专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06911157B2 Plasma processing method and apparatus using dynamic sensing of a plasma environment 失效
标题翻译：使用动态感应等离子体环境的等离子体处理方法和装置
公开(公告)号：US06911157B2
公开(公告)日：2005-06-28
申请号：US10347402
申请日：2003-01-21
申请人： Manabu Edamura , Hideyuki Yamamoto , Kazuyuki Ikenaga
发明人： Manabu Edamura , Hideyuki Yamamoto , Kazuyuki Ikenaga
IPC分类号： H05H1/00 , H01J37/32 , H01L21/302 , H01L21/3065 , H01L21/31 , H01L21/66 , H05H1/46 , H01L21/00
CPC分类号： H01J37/32935 , H01J37/3299
摘要： At least one control parameter such as power supplied to a plasma, process pressure, gas flow rate, and radio frequency bias power to a wafer is changed for an extremely short time as compared with an entire plasma processing time, to the extent that such a change does not affect the result of plasma processing on the wafer, to monitor a temporal change of a plasma state which occurs at the time of changing. A signal resulting from the monitoring method is used to control or diagnose the plasma processing, thereby making it possible to accomplish miniature etching works, high quality deposition, surface processing.
摘要翻译：与整个等离子体处理时间相比，至少一个控制参数（例如提供给等离子体的功率，过程压力，气体流速和射频偏置功率）与整个等离子体处理时间相比改变极短的时间，改变不影响晶片上的等离子体处理的结果，以监视在改变时发生的等离子体状态的时间变化。由监视方法产生的信号用于控制或诊断等离子体处理，从而可以实现微型蚀刻工作，高质量沉积，表面处理。

2. 发明授权

US06793768B2 Plasma-assisted processing apparatus 失效
标题翻译：等离子体辅助处理装置
公开(公告)号：US06793768B2
公开(公告)日：2004-09-21
申请号：US10061168
申请日：2002-02-04
申请人： Hideyuki Kazumi , Manabu Edamura , Kazuyuki Ikenaga , Atsushi Ootake
发明人： Hideyuki Kazumi , Manabu Edamura , Kazuyuki Ikenaga , Atsushi Ootake
IPC分类号： C23C1600
CPC分类号： H01J37/32082
摘要： A plasma-assisted processing apparatus has a vacuum vessel defining a processing chamber, a gas supply line for carrying gases into the processing chamber, a workpiece support disposed in the processing chamber and serving as an electrode, a disk antenna for radiating a high-frequency wave having a frequency in the VHF or the UHF band into the processing chamber, a high-frequency waveguide for guiding a high-frequency wave to the disk antenna, and a window made of a dielectric material isolating the disk antenna from the processing chamber. A conductive ring is disposed between the disk antenna and the window such that one surface thereof is in contact with a peripheral part of the disk antenna.
摘要翻译：等离子体辅助处理装置具有限定处理室的真空容器，用于将气体输送到处理室中的气体供给管线，设置在处理室中并用作电极的工件支撑件，用于辐射高频具有在VHF或UHF频带中的频率进入处理室的波，用于将高频波引导到盘状天线的高频波导，以及由隔离盘天线的介电材料制成的窗口。导电环设置在盘状天线和窗口之间，使得其一个表面与盘形天线的周边部分接触。

3. 发明授权

US06850012B2 Plasma processing apparatus 失效
标题翻译：等离子体处理装置
公开(公告)号：US06850012B2
公开(公告)日：2005-02-01
申请号：US10224467
申请日：2002-08-21
申请人： Manabu Edamura , Kazuyuki Ikenaga , Ken Yoshioka , Akitaka Makino
发明人： Manabu Edamura , Kazuyuki Ikenaga , Ken Yoshioka , Akitaka Makino
IPC分类号： C23C16/507 , H01J37/32 , H01L21/302 , H01L21/3065 , H01L21/31 , H05H1/46 , H01J7/24
CPC分类号： H01J37/321 , H05H1/46
摘要： Induction coils of an induction coupling type plasma processing apparatus are divided into a plurality of coil elements and a plurality of lead wire portions for effecting connection between the coil elements. The coil elements are disposed inside of a process chamber, while the lead wire portions which effect connection between the coil elements are disposed outside of the process chamber. The coil elements disposed in the process chamber are in the form of short arcs as a result of the division thereof, so that they can be easily arranged symmetrically with respect to the center of the process chamber, whereby a uniform plasma distribution can be easily achieved.
摘要翻译：感应耦合型等离子体处理装置的感应线圈被分成多个线圈元件和多个引线部分，用于实现线圈元件之间的连接。线圈元件设置在处理室的内部，而实现线圈元件之间的连接的引线部分设置在处理室的外部。设置在处理室中的线圈元件由于其分开而呈短弧形，使得它们可以容易地相对于处理室的中心对称布置，从而可以容易地实现均匀的等离子体分布。

