专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US5276498A Adaptive spatial filter for surface inspection 失效
标题翻译：用于表面检测的自适应空间滤波器
公开(公告)号：US5276498A
公开(公告)日：1994-01-04
申请号：US882047
申请日：1992-05-12
申请人： Lee K. Galbraith , John L. Vaught , Ralph C. Wolf , Brian Leslie , Armand P. Neukermans
发明人： Lee K. Galbraith , John L. Vaught , Ralph C. Wolf , Brian Leslie , Armand P. Neukermans
IPC分类号： H01L21/66 , G01N21/956 , G02B27/46 , G02F1/1343 , G01N21/00
CPC分类号： G02F1/134309 , G01N21/95623 , G02B27/46 , G01N2201/067
摘要： An inspection apparatus for a light diffracting surface employs a planar array of individually addressable light valves for use as a spatial filter in an imaged Fourier plane of a diffraction pattern, with valves having a stripe geometry corresponding to positions of members of the diffraction pattern, blocking light from those members. The remaining valve stripes, i.e. those not blocking light from diffraction order members, are open for transmission of light. Light directed onto the surface, such as a semiconductor wafer, forms elongated curved diffraction orders from repetitive patterns of circuit features. The curved diffraction orders are transformed to linear orders by a Fourier transform lens. The linear diffraction orders from repetitive patterns of circuit features are blocked, while light from non-repetitive features, such as dirt particles or defects is allowed to pass through the light valves to a detector. Patterns of stripes can be recorded corresponding to the repetitive features of different integrated circuits. Different filters may be rapidly switched electronically in synchronization with a beam scanning a patterned surface inspecting different light diffracting patterns in different positions, allowing scattered or diffracted light from non-repetitive features to pass through the filter to a detector. A logical AND combination of two filters may be used so that two regions may be inspected in a single scan of the beam.
摘要翻译：用于光衍射表面的检查装置采用独立寻址光阀的平面阵列，用作衍射图案的成像傅立叶平面中的空间滤光器，其中具有对应于衍射图案的部件的位置的条形几何形状的阀来自这些成员的光。剩余的阀条，即不阻挡来自衍射级构件的光的那些条纹是透光的。指向表面的光，例如半导体晶片，从电路特征的重复图案形成细长的弯曲衍射级。通过傅里叶变换透镜将弯曲的衍射级变换成线性阶数。来自电路特征的重复图案的线性衍射顺序被阻止，而来自非重复特征的光（例如污物颗粒或缺陷）允许通过光阀到达检测器。可以根据不同集成电路的重复特征对条纹进行记录。不同的滤波器可以与扫描图案化表面的光束同步地电子快速地切换，以在不同位置检查不同的光衍射图案，允许来自非重复特征的散射或衍射光通过滤光器到检测器。可以使用两个滤波器的逻辑AND组合，使得可以在波束的单次扫描中检查两个区域。

2. 发明授权

US4967095A Method and apparatus for detecting and sizing particles on surfaces 失效
标题翻译：用于检测和调整表面上的颗粒的方法和装置
公开(公告)号：US4967095A
公开(公告)日：1990-10-30
申请号：US411910
申请日：1989-09-25
申请人： Josef Berger , Armand P. Neukermans , John L. Vaught
发明人： Josef Berger , Armand P. Neukermans , John L. Vaught
IPC分类号： G01N15/02 , G01N15/06 , G01N21/94
CPC分类号： G01N15/02 , G01N21/94 , G01N2015/0681
摘要： A method and apparatus for detecting and classifying particles on a surface in which condensation is used to enlarge particles. An apparatus of the present invention includes a heatable wick disposed over a test surface and in fluid communication with a source of volatile liquid. A zone of vapor supersaturation is thus created in which condensation on particles on the surface can occur. A light beam directed onto the surface scans the surface. Droplets are detected by means of light scattered from the droplets. In an alternate embodiment a stream of carrier gas may be provided around the wick or bubbled through a jar of volatile liquid to direct a vapor toward the test surface. In another embodiment, multiple wicks communicate with different sources of volatile liquids. In a method of the invention, mulitple scans are made with either different levels of vapor supersaturation or different vapor compositions. Comparing particles in each scan allows one to classify particles into different size ranges or chemical type.
摘要翻译：一种用于检测和分类表面的颗粒的方法和装置，其中使用冷凝物来扩大颗粒。本发明的装置包括设置在测试表面上并与挥发性液体源流体连通的可加热芯。因此产生蒸气过饱和区，其中可以发生表面上的颗粒上的冷凝。指向表面的光束扫描表面。通过从液滴散射的光来检测液滴。在替代实施例中，可以在芯周围提供载气流，或者通过一罐挥发性液体鼓泡，以将蒸气引向测试表面。在另一个实施例中，多个芯与不同的挥发性液体源连通。在本发明的方法中，多重扫描是用不同水平的蒸气过饱和或不同的蒸汽组成制成的。比较每个扫描中的粒子可以将粒子分类成不同的粒度范围或化学类型。

