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    • 2. 发明授权
    • Sputter ion pump
    • 溅射离子泵
    • US07819633B2
    • 2010-10-26
    • US11478421
    • 2006-06-28
    • Li QianJie TangLiang LiuJing QiPi-Jin ChenZhao-Fu HuShou-Shan Fan
    • Li QianJie TangLiang LiuJing QiPi-Jin ChenZhao-Fu HuShou-Shan Fan
    • F04B37/02
    • F04B37/02F04B37/14H01J41/20
    • A sputter ion pump includes one vacuum chamber, two parallel anode poles and one cold cathode electron emitter. The vacuum chamber includes at least one aperture located in an outer wall thereof. The two parallel anode poles are positioned in the vacuum chamber and arranged in a symmetrical configuration about a center axis of the vacuum chamber. The cold cathode electron emission device is located on or proximate the outer wall of the vacuum chamber and faces a corresponding aperture. The cold cathode electron emission device is thus configured for injecting electrons through the corresponding aperture and into the vacuum chamber. The sputter ion pump produces a saddle-shaped electrostatic field and is free of a magnetic field. The sputter ion pump has a simplified structure and a low power consumption.
    • 溅射离子泵包括一个真空室,两个平行的阳极和一个冷阴极电子发射器。 真空室包括位于其外壁中的至少一个孔。 两个平行的阳极极位于真空室中,并以关于真空室的中心轴线的对称构型布置。 冷阴极电子发射装置位于真空室的外壁上或靠近真空室的外壁并面对相应的孔。 因此,冷阴极电子发射器件被配置用于通过相应的孔注入电子并进入真空室。 溅射离子泵产生鞍形静电场并且没有磁场。 溅射离子泵具有简化的结构和低功耗。
    • 3. 发明授权
    • Ion generator
    • 离子发生器
    • US07442941B2
    • 2008-10-28
    • US11460610
    • 2006-07-27
    • Li QianJing QiJie TangLiang LiuZhao-Fu HuPi-Jin ChenShou-Shan Fan
    • Li QianJing QiJie TangLiang LiuZhao-Fu HuPi-Jin ChenShou-Shan Fan
    • H01J27/02H01J37/08G21K1/02
    • H01J27/04
    • An ion generator (10) generally includes: a shielding shell (11), a cathode device (16), and an annular anode (14). The shielding shell has a first end (113), an opposite second end (115) and a main body (111) therebetween. The first end has an electron-input hole (13). The second end has an ion-output hole (15). The main body has a gas inlet (170) for introducing an ionizable gas (170). The cathode device faces the electron-input hole for emitting electrons to enter the shielding shell so as to ionize the ionizable gas thereby generating ions. The cathode device includes a conductive base (160) and at least one field emitter (161) thereon. The annular anode is arranged in the shielding shell. The anode is aligned with the ion-output hole.
    • 离子发生器(10)通常包括:屏蔽壳(11),阴极装置(16)和环形阳极(14)。 屏蔽壳具有第一端(113),相对的第二端(115)和它们之间的主体(111)。 第一端具有电子输入孔(13)。 第二端具有离子输出孔(15)。 主体具有用于引入可电离气体(170)的气体入口(170)。 阴极器件面向用于发射电子的电子输入孔进入屏蔽壳,从而电离可电离气体,从而产生离子。 阴极器件包括导电基底(160)和至少一个场致发射体(161)。 环形阳极布置在屏蔽壳体中。 阳极与离子输出孔对准。
    • 4. 发明申请
    • ION GENERATOR
    • 离子发生器
    • US20070114475A1
    • 2007-05-24
    • US11460610
    • 2006-07-27
    • Li QianJing QiJie TangLiang LiuZhao-Fu HuPi-Jin ChenShou-Shan Fan
    • Li QianJing QiJie TangLiang LiuZhao-Fu HuPi-Jin ChenShou-Shan Fan
    • G21F3/00
    • H01J27/04
    • An ion generator (10) generally includes: a shielding shell (11), a cathode device (16), and an annular anode (14). The shielding shell has a first end (113), an opposite second end (115) and a main body (111) therebetween. The first end has an electron-input hole (13). The second end has an ion-output hole (15). The main body has a gas inlet (170) for introducing an ionizable gas (170). The cathode device faces the electron-input hole for emitting electrons to enter the shielding shell so as to ionize the ionizable gas thereby generating ions. The cathode device includes a conductive base (160) and at least one field emitter (161) thereon. The annular anode is arranged in the shielding shell. The anode is aligned with the ion-output hole.
