会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明授权
    • Interference measurement apparatus, interference measurement probe and
interference measurement control system
    • 干涉测量装置,干涉测量探头和干涉测量控制系统
    • US6166818A
    • 2000-12-26
    • US182506
    • 1998-10-30
    • Shigenori NaganoNobuo HoriMakoto Fujino
    • Shigenori NaganoNobuo HoriMakoto Fujino
    • G01B9/02G01B11/00G01D5/26
    • G01B9/02019G01B9/0201G01B9/02022G01B9/02051G01D5/266
    • An optical system is fabricated in the form of one device, so that the simplified optical system is realized. A displacement is measured with a high resolving power utilizing an interference fringe. An interference measurement probe 2 receives a coherent light from a light source section 1, and divides the coherent light into a plurality of luminous fluxes. The interference measurement probe 2 emits a plurality of irradiation luminous fluxes at different angles. The plurality of irradiation luminous fluxes form an interference fringe and the interference fringe is irradiated onto an objective 8. A light receiving section 3 is disposed at a position where a reflection luminous flux from the objective 8 interferes, and receives an interference light reflected from the objective 8, thereby outputting a light receiving signal which is converted to an electric signal. A measurement section 4 performs processing for obtaining displacement of positions of the interference measurement probe 2 and the light receiving section 3 as well as displacement of the objective 8. A control section 5 is connected to a driving section 6, and controls the driving section 6 based on a measurement result of the measurement section 4, thereby making a stage 7 move in the Z-direction. On the stage 7, the objective 8 is mounted or provided.
    • 以一个装置的形式制造光学系统,从而实现简化的光学系统。 使用干涉条纹以高分辨率测量位移。 干涉测量探头2接收来自光源部分1的相干光,并将相干光分成多个光通量。 干涉测量探针2以不同的角度发射多个照射光束。 多个照射光束形成干涉条纹,并且干涉条纹被照射到物镜8上。光接收部分3设置在来自物体8的反射光通量干涉的位置,并且接收从该物镜8反射的干涉光 物镜8,从而输出被转换成电信号的光接收信号。 测量部分4执行用于获得干涉测量探头2和光接收部分3的位置的位移以及物镜8的位移的处理。控制部分5连接到驱动部分6,并且控制驱动部分6 基于测量部4的测量结果,从而使台7沿Z方向移动。 在平台7上安装或提供物镜8。
    • 2. 发明授权
    • Interference measurement apparatus and probe used for interference measurement apparatus
    • 用于干涉测量装置的干涉测量装置和探头
    • US06233370B1
    • 2001-05-15
    • US09182504
    • 1998-10-30
    • Makoto FujinoNobuo HoriShigenori Nagano
    • Makoto FujinoNobuo HoriShigenori Nagano
    • G02B600
    • G01B9/0201G01B2290/70
    • An simlified optical configuration is acheved and, a direction discrimination function and a high resolving detection function are performed by one light receiving section. A TE mode emitted from an optical waveguide section 3 transmits through a beam splitter 5 and is guided to a measurement optical path. A TM mode emitted from the optical waveguide is reflected by the beam splitter 5 and is guided to a reference optical path. First and second ¼ wave plates 10 and 11 are inserted in the respective optical paths, and the TE and TM modes are acted by a ½ wave plate while travelling forward and backward on the reference and measurement optical paths. A reference light (TM mode) is reflected by a reference reflection section 8 and transmits through the beam splitter section 5. A measurement light (TE mode) is reflected by a measurement reflection section 9 and is reflected by the beam splitter section 5. By a polarization member 12, only direction components of the polarization member 12 are extracted from the TM and TE modes, and both waves interfere, whereby a displacement is measured by a displacement measurement section 7.