3. 发明授权

US5264912A Speckle reduction track filter apparatus for optical inspection of patterned substrates 失效
标题翻译：用于图案化基板的光学检查的斑点还原轨道滤波装置
公开(公告)号：US5264912A
公开(公告)日：1993-11-23
申请号：US832379
申请日：1992-02-07
申请人： John L. Vaught , Michael E. Fein , Armand P. Neukermans
发明人： John L. Vaught , Michael E. Fein , Armand P. Neukermans
IPC分类号： H01L21/66 , G01N21/94 , G01N21/95 , G01N21/956 , G02B27/46 , G01N21/88
CPC分类号： G01N21/94 , G01N21/95623 , G02B27/46 , G01N21/9501
摘要： An apparatus used to inspect patterned wafers and other substrates with periodic features for the presence of particles, defects and other aperiodic features in which a spatial filter placed in the Fourier plane is used in combination with either broadband illumination, angularly diverse illumination or both. In contrast to prior devices that direct light from a single monochromatic source through a pinhole aperture stop, embodiments are describes that illuminate a patterned substrate using (1) a single monochromatic source with a slit-shaped aperture stop for angularly diverse illumination, (2) a single broadband source with a pinhole aperture stop for broadband illumination, (3) a single broadband source with a slit-shaped aperture stop for both broadband and angularly diverse illumination, or (4) multiple sources with an aperture stop for each source for at least angularly diverse illumination. The spatial filters for these illumination systems are characterized by opaque tracks in an otherwise transmissive filter for blocking the elongated bands produced by diffraction from the periodic features on the illuminates substrate. The filter may be made photographically by exposing high contrast film placed in or near the Fourier plane to the diffracted light from a defect and particle frame substrate having only periodic features. Light scattered from the aperiodic features is able to substantially pass through the filter and be imaged onto, a CCD array, vidicon camera or TDI sensor.
摘要翻译：用于检查具有周期性特征的图案化晶片和其它基板用于存在颗粒，缺陷和其他非周期性特征的装置，其中放置在傅立叶平面中的空间滤波器与宽带照明，角度不同的照明或两者结合使用。与通过针孔孔径光阑引导来自单个单色源的光的现有装置相比，描述了使用（1）具有狭缝形孔径光阑的单个单色光源来照射图案化的衬底，用于角度不同的照明，（2）单宽带光源，具有用于宽带照明的针孔孔径光阑，（3）单宽带光源，具有狭缝形孔径光阑，适用于宽带和角度不同的照明，或（4）多个源，每个光源的孔径光阑在最小角度多样的照明。用于这些照明系统的空间滤波器的特征在于在另外透射的滤光器中的不透明光道，用于阻挡由照明基板上的周期特征衍射产生的细长带。可以通过将放置在傅立叶平面中或其附近的高对比度胶片与来自仅具有周期特征的缺陷和颗粒框架基板的衍射光曝光来进行过滤。从非周期特征散射的光能够基本上通过滤光片并被成像到CCD阵列，摄像机或TDI传感器上。

4. 发明授权

US4898471A Particle detection on patterned wafers and the like 失效
标题翻译：图案化晶片上的粒子检测等
公开(公告)号：US4898471A
公开(公告)日：1990-02-06
申请号：US248309
申请日：1988-09-19
申请人： John L. Vaught , Armand P. Neukermans , Herman F. Keldermann , Franklin R. Koenig
发明人： John L. Vaught , Armand P. Neukermans , Herman F. Keldermann , Franklin R. Koenig
IPC分类号： G01N21/94 , G01N21/956
CPC分类号： G01N21/94 , G01N2021/95615 , G01N2021/95676 , G01N21/95607 , G01N2201/112
摘要： A particle detection on a periodic patterned surface is achieved in a method and apparatus using a single light beam scanning at a shallow angle over the surface. The surface contains a plurality of identical die with streets between die. The beam scans parallel to a street direction, while a light collection system collects light scattered from the surface with a constant solid angle. The position of the collection system as well as the polarization of the light beam and collected scattered light may be arranged to maximize the particle signal compared to the pattern signal. A detector produces an electrical signal corresponding to the intensity of scattered light that is colelcted. A processor constructs templates from the electrical signal corresponding to individual die and compares the templates to identify particles. A reference template is constantly updated so that comparisons are between adjacent die. In one embodiment, the templates are made up of registered positions where the signal crosses a threshold, and the comparison is between corresponding positions to eliminate periodic pattern features, leaving only positions representing particles.
摘要翻译：在使用在表面上以浅角度扫描的单个光束的方法和装置中实现周期性图案化表面上的粒子检测。表面包含多个相同的模具，在模具之间具有街道。光束平行于街道方向扫描，而光采集系统以恒定立体角收集从表面散射的光。收集系统的位置以及光束和收集的散射光的偏振可以被布置成与图案信号相比最大化粒子信号。检测器产生对应于被烧焦的散射光的强度的电信号。处理器从对应于各个管芯的电信号构建模板，并比较模板以识别粒子。参考模板不断更新，以便相邻模具之间进行比较。在一个实施例中，模板由信号跨越阈值的注册位置组成，并且在相应位置之间进行比较以消除周期性图案特征，仅留下表示粒子的位置。

