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    • 7. 发明授权
    • Method and apparatus for chemical and topographical microanalysis
    • 化学和地形微量分析的方法和装置
    • US06466309B1
    • 2002-10-15
    • US09511616
    • 2000-02-22
    • Dmitri A. KossakovskiJohn D. BaldeschwielerJesse L. Beauchamp
    • Dmitri A. KossakovskiJohn D. BaldeschwielerJesse L. Beauchamp
    • G01B1124
    • G01N21/718B82Y35/00Y10S977/868
    • A scanning probe microscope is combined with a laser induced breakdown spectrometer to provide spatially resolved chemical analysis of the surface correlated with the surface topography. Topographical analysis is achieved by scanning a sharp probe across the sample at constant distance from the surface. Chemical analysis is achieved by the means of laser induced breakdown spectroscopy by delivering pulsed laser radiation to the sample surface through the same sharp probe, and consequent collection and analysis of emission spectra from plasma generated on the sample by the laser radiation. The method comprises performing microtopographical analysis of the sample with a scanning probe, selecting a scanned topological site on the sample, generating a plasma plume at the selected scanned topological site, and measuring a spectrum of optical emission from the plasma at the selected scanned topological site. The apparatus comprises a scanning probe, a pulsed laser optically coupled to the probe, an optical spectrometer, and a controller coupled to the scanner, laser and spectrometer for controlling the operation of the scanner, laser and spectrometer. The probe and scanner are used for topographical profiling the sample. The probe is also used for laser radiation delivery to the sample for generating a plasma plume from the sample. Optical emission from the plasma plume is collected and delivered to the optical spectrometer so that analysis of emission spectrum by the optical spectrometer allows for identification of chemical composition of the sample at user selected sites.
    • 扫描探针显微镜与激光诱导击穿光谱仪结合,提供与表面形貌相关的表面的空间分辨化学分析。 通过在与表面恒定距离的样品上扫描尖锐的探针来实现形貌分析。 通过激光诱导击穿光谱法,通过将脉冲激光辐射通过相同的尖锐探针向样品表面提供化学分析,从而收集和分析通过激光辐射在样品上产生的等离子体的发射光谱。 该方法包括用扫描探针对样品进行微图形分析,选择样品上的扫描的拓扑位点,在所选择的扫描的拓扑位点产生等离子体羽流,以及测量所选扫描拓扑位点处的等离子体的光发射谱 。 该装置包括扫描探针,与探针光学耦合的脉冲激光,光谱仪和耦合到扫描仪,激光和光谱仪的控制器,用于控制扫描仪,激光和光谱仪的操作。 探头和扫描仪用于样品的形貌分析。 该探针还用于激光辐射传输到样品中以从样品中产生等离子体羽流。 来自等离子体羽流的光发射被收集并传送到光谱仪,使得通过光谱仪的发射光谱的分析允许在用户选择的部位识别样品的化学组成。