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1. 发明授权

US07471382B2 Surface inspection system with improved capabilities 有权
标题翻译：表面检测系统具有改进的能力
公开(公告)号：US07471382B2
公开(公告)日：2008-12-30
申请号：US11243349
申请日：2005-10-03
申请人： Lawrence Robert Miller , Mehdi Vaez-Iravani
发明人： Lawrence Robert Miller , Mehdi Vaez-Iravani
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/8806 , G01N2021/8822
摘要： Pixel intensities indicative of scattered radiation from portions of the inspected surface surrounding a location of a potential anomaly are also stored so that such data is available for quick review of the pixel intensities within a patch on the surface containing the location of the potential anomaly. Where rotational motion is caused between the illumination beam and the inspected surface, signal-to-noise ratio may be improved by comparing the pixel intensities of pixels at corresponding positions on two different surfaces that are inspected, where corresponding pixels at the same relative locations on the two different surfaces are illuminated and scattered radiation therefrom collected and detected under the same optical conditions.
摘要翻译：还存储指示围绕潜在异常位置的被检查表面的部分的散射辐射的像素强度，使得这样的数据可用于快速查看包含潜在异常位置的表面上的贴片内的像素强度。在照明光束和被检查表面之间产生旋转运动的情况下，可以通过比较被检查的两个不同表面上的相应位置处的像素的像素强度来改善信噪比，其中相同相对位置处的相应像素两个不同的表面被照射，并且在相同的光学条件下收集和检测散射的辐射。

2. 发明授权

US07130039B2 Simultaneous multi-spot inspection and imaging 有权
公开(公告)号：US07130039B2
公开(公告)日：2006-10-31
申请号：US10418352
申请日：2003-04-17
申请人： Mehdi Vaez-Iravani , Lawrence Robert Miller
发明人： Mehdi Vaez-Iravani , Lawrence Robert Miller
IPC分类号： G01N21/68
CPC分类号： G01N21/95623 , G01N21/8806
摘要： A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a second reflective or refractive objective having a large numerical aperture for collecting scattered radiation from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding optical fiber channel so that information about a scattering may be conveyed to a corresponding detector in a remote detector array for processing. For patterned surface inspection, a cross-shaped filter is rotated along with the surface to reduce the effects of diffraction by Manhattan geometry. A spatial filter in the shape of an annular aperture may also be employed to reduce scattering from patterns such as arrays on the surface. In another embodiment, different portions of the same objective may be used for focusing the illumination beams onto the surface and for collecting the scattered radiation from the illuminated spots simultaneously. In another embodiment, a one-dimensional array of illumination beams are directed at an oblique angle to the surface to illuminate a line of illuminated spots at an angle to the plane of incidence. Radiation scattered from the spots are collected along directions perpendicular to the line of spots or in a double dark field configuration.

3. 发明申请

US20090116004A1 Surface Inspection System with Improved Capabilities 有权
标题翻译：具有改进能力的表面检测系统
公开(公告)号：US20090116004A1
公开(公告)日：2009-05-07
申请号：US12332037
申请日：2008-12-10
申请人： Lawrence Robert Miller , Mehdi Vaez-Iravani
发明人： Lawrence Robert Miller , Mehdi Vaez-Iravani
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/8806 , G01N2021/8822
摘要： Pixel intensities indicative of scattered radiation from portions of the inspected surface surrounding a location of a potential anomaly are also stored so that such data is available for quick review of the pixel intensities within a patch on the surface containing the location of the potential anomaly. Where rotational motion is caused between the illumination beam and the inspected surface, signal-to-noise ratio may be improved by comparing the pixel intensities of pixels at corresponding positions on two different surfaces that are inspected, where corresponding pixels at the same relative locations on the two different surfaces are illuminated and scattered radiation therefrom collected and detected under the same optical conditions.
摘要翻译：还存储指示围绕潜在异常位置的被检查表面的部分的散射辐射的像素强度，使得这样的数据可用于快速查看包含潜在异常位置的表面上的贴片内的像素强度。在照明光束和被检查表面之间产生旋转运动的情况下，可以通过比较被检查的两个不同表面上的相应位置处的像素的像素强度来改善信噪比，其中相同相对位置处的相应像素两个不同的表面被照射，并且在相同的光学条件下收集和检测散射的辐射。

