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1. 发明申请

US20110138505A1 SCANNING PROBE MICROSCOPY EMPLOYING CORRELATION PATTERN RECOGNITION 失效
标题翻译：扫描探针显微镜使用相关图案识别
公开(公告)号：US20110138505A1
公开(公告)日：2011-06-09
申请号：US12854112
申请日：2010-08-10
申请人： Lin Zhou , Huiwen Liu , Dale Egbert , Peter Gunderson , John Ibele , Kah Choong Loo , Cing Siong Ling
发明人： Lin Zhou , Huiwen Liu , Dale Egbert , Peter Gunderson , John Ibele , Kah Choong Loo , Cing Siong Ling
IPC分类号： G01Q30/04 , G01Q10/00
CPC分类号： G01Q40/00 , B82Y35/00 , G01Q30/06
摘要： An apparatus and associated method for topographically characterizing a workpiece. A scanning probe obtains topographical data from the workpiece. A processor controls the scanning probe to scan a reference surface of the workpiece to derive a first digital file and to scan a surface of interest that includes at least a portion of the reference surface to derive a second digital file. Correlation pattern recognition logic integrates the first and second digital files together to align the reference surface with the surface of interest.
摘要翻译：一种用于地形学表征工件的装置和相关方法。扫描探头从工件获取地形数据。处理器控制扫描探针扫描工件的参考表面以导出第一数字文件并扫描包括参考表面的至少一部分的感兴趣的表面以导出第二数字文件。相关模式识别逻辑将第一和第二数字文件集成在一起以将参考表面与感兴趣的表面对齐。

2. 发明授权

US08371155B2 Scanning probe microscopy employing correlation pattern recognition 失效
标题翻译：扫描探针显微镜采用相关模式识别
公开(公告)号：US08371155B2
公开(公告)日：2013-02-12
申请号：US12854112
申请日：2010-08-10
申请人： Lin Zhou , Huiwen Liu , Dale Egbert , Peter Gunderson , John Ibele , Cing Siong Ling
发明人： Lin Zhou , Huiwen Liu , Dale Egbert , Peter Gunderson , John Ibele , Kah Choong Loo , Cing Siong Ling
IPC分类号： G01N19/02
CPC分类号： G01Q40/00 , B82Y35/00 , G01Q30/06
摘要： An apparatus and associated method for topographically characterizing a workpiece. A scanning probe obtains topographical data from the workpiece. A processor controls the scanning probe to scan a reference surface of the workpiece to derive a first digital file and to scan a surface of interest that includes at least a portion of the reference surface to derive a second digital file. Correlation pattern recognition logic integrates the first and second digital files together to align the reference surface with the surface of interest.
摘要翻译：一种用于地形学表征工件的装置和相关方法。扫描探头从工件获取地形数据。处理器控制扫描探针扫描工件的参考表面以导出第一数字文件并扫描包括参考表面的至少一部分的感兴趣的表面以导出第二数字文件。相关模式识别逻辑将第一和第二数字文件集成在一起以将参考表面与感兴趣的表面对齐。

3. 发明授权

US08525112B2 Variable pixel density imaging 有权
标题翻译：可变像素密度成像
公开(公告)号：US08525112B2
公开(公告)日：2013-09-03
申请号：US12854122
申请日：2010-08-10
申请人： Lin Zhou , Huiwen Liu , Dale Egbert , Peter Gunderson , John Ibele
发明人： Lin Zhou , Huiwen Liu , Dale Egbert , Peter Gunderson , John Ibele
IPC分类号： H01J37/26
CPC分类号： G01Q10/06
摘要： A method and associated apparatus for topographically characterizing a workpiece. The workpiece is scanned with a scanning probe along a first directional grid, thereby scanning a reference surface and an area of interest subportion of the reference surface, at a variable pixel density including a first pixel density outside the area of interest and a second pixel density inside the area of interest to derive a first digital file characterizing topography of the workpiece. The workpiece is further scanned along the reference surface and the area of interest with the scanning probe along a second directional grid that is substantially orthogonal to the first directional grid and at a constant pixel density to derive a second digital file characterizing topography of the workpiece. A processor executes computer-readable instructions stored in memory that generate a topographical profile of the workpiece in relation to the first and second digital files.
摘要翻译：一种用于表征工件的方法和相关设备。用扫描探针沿着第一方向网格扫描工件，从而以包括感兴趣区域外的第一像素密度的可变像素密度扫描参考表面的感兴趣部分区域和第二像素密度在感兴趣的区域内导出表征工件的形貌的第一数字文件。沿着与第一方向栅格基本正交并且处于恒定像素密度的第二方向栅格，沿着参考表面和扫描探测器的感兴趣区域进一步扫描工件，以导出表征工件的形貌的第二数字文件。处理器执行存储在存储器中的计算机可读指令，其生成相对于第一和第二数字文件的工件的地形轮廓。

