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1. 发明专利

JP2010177340A Dicing method and expanding apparatus 有权
标题翻译：定标方法和扩展装置
公开(公告)号：JP2010177340A
公开(公告)日：2010-08-12
申请号：JP2009016612
申请日：2009-01-28
申请人： Laser Gijutsu Sogo Kenkyusho , Panasonic Electric Works Co Ltd , Tohoku Univ , パナソニック電工株式会社 , 国立大学法人東北大学 , 財団法人レーザー技術総合研究所
发明人： TANAKA HIDEJI , ESASHI MASAKI , YOSHIDA KAZUJI , TOMII KAZUYUKI , FUJITA MASAYUKI , MIYANAGA NORIAKI , NAKADA YOSHIKI
IPC分类号： H01L21/301
摘要： PROBLEM TO BE SOLVED: To provide a dicing method and an expanding apparatus by which a wafer is divided precisely into individual chips collectively regardless of a type of the wafer, and a manufacturing yield is improved. SOLUTION: In an expanding process in the dicing method, a peripheral part of an adhesive resin tape 30 is fixed onto a table 41, and a ring stage 43 and a pressing stage 44 which are disposed inside the table 41 and hold a wafer ring 42, are raised relatively to a virtual plane including a surface to which the adhesive resin tape 30 is fixed, of the table 41 so as to perform a stretching step of stretching the adhesive resin tape 30 over the wafer ring 42. A dividing step is then performed wherein the pressing stage 44 is raised to expand the adhesive resin tape 30 and a bending stress is applied to a wafer 10 to divide the wafer into individual chips 1, and then, a restretching step is performed wherein the ring stage 43 is furthermore raised relatively to the virtual plane to stretch again the adhesive resin tape 30 over the wafer ring 42. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种切片方法和扩展装置，通过该切割方法和扩展装置，不管晶片的类型如何，晶片都被精确地划分成单独的芯片，并且提高了制造成品率。解决方案：在切割方法的扩展过程中，粘合树脂带30的周边部分固定在台41上，环台43和压制台44设置在工作台41的内部并保持晶片环42相对于包括固定有粘合树脂带30的表面的虚拟平面而升高，以便执行将粘合树脂带30拉伸在晶片环42上的拉伸步骤。分割然后进行步骤，其中按压台44升高以使粘合树脂带30膨胀，并且将弯曲应力施加到晶片10以将晶片分成单独的芯片1，然后进行再拉伸步骤，其中环形台43 进一步相对于虚拟平面升高，以将粘合树脂带30再次拉伸在晶片环42上。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2011023560A Light emitting device 审中-公开
标题翻译：发光装置
公开(公告)号：JP2011023560A
公开(公告)日：2011-02-03
申请号：JP2009167488
申请日：2009-07-16
申请人： Laser Gijutsu Sogo Kenkyusho , Panasonic Electric Works Co Ltd , パナソニック電工株式会社 , 財団法人レーザー技術総合研究所
发明人： TANAKA KENICHIRO , TSUBAKI KENJI , KUBO MASAO , FUJITA MASAYUKI , MIYANAGA NORIAKI , FUJIMOTO YASUSHI , TSUBAKIMOTO KOJI
IPC分类号： H01L33/50
摘要： PROBLEM TO BE SOLVED: To provide a light emitting device capable of improving wavelength conversion efficiency of a wavelength conversion portion. SOLUTION: The light emitting device includes an LED chip 1, and the wavelength conversion portion 2 disposed on a light extraction surface side of the LED chip 1 to convert part of light emitted from the LED chip 1 into light having a wavelength longer than that of the LED chip 1. The wavelength conversion portion 2 is composed of a structure wherein a plurality of wavelength conversion element portions 21 are combined and arrayed, which use fluorescent glass as glass to which a rare earth element excited with the light emitted from the LED chip 1 to emit the light having the wavelength longer than that of the LED chip 1 is added. In the wavelength conversion portion 2, the wavelength conversion element portions 21 are optical fibers 120 each including the fluorescent glass as a core 121, and the respective optical fibers 120 are arrayed each having an optical-axis direction aligned with the optical axis direction of the LED chip 1. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：解决的问题：提供能够提高波长转换部的波长转换效率的发光装置。解决方案：发光器件包括LED芯片1和设置在LED芯片1的光提取表面侧上的波长转换部分2，以将从LED芯片1发射的光的一部分转换成具有波长较长的光波长转换部分2由多个波长转换元件部分21组合和排列的结构组成，其中使用荧光玻璃作为玻璃，稀土元素被从添加发光长于LED芯片1的光的LED芯片1。在波长转换部分2中，波长转换元件部分21是包括作为核心121的荧光玻璃的光纤120，并且各个光纤120排列成具有与光轴方向对准的光轴方向 LED芯片1.版权所有（C）2011，JPO＆INPIT

