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1. 发明申请

WO2013139832A1 CERAMIC PRESSURE SENSOR AND METHOD FOR PRODUCTION THEREOF 审中-公开
标题翻译：陶瓷压力传感器及其生产方法
公开(公告)号：WO2013139832A1
公开(公告)日：2013-09-26
申请号：PCT/EP2013/055776
申请日：2013-03-20
申请人： MICROTEL TECNOLOGIE ELETTRONICHE S.P.A.
发明人： COGLIATI, Achille , MAY, Roberto , REGOLIOSI, Pietro , ALBONICO, Angelo Mario Adamo
IPC分类号： G01L9/00 , G01L19/04 , G01L19/06
CPC分类号： G01L9/0054 , B23K1/0008 , B23K1/0016 , B23K1/19 , C04B37/005 , C04B2237/10 , G01L9/0042 , G01L9/0044 , G01L9/0048 , G01L9/0052 , G01L9/0075 , G01L19/04 , G01L19/06 , G01L19/0618 , H01L41/25
摘要： A method for production of a pressure sensor (130) comprising a flat flexible membrane (100) made of a ceramic material and a flat rigid support (110) thereof made of a ceramic material, comprising the following steps: - realising an electric circuit (16, 18) on the membrane (100); - realising an electric contact with the outside on the support (110); - depositing an electrically conductive material on the support (110); - realising an electrical and mechanical coupling between the membrane (100) and the support (110); the electrical coupling between the membrane (100) and the support (110) being performed by deposition and sintering of at least one layer of an electrically conductive sinterable electrical connection material; the mechanical coupling between the membrane (100) and the support (110) being performed by deposition and sintering of at least one layer of sinterable mechanical connection material that is electrically insulating and/or isolated from the layer of sinterable electrical connection material; the layer of sinterable electrical connection material and the layer of sinterable mechanical connection material undergoing re flow together in a single step in a sintering furnace.
摘要翻译：一种制造压力传感器的方法，包括由陶瓷材料制成的扁平柔性膜（100）和由陶瓷材料制成的扁平刚性支撑件（110），包括以下步骤： - 实现电路（ 16），在膜（100）上; - 在支撑件（110）上实现与外部的电接触; - 在所述支撑件（110）上沉积导电材料; - 实现膜（100）和支撑件（110）之间的电和机械耦合; 通过至少一层导电的可烧结电连接材料的沉积和烧结来实现膜（100）和支撑体（110）之间的电耦合; 通过沉积和烧结与可烧结电连接材料层电绝缘和/或隔离的至少一层可烧结机械连接材料来执行膜（100）和支撑体（110）之间的机械耦合; 可烧结电连接材料层和可烧结机械连接材料层在烧结炉中在一个步骤中一起再次流动。

2. 发明公开

EP2834608A1 CERAMIC PRESSURE SENSOR AND METHOD FOR PRODUCTION THEREOF 审中-公开
标题翻译：陶瓷压力传感器和方法及其生产
公开(公告)号：EP2834608A1
公开(公告)日：2015-02-11
申请号：EP13711351.0
申请日：2013-03-20
申请人： Microtel Tecnologie Elettroniche S.P.A.
发明人： COGLIATI, Achille , MAY, Roberto , REGOLIOSI, Pietro , ALBONICO, Angelo Mario Adamo
IPC分类号： G01L9/00 , G01L19/04 , G01L19/06
CPC分类号： G01L9/0054 , B23K1/0008 , B23K1/0016 , B23K1/19 , C04B37/005 , C04B2237/10 , G01L9/0042 , G01L9/0044 , G01L9/0048 , G01L9/0052 , G01L9/0075 , G01L19/04 , G01L19/06 , G01L19/0618 , H01L41/25
摘要： A method for production of a pressure sensor including a flat flexible membrane made of a ceramic material and a flat rigid support thereof made of a ceramic material is provided. Steps include: —establishing an electric circuit on the membrane; —establishing an electric contact with the outside on the support; —depositing an electrically conductive material on the support; —establishing an electrical and mechanical coupling between the membrane and the support. The electrical coupling between the membrane and the support are performed by deposition and sintering of at least one layer of an electrically conductive sinterable electrical connection material. The mechanical coupling between the membrane and the support are performed by deposition and sintering of at least one layer of sinterable mechanical connection material that is electrically insulating and/or isolated from the layer of sinterable electrical connection material. The layer of sinterable electrical connection material and the layer of sinterable mechanical connection material undergo re flow together in a single step in a sintering furnace.

3. 发明公开

EP3279631A1 PIEZORESISTIVE PRESSURE SENSOR PROVIDED WITH A CALIBRATION RESISTOR 审中-公开
标题翻译：压电式压力传感器配有校准电阻
公开(公告)号：EP3279631A1
公开(公告)日：2018-02-07
申请号：EP17182279.4
申请日：2017-07-20
申请人： Microtel Tecnologie Elettroniche S.P.A.
发明人： MAY, Roberto , BERSANI, Erminio Maria , SUVIGHI, Paolo Pietro
IPC分类号： G01L27/00 , H01C17/242
摘要： The piezoresistive pressure sensor (1) comprises a rigid flat support (2), a flat flexible membrane (3) having a flat external face (4) exposed to a pressure of a fluid and a flat internal face (5) delimiting in cooperation with a flat internal face (7) of the support (2) a chamber (9) accommodating the deformation of the membrane (3), an electrical measuring circuit comprising a resistive Wheatstone bridge (10) applied on the flat internal face (5) of the membrane (3) for detecting the deformation of the membrane (3), and at least an electrical resistor (Rc) for calibrating the value of the output signal when the fluid is at a reference pressure, the calibration resistor (Rc) being applied on the flat internal face (5) of the membrane (3).
摘要翻译：压阻式压力传感器（1）包括刚性平坦支撑件（2），具有暴露于流体压力的平坦外表面（4）和平坦内表面（5）的平坦柔性膜（3）（2）的平坦内表面（7），容纳所述膜（3）的变形的腔室（9）;电测量电路，其包括施加在所述平坦内表面（5）上的电阻性惠斯通电桥用于检测膜（3）的变形的膜（3）以及用于在流体处于基准压力时校准输出信号的值的至少一个电阻器（Rc），校准电阻器（Rc）被施加在膜（3）的平坦内表面（5）上。

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