4. 发明授权

US09581176B2 Construction machine having revolving structure 有权
标题翻译：具有旋转结构的施工机械
公开(公告)号：US09581176B2
公开(公告)日：2017-02-28
申请号：US13979436
申请日：2012-01-19
申请人： Shiho Izumi , Manabu Edamura , Kouichi Shibata , Manabu Sugiura , Takatoshi Ooki
发明人： Shiho Izumi , Manabu Edamura , Kouichi Shibata , Manabu Sugiura , Takatoshi Ooki
IPC分类号： F15B15/18 , B60T8/00 , B60L1/00 , E02F9/12 , E02F9/20 , B60K6/28 , B60K6/485
CPC分类号： F15B15/18 , B60K6/28 , B60K6/485 , B60Y2400/114 , E02F9/123 , E02F9/2091 , E02F9/2095 , Y02T10/6226
摘要： Both a hydraulic motor and an electric motor are provided for driving an upper swing structure. When the amount of electricity stored in a capacitor is appropriate, the upper swing structure is driven by both the hydraulic motor and the electric motor. When the amount of electricity stored in the capacitor exceeds an appropriate value, the mode is changed over to a mode in which the upper swing structure is driven only by the hydraulic motor, and an assist electric generation motor is assist-driven or engine-driven to thereby rapidly return the amount of electricity stored in the capacitor to an appropriate range. The capacity of the capacitor can be reduced, and the amount of electricity stored in the capacitor can be managed without losing the operability of swing motion.
摘要翻译：提供液压马达和电动马达用于驱动上部摆动结构。当存储在电容器中的电量适当时，上部摆动结构由液压马达和电动马达驱动。当存储在电容器中的电量超过适当的值时，该模式转换到仅由液压马达驱动上部摆动结构的模式，并且辅助发电马达是辅助驱动的或发动机驱动的从而将存储在电容器中的电量迅速返回到适当的范围。可以降低电容器的容量，并且可以在不损失摆动运动的可操作性的情况下管理存储在电容器中的电量。

5. 发明授权

US09065361B2 Hybrid construction machine 有权
标题翻译：混合式施工机
公开(公告)号：US09065361B2
公开(公告)日：2015-06-23
申请号：US13879429
申请日：2011-10-12
申请人： Shinji Ishihara , Shinya Imura , Seiji Ishida , Masatoshi Hoshino , Manabu Edamura , Mitsuo Sonoda , Takatoshi Ooki , Takako Satake
发明人： Shinji Ishihara , Shinya Imura , Seiji Ishida , Masatoshi Hoshino , Hidetoshi Satake , Manabu Edamura , Mitsuo Sonoda , Takatoshi Ooki
IPC分类号： H02P1/00 , H02P7/00 , B60W10/06 , B60W10/08 , B60W10/26 , B60W20/00 , E02F9/20 , B60W10/30 , B60K25/00 , B60K25/02
CPC分类号： B60W20/13 , B60C23/0471 , B60C23/061 , B60K2025/005 , B60K2025/024 , B60W10/06 , B60W10/08 , B60W10/26 , B60W10/30 , B60W20/00 , B60W2510/0638 , B60W2510/244 , B60W2710/0644 , B60W2710/083 , B60W2710/244 , B60Y2200/412 , E02F9/2075 , H02P7/00 , Y02T10/6286
摘要： In a hybrid construction machine, there is provided a drive control device which realizes in, as a simple a structure as possible, control means of a motor generator, which is capable of preventing rapid decreases in the state of charge. The control means, which calculates a motor torque command value to be output to the motor generator, is characterized by calculating the motor torque command value, based on a difference between an actual state-of-charge and a prescribed target state-of-charge and a torque margin obtained by a difference between a maximum torque of an engine determined based on an actual rotational speed of the engine and an actual torque of the engine.
摘要翻译：在混合动力施工机械中，提供了一种驱动控制装置，其实现了尽可能简单的结构，其能够防止充电状态的快速降低，电动发电机的控制装置。计算要输出到电动发电机的电动机转矩指令值的控制装置的特征在于，基于实际充电状态与规定的目标充电状态之间的差来计算电动机转矩指令值以及通过基于发动机的实际转速确定的发动机的最大扭矩与发动机的实际转矩之间的差异获得的转矩余量。

