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1. 发明申请

US20110108900A1 BI-DIRECTIONAL SELF-ALIGNED FET CAPACITOR 有权
标题翻译：双向自对准FET电容器
公开(公告)号：US20110108900A1
公开(公告)日：2011-05-12
申请号：US12616861
申请日：2009-11-12
申请人： Leland Chang , Chung-Hsun Lin , Brian L. Ji , Jeffrey W. Sleight
发明人： Leland Chang , Chung-Hsun Lin , Brian L. Ji , Jeffrey W. Sleight
IPC分类号： H01L29/94 , H01L21/334
CPC分类号： H01L27/0811 , H01L21/26586 , H01L21/823418 , H01L21/84 , H01L27/1203 , H01L29/66181 , H01L29/94
摘要： A method of forming a field effect transistor (FET) capacitor includes forming a channel region; forming a gate stack over the channel region; forming a first extension region on a first side of the gate stack, the first extension region being formed by implanting a first doping material at a first angle such that a shadow region exists on a second side of the gate stack; and forming a second extension region on the second side of the gate stack, the second extension region being formed by implanting a second doping material at a second angle such that a shadow region exists on the first side of the gate stack.
摘要翻译：形成场效应晶体管（FET）电容器的方法包括：形成沟道区; 在沟道区上形成栅叠层; 在所述栅极堆叠的第一侧上形成第一延伸区域，所述第一延伸区域通过以第一角度注入第一掺杂材料形成，使得阴极区域存在于所述栅极叠层的第二侧上; 以及在所述栅极堆叠的第二侧上形成第二延伸区域，所述第二延伸区域通过以第二角度注入第二掺杂材料形成，使得阴极区域存在于所述栅极叠层的第一侧上。

2. 发明授权

US08741730B2 Bi-directional self-aligned FET capacitor 有权
标题翻译：双向自对准FET电容
公开(公告)号：US08741730B2
公开(公告)日：2014-06-03
申请号：US13565294
申请日：2012-08-02
申请人： Leland Chang , Brian L. Ji , Chung-Hsun Lin , Jeffrey W. Sleight
发明人： Leland Chang , Brian L. Ji , Chung-Hsun Lin , Jeffrey W. Sleight
IPC分类号： H01L29/94 , H01L21/8242
CPC分类号： H01L27/0811 , H01L21/26586 , H01L21/823418 , H01L21/84 , H01L27/1203 , H01L29/66181 , H01L29/94
摘要： A method of forming a field effect transistor (FET) capacitor includes forming a channel region; forming a gate stack over the channel region; forming a first extension region on a first side of the gate stack, the first extension region being formed by implanting a first doping material at a first angle such that a shadow region exists on a second side of the gate stack; and forming a second extension region on the second side of the gate stack, the second extension region being formed by implanting a second doping material at a second angle such that a shadow region exists on the first side of the gate stack.
摘要翻译：形成场效应晶体管（FET）电容器的方法包括：形成沟道区; 在沟道区上形成栅叠层; 在所述栅极堆叠的第一侧上形成第一延伸区域，所述第一延伸区域通过以第一角度注入第一掺杂材料形成，使得阴极区域存在于所述栅极叠层的第二侧上; 以及在所述栅极堆叠的第二侧上形成第二延伸区域，所述第二延伸区域通过以第二角度注入第二掺杂材料形成，使得阴极区域存在于所述栅极叠层的第一侧上。

