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1. 发明申请

WO2007032826A2 PRECURSOR GAS DELIVERY WITH CARRIER GAS MIXING 审中-公开
标题翻译：前列腺气体输送与载体气体混合
公开(公告)号：WO2007032826A2
公开(公告)日：2007-03-22
申请号：PCT/US2006029921
申请日：2006-07-28
申请人： MKS INSTR INC , MENEGHINI PAUL , SMITH DANIEL , SHAJII ALI
发明人： MENEGHINI PAUL , SMITH DANIEL , SHAJII ALI
CPC分类号： G05D11/133 , C23C16/4481 , C23C16/45512 , C23C16/52
摘要： A system and method are described that control the amount of precursor that is delivered to a process chamber by precisely measuring the mole fraction of the gas mixture being delivered. A gas delivery system includes a delivery chamber, a precursor inlet valve, a carrier inlet valve, an outlet valve, and a controller. The controller controls the opening and closing of the precursor inlet valve, the carrier inlet valve, and the outlet valve, so as to introduce a desired amount of a precursor gas and a carrier gas into the delivery chamber, to generate a gas mixture having a desired mole fraction of the precursor gas, and to deliver to the process chamber the gas mixture having the desired mole fraction of the precursor gas.
摘要翻译：描述了一种系统和方法，其通过精确测量被输送的气体混合物的摩尔分数来控制被输送到处理室的前体的量。气体输送系统包括输送室，前体入口阀，载体入口阀，出口阀和控制器。控制器控制前体入口阀，载体入口阀和出口阀的打开和关闭，以便将所需量的前体气体和载气引入到输送室中，以产生具有前体气体的所需摩尔分数，并将具有所需前体气体摩尔分数的气体混合物输送到处理室。

2. 发明申请

WO2006101697A2 VAPORIZER AND METHOD OF VAPORIZING A LIQUID FOR THIN FILM DELIVERY 审中-公开
标题翻译：蒸发器和蒸发薄膜用于薄膜输送的方法
公开(公告)号：WO2006101697A2
公开(公告)日：2006-09-28
申请号：PCT/US2006007752
申请日：2006-03-03
申请人： MKS INSTR INC , MENEGHINI PAUL , SHAJII ALI , SMITH DANIEL , CLARK WILLIAM
发明人： MENEGHINI PAUL , SHAJII ALI , SMITH DANIEL , CLARK WILLIAM
IPC分类号： C23C16/448 , B01B1/00 , C23C16/455
CPC分类号： C23C16/4485
摘要： A vaporizer including an inlet for liquid and an outlet for gas, a gas valve controlling gas flow to the outlet of the vaporizer, and means for heating liquid flowing between the liquid inlet and the gas valve. The vaporizer also includes means for increasing a heat transfer rate of the liquid flowing between the liquid inlet and the gas valve, and for causing a pressure drop in the liquid so that a pressure of the liquid drops below a vapor transition pressure of the liquid upon reaching the gas valve. The pressure drop occurs under isothermal conditions, and the liquid is vaporized on demand only when the valve is opened. The means for increasing a heat transfer rate and for causing a pressure drop can be a plug of porous media.
摘要翻译：一种蒸发器，包括用于液体的入口和用于气体的出口，气体阀控制气体流向蒸发器的出口，以及用于加热在液体入口和气体阀之间流动的液体的装置。蒸发器还包括用于增加在液体入口和气体阀之间流动的液体的传热速率并且用于引起液体中的压降的装置，使得液体的压力下降到液体的蒸汽过渡压力以下到达气阀。在等温条件下发生压降，仅当阀门打开时液体才能根据需要蒸发。用于增加传热速率和引起压降的方法可以是多孔介质的塞子。

3. 发明申请

WO2006055314A3 REYNOLDS NUMBER CORRECTION FUNCTION FOR MASS FLOW RATE SENSOR 审中-公开
标题翻译：质量流量传感器的雷诺数修正函数
公开(公告)号：WO2006055314A3
公开(公告)日：2006-08-10
申请号：PCT/US2005040280
申请日：2005-11-07
申请人： MKS INSTR INC , SHAJII ALI , MENEGHINI PAUL
发明人： SHAJII ALI , MENEGHINI PAUL
IPC分类号： G01F5/00 , G01F1/684 , G01F1/696 , G01F15/04
CPC分类号： G01F15/046 , G01F1/6847 , G01F1/6965 , G01F5/00
摘要： A mass flow rate sensor uses a Reynolds number correction function to compensate for errors in a bypass ratio of the sensor for all gases, based on the fact that all bypass errors are functions of Reynolds number. The sensor includes a sensor tube and a bypass tube dividing flow, wherein a bypass ratio of the sensor equals a total flow rate through the sensor divided by a flow rate through just the sensor tube. Heater elements heat an upstream portion and a downstream portion of the sensor tube, and a circuit is connected to the heater elements for producing a voltage based upon a difference in resistance between the heater elements. The voltage is calibrated based on known flow rates of a reference gas, and the flow rate through the sensor is based upon the calibrated voltage multiplied by a multi-gas correction function and a Reynolds number correction function.
摘要翻译：基于所有旁路误差都是雷诺数的函数的事实，质量流率传感器使用雷诺数校正函数来补偿所有气体的传感器的旁路比中的误差。传感器包括传感器管和分流管的旁路管，其中传感器的旁路比等于通过传感器的总流量除以仅通过传感器管的流速。加热器元件加热传感器管的上游部分和下游部分，并且电路连接到加热器元件，用于基于加热器元件之间的电阻差产生电压。电压基于已知的参考气体流量进行校准，并且通过传感器的流量基于校准电压乘以多气体校正函数和雷诺数校正函数。

