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2. 发明申请

WO2003043067A1 APPARATUS FOR MANUFACTURING ORGANIC ELECTRO-LUMINESCENT LIGHT EMITTING DEVICES FOR MASS PRODUCTION 审中-公开
标题翻译：制造大规模生产有机电致发光发光装置的装置
公开(公告)号：WO2003043067A1
公开(公告)日：2003-05-22
申请号：PCT/KR2002/002135
申请日：2002-11-15
申请人： JEONG, Kwang-Ho , LEE, Sam-Hyeon , HWANG, Chang-Hun
发明人： JEONG, Kwang-Ho , LEE, Sam-Hyeon , HWANG, Chang-Hun
IPC分类号： H01L21/20
CPC分类号： C23C14/12 , C23C14/568 , H01L51/56
摘要： The present invention relates to an apparatus for manufacturing an organic electro-luminescent device, and more particularly, to an apparatus for manufacturing an organic electro-luminescent device including a thin film with at least one player. The apparatus for manufacturing the organic electro-luminescent device according to the present invention comprises a substrate carrying chamber 100 in which a plurality of openings 110 for installation of processing chambers are formed and a pump port 120 is installed, a substrate carrying means 200 installed in the substrate carrying chamber 100 for carrying substrates processed in the plurality of openings to next openings within the substrate carrying chamber 100, and a plurality of chambers 300 attached to the openings 100 of the substrate carrying chamber 100, respectively. Accordingly, the substrates can be carried within the substrate carrying chamber and relevant processes such as substrate cleaning, mask alignment and cleaning, and vapor deposition can be simultaneously performed within the plurality of chambers.
摘要翻译：本发明涉及一种用于制造有机电致发光器件的设备，更具体地，涉及一种用于制造包括具有至少一个播放器的薄膜的有机电致发光器件的设备。根据本发明的用于制造有机电致发光器件的装置包括：衬底承载室100，其中形成有用于安装处理室的多个开口110和安装泵口120;衬底承载装置200安装在用于将在多个开口中处理的衬底承载到衬底承载室100内的下一个开口的衬底承载室100以及分别附接到衬底承载室100的开口100的多个室300。因此，可以在基板承载室内承载基板，并且可以在多个室内同时执行诸如基板清洁，掩模对准和清洁以及气相沉积的相关工艺。

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