3. 发明申请

US20120292678A1 BI-DIRECTIONAL SELF-ALIGNED FET CAPACITOR 有权
标题翻译：双向自对准FET电容器
公开(公告)号：US20120292678A1
公开(公告)日：2012-11-22
申请号：US13565294
申请日：2012-08-02
申请人： Leland Chang , Chung-Hsun Lin , Brian L. Ji , Jeffrey W. Sleight
发明人： Leland Chang , Chung-Hsun Lin , Brian L. Ji , Jeffrey W. Sleight
IPC分类号： H01L29/94 , H01L21/02
CPC分类号： H01L27/0811 , H01L21/26586 , H01L21/823418 , H01L21/84 , H01L27/1203 , H01L29/66181 , H01L29/94
摘要： A method of forming a field effect transistor (FET) capacitor includes forming a channel region; forming a gate stack over the channel region; forming a first extension region on a first side of the gate stack, the first extension region being formed by implanting a first doping material at a first angle such that a shadow region exists on a second side of the gate stack; and forming a second extension region on the second side of the gate stack, the second extension region being formed by implanting a second doping material at a second angle such that a shadow region exists on the first side of the gate stack.
摘要翻译：形成场效应晶体管（FET）电容器的方法包括：形成沟道区; 在沟道区上形成栅叠层; 在所述栅极堆叠的第一侧上形成第一延伸区域，所述第一延伸区域通过以第一角度注入第一掺杂材料形成，使得阴极区域存在于所述栅极叠层的第二侧上; 以及在所述栅极堆叠的第二侧上形成第二延伸区域，所述第二延伸区域通过以第二角度注入第二掺杂材料形成，使得阴极区域存在于所述栅极叠层的第一侧上。

4. 发明授权

US08309445B2 Bi-directional self-aligned FET capacitor 有权
标题翻译：双向自对准FET电容
公开(公告)号：US08309445B2
公开(公告)日：2012-11-13
申请号：US12616861
申请日：2009-11-12
申请人： Leland Chang , Brian L. Ji , Chung-Hsun Lin , Jeffrey W. Sleight
发明人： Leland Chang , Brian L. Ji , Chung-Hsun Lin , Jeffrey W. Sleight
IPC分类号： H01L21/336 , H01L21/425 , H01L29/94
CPC分类号： H01L27/0811 , H01L21/26586 , H01L21/823418 , H01L21/84 , H01L27/1203 , H01L29/66181 , H01L29/94
摘要： A method of forming a field effect transistor (FET) capacitor includes forming a channel region; forming a gate stack over the channel region; forming a first extension region on a first side of the gate stack, the first extension region being formed by implanting a first doping material at a first angle such that a shadow region exists on a second side of the gate stack; and forming a second extension region on the second side of the gate stack, the second extension region being formed by implanting a second doping material at a second angle such that a shadow region exists on the first side of the gate stack.
摘要翻译：形成场效应晶体管（FET）电容器的方法包括：形成沟道区; 在沟道区上形成栅叠层; 在所述栅极堆叠的第一侧上形成第一延伸区域，所述第一延伸区域通过以第一角度注入第一掺杂材料形成，使得阴极区域存在于所述栅极叠层的第二侧上; 以及在所述栅极堆叠的第二侧上形成第二延伸区域，所述第二延伸区域通过以第二角度注入第二掺杂材料形成，使得阴极区域存在于所述栅极叠层的第一侧上。

5. 发明申请

US20130260525A1 LOW EXTENSION DOSE IMPLANTS IN SRAM FABRICATION 有权
标题翻译： SRAM扩展中的低延伸剂量植入
公开(公告)号：US20130260525A1
公开(公告)日：2013-10-03
申请号：US13438437
申请日：2012-04-03
申请人： Leland Chang , Chung-Hsun Lin , Shih-Hsien Lo , Jeffrey W. Sleight
发明人： Leland Chang , Chung-Hsun Lin , Shih-Hsien Lo , Jeffrey W. Sleight
IPC分类号： H01L21/336
CPC分类号： H01L29/7833 , H01L27/0207 , H01L27/1104 , H01L29/6659
摘要： A static random access memory fabrication method includes forming a gate stack on a substrate, forming isolating spacers adjacent the gate stack, the isolating spacers and gate stack having a gate length, forming a source and drain region adjacent the gate stack, which generates an effective gate length, wherein the source and drain regions are formed from a low extension dose implant that varies a difference between the gate length and the effective gate length.
摘要翻译：一种静态随机存取存储器制造方法包括在衬底上形成栅极堆叠，在栅极叠层附近形成隔离间隔物，隔离间隔物和栅极叠层具有栅极长度，形成与栅极堆叠相邻的源极和漏极区域，其产生有效的栅极长度，其中源极和漏极区域由改变栅极长度和有效栅极长度之间的差异的低延伸剂量注入形成。

