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1. 发明授权

US07194821B2 Vacuum processing apparatus and vacuum processing method 有权
标题翻译：真空加工设备和真空加工方法
公开(公告)号：US07194821B2
公开(公告)日：2007-03-27
申请号：US11068804
申请日：2005-03-02
申请人： Manabu Edamura , Akitaka Makino , Motohiko Yoshigai , Takanori Nakatsuka , Susumu Tauchi
发明人： Manabu Edamura , Akitaka Makino , Motohiko Yoshigai , Takanori Nakatsuka , Susumu Tauchi
IPC分类号： F26B7/00
CPC分类号： G05D16/2066
摘要： The downtime of a vacuum processing apparatus due to wet cleaning is reduced. In a vacuum processing apparatus that requires aging for its chamber or process container after vacuum evacuation of the apparatus and before actual processing of a workpiece, when the chamber has been opened to atmosphere for the purpose of wet cleaning or component replacement, the apparatus comprises a high precision absolute pressure gauge for use in processing, a wide range gauge capable of measuring a wide range of pressures, and a controller, wherein the controller uses a pressure trend during vacuum evacuation to determine whether the vacuum evacuation is satisfactory, and starts aging upon determining that the vacuum evacuation is satisfactory even if the actual pressure is not below a prescribed value. The controller determines relationship between an apparent flow rate (leak rate) measured by the absolute pressure gauge when the chamber is vacuum sealed, and a chamber pressure measured by the wide range gauge, and then measures only the pressure to determine whether a baseline leak rate is reached.
摘要翻译：减少了由于湿清洗而造成的真空处理装置的停机时间。在真空处理装置中，在对设备进行真空抽真空之后并且在实际处理工件之前需要对其室或处理容器进行老化的情况下，当室已经被打开到大气中以进行湿式清洁或部件更换时，该装置包括：用于加工的高精度绝对压力表，可测量宽范围压力的宽范围计量器和控制器，其中控制器在真空抽真空中使用压力趋势，以确定真空抽气是否令人满意，并开始老化确定即使实际压力不低于规定值，真空排气也令人满意。控制器确定当室被真空密封时由绝对压力表测量的表观流量（泄漏率）与由宽范围量规测量的室压力之间的关系，然后仅测量压力以确定基线泄漏率到达了。

2. 发明申请

US20060168844A1 Vacuum processing apparatus and vacuum processing method 有权
标题翻译：真空加工设备和真空加工方法
公开(公告)号：US20060168844A1
公开(公告)日：2006-08-03
申请号：US11068804
申请日：2005-03-02
申请人： Manabu Edamura , Akitaka Makino , Motohiko Yoshigai , Takanori Nakatsuka , Susumu Tauchi
发明人： Manabu Edamura , Akitaka Makino , Motohiko Yoshigai , Takanori Nakatsuka , Susumu Tauchi
IPC分类号： F26B13/30 , G05D16/00 , F26B21/06
CPC分类号： G05D16/2066
摘要： The downtime of a vacuum processing apparatus due to wet cleaning is reduced. In a vacuum processing apparatus that requires aging for its chamber or process container after vacuum evacuation of the apparatus and before actual processing of a workpiece, when the chamber has been opened to atmosphere for the purpose of wet cleaning or component replacement, the apparatus comprises a high precision absolute pressure gauge for use in processing, a wide range gauge capable of measuring a wide range of pressures, and a controller, wherein the controller uses a pressure trend during vacuum evacuation to determine whether the vacuum evacuation is satisfactory, and starts aging upon determining that the vacuum evacuation is satisfactory even if the actual pressure is not below a prescribed value. The controller determines relationship between an apparent flow rate (leak rate) measured by the absolute pressure gauge when the chamber is vacuum sealed, and a chamber pressure measured by the wide range gauge, and then measures only the pressure to determine whether a baseline leak rate is reached.
摘要翻译：减少了由于湿清洗而造成的真空处理装置的停机时间。在真空处理装置中，在对设备进行真空抽真空之后并且在实际处理工件之前需要对其室或处理容器进行老化的情况下，当室已经被打开到大气中以进行湿式清洁或部件更换时，该装置包括：用于加工的高精度绝对压力表，可测量宽范围压力的宽范围计量器和控制器，其中控制器在真空抽真空中使用压力趋势，以确定真空抽气是否令人满意，并开始老化确定即使实际压力不低于规定值，真空排气也令人满意。控制器确定当室被真空密封时由绝对压力表测量的表观流量（泄漏率）与由宽范围量规测量的室压力之间的关系，然后仅测量压力以确定基线泄漏率到达了。

3. 发明授权

US09991052B2 Biaxially stretched polypropylene film for capacitor, metallized film, and film capacitor 有权
公开(公告)号：US09991052B2
公开(公告)日：2018-06-05
申请号：US14112591
申请日：2011-04-19
申请人： Takanori Nakatsuka , Masami Sugata , Tetsuya Asano
发明人： Takanori Nakatsuka , Masami Sugata , Tetsuya Asano
IPC分类号： H01G4/18 , C08J5/18 , B29C55/14 , B29K23/00 , B82Y99/00
CPC分类号： H01G4/18 , B29C55/143 , B29K2023/10 , B29K2995/0072 , B82Y99/00 , C08J5/18 , C08J2323/10 , Y02T10/7022 , Y10S977/948 , Y10T428/24355
摘要： Provided is a biaxially stretched polypropylene film for capacitors which has high withstand voltage characteristics when used as a dielectric for capacitors and which has highly suitable processability into elements. The biaxially stretched polypropylene film for capacitors has projections on both surfaces and has a thickness (t1, μm) of 4-20 μm. When one of the surfaces is expressed by surface A and the other by surface B, all of the following relationships are satisfied. 800≤SRzB≤1,300 (nm) 0.1≤SRzA/SRzB≤0.8 PBmin≥100 (nm) PBmax≤1,500 (nm) 0.4≤PB450-750/PB≤0.7.

