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    • 3. 发明授权
    • Interposer for mounting semiconductor dice on substrates
    • 用于将半导体裸片安装在基板上的插入器
    • US06303992B1
    • 2001-10-16
    • US09347542
    • 1999-07-06
    • Cuong Van PhamFrank Burke DiPiazzaJay DeAvis BakerMarc Alan StraubVivek Amir Jairazbhoy
    • Cuong Van PhamFrank Burke DiPiazzaJay DeAvis BakerMarc Alan StraubVivek Amir Jairazbhoy
    • H01L2348
    • H01L23/473H01L2224/16225
    • An interposer 10 for electrically coupling a semiconductor die 50 to a substrate 70, comprising: an interposer body 12 made of a dielectric material and having a contact surface 14 and an opposed bonding surface 16; a plurality of contact pads 18 arranged about the periphery of the contact surface 14; a plurality of bonding pads 20 arranged across generally the entire area of the bonding surface 16; and a plurality of electrically conductive conduits 22 disposed generally within the interposer body, such that each conduit 22 connects a respective one of the contact pads 18 with a respective one of the bonding pads 20. The interposer 10 may also include: a sealed cooling channel 28 defined within the interposer body 12; a fluid medium 30 generally filling the cooling channel 28; and a piezoelectric element 26 attached to the interposer body such that the piezoelectric element communicates with the cooling channel 28 and the fluid medium 30, the piezoelectric element being operatively coupled to at least two of the electrically conductive conduits 22.
    • 一种用于将半导体管芯50电耦合到衬底70的插入器10,包括:由介电材料制成并具有接触表面14和相对的接合表面16的插入体本体12; 布置在接触表面14周围的多个接触垫18; 布置在接合表面16的整个区域的多个接合焊盘20; 以及大体上设置在插入体内部的多个导电管道22,使得每个导管22将相应的一个接触焊盘18与相应的一个接合焊盘20连接。插入器10还可以包括:密封的冷却通道 28; 通常填充冷却通道28的流体介质30; 以及压电元件26,其连接到中介体,使得压电元件与冷却通道28和流体介质30连通,压电元件可操作地耦合到至少两个导电导管22。