6. 发明申请

US20140199148A1 HYBRID CONSTRUCTION MACHINE 有权
标题翻译：混合建筑机械
公开(公告)号：US20140199148A1
公开(公告)日：2014-07-17
申请号：US13982563
申请日：2012-01-05
申请人： Manabu Edamura , Takatoshi Ooki , Takako Satake , Koiji Ishikawa , Shinya Imura , Shinji Nishikawa
发明人： Shinya Imura , Kouji Ishikawa , Hidetoshi Satake , Takatoshi Ooki , Shinji Nishikawa , Manabu Edamura
IPC分类号： E02F9/12
CPC分类号： E02F9/123 , E02F9/2037 , E02F9/2095 , Y10S903/903 , Y10S903/93
摘要： In hybrid construction machine employing a hydraulic motor and an electric motor for the driving of the swing structure, satisfactory operability of a combined operation of the swing structure and other actuators is secured irrespective of the operating status of the electric motor.A control device of the hybrid construction machine executes control selected from: hydraulic/electric complex swing control for driving the swing structure by total torque of the electric motor and the hydraulic motor when a swing operating lever device is operated; and hydraulic solo swing control for driving the swing structure by the torque of the hydraulic motor alone when the swing operating lever device is operated. The control device controls drive torque or driving force of each of the electric motor, the hydraulic motor and a second hydraulic actuator so that the relationship between the position or the speed of the second hydraulic actuator and the swing angle or the swing speed of the swing structure in the combined operation when the swing operating lever device and a second operating lever device are operated at the same time during the hydraulic/electric complex swing control is substantially identical with the relationship in the combined operation during the hydraulic solo swing control.
摘要翻译：在使用液压马达和用于驱动摆动结构的电动机的混合动力施工机械中，无论电动机的运行状态如何，均可确保摆动结构和其它致动器的组合操作的可操作性。混合动力施工机械的控制装置执行选择的控制装置：当操作摆动操作杆装置时，通过电动机和液压马达的总转矩来驱动摆动结构的液压/电动复合摇摆控制; 以及当操作摆动操作杆装置时单独通过液压马达的扭矩驱动摆动结构的液压独奏摆动控制。控制装置控制电动机，液压马达和第二液压致动器中的每一个的驱动扭矩或驱动力，使得第二液压致动器的位置或速度与摆动角度或摆动摆动速度之间的关系在液压/电气复合体摆动控制期间当摆动操作杆装置和第二操作杆装置同时操作时的组合操作中的结构与液压独奏摇摆控制期间的组合操作的关系基本相同。

