会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明申请
    • OPTICAL MEMBRANE ELEMENT
    • 光学膜元件
    • WO2009043885A2
    • 2009-04-09
    • PCT/EP2008063170
    • 2008-10-01
    • ZEISS CARL SMT AGMUELLER ULRICHRATH MARTIN
    • MUELLER ULRICHRATH MARTIN
    • G03F1/64
    • G03F7/7015G02B5/208G03F1/64
    • The present invention relates to an optical membrane element for an optical device in lithography, especially EUV (extreme ultraviolet) lithography, with at least one membrane layer and a frame, which at least partially surrounds the membrane layer and at which at least part of the rim of the membrane layer is mounted, wherein at least one tautening element provided, which facilitates tautening of the membrane layer and wherein the optical membrane element can be used in a projection exposure system, especially for EUV lithography, such that the membrane layer of the membrane element can be adjustably tautened, such that the membrane layer is flat and wherein a method for manufacturing a corresponding optical membrane element is provided, in which a tautening element is generated lithographically together with the membrane layer.
    • 用于光刻设备中的光学器件的光学膜元件技术领域本发明涉及光刻设备中的光学器件的光学膜元件,尤其是EUV(极紫外)光刻技术,其具有至少一个膜层和框架,所述至少一个膜层和框架至少部分地围绕膜层, 其中设置至少一个粘合元件,该粘合元件有利于薄膜层的粘合,并且其中光学膜元件可以用于投影曝光系统中,特别是用于EUV光刻,使得薄膜层的膜层 膜元件可被可调节地拉紧,使得膜层是平坦的,并且其中提供了一种用于制造相应的光学膜元件的方法,其中与膜层一起光刻地产生一种调色元件。