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1. 发明授权

US07139115B2 Athermalization of an optical parametric oscillator 失效
标题翻译：光参量振荡器的热化
公开(公告)号：US07139115B2
公开(公告)日：2006-11-21
申请号：US10838666
申请日：2004-05-04
申请人： Lynn Schilling-Benz , Jinmei Zhang
发明人： Lynn Schilling-Benz , Jinmei Zhang
IPC分类号： G02F1/39
CPC分类号： G02F1/39 , G02F2203/60
摘要： A method for thermally stabilizing an optical parametric oscillator (OPO) 10 to maintain constant optical path length for stable high power output places a beam dump 32 outside an OPO cavity 18. The OPO 10 has a nonlinear crystal 22 within cavity 18 for splitting a single input pump beam 14 into lower energy signal and idler beams 16, 18. The method includes providing a cavity exit port for unconverted pump and generated idler beams, and absorbing unconverted beams in beam dump 32. The method includes athermalization by actively cooling surfaces used as an optics mounting base, and athermalization by constraining the size of cavity 18 by using thermally stiff members, guiding pins or rails, or by using bimetallic materials with different expansion.
摘要翻译：用于热稳定光学参数振荡器（OPO）10以保持用于稳定的高功率输出的恒定光程长度的方法将光束转储32放置在OPO腔18外部。 OPO 10具有腔18内的非线性晶体22，用于将单个输入泵浦光束14分成较低能量信号和惰轮16,18。该方法包括提供用于未转换的泵和产生的惰轮的空腔出口端口，以及在梁式收集器32中吸收未转换的梁。该方法包括通过主动冷却用作光学安装基座的表面的绝热，以及通过使用热刚性构件，引导销或轨道或通过使用具有不同膨胀的双金属材料约束腔18的尺寸来进行绝热。

2. 发明申请

US20050248831A1 Athermalization of an optical parametric oscillator 失效
标题翻译：光参量振荡器的热化
公开(公告)号：US20050248831A1
公开(公告)日：2005-11-10
申请号：US10838666
申请日：2004-05-04
申请人： Lynn Schilling-Benz , Jinmei Zhang
发明人： Lynn Schilling-Benz , Jinmei Zhang
IPC分类号： G02F1/39 , H01S3/02 , G02F2/02
CPC分类号： G02F1/39 , G02F2203/60
摘要： A method for thermally stabilizing an optical parametric oscillator (OPO) 10 to maintain constant optical path length for stable high power output places a beam dump 32 outside an OPO cavity 18. The OPO 10 has a nonlinear crystal 22 within cavity 18 for splitting a single input pump beam 14 into lower energy signal and idler beams 16, 18. The method includes providing a cavity exit port for unconverted pump and generated idler beams, and absorbing unconverted beams in beam dump 32. The method includes athermalization by actively cooling surfaces used as an optics mounting base, and athermalization by constraining the size of cavity 18 by using thermally stiff members, guiding pins or rails, or by using bimetallic materials with different expansion.
摘要翻译：用于热稳定光学参数振荡器（OPO）10以保持用于稳定的高功率输出的恒定光程长度的方法将光束转储32放置在OPO腔18外部。 OPO 10具有腔18内的非线性晶体22，用于将单个输入泵浦光束14分成较低能量信号和惰轮16,18。该方法包括提供用于未转换的泵和产生的惰轮的空腔出口端口，以及在梁式收集器32中吸收未转换的梁。该方法包括通过主动冷却用作光学安装基座的表面的绝热，以及通过使用热刚性构件，引导销或轨道或通过使用具有不同膨胀的双金属材料约束腔18的尺寸来进行绝热。