4. 发明申请

WO2005098375A2 THERMAL MASS FLOW RATE SENSOR PROVIDING INCREASED RATE OF HEAT TRANSFER TO GAS 审中-公开
标题翻译：热质量流量传感器向燃气传热提供了更高的速率
公开(公告)号：WO2005098375A2
公开(公告)日：2005-10-20
申请号：PCT/US2005009800
申请日：2005-03-24
申请人： MKS INSTR INC , SHAJII ALI , MENEGHINI PAUL , MYATT LEONARD
发明人： SHAJII ALI , MENEGHINI PAUL , MYATT LEONARD
IPC分类号： G01F1/68 , G01F1/684 , G01F5/00
CPC分类号： G01F1/6847 , G01F5/00
摘要： A sensing apparatus for use in a mass flow rate sensor for measuring a fluid flow rate includes a main conduit for containing a fluid flow, and a capillary tube for tapping a portion of the fluid flow from the main conduit at a first location, and returning the portion of the fluid flow to the conduit at a second location. The capillary tube is disposed about a centerline, and includes an inner wall defined by an inside radius measured from the centerline. The inside radius varies periodically, preferably sinusoidally, along the centerline for at least a portion of the capillary tube, thereby forming a turbulated surface on the inner wall. The turbulated inner wall increases wall surface area, and fluid mixing. The resulting increased heat transfer rate decreases the error in sensor output from nonlinear behavior.
摘要翻译：一种用于测量流体流量的质量流量传感器中的传感装置包括用于容纳流体流的主管道和用于在第一位置处从主管道中抽出流体流的一部分的毛细管，该部分流体在第二位置流向导管。毛细管围绕中心线布置，并且包括由从中心线测量的内径限定的内壁。内部半径沿着毛细管的至少一部分的中心线周期性地，优选地正弦地变化，由此在内壁上形成紊流表面。紊流的内壁增加了壁面积和流体混合。由此产生的增加的传热速率减少了非线性行为导致的传感器输出误差。

5. 发明专利

DE112005002773T5 未知
公开(公告)号：DE112005002773T5
公开(公告)日：2007-10-31
申请号：DE112005002773
申请日：2005-11-07
申请人： MKS INSTR INC
发明人： SHAJII ALI , MENEGHINI PAUL
IPC分类号： G01F1/68 , G01F1/684 , G01F5/00
摘要： A mass flow rate sensor uses a Reynolds number correction function to compensate for errors in a bypass ratio of the sensor for all gases, based on the fact that all bypass errors are functions of Reynolds number. The sensor includes a sensor tube and a bypass tube dividing flow, wherein a bypass ratio of the sensor equals a total flow rate through the sensor divided by a flow rate through just the sensor tube. Heater elements heat an upstream portion and a downstream portion of the sensor tube, and a circuit is connected to the heater elements for producing a voltage based upon a difference in resistance between the heater elements. The voltage is calibrated based on known flow rates of a reference gas, and the flow rate through the sensor is based upon the calibrated voltage multiplied by a multi-gas correction function and a Reynolds number correction function.

6. 发明专利

DE112006000631T5 未知
公开(公告)号：DE112006000631T5
公开(公告)日：2008-01-31
申请号：DE112006000631
申请日：2006-03-03
申请人： MKS INSTR INC
发明人： MENEGHINI PAUL , SHAJII ALI , SMITH DANIEL , CLARK WILLIAM
IPC分类号： C23C16/448 , B01B1/00 , C23C16/455
摘要： A vaporizer including an inlet for liquid and an outlet for gas, a gas valve controlling gas flow to the outlet of the vaporizer, and means for heating liquid flowing between the liquid inlet and the gas valve. The vaporizer also includes means for increasing a heat transfer rate of the liquid flowing between the liquid inlet and the gas valve, and for causing a pressure drop in the liquid so that a pressure of the liquid drops below a vapor transition pressure of the liquid upon reaching the gas valve. The pressure drop occurs under isothermal conditions, and the liquid is vaporized on demand only when the valve is opened. The means for increasing a heat transfer rate and for causing a pressure drop can be a plug of porous media.

