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1. 发明授权

US08441896B2 Energy assisted magnetic recording head having laser integrated mounted to slider 有权
标题翻译：具有激光一体化的能量辅助磁记录头安装到滑块
公开(公告)号：US08441896B2
公开(公告)日：2013-05-14
申请号：US12824080
申请日：2010-06-25
申请人： Lei Wang , Shing Lee , Wentao Yan
发明人： Lei Wang , Shing Lee , Wentao Yan
IPC分类号： G11B11/00
CPC分类号： G11B5/127 , G11B5/02 , G11B5/105 , G11B5/314 , G11B5/6088 , G11B2005/0021
摘要： A method and system for providing energy assisted magnetic recording (EAMR) heads are described. The method and system include providing a substrate, at least one EAMR transducer, an overcoat layer and at least one laser. The substrate has a leading edge and a substrate trailing edge. The EAMR transducer(s) reside in a device layer and on the substrate trailing edge. The overcoat layer includes a plurality of contacts. The device layer is between the overcoat layer and the substrate trailing edge. The laser(s) provide energy to the EAMR transducer. The overcoat layer is between the substrate trailing edge and the laser(s). The laser(s) are electrically coupled to at least a first portion of the contacts. The contacts provide thermal connection through the overcoat layer and the device layer. At least a second portion of the contacts is electrically insulated from the substrate.
摘要翻译：描述了一种用于提供能量辅助磁记录（EAMR）头的方法和系统。该方法和系统包括提供衬底，至少一个EAMR换能器，外涂层和至少一个激光器。衬底具有前缘和衬底后缘。 EAMR传感器位于器件层和衬底后缘。外涂层包括多个触点。器件层位于覆盖层和衬底后缘之间。激光器向EAMR传感器提供能量。外涂层位于基板后缘和激光之间。激光器电耦合到触点的至少第一部分。触点提供通过外涂层和器件层的热连接。触点的至少第二部分与基板电绝缘。

2. 发明申请

US20120163137A1 METHOD AND SYSTEM FOR OPTICALLY COUPLING A LASER WITH A TRANSDUCER IN AN ENERGY ASSISTED MAGNETIC RECORDING DISK DRIVE 有权
标题翻译：在能量辅助磁记录盘驱动器中光耦合带有传感器的激光器的方法和系统
公开(公告)号：US20120163137A1
公开(公告)日：2012-06-28
申请号：US12976770
申请日：2010-12-22
申请人： Lei Wang , Shing Lee , Sergei Sochava , Hyojune Lee , Arkadi B. Goulakov
发明人： Lei Wang , Shing Lee , Sergei Sochava , Hyojune Lee , Arkadi B. Goulakov
IPC分类号： G11B11/00 , G11B5/127
CPC分类号： G11B5/6088 , G11B5/105 , G11B5/3166 , G11B2005/0021
摘要： A method and system for providing an energy assisted magnetic recording (EAMR) head are described. The EAMR head includes a laser, a slider, and an EAMR transducer. The laser has a main emitter and at least one alignment emitter. The slider includes at least one alignment waveguide, at least one output device, and an air-bearing surface (ABS). The alignment waveguide(s) are aligned with the alignment emitter(s). The EAMR transducer is coupled with the slider and includes a waveguide aligned with main emitter. The waveguide is for directing energy from the main emitter toward the ABS.
摘要翻译：描述了一种用于提供能量辅助磁记录（EAMR）头的方法和系统。 EAMR头包括激光，滑块和EAMR传感器。激光器具有主发射极和至少一个对准发射极。滑块包括至少一个对准波导，至少一个输出装置和空气轴承表面（ABS）。对准波导与对准发射器对准。 EAMR传感器与滑块耦合并且包括与主发射器对准的波导。波导用于将能量从主发射器引向ABS。