5. 发明授权

US4861125A Suspension assembly for a scanning mirror 失效
标题翻译：用于扫描镜的悬挂组件
公开(公告)号：US4861125A
公开(公告)日：1989-08-29
申请号：US190760
申请日：1988-05-06
申请人： John L. Vaught
发明人： John L. Vaught
IPC分类号： G02B26/10
CPC分类号： G02B26/10
摘要： An optical scanning device for flaw detection or the like having a suspension system including at least two pairs of flexure legs. A first pair has flexure legs diagonally crossed in spaced-apart relation and fixed at one end to a stationary body and at an opposite end to a vibratory body. A second pair of spaced-apart cross-flexure legs link the stationary base to a magnetic driver for varying the angular position of the vibratory body about an axis of rotation. Each of the four flexure legs has a radial stiffness exceeding a torsional stiffness. The first pair of cross-flexure legs and the supported mass have characteristics corresponding to the characteristics of the second pair of cross-flexure legs and associated mass, thereby providing identical resonant frequencies of distortional bending. Any torque exerted on the stationary base by the first pair of cross-flexure legs is compensated by a torque which is equal in magnitude but opposite in direction translated through the second pair of flexure legs.
摘要翻译：一种用于探伤等的光学扫描装置，具有包括至少两对弯曲腿的悬架系统。第一对具有彼此间隔开的对角交叉的挠曲腿，并且在一端固定在固定体上，在另一端固定在振动体上。第二对间隔开的交叉弯曲腿将固定基座连接到磁性驱动器，用于改变振动体围绕旋转轴的角度位置。四个弯曲腿中的每一个具有超过扭转刚度的径向刚度。第一对交叉弯曲腿和支撑体具有对应于第二对交叉弯曲腿和相关联质量的特性的特征，从而提供相同的扭曲弯曲的谐振频率。通过第一对交叉弯曲腿施加在固定基座上的任何扭矩通过在大小上相等但与第二对弯曲腿平行的方向相反的扭矩来补偿。

6. 发明授权

US4490728A Thermal ink jet printer 失效
标题翻译：热敏式喷墨打印机
公开(公告)号：US4490728A
公开(公告)日：1984-12-25
申请号：US415290
申请日：1982-09-07
申请人： John L. Vaught , Frank L. Cloutier , David K. Donald , John D. Meyer , Christopher A. Tacklind , Howard H. Taub
发明人： John L. Vaught , Frank L. Cloutier , David K. Donald , John D. Meyer , Christopher A. Tacklind , Howard H. Taub
IPC分类号： B41J2/05 , G01D15/18
CPC分类号： B41J2/0458 , B41J2/04588 , B41J2/0459 , B41J2/04591 , B41J2/04598 , B41J2002/14169
摘要： A thermal ink jet printer is disclosed in which ink droplets are ejected from an orifice by the explosive formation of a vapor bubble within the ink supply due to the application of a two part electrical pulse to a resistor within the ink supply. The electrical pulse comprises a precurser pulse and a nucleation pulse; the precurser pulse preheats the ink in the vicinity of the resistor to a temperature below the boiling temperature of the ink so as to preheat the ink while avoiding vapor bubble nucleation within the ink supply and the subsequently occuring nucleation pulse very quickly heats the resistor to near the superheat limit of the ink.
摘要翻译：公开了一种热喷墨打印机，其中由于将二部分电脉冲施加到墨水供应内的电阻器，墨滴从喷墨孔内的气泡爆炸形成从孔口喷出。的

7. 发明授权

US4490731A Ink dispenser with "frozen" solid ink 失效
标题翻译：油墨分配器带有“冷冻”固体油墨
公开(公告)号：US4490731A
公开(公告)日：1984-12-25
申请号：US443410
申请日：1982-11-22
申请人： John L. Vaught
发明人： John L. Vaught
IPC分类号： B41J2/015 , B41J2/175 , C09D11/00 , G01D15/16
CPC分类号： C09D11/34 , B41J2/17593
摘要： A new type of apparatus for dispensing "frozen" solid ink and the ink for use therein for printing on paper is disclosed. The ink dye vehicle is chosen to have a melting point above room temperature, so that the ink which is melted in the apparatus will not be subject to evaporation or spillage during periods of non-printing. The vehicle is also chosen to have a low critical temperature to permit the use of the solid ink in a thermal ink jet printer.
摘要翻译：公开了一种用于分配“冷冻”固体油墨和用于其中用于在纸上打印的油墨的新型设备。选择油墨染料载体的熔点高于室温，使得在设备中熔化的油墨在非印刷期间不会被蒸发或溢出。车辆也被选择为具有低临界温度以允许在热喷墨打印机中使用固体油墨。