3. 发明专利

JP2006085940A Method and device for generating x ray 有权
标题翻译：用于生成X射线的方法和装置
公开(公告)号：JP2006085940A
公开(公告)日：2006-03-30
申请号：JP2004267078
申请日：2004-09-14
申请人： Laser Gijutsu Sogo Kenkyusho , 財団法人レーザー技術総合研究所
发明人： UCHIDA SHIGEAKI , SHIMADA YOSHINORI , YAMAURA MICHITERU , MIYANAGA NORIAKI , NISHIMURA HIROAKI , FUJIOKA SHINSUKE , NORIMATSU TAKAYOSHI , NAGAI KEIJI , NISHIHARA ISANAGA , IZAWA YASUKAZU
IPC分类号： H05G2/00 , G21K5/08 , H05H1/24
摘要： PROBLEM TO BE SOLVED: To provide a method for generating a X ray (including EUV light), whereby generation of debris can be effectively suppressed.
SOLUTION: This method of generating the X ray is provided with a process in which a target separating laser beam 19 is irradiated to a X ray generating target 13 deposited on the surface of a transparent substrate 11 directly or through a laser absorbing layer from the rear surface side of the substrate, the target 13 is thereby separated from the substrate 11, and X ray generating energy 23 is supplied to the separated target 13, in order to generate the X ray.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于产生X射线（包括EUV光）的方法，由此可以有效地抑制碎屑的产生。解决方案：这种产生X射线的方法具有这样的处理，其中靶分离激光束19直接照射到沉积在透明基板11的表面上的X射线产生靶13，或者通过激光吸收层从基板的背面侧将靶13与基板11分离，将X射线产生能23供给到被分离的靶13，以产生X射线。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP2012078813A Laser device 审中-公开
标题翻译：激光装置
公开(公告)号：JP2012078813A
公开(公告)日：2012-04-19
申请号：JP2011192954
申请日：2011-09-05
申请人： Hamamatsu Photonics Kk , Laser Gijutsu Sogo Kenkyusho , Osaka Univ , 国立大学法人大阪大学 , 浜松ホトニクス株式会社 , 財団法人レーザー技術総合研究所
发明人： MIYANAGA NORIAKI , FUJITA MASAYUKI , KURITA TAKASHI , KAWASHIMA TOSHIYUKI
IPC分类号： G02F1/01 , H01S3/07 , H01S3/10
摘要： PROBLEM TO BE SOLVED: To provide a laser device capable of generating a pulsed laser beam with high output.SOLUTION: Each laser beam Lbeing continuous beam is amplified by a channel amplifier 14 in a laser device 1 and by a slab type solid laser device 44 in a laser device 1A. Therefore, an amplification factor can be set higher comparing to the case of amplifying a pulsed laser beam. In multiplexing each of the laser beams Lamplified in this manner on a condensing position Pof a diffraction grating 16 to generate a multiplexed beam L, the phase of each laser beam Lis controlled such that an output peak (the same pulse time waveform) of the multiplexed beam Lrepeatedly appears at predetermined time intervals on the condensing position P. Consequently, a pulsed laser beam is generated by a plurality of the amplified laser beams Lon the condensing position Pof the diffraction grating 16. Therefore, it becomes possible for this laser device 1 to generate a pulsed laser beam with high output.
摘要翻译：要解决的问题：提供能够产生高输出的脉冲激光束的激光装置。
解决方案：作为连续光束的每个激光束L 1 由激光装置1中的通道放大器14和激光装置中的平板型固体激光装置44放大 1A。因此，与放大脉冲激光束的情况相比，放大系数可以设定得更高。在将衍射光栅16的聚光位置P 1 以这种方式放大的激光束L 2 多路复用光束L 3 ，控制每个激光束L 1 的相位，使得输出峰值（相同脉冲时间复合光束L 3 的波形以预定的时间间隔重复出现在聚光位置P 1 上。因此，脉冲激光束由多个放大激光束L 2 在聚光位置P 1 衍射光栅16.因此，该激光装置1可以产生高输出的脉冲激光束。版权所有（C）2012，JPO＆INPIT