3. 发明申请

US20110317527A1 METHOD AND SYSTEM FOR PROVIDING THERMAL MANAGEMENT IN AN ENERGY ASSISTED MAGNETIC RECORDING HEAD 有权
标题翻译：在能量辅助磁记录头中提供热管理的方法和系统
公开(公告)号：US20110317527A1
公开(公告)日：2011-12-29
申请号：US12824080
申请日：2010-06-25
申请人： Lei Wang , Shing Lee , Wentao Yan
发明人： Lei Wang , Shing Lee , Wentao Yan
IPC分类号： G11B11/00
CPC分类号： G11B5/127 , G11B5/02 , G11B5/105 , G11B5/314 , G11B5/6088 , G11B2005/0021
摘要： A method and system for providing energy assisted magnetic recording (EAMR) heads are described. The method and system include providing a substrate, at least one EAMR transducer, an overcoat layer and at least one laser. The substrate has a leading edge and a substrate trailing edge. The EAMR transducer(s) reside in a device layer and on the substrate trailing edge. The overcoat layer includes a plurality of contacts. The device layer is between the overcoat layer and the substrate trailing edge. The laser(s) provide energy to the EAMR transducer. The overcoat layer is between the substrate trailing edge and the laser(s). The laser(s) are electrically coupled to at least a first portion of the contacts. The contacts provide thermal connection through the overcoat layer and the device layer. At least a second portion of the contacts is electrically insulated from the substrate.
摘要翻译：描述了一种用于提供能量辅助磁记录（EAMR）头的方法和系统。该方法和系统包括提供衬底，至少一个EAMR换能器，外涂层和至少一个激光器。衬底具有前缘和衬底后缘。 EAMR传感器位于器件层和衬底后缘。外涂层包括多个触点。器件层位于覆盖层和衬底后缘之间。激光器向EAMR传感器提供能量。外涂层位于基板后缘和激光之间。激光器电耦合到触点的至少第一部分。触点提供通过外涂层和器件层的热连接。触点的至少第二部分与基板电绝缘。

4. 发明授权

US08593914B2 Method and system for optically coupling a laser with a transducer in an energy assisted magnetic recording disk drive 有权
标题翻译：用于在能量辅助磁记录磁盘驱动器中将激光与换能器光学耦合的方法和系统
公开(公告)号：US08593914B2
公开(公告)日：2013-11-26
申请号：US12976770
申请日：2010-12-22
申请人： Lei Wang , Shing Lee , Sergei Sochava , Hyojune Lee , Arkadi B. Goulakov
发明人： Lei Wang , Shing Lee , Sergei Sochava , Hyojune Lee , Arkadi B. Goulakov
IPC分类号： G11B11/00
CPC分类号： G11B5/6088 , G11B5/105 , G11B5/3166 , G11B2005/0021
摘要： A method and system for providing an energy assisted magnetic recording (EAMR) head are described. The EAMR head includes a laser, a slider, and an EAMR transducer. The laser has a main emitter and at least one alignment emitter. The slider includes at least one alignment waveguide, at least one output device, and an air-bearing surface (ABS). The alignment waveguide(s) are aligned with the alignment emitter(s). The EAMR transducer is coupled with the slider and includes a waveguide aligned with main emitter. The waveguide is for directing energy from the main emitter toward the ABS.
摘要翻译：描述了一种用于提供能量辅助磁记录（EAMR）头的方法和系统。 EAMR头包括激光，滑块和EAMR传感器。激光器具有主发射极和至少一个对准发射极。滑块包括至少一个对准波导，至少一个输出装置和空气轴承表面（ABS）。对准波导与对准发射器对准。 EAMR传感器与滑块耦合并且包括与主发射器对准的波导。波导用于将能量从主发射器引向ABS。

5. 发明授权

US08451556B1 Method and system for providing a molded capping layer for an energy assisted magnetic recording head 有权
标题翻译：用于提供用于能量辅助磁记录头的模制顶盖层的方法和系统
公开(公告)号：US08451556B1
公开(公告)日：2013-05-28
申请号：US12646896
申请日：2009-12-23
申请人： Lei Wang , Shing Lee
发明人： Lei Wang , Shing Lee
IPC分类号： G11B5/02 , G11B5/127 , G11B11/00
CPC分类号： G11B5/314 , G11B5/6088 , G11B2005/0021
摘要： A method and system for providing energy assisted magnetic recording (EAMR) heads are described. The heads include sliders and lasers coupled with the sliders. The method and system include molding an enclosure layer. The enclosure layer has a laser-facing surface and a top surface opposing the laser-facing surface. The laser-facing surface has a cavity including a concave section. The method and system further includes providing a reflective layer on the cavity. A portion of the reflective layer resides on the concave section, collimates light from the laser, and provides the collimated light to the EAMR transducer. The method and system further includes aligning the concave section of the cavity with a light emitting portion of the laser. The enclosure layer is also bonded to the slider.
摘要翻译：描述了一种用于提供能量辅助磁记录（EAMR）头的方法和系统。头部包括滑块和与滑块结合的激光器。该方法和系统包括模制外壳层。外壳层具有面向激光的表面和与面向激光的表面相对的顶表面。面向激光的表面具有包括凹部的空腔。该方法和系统还包括在空腔上提供反射层。反射层的一部分位于凹部上，准直来自激光器的光，并将准直光提供给EAMR传感器。所述方法和系统还包括将空腔的凹部与激光器的发光部分对准。外壳层也结合到滑块。