    • 离子发生器(10)通常包括:屏蔽壳(11),阴极装置(16)和环形阳极(14)。 屏蔽壳具有第一端(113),相对的第二端(115)和它们之间的主体(111)。 第一端具有电子输入孔(13)。 第二端具有离子输出孔(15)。 主体具有用于引入可电离气体(170)的气体入口(170)。 阴极器件面向用于发射电子的电子输入孔进入屏蔽壳,从而电离可电离气体,从而产生离子。 阴极器件包括导电基底(160)和至少一个场致发射体(161)。 环形阳极布置在屏蔽壳体中。 阳极与离子输出孔对准。
    • 6. 发明授权
    • Cold cathode device and vacuum gauge using same
    • 冷阴极装置和真空计使用相同
    • US07141983B2
    • 2006-11-28
    • US11092087
    • 2005-03-29
    • Peng LiuLei-Mei ShengYang WeiLiang LiuJing QiShou-Shan Fan
    • Peng LiuLei-Mei ShengYang WeiLiang LiuJing QiShou-Shan Fan
    • G01L21/34
    • G01L21/34
    • A cold cathode device (20) includes a grid (24), a cold cathode (21) positioned under the grid, and a shield electrode (26) positioned above and parallel to the grid. A vacuum gauge includes a shell (32), a collector (39), an anode (38), and the cold cathode device of the present invention. The cold cathode device and the collector are positioned symmetrically relative to the anode. The collector, the grid and the cold cathode device are received in the shell. The shield electrode can shield an electric field of the grid for preventing from disturbing a symmetrical saddle field in the vacuum gauge. Electrons produced by the cold cathode device can obtain a long electron track because the electron vibration in the saddle field is symmetrical. Thus, the vacuum gauge has an improved sensitivity, and can be widely used to measure pressure in ultra-high and extremely high vacuum conditions.
    • 冷阴极器件(20)包括栅格(24),位于栅格下方的冷阴极(21)和位于栅格上方并平行于栅极的屏蔽电极(26)。 真空计包括壳体(32),收集器(39),阳极(38)和本发明的冷阴极装置。 冷阴极器件和集电器相对于阳极对称地定位。 收集器,格栅和冷阴极装置被接收在外壳中。 屏蔽电极可以屏蔽电网的电场,以防止干扰真空计中的对称鞍场。 由冷阴极器件产生的电子可以获得长电子轨迹,因为鞍场中的电子振动是对称的。 因此,真空计具有提高的灵敏度,并且可以广泛用于在超高和极高的真空条件下测量压力。
    • 7. 发明申请
    • Cold cathode device and vacuum gauge using same
    • 冷阴极装置和真空计使用相同
    • US20050237066A1
    • 2005-10-27
    • US11092087
    • 2005-03-29
    • Peng LiuLei-Mei ShengYang WeiLiang LiuJing QiShou-Shan Fan
    • Peng LiuLei-Mei ShengYang WeiLiang LiuJing QiShou-Shan Fan
    • G01L21/30G01L21/34H01J3/02
    • G01L21/34
    • A cold cathode device (20) includes a grid (24), a cold cathode (21) positioned under the grid, and a shield electrode (26) positioned above and parallel to the grid. A vacuum gauge includes a shell (32), a collector (39), an anode (38), and the cold cathode device of the present invention. The cold cathode device and the collector are positioned symmetrically relative to the anode. The collector, the grid and the cold cathode device are received in the shell. The shield electrode can shield an electric field of the grid for preventing from disturbing a symmetrical saddle field in the vacuum gauge. Electrons produced by the cold cathode device can obtain a long electron track because the electron vibration in the saddle field is symmetrical. Thus, the vacuum gauge has an improved sensitivity, and can be widely used to measure pressure in ultra-high and extremely high vacuum conditions.
    • 冷阴极器件(20)包括栅格(24),位于栅格下方的冷阴极(21)和位于栅格上方并平行于栅极的屏蔽电极(26)。 真空计包括壳体(32),收集器(39),阳极(38)和本发明的冷阴极装置。 冷阴极器件和集电器相对于阳极对称地定位。 收集器,格栅和冷阴极装置被接收在外壳中。 屏蔽电极可以屏蔽电网的电场,以防止干扰真空计中的对称鞍场。 由冷阴极器件产生的电子可以获得长电子轨迹,因为鞍场中的电子振动是对称的。 因此,真空计具有提高的灵敏度,并且可以广泛用于在超高和极高的真空条件下测量压力。