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    • 3. 发明授权
    • Method for forming a wiring pattern by laser irradiation
    • 通过激光照射形成布线图案的方法
    • US08420301B2
    • 2013-04-16
    • US13036634
    • 2011-02-28
    • Chien-Han HoHua-Min Huang
    • Chien-Han HoHua-Min Huang
    • G03F7/26
    • H05K3/102G03F7/265H05K2203/0522H05K2203/107H05K2203/122
    • A method for forming a wiring pattern by laser irradiation includes the steps of coating a light-sensitive material on a substrate to form a light-sensitive layer, irradiating a laser beam on the light-sensitive material of the substrate to form a pattern including an exposed region exposed to laser irradiation and an unexposed region unexposed to laser irradiation, and forming a metallic wiring pattern by immersing the substrate into a solution having a plurality of metallic nano-particles. The metallic nano-particles are easily bonded to the straighter molecular structure of the light-sensitive material in the exposed region for forming a conducting wiring pattern. The laser irradiation method has advantages such as high-power, high-density, high-directionality and monochromaticity, such that product quality can be effectively controlled. Moreover, the laser irradiated light-sensitive material can form a molecular structure that is easily bonded to the metallic particles. As a result, the chemical wastes are substantially reduced.
    • 通过激光照射形成布线图案的方法包括以下步骤:在基板上涂布感光材料以形成感光层,将激光束照射在基板的感光材料上,形成包括 暴露于激光照射的暴露区域和未暴露于激光照射的未曝光区域,并且通过将衬底浸入具有多个金属纳米颗粒的溶液中而形成金属布线图案。 金属纳米粒子容易地结合到暴露区域中的感光材料的更直的分子结构,以形成导电布线图案。 激光照射方法具有高功率,高密度,高方向性和单色性等优点,可以有效地控制产品质量。 此外,激光照射的感光材料可以形成容易与金属颗粒结合的分子结构。 结果,化学废物大大减少。