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    • 8. 发明申请
    • METHOD AND DEVICE OF DIFFERENTIAL CONFOCAL AND INTERFERENCE MEASUREMENT FOR MULTIPLE PARAMETERS OF AN ELEMENT
    • 差分协调的方法和设备和干扰测量对于元素的多个参数
    • US20130010286A1
    • 2013-01-10
    • US13636123
    • 2011-11-09
    • Weiqian ZhaoJiamiao YangLirong QiuYun WangJia Li
    • Weiqian ZhaoJiamiao YangLirong QiuYun WangJia Li
    • G01B11/24G01N21/41G01B11/06G01B11/255G01B11/02
    • G01M11/025G01B11/06G01B11/14G01B11/2441G01B11/255G01M11/0271
    • The present invention relates to the field of optical precision measurement technologies, and in particular, to a method and a device of differential confocal (confocal) and interference measurement for multiple parameters of an element. The core concept of the invention lies in that: the concurrent high-precision measurement of multiple parameters of an element may be realized by measuring the surface curvature radius of an element with spherical surface, the back focal length of a lens, the refractive index of a lens, the thickness of a lens and the axial spaces of an assembled lenses by using a differential confocal (confocal) measuring system and measuring the surface profile of the element by using a figure interference measuring system. In the invention, a differential confocal (confocal) detection system and a figure interference measuring system are combined for the first time, the method covers more measured parameters, and during the measurement of multiple parameters of an element, it is not essential to readjust the optical path or disassemble the test element, thus no damage will be caused on the test element, and the measurement speed will be fast.
    • 本发明涉及光学精密测量技术领域,特别涉及用于元件的多个参数的差分共焦(共焦)和干涉测量的方法和装置。 本发明的核心思想在于:通过测量具有球形表面的元件的表面曲率半径,透镜的后焦距,折射率的折射率,可以实现元件的多个参数的并行高精度测量 通过使用差分共焦(共焦)测量系统,透镜,透镜的厚度和组装的透镜的轴向空间,并通过使用图形干涉测量系统测量元件的表面轮廓。 在本发明中,首次组合了差分共焦(共焦)检测系统和图形干扰测量系统,该方法涵盖更多的测量参数,并且在测量元件的多个参数期间,重要的是不必重新调整 光路或拆卸测试元件,因此不会对测试元件造成损坏,测量速度将会很快。