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1. 发明申请

WO2006050495A2 METHOD AND APPARATUS FOR THE AUTOMATED PROCESS OF IN-SITU LIFT-OUT 审中-公开
标题翻译：用于自动提升自动化过程的方法和装置
公开(公告)号：WO2006050495A2
公开(公告)日：2006-05-11
申请号：PCT/US2005/039942
申请日：2005-11-03
申请人： OMNIPROBE, INC. , MOORE, Thomas, M. , ZAYKOVA-FELDMAN, Lyudmila
发明人： MOORE, Thomas, M. , ZAYKOVA-FELDMAN, Lyudmila
IPC分类号： H01J37/08
CPC分类号： H01J37/302 , B82Y15/00 , G01N1/32 , H01J37/20 , H01J37/22 , H01J37/3056 , H01J2237/20 , H01J2237/202 , H01J2237/204 , H01J2237/206 , H01J2237/208 , H01J2237/2482 , H01J2237/28 , H01J2237/30411 , H01J2237/30472 , H01J2237/31745
摘要： An apparatus for performing automated in-situ lift-out of a sample (150) from a specimen (125) includes a computer (100) having a memory with computer-readable instructions, a stage (120) for a specimen (125) and a nano-manipulator (130). The stage (120) and the nano-manipulator (130) are controlled by motion controllers (110) connected to the computer (100). The nano-manipulator (130) has a probe tip (140) for attachment to samples (150) excised from the specimen (125). The computer-readable instructions include instructions to cause the stage motion controllers (110) and the nano-manipulator motion controllers (110), as well as an ion-beam source (170), to automatically perform in-situ lift-out of a sample (150) from the specimen (125).
摘要翻译：用于从样本（125）进行样品（150）的自动原位取出的设备包括具有计算机可读指令的存储器的计算机（100），用于样本（125）的级（120）和纳米操纵器（130）。舞台（120）和纳米机械手（130）由连接到计算机（100）的运动控制器（110）控制。纳米操纵器（130）具有用于附接到从样本（125）切除的样品（150）的探针尖端（140）。所述计算机可读指令包括使所述载物台运动控制器（110）和所述纳米机械手运动控制器（110）以及离子束源（170）自动执行原位取出的指令来自样品（125）的样品（150）。

2. 发明申请

WO2006020324A3 METHOD AND APPARATUS FOR IN-SITU PROBE TIP REPLACEMENT INSIDE A CHARGED PARTICLE BEAM MICROSCOPE 审中-公开
公开(公告)号：WO2006020324A3
公开(公告)日：2006-02-23
申请号：PCT/US2005/025745
申请日：2005-07-21
申请人： MOORE, Thomas, M. , ZAYKOVA-FELDMAN, Lyudmila
发明人： MOORE, Thomas, M. , ZAYKOVA-FELDMAN, Lyudmila
IPC分类号： G21K7/00
摘要： We disclose a gripper and associated apparatus and methods for delivering nano-manipulator probe tips inside a vacuum chamber. The gripper includes a tube; a compression cylinder inside of and coaxial with the tube; and at least one elastic ring adjacent to the compression cylinder. There is a vacuum seal coaxial with the compression cylinder for receiving and sealing against a probe tip. An actuator is connected to the compression cylinder for compressing the elastic ring and causing it to grip the probe tip. Thus the probe tip can be gripped, transferred to a different location in the vacuum chamber, and released there. Samples attached to the probe tips will be transferred to a TEM sample holder, shown in several embodiments, that includes a bar having opposed ends; an arm attached to each opposed end of the bar; one or more slots for receiving a probe tip; and, each slot having an inner part and an outer part, where the inner part is smaller than the outer part. The TEM sample holders just described are inserted into a carrier cassette. A cassette for transferring one or more TEM sample holders comprises a platform; at least one bar extending upwardly from the platform; the bar having a groove for receiving and holding a TEM sample holder. A rotatable magazine holds one or more probe tips and selectively releases the tips. The magazine includes a cartridge having a plurality of longitudinal openings for receiving probe tips and dispensing probe tips.