3. 发明授权

US07465475B2 Method for controlling the deposition of vaporized organic material 有权
标题翻译：控制汽化有机材料沉积的方法
公开(公告)号：US07465475B2
公开(公告)日：2008-12-16
申请号：US10984667
申请日：2004-11-09
申请人： Jeremy M. Grace , Michael Long , Michael L. Boroson , Jinmei Zhang , Bruce E. Koppe , Thomas W. Palone , Neil P. Redden
发明人： Jeremy M. Grace , Michael Long , Michael L. Boroson , Jinmei Zhang , Bruce E. Koppe , Thomas W. Palone , Neil P. Redden
IPC分类号： C23C16/448
CPC分类号： C23C14/542 , C23C14/12 , C23C14/24 , H01L51/001 , H01L51/56
摘要： A method for controlling the deposition of vaporized organic material onto a substrate surface, includes providing a heating device to produce vaporized organic material; providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; providing a controller operating independently of the heating device and effective in a first condition for limiting the passage of vaporized organic material through the aperture, and effective in a second condition for facilitating the passage of vaporized organic material through the aperture; and wherein the heating device, or the controller, or both are contiguous to the manifold.
摘要翻译：一种用于控制蒸发的有机材料沉积到衬底表面上的方法，包括提供加热装置以产生蒸发的有机材料; 提供具有至少一个孔的歧管，蒸发的有机材料通过该孔通过以沉积到衬底表面上; 提供独立于所述加热装置操作的控制器，并且在第一条件下有效地限制汽化的有机材料通过所述孔的通道，并且在第二条件下有效地促进蒸发的有机材料通过所述孔; 并且其中所述加热装置或所述控制器或两者都与所述歧管邻接。

4. 发明申请

US20060099345A1 Controlling the application of vaporized organic material 有权
标题翻译：控制汽化有机材料的应用
公开(公告)号：US20060099345A1
公开(公告)日：2006-05-11
申请号：US10984667
申请日：2004-11-09
申请人： Jeremy Grace , Michael Long , Michael Boroson , Jinmei Zhang , Bruce Koppe , Thomas Palone , Neil Redden
发明人： Jeremy Grace , Michael Long , Michael Boroson , Jinmei Zhang , Bruce Koppe , Thomas Palone , Neil Redden
IPC分类号： B05D5/06 , C23C16/00
CPC分类号： C23C14/542 , C23C14/12 , C23C14/24 , H01L51/001 , H01L51/56
摘要： A method for controlling the deposition of vaporized organic material onto a substrate surface, includes providing a heating device to produce vaporized organic material; providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; providing a controller operating independently of the heating device and effective in a first condition for limiting the passage of vaporized organic material through the aperture, and effective in a second condition for facilitating the passage of vaporized organic material through the aperture; and wherein the heating device, or the controller, or both are contiguous to the manifold.
摘要翻译：一种用于控制蒸发的有机材料沉积到衬底表面上的方法，包括提供加热装置以产生蒸发的有机材料; 提供具有至少一个孔的歧管，蒸发的有机材料通过该孔通过以沉积到衬底表面上; 提供独立于所述加热装置操作的控制器，并且在第一条件下有效地限制汽化的有机材料通过所述孔的通道，并且在第二条件下有效地促进蒸发的有机材料通过所述孔; 并且其中所述加热装置或所述控制器或两者都与所述歧管邻接。

5. 发明授权

US08012537B2 Controlling the vaporization of organic material 有权
标题翻译：控制有机材料的蒸发
公开(公告)号：US08012537B2
公开(公告)日：2011-09-06
申请号：US12786182
申请日：2010-05-24
申请人： Michael L. Boroson , Michael Long , Jeremy M. Grace , Jinmei Zhang , Bruce E. Koppe , Thomas W. Palone , Neil P. Redden
发明人： Michael L. Boroson , Michael Long , Jeremy M. Grace , Jinmei Zhang , Bruce E. Koppe , Thomas W. Palone , Neil P. Redden
IPC分类号： B05D5/06 , C23C16/00
CPC分类号： C23C14/542 , C23C14/12 , C23C14/246 , H01L51/001
摘要： A method for controlling the deposition of vaporized organic material onto a substrate surface, includes providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; and providing a volume of organic material and maintaining the temperature of such organic material in a first condition so that its vapor pressure is below that needed to effectively form a layer on the substrate, and in a second condition heating a volume percentage of the initial volume of such organic material so that the vapor pressure of the heated organic material is sufficient to effectively form a layer.
摘要翻译：一种用于控制蒸发的有机材料沉积到衬底表面上的方法，包括提供具有至少一个孔的歧管，蒸发的有机材料通过该孔通过以沉积到衬底表面上; 并且提供一定体积的有机材料并将这种有机材料的温度保持在第一状态，使得其蒸气压低于在衬底上有效形成层所需的蒸气压，而在第二条件下加热初始体积的体积百分数的这种有机材料，使得加热的有机材料的蒸气压足以有效地形成层。

