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1. 发明申请

WO2014117161A8 ELECTROMECHANICAL DEVICE 审中-公开
公开(公告)号：WO2014117161A8
公开(公告)日：2014-07-31
申请号：PCT/US2014/013403
申请日：2014-01-28
申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY
发明人： BULOVIC, Vladimir , LANG, Jeffrey, H. , LEE, Hae-seung , SWAGER, Timothy, M. , ANDREW, Trisha, L. , D'ASARO, Matthew, Eric , DEOTARE, Parag , MURARKA, Apoorva , NIROUI, Farnaz , SLETTEN, Ellen , WANG, Annie, I-Jen
IPC分类号： H01H3/02
摘要： Electromechanical devices described herein may employ tunneling phenomena to function as low- voltage switches. Opposing electrodes may be separated by an elastically deformable layer which, in some cases, may be made up of a non-electrically conductive material. In some embodiments, the elastically deformable layer is substantially free of electrically conductive material. When a sufficient actuation voltage and/or force is applied, the electrodes are brought toward one another and, accordingly, the elastically deformable layer is compressed. Though, the elastically deformable layer prevents the electrodes from making direct contact with one another. Rather, when the electrodes are close enough to one another, a tunneling current arises therebetween. The elastically deformable layer may exhibit spring-like behavior such that, upon release of the actuation voltage and/or force, the separation distance between electrodes is restored. Thus, the electromechanical device may be actuated between open and closed switch positions.

2. 发明申请

WO2018195230A1 ELECTROSTATIC ACOUSTIC TRANSDUCER 审中-公开
公开(公告)号：WO2018195230A1
公开(公告)日：2018-10-25
申请号：PCT/US2018/028212
申请日：2018-04-18
申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY
发明人： MURARKA, Apoorva , BULOVIC, Vladimir , LANG, Jeffrey H.
IPC分类号： H04R19/00
CPC分类号： H04R1/1091 , H04R5/02 , H04R5/027 , H04R5/033 , H04R19/00 , H04R19/005 , H04R19/02 , H04R25/505 , H04R25/554 , H04R31/00 , H04R2201/401 , H04R2225/025 , H04R2400/01 , H04R2420/07
摘要： Briefly, in accordance with one or more embodiments, an electrostatic acoustic transducer comprises a substrate comprising a first material to function as a first electrode, a dielectric layer coupled with the first material, wherein the dielectric layer has one or more cavities formed therein, and a membrane coupled with the dielectric layer to cover one or more of the one or more cavities and to function as a second electrode. The electrostatic acoustic transducer generates an acoustic wave in response to an electrical signal applied between the first electrode and the second electrode, wherein the applied electrical signal comprises a direct-current (dc) bias voltage and one or more time-varying electrical signals.

3. 发明申请

WO2015073734A1 THIN-FILM PARYLENE MEMBRANE TRANSFER 审中-公开
标题翻译：薄膜薄膜转移
公开(公告)号：WO2015073734A1
公开(公告)日：2015-05-21
申请号：PCT/US2014/065561
申请日：2014-11-13
申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY
发明人： BULOVIC, Vladimir , LANG, Jeffrey Hastings , WANG, Annie I-Jen , MURARKA, Apoorva , CHANG, Wendi
IPC分类号： B81B7/02 , B81C1/00 , H01L29/84
CPC分类号： B81B7/02 , B81B2201/047 , B81B2203/0127 , B81C1/00 , B81C1/00158 , B81C1/00373 , B81C2201/0185 , H04B10/572 , H05B33/0857
摘要： The disclosure relates to method and apparatus for micro-contact printing of microelectromechanical systems ("MEMS") in a solvent-free environment. The disclosed embodiments enable forming a composite membrane over a parylene layer and transferring the composite structure to a receiving structure to form one or more microcavities covered by the composite membrane. The parylene film may have a thickness in the range of about 100 nm-2 microns; 100 nm-1 micron, 200-300 nm, 300-500 nm, 500 nm to 1 micron and 1-30 microns. Next, one or more secondary layers are formed over the parylene to create a composite membrane. The composite membrane may have a thickness of about 100 nm to 700 nm to several microns. The composite membrane's deflection in response to external forces can be measured to provide a contact-less detector. Conversely, the composite membrane may be actuated using an external bias to cause deflection commensurate with the applied bias.
摘要翻译：本公开涉及在无溶剂环境中微机电系统（“MEMS”）的微接触印刷的方法和装置。所公开的实施方案使得能够在聚对二甲苯层上形成复合膜并将复合结构转移到接收结构以形成由复合膜覆盖的一个或多个微腔。聚对二甲苯膜的厚度可以在约100nm-2微米的范围内; 200nm-1微米，200-300nm，300-500nm，500nm至1微米和1-30微米。接下来，在聚对二甲苯之上形成一个或多个二次层以产生复合膜。复合膜可以具有约100nm至700nm至几微米的厚度。可以测量复合膜的响应于外力的偏转以提供无接触检测器。相反，可以使用外部偏压来致动复合膜，以产生与施加的偏压相称的偏转。