7. 发明申请

US20140103874A1 CONSTRUCTION MACHINE 有权
标题翻译：建筑机械
公开(公告)号：US20140103874A1
公开(公告)日：2014-04-17
申请号：US13879444
申请日：2011-10-12
申请人： Shiho Izumi , Manabu Edamura , Takako Satake , Yusuke Kajita , Masataka Sasaki , Seiji Ishida , Kazuo Fujishima
发明人： Seiji Ishida , Masataka Sasaki , Yusuke Kajita , Hidetoshi Satake , Manabu Edamura , Kazuo Fujishima , Shiho Izumi
IPC分类号： B60L11/18
CPC分类号： B60L11/1809 , B60L1/003 , B60L11/14 , B60L11/1816 , B60L11/1862 , B60L2200/40 , B60L2240/423 , B60L2240/427 , B60L2240/547 , B60L2240/80 , E02F9/2075 , E02F9/2091 , F02D29/02 , Y02T10/642 , Y02T10/70 , Y02T10/7005 , Y02T10/7044 , Y02T10/705 , Y02T10/7072 , Y02T10/7077 , Y02T90/14
摘要： Construction machine capable of incorporating an engine and using an external power source. The construction machine includes an electrical storage device performing a charge with the external power source, uses the electrical storage device to provide assist when the power of the engine is insufficient, uses an electrical charge in the electrical storage device systematically in accordance with work time, and efficiently uses the electrical storage device by controlling its discharge amount in accordance with load status. The construction machine includes the engine, accessory loads connected to the engine, an assist electric motor driven by the engine, electrical power converters for converting an AC current, which is the output current of the assist electric motor, to a DC current, and the electrical storage device connected to the DC side of each electrical power converter. The electrical storage device becomes charged through a charging device from the external power source.
摘要翻译：能够结合发动机并使用外部电源的施工机械。施工机械包括与外部电源进行充电的蓄电装置，当发动机的功率不足时，使用蓄电装置提供辅助，根据工作时间系统地使用蓄电装置中的电荷，并且通过根据负载状态控制其排出量来有效地使用蓄电装置。施工机械包括发动机，与发动机连接的附件负载，由发动机驱动的辅助电动机，将作为辅助电动机的输出电流的交流电转换成直流电的电力转换器，电气存储装置连接到每个电力转换器的直流侧。蓄电装置通过充电装置从外部电源充电。

8. 发明申请

US20130311052A1 HYBRID CONSTRUCTION MACHINE AND AUXILIARY CONTROL DEVICE USED THEREIN 有权
标题翻译：混合结构机和辅助控制装置
公开(公告)号：US20130311052A1
公开(公告)日：2013-11-21
申请号：US13981659
申请日：2012-03-13
申请人： Manabu Sugiura , Toshihiko Watanabe , Takenori Hiroki , Manabu Edamura , Takako Satake , Kouji Ishikawa
发明人： Manabu Edamura , Kouji Ishikawa , Manabu Sugiura , Takenori Hiroki , Toshihiko Watanabe , Hidetoshi Satake
IPC分类号： E02F9/20
CPC分类号： E02F9/2025 , B60L1/003 , B60L1/20 , B60L3/0046 , B60L3/0061 , B60L3/0069 , B60L11/005 , B60L11/123 , B60L15/2009 , B60L2200/40 , B60L2210/40 , B60L2220/14 , B60L2240/36 , B60L2240/421 , B60L2240/423 , B60L2240/425 , B60L2240/441 , B60L2240/443 , B60L2240/545 , B60L2240/547 , B60L2240/549 , B60L2250/10 , B60L2250/24 , E02F9/123 , E02F9/2091 , E02F9/2095 , E02F9/2228 , E02F9/2235 , E02F9/2282 , E02F9/2285 , E02F9/2296 , E02F9/267 , Y02T10/6217 , Y02T10/645 , Y02T10/7005 , Y02T10/7022 , Y02T10/7077 , Y02T10/7241 , Y02T10/7275
摘要： Disclosed is a hybrid construction machine that includes a control device and an auxiliary control device. The control device switches between a hydraulic/electric complex swing mode in which both the electric motor and the hydraulic motor are driven to drive the swing structure by using the sum of the torque of the electric motor and the torque of the hydraulic motor; and a hydraulic-only swing mode in which only the hydraulic motor is driven to drive the swing structure by using only the torque of the hydraulic motor. The auxiliary control device includes a monitoring controller that is connected to the control device and to the electric motor to monitor the temperature or electrical leakage in the electric motor as a substitute controller for the power control unit or the electrical storage device when the power control unit or the electrical storage device is removed due to a fault.
摘要翻译：公开了一种混合式施工机械，其包括控制装置和辅助控制装置。控制装置在通过使用电动机的转矩和液压马达的转矩的总和来驱动电动机和液压马达两者来驱动摆动结构的液压/电动复合摇摆模式之间切换; 仅液压马达被驱动以仅使用液压马达的转矩来驱动摆动结构的仅液压摆动模式。辅助控制装置包括监视控制器，其连接到控制装置和电动机，以监视作为电力控制单元或蓄电装置的替代控制器的电动机中的温度或漏电，当电力控制单元或由于故障而将电存储装置移除。