6. 发明申请

US20100233367A1 Controlling the Vaporization of Organic Material 有权
标题翻译：控制有机材料的汽化
公开(公告)号：US20100233367A1
公开(公告)日：2010-09-16
申请号：US12786182
申请日：2010-05-24
申请人： Michael L. Boroson , Michael Long , Jeremy M. Grace , Jinmei Zhang , Bruce E. Koppe , Thomas W. Palone , Neil P. Redden
发明人： Michael L. Boroson , Michael Long , Jeremy M. Grace , Jinmei Zhang , Bruce E. Koppe , Thomas W. Palone , Neil P. Redden
IPC分类号： B05D1/00
CPC分类号： C23C14/542 , C23C14/12 , C23C14/246 , H01L51/001
摘要： A method for controlling the deposition of vaporized organic material onto a substrate surface, includes providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; and providing a volume of organic material and maintaining the temperature of such organic material in a first condition so that its vapor pressure is below that needed to effectively form a layer on the substrate, and in a second condition heating a volume percentage of the initial volume of such organic material so that the vapor pressure of the heated organic material is sufficient to effectively form a layer.
摘要翻译：一种用于控制蒸发的有机材料沉积到衬底表面上的方法，包括提供具有至少一个孔的歧管，蒸发的有机材料通过该孔通过以沉积到衬底表面上; 并且提供一定体积的有机材料并将这种有机材料的温度保持在第一状态，使得其蒸气压低于在衬底上有效形成层所需的蒸气压，而在第二条件下加热初始体积的体积百分数的这种有机材料，使得加热的有机材料的蒸气压足以有效地形成层。

7. 发明申请

US20060099344A1 Controlling the vaporization of organic material 审中-公开
标题翻译：控制有机材料的蒸发
公开(公告)号：US20060099344A1
公开(公告)日：2006-05-11
申请号：US10984095
申请日：2004-11-09
申请人： Michael Boroson , Michael Long , Jeremy Grace , Jinmei Zhang , Bruce Koppe , Thomas Palone , Neil Redden
发明人： Michael Boroson , Michael Long , Jeremy Grace , Jinmei Zhang , Bruce Koppe , Thomas Palone , Neil Redden
IPC分类号： B05D5/06 , C23C16/00
CPC分类号： C23C14/542 , C23C14/12 , C23C14/246 , H01L51/001
摘要： A method for controlling the deposition of vaporized organic material onto a substrate surface, includes providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; and providing a volume of organic material and maintaining the temperature of such organic material in a first condition so that its vapor pressure is below that needed to effectively form a layer on the substrate, and in a second condition heating a volume percentage of the initial volume of such organic material so that the vapor pressure of the heated organic material is sufficient to effectively form a layer.
摘要翻译：一种用于控制蒸发的有机材料沉积到衬底表面上的方法，包括提供具有至少一个孔的歧管，蒸发的有机材料通过该孔通过以沉积到衬底表面上; 并且提供一定体积的有机材料并将这种有机材料的温度保持在第一状态，使得其蒸气压低于在衬底上有效形成层所需的蒸气压，而在第二条件下加热初始体积的体积百分数的这种有机材料，使得加热的有机材料的蒸气压足以有效地形成层。

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