6. 发明授权

US08012804B1 Method and system for mounting lasers on energy assisted magnetic recording heads 有权
标题翻译：将激光器安装在能量辅助磁记录头上的方法和系统
公开(公告)号：US08012804B1
公开(公告)日：2011-09-06
申请号：US12645493
申请日：2009-12-23
申请人： Lei Wang , Shing Lee
发明人： Lei Wang , Shing Lee
IPC分类号： H01L21/00
CPC分类号： G11B5/314 , B82Y25/00 , G11B5/3173 , G11B5/6088 , G11B2005/001 , G11B2005/0021
摘要： A method and system for providing energy assisted magnetic recording (EAMR) heads including EAMR transducers are described. The method and system include aligning a laser bar to the EAMR heads on a substrate. The laser bar includes lasers in locations corresponding to a portion of the EAMR transducers. The method and system also include bonding the laser bar to the substrate and removing a portion of the laser bar to separate the plurality of lasers. The substrate is separated into the EAMR heads.
摘要翻译：描述了一种用于提供包括EAMR换能器的能量辅助磁记录（EAMR）头的方法和系统。该方法和系统包括将激光棒对准基板上的EAMR头。激光棒包括对应于一部分EAMR换能器的位置的激光器。该方法和系统还包括将激光棒接合到基板上并且去除激光棒的一部分以分离多个激光器。将基板分离成EAMR头。

7. 发明授权

US07764376B2 Systems and methods for measurement of a specimen with vacuum ultraviolet light 有权
标题翻译：用真空紫外光测量样品的系统和方法
公开(公告)号：US07764376B2
公开(公告)日：2010-07-27
申请号：US12506019
申请日：2009-07-20
申请人： John Fielden , Gary Janik , Shing Lee
发明人： John Fielden , Gary Janik , Shing Lee
IPC分类号： G01J4/00
CPC分类号： G03F7/70933 , G03F7/70916
摘要： Various systems for measurement of a specimen are provided. One system includes a first optical subsystem, which is disposed within a purged environment. The purged environment may be provided by a differential purging subsystem. The first optical subsystem performs measurements using vacuum ultraviolet light. This system also includes a second optical subsystem, which is disposed within a non-purged environment. The second optical subsystem performs measurements using non-vacuum ultraviolet light. Another system includes two or more optical subsystems configured to perform measurements of a specimen using vacuum ultraviolet light. The system also includes a purging subsystem configured to maintain a purged environment around the two or more optical subsystems. The purging subsystem is also configured to maintain the same level of purging in both optical subsystems. Some systems also include a cleaning subsystem configured to remove contaminants from a portion of a specimen prior to measurements at vacuum ultraviolet wavelengths.
摘要翻译：提供了用于测量样本的各种系统。一个系统包括设置在净化环境中的第一光学子系统。净化的环境可以由差动清洗子系统提供。第一个光学子系统使用真空紫外线进行测量。该系统还包括第二光学子系统，其被布置在非净化环境中。第二光学子系统使用非真空紫外光进行测量。另一系统包括两个或更多个配置成使用真空紫外光进行样本测量的光学子系统。该系统还包括净化子系统，该净化子系统配置为保持围绕两个或更多个光学子系统的净化环境。清洗子系统还被配置为在两个光学子系统中保持相同的清洗水平。一些系统还包括清洁子系统，被配置为在真空紫外线波长测量之前从试样的一部分去除污染物。

8. 发明授权

US07623239B2 Systems and methods for measurement of a specimen with vacuum ultraviolet light 有权
标题翻译：用真空紫外光测量样品的系统和方法
公开(公告)号：US07623239B2
公开(公告)日：2009-11-24
申请号：US12103320
申请日：2008-04-15
申请人： John Fielden , Gary Janik , Shing Lee
发明人： John Fielden , Gary Janik , Shing Lee
IPC分类号： G01J4/00
CPC分类号： G01J3/10 , G01J3/0286 , G01J3/36 , G01N21/211 , G01N2021/213
摘要： Various systems for measurement of a specimen are provided. One system includes an optical subsystem configured to perform measurements of a specimen using vacuum ultraviolet light and non-vacuum ultraviolet light. This system also includes a purging subsystem that is configured to maintain a purged environment around the optical subsystem during the measurements. Another system includes a cleaning subsystem configured to remove contaminants from a specimen prior to measurement. In one embodiment, the cleaning subsystem may be a laser-based cleaning subsystem that is configured to remove contaminants from a localized area on the specimen. The system also includes an optical subsystem that is configured to perform measurements of the specimen using vacuum ultraviolet light. The optical subsystem is disposed within a purged environment. In some embodiments, the system may include a differential purging subsystem that is configured to provide the purged environment for the optical subsystem.
摘要翻译：提供了用于测量样本的各种系统。一个系统包括被配置为使用真空紫外光和非真空紫外光进行样本的测量的光学子系统。该系统还包括清洗子系统，其被配置为在测量期间保持围绕光学子系统的净化环境。另一种系统包括清洁子系统，其构造成在测量之前从试样中去除污染物。在一个实施例中，清洁子系统可以是被配置为从样本上的局部区域去除污染物的基于激光的清洁子系统。该系统还包括被配置为使用真空紫外光进行样本的测量的光学子系统。光学子系统设置在净化的环境中。在一些实施例中，系统可以包括差分清洗子系统，其被配置为提供用于光学子系统的净化环境。