6. 发明申请

US20130176769A1 8-TRANSISTOR SRAM CELL DESIGN WITH SCHOTTKY DIODES 有权
标题翻译：具有肖特基二极管的8晶体管SRAM单元设计
公开(公告)号：US20130176769A1
公开(公告)日：2013-07-11
申请号：US13345619
申请日：2012-01-06
申请人： Leland Chang , Isaac Lauer , Chung-Hsun Lin , Jeffrey W. Sleight
发明人： Leland Chang , Isaac Lauer , Chung-Hsun Lin , Jeffrey W. Sleight
IPC分类号： G11C11/40
CPC分类号： G11C11/417 , G11C11/412
摘要： An 8-transistor SRAM cell which includes two pull-up transistors and two pull-down transistors in cross-coupled inverter configuration to form two inverters for storing a single data bit, wherein each of the inverters includes a Schottky diode; first and second pass gate transistors having a gate terminal coupled to a write word line and a source or drain of each of the pass gate transistors coupled to a write bit line; and first and second read transistors coupled to the two pull-up and two pull-down transistors, one of the read transistors having a gate terminal coupled to a read word line and a source or a drain coupled to a read bit line. In a preferred embodiment, the 8-transistor SRAM cell has column select writing enabled for writing a value to the 8-transistor SRAM cell without inadvertently also writing a value to another 8-transistor SRAM cell.
摘要翻译：一种8晶体管SRAM单元，其包括两个上拉晶体管和两个交叉耦合的反相器配置的下拉晶体管，以形成用于存储单个数据位的两个反相器，其中每个反相器包括肖特基二极管; 第一和第二栅极晶体管，其具有耦合到写入字线的栅极端子和耦合到写位线的每个通路栅极晶体管的源极或漏极; 以及耦合到所述两个上拉和两个下拉晶体管的第一和第二读取晶体管，所述读取晶体管中的一个具有耦合到读取字线的栅极端子和耦合到读取位线的源极或漏极。在优选实施例中，8晶体管SRAM单元具有使能用于向8晶体管SRAM单元写入值的列选择写入，而无需另外向另一个8-晶体管SRAM单元写入一个值。

7. 发明授权

US08426917B2 Body-tied asymmetric P-type field effect transistor 有权
标题翻译：体系不对称P型场效应晶体管
公开(公告)号：US08426917B2
公开(公告)日：2013-04-23
申请号：US12683606
申请日：2010-01-07
申请人： Jeffrey W. Sleight , Chung-Hsun Lin , Josephine B. Chang , Leland Chang
发明人： Jeffrey W. Sleight , Chung-Hsun Lin , Josephine B. Chang , Leland Chang
IPC分类号： H01L29/786 , H01L21/336
CPC分类号： H01L29/78612 , H01L21/26586 , H01L29/1083 , H01L29/42384 , H01L29/66772
摘要： In one exemplary embodiment of the invention, an asymmetric P-type field effect transistor includes: a source region coupled to a drain region via a channel; a gate structure overlying at least a portion of the channel; a halo implant disposed at least partially in the channel, where the halo implant is disposed closer to the source region than the drain region; and a body-tie coupled to the channel. In a further exemplary embodiment, the asymmetric P-type field effect transistor is operable to act as a symmetric P-type field effect transistor.
摘要翻译：在本发明的一个示例性实施例中，非对称P型场效应晶体管包括：源极区，经由沟道耦合到漏极区; 覆盖所述通道的至少一部分的栅极结构; 至少部分地设置在所述通道中的卤素植入物，其中所述晕轮植入物设置成比所述漏极区域更靠近所述源极区域; 以及耦合到该通道的机身连接。在另一示例性实施例中，非对称P型场效应晶体管可用作对称P型场效应晶体管。

