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1. 发明申请

WO02086804A9 IMAGE PROCESSING SYSTEM FOR MULTI-BEAM INSPECTION 审中-公开
标题翻译：用于多光束检测的图像处理系统
公开(公告)号：WO02086804A9
公开(公告)日：2003-04-10
申请号：PCT/US0212265
申请日：2002-04-17
申请人： MULTIBEAM SYSTEMS INC
发明人： MILLER STEPHEN DANIEL , PARKER NORMAN WILLIAM , HOBMANN STEVEN B
IPC分类号： G06T7/00 , G06K9/00
CPC分类号： G06T7/001 , G06T2207/30148
摘要： An image processing system (fig. 1A 200) for use in semiconductor wafer inspection comprises a multiplicity of self-contained image processors for independently performing image cross-correlation and defect detection. The system may also comprise an image normalization engine for performing image brightness and contrast normalization. The self-contained image processors and image normalization engine (fig. 1A 400) access image data from a memory array (fig. 1A 300); the array is fed data from a multiplicity of imaging modules operating in parallel. The memory array is configured to allow simultaneous access for data input, normalization, and cross-correlation and defect detection. Multiple image processing systems can be configured in parallel as a single image processing computer, all sending defect data to a common display module.
摘要翻译：用于半导体晶片检查的图像处理系统（图1A 200）包括用于独立执行图像互相关和缺陷检测的多个自包含图像处理器。该系统还可以包括用于执行图像亮度和对比度归一化的图像归一化引擎。独立的图像处理器和图像归一化引擎（图1A400）从存储器阵列（图1A300）访问图像数据; 该阵列从并行操作的多个成像模块馈送数据。存储器阵列被配置为允许同时访问数据输入，归一化和互相关和缺陷检测。多个图像处理系统可以并行配置为单个图像处理计算机，全部将缺陷数据发送到公共显示模块。

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