4. 发明申请

US20120042422A1 VARIABLE PIXEL DENSITY IMAGING 有权
标题翻译：可变像素密度成像
公开(公告)号：US20120042422A1
公开(公告)日：2012-02-16
申请号：US12854122
申请日：2010-08-10
申请人： Lin Zhou , Huiwen Liu , Dale Egbert , Peter Gunderson , John Ibele
发明人： Lin Zhou , Huiwen Liu , Dale Egbert , Peter Gunderson , John Ibele
IPC分类号： G01Q10/00 , G06K9/00
CPC分类号： G01Q10/06
摘要： A method and associated apparatus for topographically characterizing a workpiece. The workpiece is scanned with a scanning probe along a first directional grid, thereby scanning a reference surface and an area of interest subportion of the reference surface, at a variable pixel density including a first pixel density outside the area of interest and a second pixel density inside the area of interest to derive a first digital file characterizing topography of the workpiece. The workpiece is further scanned along the reference surface and the area of interest with the scanning probe along a second directional grid that is substantially orthogonal to the first directional grid and at a constant pixel density to derive a second digital file characterizing topography of the workpiece. A processor executes computer-readable instructions stored in memory that generate a topographical profile of the workpiece in relation to the first and second digital files.
摘要翻译：一种用于表征工件的方法和相关设备。用扫描探针沿着第一方向网格扫描工件，从而以包括感兴趣区域外的第一像素密度的可变像素密度扫描参考表面的感兴趣部分区域和第二像素密度在感兴趣的区域内导出表征工件的形貌的第一数字文件。沿着与第一方向栅格基本正交并且处于恒定像素密度的第二方向栅格，沿着参考表面和扫描探测器的感兴趣区域进一步扫描工件，以导出表征工件的形貌的第二数字文件。处理器执行存储在存储器中的计算机可读指令，其生成相对于第一和第二数字文件的工件的地形轮廓。

5. 发明授权

US08296860B2 Atomic force microscopy true shape measurement method 有权
标题翻译：原子力显微镜真实形状测量方法
公开(公告)号：US08296860B2
公开(公告)日：2012-10-23
申请号：US12404849
申请日：2009-03-16
申请人： Huiwen Liu , Lin Zhou , Dale Egbert , Jonathan Arland Nelson , Peter Gunderson
发明人： Huiwen Liu , Lin Zhou , Dale Egbert , Jonathan Arland Nelson , Peter Gunderson
IPC分类号： G01B5/28
CPC分类号： G01Q30/06
摘要： An atomic force microscopy (AFM) method includes a scanning probe that scans a surface of a structure to produce a first structure image. The structure is then rotated by 90° with respect to the scanning probe. The scanning probe scans the surface of the structure again to produce a second structure image. The first and second structure images are combined to produce best fit image of the surface area of the structure. The same method is used to produce the best fit image of a flat standard. The best fit image of the flat standard is subtracted from the best fit image of the structure to obtain a true topographical image in which Z direction run out error is substantially reduced or eliminated.
摘要翻译：原子力显微镜（AFM）方法包括扫描结构的表面以产生第一结构图像的扫描探针。然后将结构相对于扫描探针旋转90°。扫描探针再次扫描结构的表面以产生第二结构图像。第一和第二结构图像被组合以产生结构的表面积的最佳拟合图像。使用相同的方法来产生平坦标准的最佳拟合图像。从结构的最佳拟合图像中减去平面标准的最佳拟合图像，以获得其中Z方向耗尽误差大大降低或消除的真实地形图像。

