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    • 1. 发明授权
    • Dispenser
    • 分配器
    • US08286444B2
    • 2012-10-16
    • US12629311
    • 2009-12-02
    • Makoto SasakiKouichi ItouYuji HiranoMotohiro KawachiHiroshi Nagai
    • Makoto SasakiKouichi ItouYuji HiranoMotohiro KawachiHiroshi Nagai
    • F25C1/14
    • B67D1/07
    • Provided is a dispenser in which a wash water discharge opening provided to a drain pan is connected to an external tap water system via a wash water supply path. The wash water supply path is provided with a wash water supply valve for controlling whether or not to supply wash water to the drain pan. Based on delivery information output from a delivery control section for controlling delivery of ice chips, a wash control section in a controller judges whether or not a delivery count of the ice chips has reached a predetermined set count, and, when it is judged that the delivery count has reached the set count, opens the wash water supply valve to perform a wash action.
    • 提供了一种分配器,其中设置在排水盘上的洗涤水排出口经由洗涤水供给路连接到外部自来水系统。 洗涤水供给路径设置有用于控制是否向排水盘供给洗涤水的洗涤水供给阀。 基于从用于控制冰芯片的传送的传送控制部分输出的传送信息,控制器中的洗涤控制部分判断冰芯片的传送计数是否达到预定的设定计数,并且当判断为 送货数量达到设定数量,打开洗涤水供应阀门执行清洗动作。
    • 5. 发明授权
    • Substrate processing apparatus, substrate processing method and storage medium
    • 基板处理装置,基板处理方法和存储介质
    • US08644981B2
    • 2014-02-04
    • US13222141
    • 2011-08-31
    • Kouichi Itou
    • Kouichi Itou
    • G06F7/00
    • H01L21/67265
    • Disclosed is a substrate processing apparatus in which a target substrate is taken out from a slot of a cassette having a plurality of slots and processed. The substrate processing apparatus includes a substrate processing unit that processes the target substrate, a transfer unit that transfers the target substrate from the cassette to the substrate processing unit and transfers the target substrate processed in the substrate processing unit from the substrate processing unit to the cassette, and a confirming unit that determines whether or not the slot is empty. The substrate processing apparatus further includes a control unit that reads the slot designated to the target substrate and makes the confirming unit to determine whether or not the slot is empty, after the target substrate has been processed in the substrate processing unit but before the target substrate is disposed in the cassette.
    • 公开了一种基板处理装置,其中从具有多个槽的盒的槽中取出目标基板并进行处理。 基板处理装置包括处理目标基板的基板处理单元,将目标基板从盒子传送到基板处理单元的转印单元,将从基板处理单元处理的目标基板从基板处理单元传送到盒 以及确定所述时隙是否为空的确认单元。 基板处理装置还包括控制单元,其在目标基板在基板处理单元中处理之后但在目标基板之前读取指定到目标基板的槽,并使确认单元确定槽是否为空 被放置在盒中。
    • 6. 发明授权
    • Substrate processing apparatus and substrate transfer method
    • 基板加工装置及基板转印方法
    • US08630733B2
    • 2014-01-14
    • US12892109
    • 2010-09-28
    • Kouichi Itou
    • Kouichi Itou
    • H01L21/677
    • H01L21/67778H01L21/67184H01L21/67225H01L21/67253
    • A substrate processing apparatus includes a loading/unloading unit including a mounting table on which a storage container accommodating a target substrate is mounted; a processing unit set including a plurality of processing units that perform a process on the target substrate; a plurality of transit units that transit the target substrate between the loading/unloading unit and the processing unit set; a selection unit that receives input for selecting a storage container for loading, a storage container for unloading, and a processing unit to be used for processing the target substrate; and a transfer recipe creating unit that automatically selects a transit unit to be used among the plurality of transit units based on the storage container for loading, the storage container for unloading, and the processing unit selected through the selection unit, automatically generates a transfer route of the target substrate, and creates a transfer recipe.