3. 发明申请

WO2006096549A2 APPARATUS AND METHOD FOR AUTOMATED STRESS TESTING OF FLIP-CHIP PACKAGES 审中-公开
标题翻译：用于自动应力测试的芯片包装的装置和方法
公开(公告)号：WO2006096549A2
公开(公告)日：2006-09-14
申请号：PCT/US2006/007700
申请日：2006-03-03
申请人： OMNIPROBE, INC. , ZAYKOVA-FELDMAN, Lyudmila , MOORE, Thomas M.
发明人： ZAYKOVA-FELDMAN, Lyudmila , MOORE, Thomas M.
IPC分类号： G06K9/00
CPC分类号： G01R31/2881 , G01M7/08 , G01N3/00 , G01N3/307 , G01N3/313 , G01N2203/0044 , G01N2203/005 , G01N2203/0057 , G01N2203/0296 , G01N2203/0676 , G01R31/2868 , H01L21/67011
摘要： An apparatus for testing flip-chip packages has a programmed computer (100), a test-engine stage (130) for applying an impact to at least one package (110) under test, and a monitoring stage (140). The test-engine stage (130) causes an impact on the package (110) on the side opposite its ball-grid array. The test-engine stage (130) has actuators connected to the test-engine stage (130) and the computer (100), for moving and aligning the test-engine stage (130). The monitoring stage (140) has a digital camera (300) connected to the computer (100) for transmitting digital images from the ball-grid array side of the package (110) to the computer (100). A microscope (290) is preferably connected to the digital camera (300). A sample stage (120) located between the test-engine stage (130) and the monitoring stage (140) holds the package (110 under test. The sample stage (120) has an acoustic transducer (190) capable of being removably connected to the package (110) under test. The acoustic transducer (190) is connected to the computer (100) for transmitting signals from the acoustic transducer (190) to the computer (100).
摘要翻译：用于测试倒装芯片封装的装置具有编程计算机（100），用于对被测试的至少一个封装（110）施加冲击的测试引擎级（130）和监视级（140）。测试引擎级（130）在与球栅阵列相对的一侧上引起对包装（110）的冲击。测试发动机级（130）具有连接到测试引擎级（130）和计算机（100）的致动器，用于移动和对准测试引擎级（130）。监视级（140）具有连接到计算机（100）的数字照相机（300），用于将数字图像从包装（110）的球栅阵列侧传送到计算机（100）。显微镜（290）优选地连接到数字照相机（300）。位于测试引擎级（130）和监控级（140）之间的样品台（120）保持被测试的包装（110）。样品台（120）具有能够可移除地连接到声学换能器（190）连接到计算机（100），用于将信号从声换能器（190）发送到计算机（100）。

4. 发明申请

WO2006050494A2 APPARATUS AND METHOD OF DETECTING PROBE TIP CONTACT WITH A SURFACE 审中-公开
标题翻译：检测探头与表面接触的装置和方法
公开(公告)号：WO2006050494A2
公开(公告)日：2006-05-11
申请号：PCT/US2005/039940
申请日：2005-11-03
申请人： OMNIPROBE, INC. , MOORE, Thomas, M. , ZAYKOVA-FELDMAN, Lyudmila
发明人： MOORE, Thomas, M. , ZAYKOVA-FELDMAN, Lyudmila
IPC分类号： H01J37/08
CPC分类号： H01J37/22 , B82Y35/00 , H01J37/20 , H01J37/3056 , H01J2237/20 , H01J2237/202 , H01J2237/204 , H01J2237/206 , H01J2237/208 , H01J2237/2482 , H01J2237/28 , H01J2237/31745
摘要： We disclose an apparatus and method for detecting probe-tip (120) contact with a surface, generally inside a focused ion-beam instrument, where the probe tip (120) is attached to a capsule (130), and the capsule (130) is movably secured in a probe shaft (140). There is a fiber-optic cable (150) having a first end and a second end; a beam splitter (115) having first and second output ports; and a light source (100) connected to the beam splitter (115). The first output port of the beam splitter (115) is connected to the first end of the fiber-optic cable (150), and the second output port of the beam splitter (115) is connected to a photodiode (110). The second end of the fiber-optic cable (150) has a mirror (155) for reflecting incident light at approximately a ninety-degree angle to the axis of the optical path in the fiber-optic cable (150) and onto the capsule (130), so that the intensity of the light reflected back from the capsule (130) through the fiber-optic cable (150) is proportional to the deflection of the capsule (130) as the probe tip (120) makes contact with the surface.
摘要翻译：我们公开了一种用于检测探针尖端（120）与通常在聚焦离子束仪器内部的表面接触的装置和方法，其中探针尖端（120）附接到胶囊（130），并且胶囊（130）可移动地固定在探针轴（140）中。存在具有第一端和第二端的光纤电缆（150）分束器（115），具有第一和第二输出端口; 以及连接到分束器（115）的光源（100）。分束器（115）的第一输出端口连接到光纤电缆（150）的第一端，并且分束器（115）的第二输出端口连接到光电二极管（110）。光纤电缆（150）的第二端具有反射镜（155），用于将入射光以与光纤电缆（150）中的光路的轴线成约90度的角度反射到胶囊（ 130），使得通过光纤电缆（150）从胶囊（130）反射的光的强度与探针尖端（120）与表面接触的胶囊（130）的偏转成比例。