6. 发明申请

US20100235956A1 ATOMIC FORCE MICROSCOPY TRUE SHAPE MEASUREMENT METHOD 有权
标题翻译：原子力显微镜真实形状测量方法
公开(公告)号：US20100235956A1
公开(公告)日：2010-09-16
申请号：US12404849
申请日：2009-03-16
申请人： Huiwen Liu , Lin Zhou , Dale Egbert , Jonathan Arland Nelson , Peter Gunderson
发明人： Huiwen Liu , Lin Zhou , Dale Egbert , Jonathan Arland Nelson , Peter Gunderson
IPC分类号： G12B21/08
CPC分类号： G01Q30/06
摘要： An atomic force microscopy (AFM) method includes a scanning probe that scans a surface of a structure to produce a first structure image. The structure is then rotated by 90° with respect to the scanning probe. The scanning probe scans the surface of the structure again to produce a second structure image. The first and second structure images are combined to produce best fit image of the surface area of the structure. The same method is used to produce the best fit image of a flat standard. The best fit image of the flat standard is subtracted from the best fit image of the structure to obtain a true topographical image in which Z direction run out error is substantially reduced or eliminated.
摘要翻译：原子力显微镜（AFM）方法包括扫描结构的表面以产生第一结构图像的扫描探针。然后将结构相对于扫描探针旋转90°。扫描探针再次扫描结构的表面以产生第二结构图像。第一和第二结构图像被组合以产生结构的表面积的最佳拟合图像。使用相同的方法来产生平坦标准的最佳拟合图像。从结构的最佳拟合图像中减去平面标准的最佳拟合图像，以获得其中Z方向耗尽误差大大降低或消除的真实地形图像。

7. 发明授权

US07406860B2 Atomic force microscopy scanning and image processing 有权
标题翻译：原子力显微镜扫描和图像处理
公开(公告)号：US07406860B2
公开(公告)日：2008-08-05
申请号：US11413579
申请日：2006-04-28
申请人： Lin Zhou , Huiwen Liu , Dale Egbert , Jonathan A. Nelson , Jianxin Zhu
发明人： Lin Zhou , Huiwen Liu , Dale Egbert , Jonathan A. Nelson , Jianxin Zhu
IPC分类号： G01B6/28
CPC分类号： G01Q40/00 , B82Y35/00 , G01Q30/06
摘要： A topographic profile of a structure is generated using atomic force microscopy. The structure is scanned such that an area of interest of the structure is scanned at a higher resolution than portions of the structure outside of the area of interest. An profile of the structure is then generated based on the scan. To correct skew and tilt of the profile, a first feature of the profile is aligned with a first axis of a coordinate system. The profile is then manipulated to align a second feature of the profile with a second axis of the coordinate system.
摘要翻译：使用原子力显微镜产生结构的形貌。扫描该结构使得结构的感兴趣区域以比目标区域外的结构的部分更高的分辨率被扫描。然后基于扫描生成结构的轮廓。为了校正轮廓的偏斜和倾斜，轮廓的第一特征与坐标系的第一轴对齐。然后对该轮廓进行操纵以将轮廓的第二特征与坐标系的第二轴对齐。