4. 发明授权

US09123471B2 Biaxially stretched polypropylene film, metallized film and film capacitor 有权
标题翻译：双轴拉伸聚丙烯薄膜，金属化薄膜和薄膜电容器
公开(公告)号：US09123471B2
公开(公告)日：2015-09-01
申请号：US14004068
申请日：2012-03-06
申请人： Teruo Monno , Tetsuya Asano , Masami Sugata , Takanori Nakatsuka
发明人： Teruo Monno , Tetsuya Asano , Masami Sugata , Takanori Nakatsuka
IPC分类号： H01G4/18 , H01G4/08 , C08J5/18 , B29C55/14 , B29K23/00 , B29L31/34
CPC分类号： H01G4/08 , B29C55/143 , B29K2023/10 , B29L2031/3406 , C08J5/18 , C08J2323/12 , H01G4/18 , Y02T10/7022 , Y10T428/24479 , Y10T428/24529 , Y10T428/24545
摘要： A biaxially stretched polypropylene film includes protrusions on both surfaces, in which the biaxially stretched polypropylene film has a thickness t1 of 1 μm to 3 μm, has a tensile strength in the machine direction of 120 MPa to 250 MPa, has a tensile strength in the transverse direction of 250 MPa to 400 MPa, has a minimum protrusion height Pmin of 100 nm or greater and a maximum protrusion height Pmax of 1,600 nm or smaller for either surface, and satisfies all of Formulae (1) to (3) when one of the surfaces is surface A and the other is surface B: 0.5≦Pa250-450/Pa≦1.0 (1), 0.5≦Pb450-1600/Pb≦1.0 (2), and 600≦Pa+Pb≦1,200 (3).
摘要翻译：双轴拉伸聚丙烯膜在两面上具有突起，双轴拉伸聚丙烯膜的厚度t1为1μm〜3μm，拉伸强度为120MPa〜250MPa，拉伸强度为横向为250MPa〜400MPa，对于任一表面具有最小突出高度Pmin为100nm以上，最大突出高度Pmax为1600nm以下，并且当以下之一满足式（1）〜（3）时，表面是表面A，另一个是表面B：0.5＆nlE; Pa250-450 / Pa＆nlE; 1.0（1），0.5＆nlE; Pb450-1600 / Pb＆nlE; 1.0（2）和600＆nlE; Pa + Pb＆）。

5. 发明申请

US20140016244A1 BIAXIALLY STRETCHED POLYPROPYLENE FILM, METALLIZED FILM, AND FILM CAPACITOR 有权
标题翻译：双向拉伸聚丙烯薄膜，金属薄膜和薄膜电容器
公开(公告)号：US20140016244A1
公开(公告)日：2014-01-16
申请号：US14004068
申请日：2012-03-06
申请人： Teruo Monno , Tetsuya Asano , Masami Sugata , Takanori Nakatsuka
发明人： Teruo Monno , Tetsuya Asano , Masami Sugata , Takanori Nakatsuka
IPC分类号： H01G4/08
CPC分类号： H01G4/08 , B29C55/143 , B29K2023/10 , B29L2031/3406 , C08J5/18 , C08J2323/12 , H01G4/18 , Y02T10/7022 , Y10T428/24479 , Y10T428/24529 , Y10T428/24545
摘要： A biaxially stretched polypropylene film includes protrusions on both surfaces, in which the biaxially stretched polypropylene film has a thickness t1 of 1 μm to 3 μm, has a tensile strength in the machine direction of 120 MPa to 250 MPa, has a tensile strength in the transverse direction of 250 MPa to 400 MPa, has a minimum protrusion height Pmin of 100 nm or greater and a maximum protrusion height Pmax of 1,600 nm or smaller for either surface, and satisfies all of Formulae (1) to (3) when one of the surfaces is surface A and the other is surface B: 0.5 Pa250-450/Pa≦1.0 (1), 0.5≦Pb450-1600/Pb≦1.0 (2), and 600≦Pa+Pb≦1,200 (3).
摘要翻译：双轴拉伸聚丙烯膜在两面上具有突出部，双轴拉伸聚丙烯膜的厚度t1为1〜3μm，拉伸强度为120MPa〜250MPa，拉伸强度为横向为250MPa〜400MPa，对于任一表面具有最小突出高度Pmin为100nm以上，最大突出高度Pmax为1600nm以下，并且当以下之一满足式（1）〜（3）时，表面是表面A，另一个是表面B：0.5 Pa250-450/Pa@1.0（1），0.5 @ Pb450-1600 / Pb @ 1.0（2）和600 @ Pa + Pb @ 1,200（3）。

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