4. 发明申请

WO2013033032A2 METHOD AND APPARATUS FOR RELEASE-ASSISTED MICROCONTACT PRINTING OF MEMS 审中-公开
标题翻译：用于微机械辅助微型打印的方法和装置
公开(公告)号：WO2013033032A2
公开(公告)日：2013-03-07
申请号：PCT/US2012/052549
申请日：2012-08-27
申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY , MURARKA, Apoorva , BULOVIC, Vladimir , PAYDAVOSI, Sarah
发明人： MURARKA, Apoorva , BULOVIC, Vladimir , PAYDAVOSI, Sarah
CPC分类号： B81C1/00373 , B81C2201/0185 , B81C2201/0194
摘要： The disclosure provides methods and apparatus for release-assisted microcontact printing of MEMS. Specifically, the principles disclosed herein enable patterning diaphragms and conductive membranes on a substrate having articulations of desired shapes and sizes. Such diaphragms deflect under applied pressure or force (e.g., electrostatic, electromagnetic, acoustic, pneumatic, mechanical, etc.) generating a responsive signal. Alternatively, the diaphragm can be made to deflect in response to an external bias to measure the external bias/phenomenon. The disclosed principles enable transferring diaphragms and/or thin membranes without rupturing.
摘要翻译：本公开提供了用于MEMS的释放辅助微接触印刷的方法和装置。具体来说，本文公开的原理使得能够在具有所需形状和尺寸的关节的基底上形成膜片和导电膜。这种隔膜在施加的压力或力（例如，静电，电磁，声学，气动，机械等）下偏转，产生响应信号。或者，可以使隔膜响应于外部偏置而偏转以测量外部偏置/现象。所公开的原理使得能够在不破裂的情况下传送膜片和/或薄膜。

5. 发明申请

WO2010075012A2 METHOD AND APPARATUS FOR MICROCONTACT PRINTING OF MEMS 审中-公开
标题翻译： MEMS微型打印的方法与装置
公开(公告)号：WO2010075012A2
公开(公告)日：2010-07-01
申请号：PCT/US2009/067801
申请日：2009-12-14
申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY , BULOVIC, Vladimir , PACKARD, Corrine , JONG-HUA YO, Jennifer , MURARKA, Apoorva , KIM, LeeAnn
发明人： BULOVIC, Vladimir , PACKARD, Corrine , JONG-HUA YO, Jennifer , MURARKA, Apoorva , KIM, LeeAnn
IPC分类号： B81C1/00
CPC分类号： B81C1/0046 , B81B2201/042 , B81C2201/0185 , Y10T29/43 , Y10T29/435 , Y10T29/49002 , Y10T29/4902 , Y10T29/49105 , Y10T156/1168
摘要： The embodiments disclosed herein are directed to fabrication methods useful for creating MEMS via microcontact printing by using small organic molecule release layers. The disclose method enables transfer of a continuous metal film onto a discontinuous platform to form a variable capacitor array. The variable capacitor array can produce mechanical motion under the application of a voltage. The methods disclosed herein eliminate masking and other traditional MEMS fabrication methodology. The methods disclosed herein can be used to form a substantially transparent MEMS having a PDMS layer interposed between an electrode and a graphene diaphragm.
摘要翻译：本文公开的实施例涉及通过使用小的有机分子释放层通过微接触印刷创建MEMS的制造方法。公开的方法能够将连续金属膜转移到不连续平台上以形成可变电容器阵列。可变电容器阵列可以在施加电压的情况下产生机械运动。本文公开的方法消除掩蔽和其它传统的MEMS制造方法。本文公开的方法可以用于形成基本上透明的MEMS，其具有介于电极和石墨烯隔膜之间的PDMS层。