8. 发明申请

US20070251306A1 Atomic force microscopy scanning and image processing 有权
标题翻译：原子力显微镜扫描和图像处理
公开(公告)号：US20070251306A1
公开(公告)日：2007-11-01
申请号：US11413579
申请日：2006-04-28
申请人： Lin Zhou , Huiwen Liu , Dale Egbert , Jonathan Nelson , Jianxin Zhu
发明人： Lin Zhou , Huiwen Liu , Dale Egbert , Jonathan Nelson , Jianxin Zhu
IPC分类号： G01B5/28
CPC分类号： G01Q40/00 , B82Y35/00 , G01Q30/06
摘要： A topographic profile of a structure is generated using atomic force microscopy. The structure is scanned such that an area of interest of the structure is scanned at a higher resolution than portions of the structure outside of the area of interest. An profile of the structure is then generated based on the scan. To correct skew and tilt of the profile, a first feature of the profile is aligned with a first axis of a coordinate system. The profile is then manipulated to align a second feature of the profile with a second axis of the coordinate system.
摘要翻译：使用原子力显微镜产生结构的形貌。扫描该结构使得结构的感兴趣区域以比目标区域外的结构的部分更高的分辨率被扫描。然后基于扫描生成结构的轮廓。为了校正轮廓的偏斜和倾斜，轮廓的第一特征与坐标系的第一轴对齐。然后对该轮廓进行操纵以将轮廓的第二特征与坐标系的第二轴对齐。

9. 发明授权

US09150415B2 Atomic force microscopy of scanning and image processing 有权
标题翻译：原子力显微镜扫描和图像处理
公开(公告)号：US09150415B2
公开(公告)日：2015-10-06
申请号：US12179688
申请日：2008-07-25
申请人： Lin Zhou , Huiwen Liu , Dale Egbert , Jonathan A. Nelson , Jianxin Zhu
发明人： Lin Zhou , Huiwen Liu , Dale Egbert , Jonathan A. Nelson , Jianxin Zhu
IPC分类号： G01B7/34 , B82Y35/00 , G01Q30/06 , G01Q40/00
CPC分类号： G01Q40/00 , B82Y35/00 , G01Q30/06
摘要： A topographic profile of a structure is generated using atomic force microscopy. The structure is scanned such that an area of interest of the structure is scanned at a higher resolution than portions of the structure outside of the area of interest. An profile of the structure is then generated based on the scan. To correct skew and tilt of the profile, a first feature of the profile is aligned with a first axis of a coordinate system. The profile is then manipulated to align a second feature of the profile with a second axis of the coordinate system.
摘要翻译：使用原子力显微镜产生结构的形貌。扫描该结构使得结构的感兴趣区域以比目标区域外的结构的部分更高的分辨率被扫描。然后基于扫描生成结构的轮廓。为了校正轮廓的偏斜和倾斜，轮廓的第一特征与坐标系的第一轴对齐。然后对该轮廓进行操纵以将轮廓的第二特征与坐标系的第二轴对齐。

10. 发明申请

US20080276696A1 ATOMIC FORCE MICROSCOPY OF SCANNING AND IMAGE PROCESSING 有权
标题翻译：原子力显微镜扫描和图像处理
公开(公告)号：US20080276696A1
公开(公告)日：2008-11-13
申请号：US12179688
申请日：2008-07-25
申请人： Lin Zhou , Huiwen Liu , Dale Egbert , Jonathan A. Nelson , Jianxin Zhu
发明人： Lin Zhou , Huiwen Liu , Dale Egbert , Jonathan A. Nelson , Jianxin Zhu
IPC分类号： G01B5/28
CPC分类号： G01Q40/00 , B82Y35/00 , G01Q30/06
摘要： A topographic profile of a structure is generated using atomic force microscopy. The structure is scanned such that an area of interest of the structure is scanned at a higher resolution than portions of the structure outside of the area of interest. An profile of the structure is then generated based on the scan. To correct skew and tilt of the profile, a first feature of the profile is aligned with a first axis of a coordinate system. The profile is then manipulated to align a second feature of the profile with a second axis of the coordinate system.
摘要翻译：使用原子力显微镜产生结构的形貌。扫描该结构使得结构的感兴趣区域以比目标区域外的结构的部分更高的分辨率被扫描。然后基于扫描生成结构的轮廓。为了校正轮廓的偏斜和倾斜，轮廓的第一特征与坐标系的第一轴对齐。然后对该轮廓进行操纵以将轮廓的第二特征与坐标系的第二轴对齐。

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