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    • 9. 发明授权
    • Non-volatile memory cell devices and methods
    • 非易失性存储单元器件及方法
    • US08268692B2
    • 2012-09-18
    • US13154618
    • 2011-06-07
    • Gurtej S. SandhuKirk D. Prall
    • Gurtej S. SandhuKirk D. Prall
    • H01L21/336
    • H01L21/28273B82Y10/00H01L29/42332
    • A method of fabricating a memory cell including forming nanodots over a first dielectric layer and forming an intergate dielectric layer over the nanodots, where the intergate dielectric layer encases the nanodots. To form sidewalls of the memory cell, a portion of the intergate dielectric layer is removed with a dry etch, where the sidewalls include a location where a nanodot has been deposited. A spacing layer is formed over the sidewalls to cover the location where a nanodot has been deposited and the remaining portion of the intergate dielectric layer and the nanodots can be removed with an etch selective to the intergate dielectric layer.
    • 一种制造存储单元的方法,包括在第一介电层上形成纳米点并在纳米点上形成隔间电介质层,其中隔间电介质层封装在纳米点上。 为了形成存储器单元的侧壁,隔离介电层的一部分用干蚀刻去除,其中侧壁包括已经沉积纳米点的位置。 在侧壁上形成间隔层以覆盖已经沉积纳米点的位置,并且可以用对栅极间电介质层选择性的蚀刻来去除间隔栅电介质层和纳米点的剩余部分。