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1. 发明授权

US06943569B1 Method, system and apparatus to detect defects in semiconductor devices 有权
标题翻译：检测半导体器件缺陷的方法，系统和装置
公开(公告)号：US06943569B1
公开(公告)日：2005-09-13
申请号：US10121252
申请日：2002-04-12
申请人： Laura Pressley , David E. Brown , Travis Lewis , Edward E. Ehrichs , Paul R. Besser
发明人： Laura Pressley , David E. Brown , Travis Lewis , Edward E. Ehrichs , Paul R. Besser
IPC分类号： G01R27/08 , G01R31/302 , G01R31/305
CPC分类号： G01R31/307 , G06T7/0006 , G06T2207/10056 , G06T2207/20068 , G06T2207/30148 , H01J2237/2817 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A method and system to locate and detect voids in films that are involved in critical dimension (CD) structures and non-critical dimension structures in semiconductor devices are presented. One or more test structures (resolution devices) are formed on a semiconductor wafer. A scanning electron microscope is operated in voltage contrast mode to obtain a digital representation of the test structure. The voltage contrast image of the test structure is then analyzed with a system which automates the location, identification, and categorization of voids in the test structure. Additionally, the method is more sensitive to electrical marginalities caused by voids than other wafer electrical testing methods. The method is suitable inline monitoring during a manufacturing process by utilizing the automation of void identification, location, and categorization as a process monitoring parameter.
摘要翻译：提出了一种在半导体器件中涉及关键尺寸（CD）结构和非关键尺寸结构的薄膜中定位和检测空隙的方法和系统。在半导体晶片上形成一个或多个测试结构（分辨率器件）。扫描电子显微镜以电压对比模式工作，以获得测试结构的数字表示。然后用自动化测试结构中空隙的位置，识别和分类的系统分析测试结构的电压对比图像。此外，该方法比其他晶片电气测试方法对由空隙引起的电气边界更敏感。该方法通过利用空白识别，位置和分类的自动化作为过程监控参数，在制造过程中适合于在线监测。

2. 发明申请

US20100077923A1 Filter apparatus and method 审中-公开
标题翻译：过滤装置及方法
公开(公告)号：US20100077923A1
公开(公告)日：2010-04-01
申请号：US12286329
申请日：2008-09-30
申请人： Travis Lewis
发明人： Travis Lewis
IPC分类号： B01D46/20 , B01D46/46
CPC分类号： B01D46/18 , B01D46/0023 , B01D46/44 , F24F3/1603
摘要： An air filter system for installation within the air inlet duct for an air conditioning system has a pair of mandrels that establish sufficient friction force when a web of fresh filter fabric is drawn from a supply roll to eliminate most undesirable wrinkles and slackness in the web. The “pop-off” feature of the fresh filter fabric supply and contaminated filter fabric storage magazines with a removable side enable a fresh roll of filter fabric to be installed in the system with minimal disagreeable effort. A peripheral step that protrudes from the base of the system enables the system to be adaptable to many existing air conditioner ducting structures. A back-up secondary filter, preferably treated with the activated carbon, permits less-than-particulate contamination, e.g. odors and noxious gases to be removed from the incoming air stream. Electrical circuits that control the sequential cycles for replacing the filter fabric webs, signals each progressive cycle and provide system condition cues are also described.
摘要翻译：用于安装在用于空调系统的空气入口管道内的空气过滤器系统具有一对心轴，当从供应辊抽出新鲜的过滤织物的腹板以消除纤维网中最不希望的皱纹和松弛时，其形成足够的摩擦力。新鲜过滤织物供应和污染过滤织物存储杂志的“弹出”功能具有可拆卸的侧面，可以以最小的不合意的努力将新鲜的过滤织物安装在系统中。从系统底部突出的外围台阶使得系统能够适应许多现有的空调管道结构。优选用活性炭处理的备用二次过滤器允许小于颗粒的污染物，例如，气味和有害气体从进入的气流中除去。还描述了控制用于更换过滤织物腹板的顺序循环的电路，指示每个渐进循环并提供系统状态提示。

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