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1. 发明申请

WO2003081338A1 METHOD AND APPARATUS FOR PRINTING LARGE DATA FLOWS 审中-公开
标题翻译：打印大数据流的方法和装置
公开(公告)号：WO2003081338A1
公开(公告)日：2003-10-02
申请号：PCT/SE2003/000462
申请日：2003-03-19
申请人： MICRONIC LASER SYSTEMS AB , ASML NETHERLANDS B.V. , THURÉN, Anders , VAN DER MAST, Karel , BLEEKER, Arno
发明人： THURÉN, Anders , VAN DER MAST, Karel , BLEEKER, Arno
IPC分类号： G03F7/20
CPC分类号： G03F7/70725 , G03F7/70291 , G03F7/704 , G03F7/70508
摘要： An aspect of the present invention includes a method for patterning a workpiece covered at least partly with a layer sensitive to electromagnetic radiation, comprising the actions of, providing a data representation of at least one image to be imaged onto a plurality of locations of said workpiece, fracturing said data representation into a plurality of field stripes, repeating the actions of rasterizing a first field stripe of said data representation, modulating a modulator according to said rasterized field stripe, imaging said first field stripe onto a plurality of locations of said workpiece, rasterizing a second field stripe of said data representation while imaging said first field stripe onto said plurality of locations of said workpiece, terminating the repetition when a predetermined amount of said image is imaged onto said plurality of locations of said workpiece. Other aspects of the present invention are reflected in the detailed description, figures and claims.
摘要翻译：本发明的一个方面包括一种用于图案化至少部分地具有对电磁辐射敏感的层的工件的方法，包括以下动作：提供要成像到所述工件的多个位置上的至少一个图像的数据表示将所述数据表示压缩成多个场条带，重复光栅化所述数据表示的第一场条带的动作，根据所述光栅化场条带调制调制器，将所述第一场条纹成像到所述工件的多个位置上，光栅化所述数据表示的第二场条纹，同时将所述第一场条纹成像到所述工件的所述多个位置上，当将预定量的所述图像成像到所述工件的所述多个位置上时，终止重复。本发明的其它方面在详细描述，附图和权利要求中被体现。

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