6. 发明公开

EP2948968A1 ELECTROMECHANICAL DEVICE 有权
标题翻译：机电装置
公开(公告)号：EP2948968A1
公开(公告)日：2015-12-02
申请号：EP14742743.9
申请日：2014-01-28
申请人： Massachusetts Institute of Technology
发明人： BULOVIC, Vladimir , LANG, Jeffrey, H. , LEE, Hae-seung , SWAGER, Timothy, M. , ANDREW, Trisha, L. , D'ASARO, Matthew, Eric , DEOTARE, Parag , MURARKA, Apoorva , NIROUI, Farnaz , SLETTEN, Ellen , WANG, Annie, I-Jen
IPC分类号： H01H3/02
CPC分类号： H01H59/0009 , H01H49/00 , H01L45/00 , Y10T156/10
摘要： Electromechanical devices described herein may employ tunneling phenomena to function as low-voltage switches. Opposing electrodes may be separated by an elastically deformable layer which, in some cases, may be made up of a non-electrically conductive material. In some embodiments, the elastically deformable layer is substantially free of electrically conductive material. When a sufficient actuation voltage and/or force is applied, the electrodes are brought toward one another and, accordingly, the elastically deformable layer is compressed. Though, the elastically deformable layer prevents the electrodes from making direct contact with one another. Rather, when the electrodes are close enough to one another, a tunneling current arises therebetween. The elastically deformable layer may exhibit spring-like behavior such that, upon release of the actuation voltage and/or force, the separation distance between electrodes is restored. Thus, the electromechanical device may be actuated between open and closed switch positions.

7. 发明申请

WO2020190732A1 MICROSCALE AND NANOSCALE STRUCTURED ELECTROMECHANICAL TRANSDUCERS EMPLOYING COMPLIANT DIELECTRIC SPACERS 审中-公开
公开(公告)号：WO2020190732A1
公开(公告)日：2020-09-24
申请号：PCT/US2020/022661
申请日：2020-03-13
申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY
发明人： BULOVIC, Vladimir , MURARKA, Apoorva , REARDON, Damien , LANG, Jeffrey, H. , HAN, Jinchi
IPC分类号： G01L1/14 , G01L9/12
摘要： Described embodiments provide an electromechanical transducer including a mechanically compliant, elastically deformable array of dielectric shells. A first electrically conductive electrode is disposed on a first surface of the array. A second electrically conductive electrode is disposed on a second surface of the array, where the second surface opposes the first surface. The array is configured to be mechanically compliant and elastically deformable in response to one or more incident forces applied to the electromechanical transducer.

8. 发明申请

WO2014035486A1 CONTACT -TRANSFER PRINTED MEMBRANES 审中-公开
标题翻译：接触式 - 打印膜
公开(公告)号：WO2014035486A1
公开(公告)日：2014-03-06
申请号：PCT/US2013/032702
申请日：2013-03-15
申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY , MURARKA, Apoorva , BULOVIC, Vladimir , WANG, Annie, I-jen , LANG, Jeffrey, Hastings
发明人： MURARKA, Apoorva , BULOVIC, Vladimir , WANG, Annie, I-jen , LANG, Jeffrey, Hastings
IPC分类号： B81B7/04 , G02B26/08
CPC分类号： B81B7/04 , B06B1/02 , B81B2201/042 , B81B2201/045 , B81B2203/0127 , B81B2207/053 , B81C2201/0185 , B81C2201/0194 , G02B26/0825 , G02B26/0841 , G10K9/12
摘要： The disclosed embodiments provide sensitive pixel arrays formed using solvent-assisted or unassisted release processes. Exemplary devices include detectors arrays, tunable optical instruments, deflectable mirrors, digital micro-mirrors, digital light processing chips, tunable optical micro-cavity resonators, acoustic sensors, acoustic actuators, acoustic transducer devices and capacitive zipper actuators to name a few.
摘要翻译：所公开的实施例提供了使用溶剂辅助或非辅助释放方法形成的敏感像素阵列。示例性设备包括检测器阵列，可调谐光学仪器，偏转镜，数字微镜，数字光处理芯片，可调谐光学微腔谐振器，声学传感器，声学致动器，声学换能器装置和电容拉链致动器。