    • 一种基板处理装置,包括装载/卸载单元,该装载/卸载单元包括安装有容纳目标基板的存储容器的安装台; 处理单元,其包括在所述目标基板上执行处理的多个处理单元; 多个运送单元,其在所述装卸单元和所述处理单元组之间转移所述目标基板; 接收用于选择用于装载的存储容器的输入的选择单元,用于卸载的存储容器以及用于处理所述目标基板的处理单元; 以及传送配方生成单元,其基于用于装载的存储容器,用于卸载的存储容器和通过选择单元选择的处理单元,自动选择在多个中转单元中使用的运输单元,自动生成运送路线 的目标基板,并产生转印配方。
    • 7. 发明申请
    • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
    • 基板加工设备和基板传输方法
    • US20110076120A1
    • 2011-03-31
    • US12892109
    • 2010-09-28
    • Kouichi Itou
    • Kouichi Itou
    • H01L21/677
    • H01L21/67778H01L21/67184H01L21/67225H01L21/67253
    • A substrate processing apparatus includes a loading/unloading unit including a mounting table on which a storage container accommodating a target substrate is mounted; a processing unit set including a plurality of processing units that perform a process on the target substrate; a plurality of transit units that transit the target substrate between the loading/unloading unit and the processing unit set; a selection unit that receives input for selecting a storage container for loading, a storage container for unloading, and a processing unit to be used for processing the target substrate; and a transfer recipe creating unit that automatically selects a transit unit to be used among the plurality of transit units based on the storage container for loading, the storage container for unloading, and the processing unit selected through the selection unit, automatically generates a transfer route of the target substrate, and creates a transfer recipe.
    • 一种基板处理装置,包括装载/卸载单元,该装载/卸载单元包括安装有容纳目标基板的存储容器的安装台; 处理单元,其包括在所述目标基板上执行处理的多个处理单元; 多个运送单元,其在所述装卸单元和所述处理单元组之间转移所述目标基板; 接收用于选择用于装载的存储容器的输入的选择单元,用于卸载的存储容器以及用于处理所述目标基板的处理单元; 以及传送配方生成单元,其基于用于装载的存储容器,用于卸载的存储容器和通过选择单元选择的处理单元,自动选择在多个中转单元中使用的运输单元,自动生成运送路线 的目标基板,并产生转印配方。
    • 10. 发明申请
    • Substrate Processing Apparatus, Substrate Processing Method and Storage Medium
    • 基板处理装置,基板处理方法和存储介质
    • US20120065770A1
    • 2012-03-15
    • US13222141
    • 2011-08-31
    • Kouichi Itou
    • Kouichi Itou
    • G06F17/00
    • H01L21/67265
    • Disclosed is a substrate processing apparatus in which a target substrate is taken out from a slot of a cassette having a plurality of slots and processed. The substrate processing apparatus includes a substrate processing unit that processes the target substrate, a transfer unit that transfers the target substrate from the cassette to the substrate processing unit and transfers the target substrate processed in the substrate processing unit from the substrate processing unit to the cassette, and a confirming unit that determines whether or not the slot is empty. The substrate processing apparatus further includes a control unit that reads the slot designated to the target substrate and makes the confirming unit to determine whether or not the slot is empty, after the target substrate has been processed in the substrate processing unit but before the target substrate is disposed in the cassette.
    • 公开了一种基板处理装置,其中从具有多个槽的盒的槽中取出目标基板并进行处理。 基板处理装置包括处理目标基板的基板处理单元,将目标基板从盒子传送到基板处理单元的转印单元,将从基板处理单元处理的目标基板从基板处理单元传送到盒 以及确定所述时隙是否为空的确认单元。 基板处理装置还包括控制单元,其在目标基板在基板处理单元中处理之后但在目标基板之前读取指定到目标基板的槽,并使确认单元确定槽是否为空 被放置在盒中。