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    • 5. 发明公开
    • ANGULAR VELOCITY SENSOR
    • DREHGESCHWINDIGKEITSSENSOR
    • EP0791804A4
    • 1999-11-17
    • EP96929545
    • 1996-09-06
    • MATSUSHITA ELECTRIC IND CO LTD
    • TERADA JIROSENDA HIROSHITAMURA MASAMIUSHIHARA MASAHARUHATANAKA MASAKAZUMURAKAMI MASAYOSHISHIMIZU HIDEYUKI
    • G01C19/56G01P9/04
    • G01C19/5607
    • An angular velocity sensor for accurately detecting an angular velocity signal. The angular velocity sensor employs a tuning fork structure wherein first and second U-shaped piezoelectric members (4) and (5) superposed with each other through a detection electrode (6) are polarized in the same direction as the direction of thickness in which their prongs (4a) and (5a) at least on one sidre is superposed, and driving signals having opposite phases are supplied between driving electrodes (7) and (12) and between (8) and (11) disposed on the diagonal lines of the tuning fork prongs. Therefore, the driving signals are cancelled in the proximity of the detection electrode, and the driving signals do not mix in the signal detected by the detection electrode (6). Accordingly, the performance of the angular velocity signal can be improved.
    • 用于精确检测角速度信号的角速度传感器。 角速度传感器采用音叉结构,其中通过检测电极(6)彼此重叠的第一和第二U形压电构件(4)和(5)沿与其中它们的厚度方向相同的方向极化 (7)和(12)之间以及(8)和(11)之间提供具有相反相位的驱动信号,该驱动信号至少在一个栅极上重叠, 音叉尖头。 因此,驱动信号在检测电极附近被消除,并且驱动信号不混合由检测电极(6)检测到的信号。 相应地,可以改善角速度信号的性能。