9. 发明授权

US07489399B1 Spectroscopic multi angle ellipsometry 有权
标题翻译：光谱多角椭偏仪
公开(公告)号：US07489399B1
公开(公告)日：2009-02-10
申请号：US10923325
申请日：2004-08-20
申请人： Shing Lee
发明人： Shing Lee
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01B11/0641 , G01N2021/213
摘要： An ellipsometer having a light source for generating a probe beam along a probe beam path. A polarizing beam splitter passes the probe beam along the probe beam path, at least in part, as the probe beam passes through the beam splitter in a first direction, and diverts the probe beam along a detection path, at least in part, as the probe beam passes through the beam splitter in a second direction that is substantially opposite of the first direction. A compensator variably retards at least portions of the probe beam along at least one axis of the compensator, thereby changing an orientation of the light passing through the compensator. Optics focus the probe beam on a spot on a substrate. A concave mirror receives the probe beam from the spot on the substrate as it travels along the probe beam path in the first direction, and sends the probe beam back along the probe beam path in the second direction. A detector receives the probe beam along the detection path. Preferably, all of the elements of the ellipsometer that are disposed along the probe beam path are fixed and do not rotate relative to the probe beam during measurement operations.
摘要翻译：具有用于沿探测光束路径产生探测光束的光源的椭偏仪。至少部分地，当探测光束沿着第一方向通过分束器时，偏振分束器沿着探测光束路径传递探测光束，并且至少部分地沿着检测路径转移探测光束，如探测光束在与第一方向基本相反的第二方向上穿过分束器。补偿器沿着补偿器的至少一个轴可变地延伸探测光束的至少一部分，从而改变通过补偿器的光的取向。光学元件将探头光束聚焦在基板上的一个点上。当在第一方向上沿着探测光束路径行进时，凹面镜从基底上的斑点接收探测光束，并沿第二方向沿着探测光束路径发送探测光束。检测器沿检测路径接收探测光束。优选地，沿着探测光束路径设置的椭偏仪的所有元件在测量操作期间是固定的并且不相对于探测光束旋转。

10. 发明授权

US07369233B2 Optical system for measuring samples using short wavelength radiation 有权
标题翻译：用于使用短波长辐射测量样品的光学系统
公开(公告)号：US07369233B2
公开(公告)日：2008-05-06
申请号：US10718126
申请日：2003-11-19
申请人： Mehrdad Nikoonahad , Shing Lee , Hidong Kwak , Sergio Edelstein , Guoheng Zhao , Gary Janik
发明人： Mehrdad Nikoonahad , Shing Lee , Hidong Kwak , Sergio Edelstein , Guoheng Zhao , Gary Janik
IPC分类号： G01N21/17
CPC分类号： G01N21/9501 , G01N21/8806
摘要： In an optical system measuring sample characteristics, by reducing the amount of ambient absorbing gas or gases and moisture present in at least a portion of the illumination and detection paths experienced by vacuum ultraviolet (VUV) radiation used in the measurement process, the attenuation of such wavelength components can be reduced. Such reduction can be accomplished by a process without requiring the evacuation of all gases and moisture from the measurement system. In one embodiment, the reduction can be accomplished by displacing at least some of the absorbing gas(es) and moisture present in at least a portion of the measuring paths so as to reduce the attenuation of VUV radiation. In this manner, the sample does not need to be placed in a vacuum, thereby enhancing system throughput.
摘要翻译：在测量样品特性的光学系统中，通过减少在测量过程中使用的真空紫外线（VUV）辐射所经历的照明和检测路径的至少一部分中存在的环境吸收气体或气体和水分的量，可以减少波长分量。这种还原可以通过一种方法来实现，而不需要从测量系统排出所有的气体和水分。在一个实施例中，可以通过置换至少部分测量路径中的至少一些吸收气体和水分来实现还原，以便减少VUV辐射的衰减。以这种方式，样品不需要放置在真空中，从而提高系统产量。

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