9. 发明申请

WO2012061830A1 ELECTRONICALLY CONTROLLED SQUISHABLE COMPOSITE SWITCH 审中-公开
标题翻译：电子控制可混合复合开关
公开(公告)号：WO2012061830A1
公开(公告)日：2012-05-10
申请号：PCT/US2011/059639
申请日：2011-11-07
申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY , BULOVIC, Vladimir , LANG, Jeffrey H. , PAYDAVOSI, Sarah , WANG, Annie I-Jen , ANDREW, Trisha L. , MURARKA, Apoorva , NIROUI, Farnaz , YAUL, Frank , GROSSMAN, Jeffrey C.
发明人： BULOVIC, Vladimir , LANG, Jeffrey H. , PAYDAVOSI, Sarah , WANG, Annie I-Jen , ANDREW, Trisha L. , MURARKA, Apoorva , NIROUI, Farnaz , YAUL, Frank , GROSSMAN, Jeffrey C.
IPC分类号： H01L45/00
CPC分类号： H01L29/84 , H01L27/0629 , H01L29/41725 , H01L45/00 , Y10S977/742
摘要： A method and apparatus for making analog and digital electronics which includes a composite including a squishable material doped with conductive particles. A microelectromechanical systems (MEMS) device has a channel made from the composite, where the channel forms a primary conduction path for the device. Upon applied voltage, capacitive actuators squeeze the composite, causing it to become conductive. The squishable device includes a control electrode, and a composite electrically and mechanically connected to two terminal electrodes. By applying a voltage to the control electrode relative to a first terminal electrode, an electric field is developed between the control electrode and the first terminal electrode. This electric field results in an attractive force between the control electrode and the first terminal electrode, which compresses the composite and enables electric control of the electron conduction from the first terminal electrode through the channel to the second terminal electrode.
摘要翻译：一种用于制造模拟和数字电子学的方法和装置，其包括掺杂有导电颗粒的可堆置材料的复合材料。微机电系统（MEMS）装置具有由复合材料制成的通道，其中通道形成器件的主导通路径。在施加电压时，电容执行器挤压复合材料，使其变得导电。可挤压装置包括控制电极，以及电气和机械连接到两个端子电极的复合体。通过相对于第一端子电极向控制电极施加电压，在控制电极和第一端子电极之间产生电场。该电场导致控制电极和第一端子电极之间的吸引力，其压缩复合材料并且能够电控制从第一端子电极通过通道到第二端子电极的电子传导。

10. 发明授权

EP2948968B1 ELECTROMECHANICAL DEVICE 有权
标题翻译：机电设备
公开(公告)号：EP2948968B1
公开(公告)日：2018-03-28
申请号：EP14742743.9
申请日：2014-01-28
申请人： Massachusetts Institute of Technology
发明人： BULOVIC, Vladimir , LANG, Jeffrey, H. , LEE, Hae-seung , SWAGER, Timothy, M. , ANDREW, Trisha, L. , D'ASARO, Matthew, Eric , DEOTARE, Parag , MURARKA, Apoorva , NIROUI, Farnaz , SLETTEN, Ellen , WANG, Annie, I-Jen
IPC分类号： H01L45/00
CPC分类号： H01H59/0009 , H01H49/00 , H01L45/00 , Y10T156/10
摘要： Electromechanical devices described herein may employ tunneling phenomena to function as low-voltage switches. Opposing electrodes may be separated by an elastically deformable layer which, in some cases, may be made up of a non-electrically conductive material. In some embodiments, the elastically deformable layer is substantially free of electrically conductive material. When a sufficient actuation voltage and/or force is applied, the electrodes are brought toward one another and, accordingly, the elastically deformable layer is compressed. Though, the elastically deformable layer prevents the electrodes from making direct contact with one another. Rather, when the electrodes are close enough to one another, a tunneling current arises therebetween. The elastically deformable layer may exhibit spring-like behavior such that, upon release of the actuation voltage and/or force, the separation distance between electrodes is restored. Thus, the electromechanical device may be actuated between open and closed switch positions.

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