5. 发明申请

WO2011011661A2 METHOD AND APPARATUS FOR THE MONITORING OF SAMPLE MILLING IN A CHARGED PARTICLE INSTRUMENT 审中-公开
标题翻译：在带电粒子仪器中监测样品研磨的方法和设备
公开(公告)号：WO2011011661A2
公开(公告)日：2011-01-27
申请号：PCT/US2010/043014
申请日：2010-07-23
申请人： OMNIPROBE, Inc. , ZAYKOVA-FELDMAN, Lyudmila , MOORE, Thomas , AMADOR, Gonzalo
发明人： ZAYKOVA-FELDMAN, Lyudmila , MOORE, Thomas , AMADOR, Gonzalo
IPC分类号： H01J37/26 , H01J37/20 , H01J37/244
CPC分类号： H01J37/3056 , G01N1/32 , H01J37/304 , H01J2237/20207 , H01J2237/2482 , H01J2237/30466 , H01J2237/31745
摘要： An apparatus for monitoring sample milling in a charged-particle instrument has a variable-tilt specimen holder (130) attached to the instrument tilt stage (120). The variable-tilt specimen holder (130) includes a first pivoting plate (260) having a slot (280) for holding a specimen (290) rotatably supported in the variable-tilt specimen holder (130). The first pivoting plate (260) has a range of rotation sufficient to move the preferred axis of thinning of the specimen (290) from a first position where the tilt stage (120) is placed at its maximum range of tilt and the angle between the preferred axis of thinning of the specimen (290) and the axis of the ion beam column (110) of the instrument is greater than zero, to a second position where the preferred axis for thinning of the specimen (290) is substantially parallel to the axis of the ion-beam column (110). A light detector (250) is positioned to intercept light passing through the specimen (290) as it is thinned by ion-beam milling. The intensity of the light passing through the specimen (290) may be compared to the intensity recorded for previous stages of milling to determine an endpoint for milling
摘要翻译：用于监视带电粒子仪器中的样本研磨的装置具有附接到仪器倾斜台（120）的可变倾斜样本保持器（130）。可变倾斜试样保持器130包括第一枢转板260，第一枢转板260具有用于保持可旋转地支撑在可变倾斜试样保持器130中的试样290的槽280。第一枢转板（260）具有足以使试样（290）的优选减薄轴从第一位置移动到第一位置的旋转范围，其中倾斜台（120）被放置在其最大倾斜范围处，所述样本（290）的优选减薄轴线和所述器械的离子束列（110）的轴线大于零，至第二位置，在所述第二位置，所述样本（290）变薄的优选轴线基本上平行于离子束柱（110）的轴线。光检测器（250）被定位成在其通过离子束铣削变薄时拦截穿过样本（290）的光。穿过样本（290）的光的强度可以与针对之前研磨阶段记录的强度进行比较以确定研磨的终点

6. 发明申请

WO2010033420A3 METHODS FOR ELECTRON-BEAM INDUCED DEPOSITION OF MATERIAL INSIDE ENERGETIC-BEAM MICROSCOPES 审中-公开
公开(公告)号：WO2010033420A3
公开(公告)日：2010-03-25
申请号：PCT/US2009/056492
申请日：2009-09-10
申请人： OMNIPROBE, INC. , ZAYKOVA-FELDMAN, Lyudmila , KRUGER, Rocky , MARCHMAN, Herschel , MOORE, Thomas
发明人： ZAYKOVA-FELDMAN, Lyudmila , KRUGER, Rocky , MARCHMAN, Herschel , MOORE, Thomas
IPC分类号： H01L21/205
摘要： We disclose methods for materials deposition on a surface (120) inside an energetic-beam instrument, where the energetic-beam instrument is provided with a laser beam (170), an electron beam (100), and a source (130) of precursor gas (150). The electron beam (100) is focused on the surface (120), and the laser beam (170) is focused to a focal point (190) that is at a distance (200) above the surface (120) of about 5 microns to one mm, preferably from 5 to 50 microns. The focal point (190) of the laser beam (170) will thus be within the stream of precursor gas (150) injected at the sample surface (120), so that the laser beam (170) will facilitate reactions in this gas cloud with less heating of the surface (120).

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