4. 发明授权

US08817248B2 Simultaneous multi-spot inspection and imaging 有权
标题翻译：同时多点检查和成像
公开(公告)号：US08817248B2
公开(公告)日：2014-08-26
申请号：US12362191
申请日：2009-01-29
申请人： Mehdi Vaez-Iravani , Lawrence Robert Miller
发明人： Mehdi Vaez-Iravani , Lawrence Robert Miller
IPC分类号： G01N21/00
CPC分类号： G01N21/95623 , G01N21/8806
摘要： A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a second reflective or refractive objective having a large numerical aperture for collecting scattered radiation from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding receiver or detector so that information about a scattering may be conveyed to a corresponding detector in a remote detector array for processing. Radiation reflected from the spots is imaged into a first array of receivers or detectors so that each receiver in the first array receives radiation from a corresponding spot in the array of spots; and scattered radiation from the spots is imaged onto a second array of receivers or detectors in a dark field imaging scheme so that each receiver or detector in the second array receives radiation from a corresponding spot.
摘要翻译：紧凑且通用的多点检查成像系统采用将辐射束阵列聚焦到表面的目标和具有大数值孔径的第二反射或折射物镜，用于收集来自照明点阵列的散射辐射。来自每个照明点的散射的辐射被聚焦到相应的接收器或检测器，使得关于散射的信息可以被传送到用于处理的远程检测器阵列中的对应的检测器。从斑点反射的辐射被成像为第一阵列的接收器或检测器，使得第一阵列中的每个接收器接收来自阵列阵列中的相应斑点的辐射; 并且来自斑点的散射的辐射在暗场成像方案中成像到接收器或检测器的第二阵列上，使得第二阵列中的每个接收器或检测器接收来自相应光斑的辐射。

5. 发明授权

US07978323B2 Surface inspection system with improved capabilities 有权
标题翻译：表面检测系统具有改进的能力
公开(公告)号：US07978323B2
公开(公告)日：2011-07-12
申请号：US12332037
申请日：2008-12-10
申请人： Lawrence Robert Miller , Mehdi Vaez-Iravani
发明人： Lawrence Robert Miller , Mehdi Vaez-Iravani
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/8806 , G01N2021/8822
摘要： Pixel intensities indicative of scattered radiation from portions of the inspected surface surrounding a location of a potential anomaly are also stored so that such data is available for quick review of the pixel intensities within a patch on the surface containing the location of the potential anomaly. Where rotational motion is caused between the illumination beam and the inspected surface, signal-to-noise ratio may be improved by comparing the pixel intensities of pixels at corresponding positions on two different surfaces that are inspected, where corresponding pixels at the same relative locations on the two different surfaces are illuminated and scattered radiation therefrom collected and detected under the same optical conditions.
摘要翻译：还存储指示围绕潜在异常位置的被检查表面的部分的散射辐射的像素强度，使得这样的数据可用于快速查看包含潜在异常位置的表面上的贴片内的像素强度。在照明光束和被检查表面之间产生旋转运动的情况下，可以通过比较被检查的两个不同表面上的相应位置处的像素的像素强度来改善信噪比，其中相同相对位置处的相应像素两个不同的表面被照射，并且在相同的光学条件下收集和检测散射的辐射。

6. 发明授权

US07492451B2 Simultaneous multi-spot inspection and imaging 有权
标题翻译：同时多点检查和成像
公开(公告)号：US07492451B2
公开(公告)日：2009-02-17
申请号：US11553174
申请日：2006-10-26
申请人： Mehdi Vaez-Iravani , Lawrence Robert Miller
发明人： Mehdi Vaez-Iravani , Lawrence Robert Miller
IPC分类号： G01N21/00
CPC分类号： G01N21/95623 , G01N21/8806
摘要： A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a second reflective or refractive objective having a large numerical aperture for collecting scattered radiation from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding optical fiber channel so that information about a scattering may be conveyed to a corresponding detector in a remote detector array for processing. For patterned surface inspection, a cross-shaped filter is rotated along with the surface to reduce the effects of diffraction by Manhattan geometry. A spatial filter in the shape of an annular aperture may also be employed to reduce scattering from patterns such as arrays on the surface.
摘要翻译：紧凑且通用的多点检查成像系统采用将辐射束阵列聚焦到表面的目标和具有大数值孔径的第二反射或折射物镜，用于收集来自照明点阵列的散射辐射。来自每个照明点的散射辐射被聚焦到相应的光纤通道，使得关于散射的信息可以被传送到用于处理的远程检测器阵列中的相应检测器。对于图案化表面检查，十字形过滤器与表面一起旋转，以减少曼哈顿几何形状的衍射效应。也可以采用环形孔形状的空间滤光器，以减少从诸如表面上的阵列的图案的散射。

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