7. 发明专利

DE112011100280T5 Steuerung für und Verfahren zur gepulsten Gaszuführung 未知
公开(公告)号：DE112011100280T5
公开(公告)日：2012-11-08
申请号：DE112011100280
申请日：2011-01-06
申请人： MKS INSTR INC
发明人： MENEGHINI PAUL
IPC分类号： C23C16/455 , C23C16/52 , G01F1/34 , G01F11/28
摘要： Ein Molzufuhrsystem und ein Verfahren erzeugen Impulse bekannter molarer Mengen als eine Funktion der Zeitdauer jedes Impulses, die ihrerseits als eine Funktion der thermischen Zustandsgleichung idealer Gase abgeleitet wird. In einer Ausführungsform des Systems umfasst das System: eine Kammer von bekanntem Volumen und kontrollierter und bekannter Temperatur; einen Drucksensor zum Messen des Drucks in der Kammer; ein Auslassventil zu einem Prozesswerkzeug; ein Einlassventil zum Beschicken der Kammer mit dem Zufuhrgas; und ein Steuerungssystem, das dafür konfiguriert und ausgelegt ist, die Funktion des Auslassventils zu steuern und die Menge jedes Gasimpulses durch Zeitsteuerung der Betätigung des Ventils zu dem Prozesswerkzeug zu steuern.

8. 发明专利

DE112005002770T5 未知
公开(公告)号：DE112005002770T5
公开(公告)日：2007-09-27
申请号：DE112005002770
申请日：2005-10-26
申请人： MKS INSTR INC
发明人： SHAJII ALI , MENEGHINI PAUL , SMITH DANIEL ALEXANDER
IPC分类号： G01F5/00 , G01F1/684
摘要： A flow rate sensor includes a main conduit, a sensor tube and a bypass tube connecting an upstream portion of the main conduit to a downstream portion of the main conduit such that flow through the main conduit is divided through the sensor tube and the bypass tube, and at least one heater element for heating the sensor tube. A first flow restrictor of porous media is positioned between the upstream portion of the main conduit and the sensor tube, and a second flow restrictor of porous media is positioned between the upstream portion of the main conduit and the bypass tube. The flow restrictors provide the flow rate sensor with a fixed bypass ratio so that the sensor can operate independently of the type of gas being measured.

9. 发明专利

SG11202111835RA POLYGONAL TOROIDAL PLASMA SOURCE 未知
公开(公告)号：SG11202111835RA
公开(公告)日：2021-11-29
申请号：SG11202111835R
申请日：2020-05-07
申请人： MKS INSTR INC
发明人： MENEGHINI PAUL , SMITH SHAUN
IPC分类号： H01J37/32
摘要： A plasma source is provided that includes multiple metallic blocks. A toroidal plasma chamber and a transformer are substantially embedded in the metallic blocks. The toroidal plasma chamber includes a gas inlet configured to receive a process gas and a gas outlet configured to expel at least a portion of the process gas from the plasma chamber. The plasma chamber also includes multiple linear channel segments, multiple joints, an inlet joint, and an outlet joint machined into the metallic blocks. Each of the inlet joint, the outlet joint, and the joints connects a pair of the linear channel segments. The linear channel segments, the joints, the inlet joint and the outlet joint in combination form the toroidal plasma chamber. The gas inlet is disposed on the inlet joint. The gas outlet is disposed on the outlet joint. An inner angle of each of the joints is greater than about 90 degrees.

10. 发明专利

GB2434208B Reynolds number correction function for mass flow rate sensor 未知
公开(公告)号：GB2434208B
公开(公告)日：2009-05-06
申请号：GB0708927
申请日：2005-11-07
申请人： MKS INSTR INC
发明人： SHAJII ALI , MENEGHINI PAUL
IPC分类号： G01F5/00 , G01F1/684 , G01F1/696 , G01F15/04
摘要： A mass flow rate sensor uses a Reynolds number correction function to compensate for errors in a bypass ratio of the sensor for all gases, based on the fact that all bypass errors are functions of Reynolds number. The sensor includes a sensor tube and a bypass tube dividing flow, wherein a bypass ratio of the sensor equals a total flow rate through the sensor divided by a flow rate through just the sensor tube. Heater elements heat an upstream portion and a downstream portion of the sensor tube, and a circuit is connected to the heater elements for producing a voltage based upon a difference in resistance between the heater elements. The voltage is calibrated based on known flow rates of a reference gas, and the flow rate through the sensor is based upon the calibrated voltage multiplied by a multi-gas correction function and a Reynolds number correction function.

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