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    • 9. 发明申请
    • Three-dimensional resonant cells with tilt up fabrication
    • 具有倾斜制造的三维谐振单元
    • US20080087973A1
    • 2008-04-17
    • US11580385
    • 2006-10-12
    • Shih-Yuan WangAlexandre BratkovskiWei Wu
    • Shih-Yuan WangAlexandre BratkovskiWei Wu
    • H01L31/00H01L21/00
    • H01Q15/0086H01Q3/44
    • A composite material for providing at least one of a negative effective permeability and a negative effective permittivity for incident radiation of at least one wavelength is described. The composite material comprises a plurality of three-dimensional resonant cells disposed across a first substrate. Each three-dimensional resonant cell comprises a base substantially parallel to the substrate and at least three sidewalls upwardly extending therefrom. Each upwardly extending sidewall comprising a sidewall substrate having at least one conductor patterned thereon. Each upwardly extending sidewall is fabricated by forming the sidewall substrate as a substantially horizontal layer above the first substrate, lithographically patterning the sidewall substrate with the at least one conductor while horizontally disposed above the first substrate, and tilting up the sidewall substrate to the upwardly extending position.
    • 描述了用于为至少一个波长的入射辐射提供负有效磁导率和负有效介电常数中的至少一个的复合材料。 复合材料包括跨越第一基板设置的多个三维谐振单元。 每个三维谐振单元包括基本上平行于基板的基座和从其向上延伸的至少三个侧壁。 每个向上延伸的侧壁包括具有图案化的至少一个导体的侧壁基板。 每个向上延伸的侧壁通过将侧壁基底形成为在第一基底之上的基本上水平的层来制造,在水平地设置在第一基底之上的情况下,利用至少一个导体光刻地图案化侧壁基底,并且将侧壁基底向上延伸 位置。