9. 发明申请

US20130058750A1 HYBRID CONSTRUCTION MACHINE 有权
标题翻译：混合式建筑机械
公开(公告)号：US20130058750A1
公开(公告)日：2013-03-07
申请号：US13640378
申请日：2011-05-16
申请人： Takenori Hiroki , Manabu Edamura , Toshihiko Ishida , Manabu Sugiura , Hidetoshi Satake , Kouji Ishikawa , Takatoshi Ooki , Shinji Nishikawa
发明人： Takenori Hiroki , Manabu Edamura , Toshihiko Ishida , Manabu Sugiura , Hidetoshi Satake , Kouji Ishikawa , Takatoshi Ooki , Shinji Nishikawa
IPC分类号： E02F9/20
CPC分类号： E02F9/123 , B60L1/003 , B60L3/003 , B60L3/0046 , B60L3/0061 , B60L7/14 , B60L11/005 , B60L11/123 , B60L11/14 , B60L2200/40 , B60L2240/423 , B60L2240/427 , B60L2240/429 , B60L2240/527 , B60L2240/529 , B60L2240/547 , B60L2240/549 , B60L2260/26 , E02F9/207 , E02F9/2075 , E02F9/2091 , E02F9/2095 , E02F9/226 , E02F9/2296 , Y02T10/6217 , Y02T10/642 , Y02T10/7022 , Y02T10/7077
摘要： A hybrid construction machine is capable of performing satisfactory operations even when trouble occurs that disables the electric motor from outputting torque. The hybrid construction has both a hydraulic motor and an electric motor driving the swing structure and a controller for switching between a hydraulic/electric hybrid swing mode (using both the hydraulic motor and the electric motor) and a hydraulic-alone swing mode (using only the hydraulic motor). The switching is executed while achieving satisfactory operability and performance in each mode. Normally, an energy saving operation is performed in the hydraulic/electric hybrid swing mode. When the electric amount of an electricity storage device has gone out of a prescribed range or an abnormality has occurred in an electric system (e.g., failure of an inverter), the swing mode is switched to the hydraulic-alone swing mode so that driving with normal braking torque is possible by the hydraulic motor alone.
摘要翻译：即使发生故障而使电动机输出转矩的混合式施工机械也能够进行令人满意的操作。混合动力结构具有驱动摆动结构的液压马达和电动马达以及用于在液压/电动混合摆动模式（使用液压马达和电动马达）两者之间进行切换的控制器和仅液压单独摆动模式液压马达）。在每种模式下实现令人满意的可操作性和性能的同时执行切换。通常，在液压/电动混合摆动模式中进行节能运转。当蓄电装置的电量在电气系统中（例如，逆变器的故障）已经超出规定范围或发生异常时，摆动模式切换到单独的液压摆动模式，以便与通过单独的液压马达可以实现正常的制动转矩。

10. 发明申请

US20100263796A1 Plasma Processing Apparatus 失效
标题翻译：等离子体处理装置
公开(公告)号：US20100263796A1
公开(公告)日：2010-10-21
申请号：US12783686
申请日：2010-05-20
申请人： Manabu Edamura , Go Miya , Ken Yoshioka
发明人： Manabu Edamura , Go Miya , Ken Yoshioka
IPC分类号： H01L21/465 , C23F1/08 , C23C16/00
CPC分类号： H01J37/321
摘要： A plasma processing apparatus includes a processing chamber, a sample stage for mounting an object to be processed, a power supply, and at least one induction coil connected to the power supply. The induction coil is formed by connecting at least two identical coil elements in a parallel circuit-like arrangement so that current flows in each of the plurality of identical coil elements in a same direction when viewed from the sample stage. The induction coil is positioned so that a center thereof corresponds to a center of the object, and input ends of the coil elements are displaced circumferentially at equal angular intervals calculated by dividing 360° by the number of identical coil elements.
摘要翻译：等离子体处理装置包括处理室，用于安装待加工物体的样品台，电源以及连接到电源的至少一个感应线圈。感应线圈通过以并联电路状布置连接至少两个相同的线圈元件而形成，使得当从样品台观察时，电流以相同的方向在多个相同的线圈元件中的每一个中流动。感应线圈被定位成使得其中心对应于物体的中心，并且线圈元件的输入端部以相等的角度间隔沿圆周方向移位，其通过将360°除以相同线圈元件的数量而计算。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式