, and an electrode for electrostatically drawing a fluid from the reservoir into the channel so as to block the flow of other fluids through the channel.
摘要翻译：在各种实施例中，提供了一种泵，其包括微流体通道和多个电极，用于将目标流体沿着通道从入口静电地平移到出口。在其他实施例中，阀包括微流体通道，与通道流体连通的储存器，以及用于将流体从储存器静电拉入通道的电极，以阻止其它流体通过通道的流动。

10. 发明授权

US06639339B1 Capacitive ultrasound transducer 有权
标题翻译：电容式超声换能器
公开(公告)号：US06639339B1
公开(公告)日：2003-10-28
申请号：US09569080
申请日：2000-05-11
申请人： Jonathan J. Bernstein
发明人： Jonathan J. Bernstein
IPC分类号： H04R1700
CPC分类号： B06B1/0292
摘要： A capacitive ultrasound transducer including a dielectric diaphragm with an electrode; a porous layer; and a spacer structure between the diaphragm and porous layer for defining a capacitive gap between them; the pores of the porous layer providing a compliant reservoir for the fluid in the gap.
摘要翻译：一种电容式超声换能器，包括具有电极的电介质膜片; 多孔层; 以及隔膜和多孔层之间的间隔结构，用于限定它们之间的电容间隙; 多孔层的孔为间隙中的流体提供顺应的储存器。

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