会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明申请
    • Electron source apparatus
    • 电子源装置
    • US20060066198A1
    • 2006-03-30
    • US11230156
    • 2005-09-19
    • Makoto YamamotoKeisuke KogaAkinori Shiota
    • Makoto YamamotoKeisuke KogaAkinori Shiota
    • H01J9/02
    • H01J1/312B82Y10/00H01J31/127
    • An electron source apparatus includes a plurality of electron emission portions arranged in a matrix on a Si substrate, and a plurality of emitter lines and a plurality of gate lines that are orthogonal to each other, and each of the plurality of electron emission portions being controlled by signals from the plurality of emitter lines and the plurality of gate lines to perform an independent electron emission operation. Furthermore, device isolation regions are provided surrounding the respective plurality of emitter lines, contact holes are formed in the respective plurality of emitter lines, a plurality of emitter line mounting electrodes that correspond to the respective plurality of emitter lines are provided in a region outside regions that are surrounded by the device isolation regions, and conductors that are connected to the respective plurality of emitter line mounting electrodes are connected via the contact holes to the respective plurality of emitter lines corresponding to the respective plurality of emitter line mounting electrodes. Accordingly, the electron source apparatus can achieve high density and size reduction.
    • 电子源装置包括在Si衬底上以矩阵形式布置的多个电子发射部分,以及彼此正交的多条发射极线和多条栅极线,并且多个电子发射部分中的每一个被控制 通过来自多个发射极线和多个栅极线的信号进行独立的电子发射操作。 此外,设置在相应的多个发射极线周围的器件隔离区域,在相应的多个发射极线路中形成接触孔,在多个发射极线的外侧的区域中设置与多个发射极线对应的多个发射极线路安装电极 被连接到相应的多个发射极线路安装电极的导体经由接触孔连接到对应于多个发射极线路安装电极的各个发射极线。 因此,电子源装置可以实现高密度和尺寸减小。