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    • 1. 发明专利
    • Apparatus for separating and taking out liquid
    • 用于分离和取出液体的装置
    • JPS5952501A
    • 1984-03-27
    • JP16262182
    • 1982-09-17
    • Mitsubishi Electric Corp
    • OONO TOSHIOFUKUNAGA HIDEJI
    • B01D17/025B01D17/02
    • PURPOSE: To make it possible to automatically take out only the lower liquid and separate two kinds of liquid, by utilizing a float having specific gravity lying between specific gravities of said liquids.
      CONSTITUTION: The mixed liquid 14 in an inner container 16 is separated into upper water 15 and the lower inert liquid 3 by the difference in specific gravities thereof. When the recovery ratio of the inert liquid 3 is increased by repeating the recovery thereof, a float 17 rises. When said float 17 rises from the position of a lower limit photocell 19 to be brought to the position of an upper limit photocell 18, a pump 21 is operated and the inert liquid 3 is pumped out from the lower part of the inner container 16 to be sent into a tank through a vinyl tube 20. The float 17 is fallen as the amount of the recovered inert liquid in the inner container 16 is decreased and, when reaches the position of the lower limit photocell 19, the operation of the pump 21 is stopped and the falling of the float 17 is also stopped.
      COPYRIGHT: (C)1984,JPO&Japio
    • 目的:通过利用比重在所述液体比重之间的浮子,可以自动取出下部液体并分离两种液体。 构成:内容器16中的混合液14通过其比重差而分离为上部水15和下部惰性液体3。 当惰性液体3的回收率通过重复其回收而增加时,浮子17上升。 当所述浮子17从下限光电管19的位置上升到上限光电管18的位置时,操作泵21,并将惰性液体3从内部容器16的下部抽出到 通过乙烯管20将其送入罐中。随着内容器16中回收的惰性液体的量减少,浮子17下降,并且当达到下限光电管19的位置时,泵21的操作 停止,并且浮子17的下降也停止。
    • 4. 发明专利
    • SENSOR
    • JPH041544A
    • 1992-01-07
    • JP10203590
    • 1990-04-17
    • MITSUBISHI ELECTRIC CORP
    • FUKUNAGA HIDEJI
    • G01L3/10G01L3/12
    • PURPOSE:To easily measure dynamic load torque while rotating by arranging a sensor which detects at least two angles on a rotary shaft. CONSTITUTION:When a load is applied to a load 3, torque in a direction oppo site to the same rotating direction is applied to rotary shafts 2b, 2a. When the tortional rigidity of the shaft 2b is less than that of the shaft 2a, the quan tity of tortion of the shaft 2b is increased than that of the shaft 2a, and since rotary disks 9a, 9b are fixed on the shafts 2a, 2b, respectively, the phase of the detecting mark 10b of the rotary disk 9b is delayed than that of the detecting mark 10a of the disk 9a. Phase difference is generated between the output signal Sa of a detecting sensor 11a and the output signal Sb of a detecting sensor 11b. In such a way, the quantity of torque can be measured by converting the quantity of tortion by measuring the phase difference and recognizing the quantity of tortion.
    • 5. 发明专利
    • Inspection device for semiconductor
    • 半导体检测装置
    • JPS58223729A
    • 1983-12-26
    • JP10890382
    • 1982-06-22
    • Mitsubishi Electric Corp
    • OONO TOSHIOFUKUNAGA HIDEJI
    • G01M3/04G01M3/06G01M3/10H01L21/66H01L23/02
    • G01M3/10
    • PURPOSE:To reduce the time required for inspection, by providing a chute which moves upward or downward in and out of inspecting liquid, and supporting the chute freely rockably in such a way that the chute can be inclined to a horizontal direction over the tank on the outside of the inspecting liquid. CONSTITUTION:A support member of a projecting shape punched with a through-hole in the central part is mounted to the bottom surface of a chute 5 by using a conventional screw hole, and both ends of a support shaft 12 thereof are pivotally supported by mounting members 6 fitted so as to sandwich the support member 11. The dislodging of said members is prevented by a stop ring 13. In other words, the chute 5 is supported freely rockably on the shaft 12 so that the chute can incline to a horizontal direction over the liquid tank 3 on the outside of inspecting liquid 2. The inspecting liquid is thus dropped in a short time by tilting the chute 5, and the time required for inspecting semiconductors in reduced.
    • 目的:为了减少检查所需的时间,通过提供向上或向下移入和移出检查液体的滑槽,并且可以自由地摇摆地支撑滑槽,使得滑槽可以倾斜在水箱上的水平方向上 检验液外。 构成:通过使用常规的螺孔将安装在中部的通孔的突出形状的支撑构件安装到滑槽5的底面,其支撑轴12的两端通过安装枢转地支撑 构件6被装配成夹持支撑构件11.通过止动环13防止所述构件的移动。换句话说,滑槽5可自由地支撑在轴12上,使得滑槽能够倾斜到水平方向 在检查液体2的外侧上的液体罐3上。因此,检查液体在短时间内通过倾斜滑槽5而下降,并且检查半导体所需的时间减少。