8. 发明授权

US4336544A Method and apparatus for drop-on-demand ink jet printing 失效
标题翻译：按需喷墨打印的方法和装置
公开(公告)号：US4336544A
公开(公告)日：1982-06-22
申请号：US179206
申请日：1980-08-18
申请人： David K. Donald , Michael J. Lee , John L. Vaught
发明人： David K. Donald , Michael J. Lee , John L. Vaught
IPC分类号： B41J2/015 , B41J2/04 , G01D15/18
CPC分类号： B41J2/04
摘要： A drop-on demand ink jet printer and a method of ink jet printing are disclosed which produce drops whose diameter have a ratio to the internal diameter of their print nozzles of 1:2 instead of the standard ratio of 2:1. This change in the basic ratio of drop diameter to print nozzle diameter is a result of the motion imparted to the print liquid by the actuation of the print nozzle. The print nozzle is cocked, released, and abruptly stopped to impart forward momentum to the print liquid near the orifice of the print nozzle. This momentum urges the liquid to be expelled from the print nozzle. Cutting the orifice of the print nozzle at an oblique angle to the run of the print nozzle creates a leading edge on the print nozzle which increases control of drop placement. The leading edge encourages formation of a single umbilicus of expelled print liquid from which a drop will be severed.
摘要翻译：公开了一种按需喷墨打印机和喷墨打印方法，其生产直径与其打印喷嘴的内径的比率为1：2而不是标准比为2：1的液滴。液滴直径与打印喷嘴直径的基本比率的这种变化是通过致动打印喷嘴而赋予打印液体的运动的结果。打印喷嘴被打开，释放并突然停止，以向打印喷嘴的孔口附近的打印液体赋予向前的动量。该动量促使液体从打印喷嘴排出。以与打印喷嘴的行程成斜角的方式切割打印喷嘴的孔口，在打印喷嘴上形成前缘，增加了滴落位置的控制。前沿鼓励形成一个排出的印刷液体的单个脐部，从该液体中滴下将被切断。

9. 发明授权

US5023424A Shock wave particle removal method and apparatus 失效
标题翻译：冲击波除尘方法及装置
公开(公告)号：US5023424A
公开(公告)日：1991-06-11
申请号：US467974
申请日：1990-01-22
申请人： John L. Vaught
发明人： John L. Vaught
IPC分类号： B08B7/00 , B23K7/06 , B23K26/03 , H01L21/00 , H01L21/304
CPC分类号： B23K26/032 , B08B7/0042 , B23K26/03 , H01L21/67028 , B23K7/06
摘要： An apparatus and method using laser induced shock waves to dislodge particles from a wafer surface. The apparatus includes a wafer support, a particle detector and computer for locating and storing the locations of particles on the wafer, a laser, and focusing optics. Laser beam pulses are directed toward the wafer surface at a shallow angle or with a large beam convergence angle to avoid damage to the wafer.
摘要翻译：一种使用激光诱发的冲击波从晶片表面去除颗粒的装置和方法。该装置包括晶片支撑件，粒子检测器和用于定位和存储颗粒在晶片上的位置，激光器和聚焦光学器件的计算机。激光束脉冲以浅的角度或以较大的光束会聚角指向晶片表面，以避免损坏晶片。

10. 发明授权

US4494128A Gray scale printing with ink jets 失效
标题翻译：喷墨喷墨打印
公开(公告)号：US4494128A
公开(公告)日：1985-01-15
申请号：US419299
申请日：1982-09-17
申请人： John L. Vaught
发明人： John L. Vaught
IPC分类号： B41J2/05 , B41J2/205 , B41J2/21 , G01D15/16
CPC分类号： B41J2/211 , Y10T137/2082 , Y10T137/2196
摘要： An ink jet system using a single transducer chamber is disclosed which can produce a wide variation in visual print density (gray scale) without a reduction in print resolution. Vehicle is mixed with the ink during the actual jet printing process to produce the desired gray scale. The system is also readily adapted to produce multi-color prints.
摘要翻译：公开了一种使用单个换能器室的喷墨系统，其可以在不降低打印分辨率的情况下产生视觉打印浓度（灰度级）的广泛变化。车辆在实际的喷墨打印过程中与油墨混合以产生所需的灰度。该系统也容易适用于生产多色印刷品。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式