    • 通过一个光接收部分来实现一个简化的光学配置,方向鉴别功能和高分辨率检测功能。 从光波导部3发射的TE模式通过分束器5透射并被引导到测量光路。 从光波导发射的TM模式被分束器5反射并被引导到参考光路。 第一和第二¼波片10和11插入相应的光路中,并且在参考和测量光路上向前和向后行进时,TE和TM模式由1/2波片作用。 参考光(TM模式)被参考反射部分8反射并透射通过分束器部分5.测量光(TE模式)被测量反射部分9反射并被分束器部分5反射。通过 极化构件12仅从TM和TE模式中提取偏振构件12的方向分量,并且两个波都相互干涉,从而由位移测量部7测量位移。
    • 3. 发明授权
    • Signal formation apparatus for use in interference measurement
    • 用于干扰测量的信号形成装置
    • US6075600A
    • 2000-06-13
    • US274306
    • 1999-03-23
    • Shigenori NaganoMakoto FujinoAkira TakadaNobuo Hori
    • Shigenori NaganoMakoto FujinoAkira TakadaNobuo Hori
    • G01B9/02
    • G01D5/34715
    • Provided is a signal formation apparatus for use in an interference measurement which is capable of achieving a simplicity of optical adjustments and a subminiature of the apparatus, as well as a reduction of an influence by a wavelength variation of a laser light to the utmost. A coherent light emitted from a light source section 1 is supplied to a light emission portion 3 via a connection section 2. The light emission portion 3 comprises a straight type incidence waveguide 32, a dividing waveguide 33, emission waveguides 34 and 35, and a phase modulation section 36, which are provided on an optical substrate 31. The light emission portion 3 performs a phase modulation for one of luminous fluxes and emits irradiation luminous fluxes while keeping the other luminous flux as it is. In an irradiation optical portion 4, these irradiation luminous fluxes are collimating and deflected, and irradiated onto a measurement spot of a scale section 5. In the scale section 5, the two luminous fluxes are diffracted into approximately the same direction and incident onto a light receiving portion 6. A light receiving portion 7 convert the received luminous flux to an electrical received signal, and a displacement of the scale section 5 can be obtained by a displacement measurement section 8, based on the received signal.
    • 提供了一种用于干涉测量的信号形成装置,其能够实现装置的光学调整和超小型化的简单性,以及最大限度地减少了由激光的波长变化引起的影响。 从光源部1发出的相干光通过连接部2供给到发光部3.发光部3包括直线型入射波导32,分割波导33,发光波导34,35和 相位调制部36设置在光学基板31上。发光部3对于一个光束进行相位调制,并且在保持另一光束的同时发射照射光束。 在照射光学部分4中,这些照射光束被准直和偏转,并照射到刻度部分5的测量点上。在刻度部分5中,两个光束被衍射成大致相同的方向并入射到光 光接收部分7将接收的光通量转换成电接收信号,并且可以通过基于接收信号的位移测量部分8获得标尺部分5的位移。
    • 6. 发明授权
    • Optical branching device
    • 光分路器
    • US07561768B2
    • 2009-07-14
    • US11956695
    • 2007-12-14
    • Akira TakadaShinya IkomaShigenori Nagano
    • Akira TakadaShinya IkomaShigenori Nagano
    • G02B6/28G02B6/32
    • G02B6/2937G02B6/32
    • An optical branching device comprises a first lens member comprising a transmitting plane surface, a transmitting convex surface having an approximate center of curvature in the transmitting plane surface, and a first optical fiber and a second optical fiber firmly affixed on the transmitting plane surface of the first lens member. The transmitting convex surface has a wavelength-selective mirror surface that transmits light of a first wavelength and reflects light of a second wavelength. The light of the second wavelength, which is one of the wavelengths of light emitted from the first optical fiber and is reflected and converged by the wavelength-selective mirror surface, enters into the second optical fiber.
    • 光分路装置包括第一透镜构件,第一透镜构件包括透射平面表面,在透射平面中具有大致曲率中心的透射凸表面,以及牢固地固定在透射平面表面的透射平面上的第一光纤和第二光纤 第一透镜构件。 透射凸面具有透射第一波长的光并反射第二波长的光的波长选择镜面。 作为从第一光纤发射并被波长选择镜面反射和收敛的光的波长之一的第二波长的光进入第二光纤。
    • 7. 发明申请
    • OPTICAL BRANCHING DEVICE
    • 光学分支装置
    • US20080219679A1
    • 2008-09-11
    • US11956695
    • 2007-12-14
    • Akira TakadaShinya IkomaShigenori Nagano
    • Akira TakadaShinya IkomaShigenori Nagano
    • H04B10/12
    • G02B6/2937G02B6/32
    • An optical branching device comprises a first lens member comprising a transmitting plane surface, a transmitting convex surface having an approximate center of curvature in the transmitting plane surface, and a first optical fiber and a second optical fiber firmly affixed on the transmitting plane surface of the first lens member. The transmitting convex surface has a wavelength-selective mirror surface that transmits light of a first wavelength and reflects light of a second wavelength. The light of the second wavelength, which is one of the wavelengths of light emitted from the first optical fiber and is reflected and converged by the wavelength-selective mirror surface, enters into the second optical fiber.
    • 光分路装置包括第一透镜构件,第一透镜构件包括透射平面表面,在透射平面中具有大致曲率中心的透射凸表面,以及牢固地固定在透射平面表面的透射平面上的第一光纤和第二光纤 第一透镜构件。 透射凸面具有透射第一波长的光并反射第二波长的光的波长选择镜面。 作为从第一光纤发射并被波长选择镜面反射和收敛的光的波长之一的第二波长的光进入第二光纤。