8. 发明申请

US20110065244A1 ASYMMETRIC FINFET DEVICE WITH IMPROVED PARASITIC RESISTANCE AND CAPACITANCE 有权
标题翻译：具有改进的抗电弧和电容的非对称FINFET器件
公开(公告)号：US20110065244A1
公开(公告)日：2011-03-17
申请号：US12559996
申请日：2009-09-15
申请人： Josephine B. Chang , Leland Chang , Chung-Hsun Lin , Jeffrey W. Sleight
发明人： Josephine B. Chang , Leland Chang , Chung-Hsun Lin , Jeffrey W. Sleight
IPC分类号： H01L21/336
CPC分类号： H01L21/26586 , H01L21/26513 , H01L29/66795
摘要： A method for forming a fin field effect transistor (finFET) device includes, forming a fin structure in a substrate, forming a gate stack structure perpendicular to the fin structure, and implanting ions in the substrate at an angle (θ) to form a source region and a drain region in the substrate, wherein the angle (θ) is oblique relative to the source region.
摘要翻译：一种用于形成鳍状场效应晶体管（finFET）器件的方法包括：在衬底中形成翅片结构，形成垂直于翅片结构的栅极堆叠结构，并以一定角度（...）将离子注入到衬底中以形成源极区域和漏极区域，其中角度（θ）相对于源极区域是倾斜的。

9. 发明授权

US08597991B2 Embedded silicon germanium n-type filed effect transistor for reduced floating body effect 有权
公开(公告)号：US08597991B2
公开(公告)日：2013-12-03
申请号：US13568689
申请日：2012-08-07
申请人： Leland Chang , Isaac Lauer , Chung-Hsun Lin , Jeffrey W. Sleight
发明人： Leland Chang , Isaac Lauer , Chung-Hsun Lin , Jeffrey W. Sleight
IPC分类号： H01L21/84
CPC分类号： H01L27/1203 , H01L21/8238 , H01L29/66636 , H01L29/66772 , H01L29/78618 , H01L29/78621
摘要： A method for fabricating a semiconductor device includes forming a gate stack on an active region of a silicon-on-insulator substrate. The active region is within a semiconductor layer and is doped with an p-type dopant. A gate spacer is formed surrounding the gate stack. A first trench is formed in a region reserved for a source region and a second trench is formed in a region reserved for a drain region. The first and second trenches are formed while maintaining exposed the region reserved for the source region and the region reserved for the drain region. Silicon germanium is epitaxially grown within the first trench and the second trench while maintaining exposed the regions reserved for the source and drain regions, respectively.

10. 发明授权

US08526228B2 8-transistor SRAM cell design with outer pass-gate diodes 有权
标题翻译：具有外部通过栅极二极管的8晶体管SRAM单元设计
公开(公告)号：US08526228B2
公开(公告)日：2013-09-03
申请号：US13345636
申请日：2012-01-06
申请人： Leland Chang , Isaac Lauer , Chung-Hsun Lin , Jeffrey W. Sleight
发明人： Leland Chang , Isaac Lauer , Chung-Hsun Lin , Jeffrey W. Sleight
IPC分类号： G11C11/36 , G11C16/24
CPC分类号： G11C16/24 , G11C11/412 , H01L27/0207 , H01L27/1104 , H01L27/1116
摘要： An 8-transistor SRAM cell which includes two pull-up transistors and two pull-down transistors in cross-coupled inverter configuration for storing a single data bit; first and second pass-gate transistors having a gate terminal coupled to a write word line and a source or drain of each of the pass-gate transistors coupled to a write bit line through a series outer diode between the pass-gate and the write bit line oriented to block charge transfer from the write bit line into the cell; and first and second read transistors coupled to the two pull-up and two pull-down transistors, one of the read transistors having a gate terminal coupled to a read word line and a source or a drain coupled to a read bit line. The 8-transistor SRAM cell is adapted to prevent the value of the bit stored in the cell from changing state.
摘要翻译：一个8晶体管SRAM单元，包括两个上拉晶体管和两个交叉耦合的反相器配置中的下拉晶体管，用于存储单个数据位; 第一和第二栅极晶体管具有耦合到写入字线的栅极端子和耦合到通过栅极和写入位之间的串联外部二极管的写入位线的每个通过栅极晶体管的源极或漏极线路阻止从写入位线进入电池的电荷转移; 以及耦合到所述两个上拉和两个下拉晶体管的第一和第二读取晶体管，所述读取晶体管中的一个具有耦合到读取字线的栅极端子和耦合到读取位线的源极或漏极。 8晶体管SRAM单元适于防止存储在单元中的位的值改变状态。

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