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    • 1. 发明申请
    • FILTER UNIT FILTER DEVICE AND FILTRATION PROCESS FOR FLUIDS
    • 过滤装置,过滤装置和用于流体的过滤过程
    • WO2006089944A2
    • 2006-08-31
    • PCT/EP2006060252
    • 2006-02-24
    • MANN & HUMMEL GMBHTHALMANN CHRISTIANRODEWALDT THOMASBURKHART BERND
    • THALMANN CHRISTIANRODEWALDT THOMASBURKHART BERND
    • B01D25/001B01D25/26
    • The invention relates to filter units (10) and a filter device for the purification of a fluid, in particular, process fluids such as required for machining process methods. The filter units (10) comprise a frame (11) and a filter medium (16). The frame (11) has support webs (12), which reinforce the frame (11) and support the filter medium (16). Said support webs (12) are arranged on the downstream side (18) of the filter medium (16), to prevent a choking on the upstream side (17) and permit a simple removal of the filter cake. The filter units (10) are stacked on each other such that the upstream sides (17) of the individual filter units (10) face each other. The same is true for the downstream sides (18) of the filter units (10). Unpurified and purified throughflow nozzles (13), (14) are formed through the frame (11) through which the fluid for purification or the purified fluid can flow.
    • 本发明涉及过滤器单元(10)和用于清洁流体特别是过程流体的过滤器装置,如在机加工过程中所要求的那样。 为此目的,过滤单元(10)具有框架(11)和过滤介质(16)。 框架(11)具有支撑腹板(12),其一方面加强框架(11)并且另一方面支撑过滤介质(16)。 这些支撑腹板12布置在过滤介质16的流出侧18上,从而防止了流入侧17的堵塞,并且使得滤饼的简单分离成为可能。 此外,过滤单元(10)彼此堆叠,使得各个过滤单元(10)的流入侧(17)彼此面对。 这同样适用于过滤器单元(10)的流出侧(18)。 通过框架(11)的原始或纯净的通过管(13),形成(14),待清洁的流体或纯净的流体可通过其流动。
    • 8. 发明申请
    • METHOD FOR CHARGING AND DISCHARGING A PROCESS TANK
    • 方法装货,卸货处理罐
    • WO0178112A8
    • 2002-12-19
    • PCT/EP0103577
    • 2001-03-29
    • MATTSON WET PRODUCTS GMBHRODEWALDT THOMASWEHRLE FELIX
    • RODEWALDT THOMASWEHRLE FELIX
    • B65G49/07H01L21/00H01L21/677
    • H01L21/6704
    • The invention relates to a method for charging and discharging a process tank. The aim of the invention is to simplify the charging and discharging of a process tank with disc-shaped substrates. To this end, the disc-shaped substrates are picked up during charging by a gripper that comprises at least two opposite gripper elements with receiving slots facing one another. The substrates are positioned above the process tank in such a manner that they are aligned with guide slots within the process tank. The gripper is lowered so as to partially lower the substrates into the process tank until they contact a lifted substrate lifting element inside the process tank. The gripper elements are then moved apart into a position in which the substrates are no longer held but are still guided in the receiving slots and they are further lowered into the process tank by lowering the lifting element. For discharging the substrates, a gripper that comprises at least two opposite gripper elements with receiving slots facing one another is positioned above the process tank in such a manner that the guide slots in the tank and the receiving slots in the gripper elements are aligned with one another. The substrates are then lifted by the substrate lifting element and introduced into the receiving slots of the gripper elements. When a predetermined position is reached, the gripper elements are moved towards one another in order to grip the substrates and the substrates are lifted out of the process tank by lifting the gripper.
    • 为了从处理池出在一个处理罐或进入加载和卸载盘形基板简化,本发明提供了一种用于处理池的加载和卸载的方法。 当装载有具有采取具有面对收容槽的至少两个相对的夹构件的夹持器的圆盘状基板,基板被定位在这样的方式使得它们与处理槽内的导向槽对准处理槽的上方,并且所述抓持器被降低到基板 部分地降低到处理槽,直到它们接触的凸起Substrathubelement在处理槽。 随后,将夹持构件被移开以在所述基底不再保持的位置上,但是,在接收时隙进行,并且通过降低所述提升元件在处理池被进一步降低。 当底物,其位置具有以这样的方式,在盆的导向槽和接收槽在所述夹紧元件被彼此对准朝向处理槽上方容纳槽的至少两个相对的夹持构件的夹持器的卸载是第一。 随后,将基片由Substrathubelement抬起并引入到夹持元件的接收槽。 一旦到达一定的位置,夹持元件被朝向彼此移动,以采取在基板和基板通过提升从处理池夹具提起。