5. 发明专利

JP2012078812A Laser device 审中-公开
标题翻译：激光装置
公开(公告)号：JP2012078812A
公开(公告)日：2012-04-19
申请号：JP2011192951
申请日：2011-09-05
申请人： Hamamatsu Photonics Kk , Laser Gijutsu Sogo Kenkyusho , Osaka Univ , 国立大学法人大阪大学 , 浜松ホトニクス株式会社 , 財団法人レーザー技術総合研究所
发明人： MIYANAGA NORIAKI , FUJITA MASAYUKI , KURITA TAKASHI , KAWASHIMA TOSHIYUKI
IPC分类号： G02F1/01
摘要： PROBLEM TO BE SOLVED: To provide a laser device capable of easily generating a pulsed laser beam with short pulse and high output.SOLUTION: In multiplexing each of a plurality of laser beams Lhaving different frequencies from each other by a diffraction grating 13 to generate a multiplexed beam L, the phase of each laser beam Lis controlled such that an output peak (the same pulse time waveform) of the multiplexed beam Lrepeatedly appears at predetermined time intervals on a condensing position Pof the diffraction grating 13. Consequently, a pulsed laser beam is generated on the condensing position P. This laser device 1 generates a pulsed laser beam by multiplexing a plurality of laser beams Loscillated from a plurality of laser light sources 10. Therefore, by increasing the number of the laser light sources 10 (the number of laser beams Lhaving different frequencies from each other), a pulsed laser beam with short pulse and high output can be easily generated.
摘要翻译：要解决的问题：提供能够容易地产生具有短脉冲和高输出的脉冲激光束的激光装置。解决方案：通过衍射光栅13将具有不同频率的多个激光束L 1 复用，以产生多路复用光束L 2 ，控制各激光束L 1 的相位，使得复用光束L 1 上以预定的时间间隔重复出现POS =“POST”> 2 。因此，脉冲激光束冷凝位置P 1 。该激光装置1通过多路复用从多个激光源10振荡的多个激光束L 1 来产生脉冲激光束。因此，通过增加激光的数量源10（具有彼此具有不同频率的激光束L 1 ）的数量），可以容易地产生具有短脉冲和高输出的脉冲激光束。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2013148769A Multi-beam coupling device 有权
标题翻译：多光束耦合器件
公开(公告)号：JP2013148769A
公开(公告)日：2013-08-01
申请号：JP2012009972
申请日：2012-01-20
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社 , Institute For Laser Technology , 公益財団法人レーザー技術総合研究所 , Osaka Univ , 国立大学法人大阪大学
发明人： HAMAMOTO KOICHI , YAMADA TAKAHIRO , HAIK CHOSROWJAN , FURUSE HIROAKI , FUJITA MASAYUKI , IZAWA YASUKAZU , KAWANAKA JUNJI , MIYANAGA NORIAKI
IPC分类号： G02B26/06 , G02F1/01 , H01S3/23
CPC分类号： H01S3/10053 , G01J9/02 , G02B26/06 , G02B27/0905 , G02F1/0121 , G02F1/21 , H01S3/0085 , H01S3/1307 , H01S3/2308 , H01S3/2383
摘要： PROBLEM TO BE SOLVED: To provide a multi-beam coupling device capable of controlling the respective phases of a plurality of laser beams with a simple configuration.SOLUTION: The multi-beam coupling device comprises: a phase shift part; a superimposing part; an observation part; and a phase control part. The phase shift part generates a plurality of shifted laser beams by shifting respective phases of the plurality of laser beams. The superimposing part generates a plurality of overlapped laser beams by superimposing the plurality of shifted laser beams on a reference beam. The observation part generates interference pattern information on a spatial interference pattern that appears when each of the superimposed laser beams is observed. A phase control part feedback-controls phase shifting by the phase shift part on the basis of interference pattern information obtained for each superimposed laser beam to thereby set the plurality of shifted laser beams into a desired state.
摘要翻译：要解决的问题：提供能够以简单的结构控制多个激光束的各个相位的多光束耦合装置。解决方案：多光束耦合装置包括：相移部分; 叠加部分; 观察部分; 和相位控制部。相移部分通过移动多个激光束的各个相位来产生多个移动的激光束。叠加部分通过将多个移动的激光束叠加在参考光束上来产生多个重叠的激光束。观察部分产生当观察到每个叠加的激光束时出现的空间干涉图案上的干涉图案信息。相位控制部分基于针对每个叠加的激光束获得的干涉图案信息反馈控制由相移部分的相移，从而将多个移动的激光束设置为期望的状态。

