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    • 6. 发明申请
    • SHAPE MEASUREMENT METHOD
    • 测量方法测量FORM
    • WO2005116578A3
    • 2006-05-11
    • PCT/EP2005005661
    • 2005-05-25
    • CARL MAHR HOLDING GMBHLEHMANN PETER
    • LEHMANN PETER
    • G01B9/02G01B11/14G01B11/24G01B11/30
    • G01B11/2441
    • Disclosed is an interferometric measuring method for detecting shapes, which is based on the interferometric observation of a surface of an object with narrow-band light. A relative movement between the interferometer (1) and the surface (2) of the object generates a test signal on an appropriate photoreceiver, e.g. a camera circuit (5), two closely adjacent signal frequencies (f 0 and f 0 +?f) being extracted from said test signal. The phase difference of the two signal portions is used for determining the distance or the change in distance. The inventive method provides a large univalent area, thus allowing for a great depth measurement range. Said method can be used also with workpieces whose surfaces are provided with steps, measurement not being disrupted at edges and steps of the workpiece. The disclosed method makes it possible to analyze even heavily slanted surfaces which are inclined to such a degree that the same cannot be measured by means of conventional methods that are based on generating and evaluating interference lines because the density of said interference lines is too great.
    • 基于对象表面的下窄带照明干涉观察形状测量的干涉测量方法。 干涉仪(1)和所述物体表面之间的相对运动(2)在合适的感光体产生的,诸如照相机电路(5)从所述两个紧密间隔的信号的频率的测量信号(F 0 )和(f 被提取F) 0 +? 的两个信号分量的相位差被用于确定距离或距离变化。 该方法有一个大的唯一性范围,并且因此,可以将大的深度的测量范围。 它可以应用,在其表面的水平,即使工件。 在机身边缘和水平测量不受影响。 它也可以检查高度倾斜的表面,其倾斜是使得在传统的基于因为过高干扰线密度测量对干涉条纹的方法的生成和分析不再可能。