7. 发明专利

JPH1039267A LIQUID CRYSTAL POLARIZATION CONTROL ELEMENT 失效
公开(公告)号：JPH1039267A
公开(公告)日：1998-02-13
申请号：JP19318796
申请日：1996-07-23
申请人： LASER GIJUTSU SOGO KENKYUSHO
发明人： SUEDA KEIICHI , TSUBAKIMOTO KOJI , MIYANAGA NORIAKI , NAKATSUKA MASAHIRO
IPC分类号： G02F1/13 , G02F1/1337
摘要： PROBLEM TO BE SOLVED: To obtain a liquid crystal polarization control element capable of being used even for a high luminance laser by generating the helical arrangement of liquid crystal molecules while adding double refraction polymer into arbitrary areas of one cell and generating many beamlets polarized in an arbitrary direction in one beam. SOLUTION: Oriented films 3a. 3b are closely adhered to glass substrates 2a, 2b are oriented film sides are oppositery arranged and nematic liquid crystal 5 is hermetically sealed between them to be made to be a liquid crystal cell. Pigments of double refraction high polymer are added to the oriented film 3a of one side of the films and pigments having an extraodinary ray axis in a direction parallel with a set direction are remained and other pigments are made to vanish double reflectivity. The oriented film 3b of other side is processed so as to be oriented uniformly. When the laser beam of a linearly polarized light is made incident on the described cell, the linearly polarized light is partially rotated in prescribed areas and beamlets having the linearly polarized light of an arbitrary direction are obtained.

8. 发明专利

JP2010157422A Illuminating device 有权
标题翻译：照明设备
公开(公告)号：JP2010157422A
公开(公告)日：2010-07-15
申请号：JP2008334886
申请日：2008-12-26
申请人： Panasonic Electric Works Co Ltd , パナソニック電工株式会社
发明人： TANAKA KENICHIRO , YAMAE KAZUYUKI , MIYANAGA NORIAKI , TSUBAKIMOTO KOJI
IPC分类号： F21S2/00 , F21V5/04 , F21Y101/02 , G02B5/18
摘要： PROBLEM TO BE SOLVED: To provide an illuminating device capable of diminishing color shading on an irradiated face. SOLUTION: The device is provided with a light-emitting part 20A having a plurality of kinds of light-emitting elements 21a to 21c emitting light of different dominant wavelengths, and a light-distribution lens 40 controlling distribution of light emitted from the light-emitting part 20A. The device is also provided with first diffractive optical elements 31a to 31c fitted to a light-extracting face side of each light-emitting element 21a to 21c at the light-emitting part 20A and changing a travelling direction of light by diffraction, and a second diffractive optical element 50 fitted to a light-irradiation face side of the light distribution lens 40 and changing a travelling direction of light by diffraction. The first diffractive optical elements 31a to 31c and the second diffractive optical element 50 are formed in a shape removing chromatic aberration. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供能够减少照射面上的着色的照明装置。解决方案：该装置设置有发光部20A，其具有发射不同主波长的光的多种发光元件21a〜21c，以及配光透镜40，其控制从发光部20A。该装置还设置有与发光部20A的各发光元件21a〜21c的光取出面侧嵌合并通过衍射改变光的行进方向的第一衍射光学元件31a〜31c，衍射光学元件50装配到配光透镜40的光照射面侧，并且通过衍射改变光的行进方向。第一衍射光学元件31a至31c和第二衍射光学元件50形成为除去色差的形状。版权所有（C）2010，JPO＆INPIT

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