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1. 发明授权

US06667245B2 CMOS-compatible MEM switches and method of making 失效
公开(公告)号：US06667245B2
公开(公告)日：2003-12-23
申请号：US10016894
申请日：2001-12-13
申请人： Lap-Wai Chow , Tsung-Yuan Hsu , Daniel J. Hyman , Robert Y. Loo , Paul Ouyang , James H. Schaffner , Adele Schmitz , Robert N. Schwartz
发明人： Lap-Wai Chow , Tsung-Yuan Hsu , Daniel J. Hyman , Robert Y. Loo , Paul Ouyang , James H. Schaffner , Adele Schmitz , Robert N. Schwartz
IPC分类号： H01L2100
CPC分类号： B81C1/00246 , B81B2201/014 , B81C2201/014 , B81C2203/0714 , B81C2203/0735 , H01H1/58 , H01H59/0009 , H01H2001/0057
摘要： A microelectromechanical (MEM) switch is fabricated inexpensively by using processing steps which are standard for fabricating multiple metal layer integrated circuits, such as CMOS. The exact steps may be adjusted to be compatible with the process of a particular foundry, resulting in a device which is both low cost and readily integrable with other circuits. The processing steps include making contacts for the MEM switch from metal plugs which are ordinarily used as vias to connect metal layers which are separated by a dielectric layer. Such contact vias are formed on either side of a sacrificial metallization area, and then the interconnect metallization is removed from between the contact vias, leaving them separated. Dielectric surrounding the contacts is etched back so that they protrude toward each other. Thus, when the contacts are moved toward each other by actuating the MEM switch, they connect firmly without obstruction. Tungsten is typically used to form vias in CMOS processes, and it makes an excellent contact material, but other via metals may also be employed as contacts. Interconnect metallization may be employed for other structural and interconnect needs of the MEM switch, and is preferably standard for the foundry and process used. Various metals and dielectric materials may be used to create the switches, but in a preferred embodiment the interconnect metal layers are aluminum and the dielectric material is SiO2, materials which are fully compatible with standard four-layer CMOS fabrication processes.

2. 发明授权

US06396368B1 CMOS-compatible MEM switches and method of making 失效
标题翻译： CMOS兼容MEM开关及制作方法
公开(公告)号：US06396368B1
公开(公告)日：2002-05-28
申请号：US09438085
申请日：1999-11-10
申请人： Lap-Wai Chow , Tsung-Yuan Hsu , Daniel J. Hyman , Robert Y. Loo , Paul Ouyang , James H. Schaffner , Adele Schmitz , Robert N. Schwartz
发明人： Lap-Wai Chow , Tsung-Yuan Hsu , Daniel J. Hyman , Robert Y. Loo , Paul Ouyang , James H. Schaffner , Adele Schmitz , Robert N. Schwartz
IPC分类号： H01P110
CPC分类号： B81C1/00246 , B81B2201/014 , B81C2201/014 , B81C2203/0714 , B81C2203/0735 , H01H1/58 , H01H59/0009 , H01H2001/0057
摘要： A microelectromechanical (MEM) switch is fabricated inexpensively by using processing steps which are standard for fabricating multiple metal layer integrated circuits, such as CMOS. The exact steps may be adjusted to be compatible with the process of a particular foundry, resulting in a device which is both low cost and readily integrable with other circuits. The processing steps include making contacts for the MEM switch from metal plugs which are ordinarily used as vias to connect metal layers which are separated by a dielectric layer. Such contact vias are formed on either side of a sacrificial metallization area, and then the interconnect metallization is removed from between the contact vias, leaving them separated. Dielectric surrounding the contacts is etched back so that they protrude toward each other. Thus, when the contacts are moved toward each other by actuating the MEM switch, they connect firmly without obstruction. Tungsten is typically used to form vias in CMOS processes, and it makes an excellent contact material, but other via metals may also be employed as contacts. Interconnect metallization may be employed for other structural and interconnect needs of the MEM switch, and is preferably standard for the foundry and process used. Various metals and dielectric materials may be used to create the switches, but in a preferred embodiment the interconnect metal layers are aluminum and the dielectric material is SiO2, materials which are fully compatible with standard four-layer CMOS fabrication processes.
摘要翻译：通过使用标准制造多个金属层集成电路（如CMOS）的处理步骤，廉价地制造了微机电（MEM）开关。可以将精确的步骤调整为与特定代工厂的过程兼容，从而导致低成本且易于与其他电路集成的装置。处理步骤包括通过通常用作通孔的金属插头进行MEM开关的接触，以连接由电介质层分离的金属层。这种接触通孔形成在牺牲金属化区域的任一侧，然后从接触通孔之间移除互连金属化，使它们分离。围绕触点的介质被回蚀，使得它们彼此突出。因此，当通过致动MEM开关使触点彼此移动时，它们牢固地连接而不阻塞。钨通常用于在CMOS工艺中形成通孔，并且它制成优良的接触材料，但也可以使用其它通孔金属作为接触。互连金属化可以用于MEM开关的其他结构和互连需求，并且优选地是用于所使用的铸造和工艺的标准。可以使用各种金属和介电材料来制造开关，但是在优选实施例中，互连金属层是铝，并且介电材料是SiO 2，与标准四层CMOS制造工艺完全兼容的材料。

3. 发明授权

US06331257B1 Fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications 有权
标题翻译：用于微波和毫米波应用的宽带表面微加工微机电开关的制造
公开(公告)号：US06331257B1
公开(公告)日：2001-12-18
申请号：US09452052
申请日：1999-11-30
申请人： Robert Y. Loo , Adele Schmitz , Julia Brown , James Foschaar , Daniel J. Hyman , Tsung-Yuan Hsu
发明人： Robert Y. Loo , Adele Schmitz , Julia Brown , James Foschaar , Daniel J. Hyman , Tsung-Yuan Hsu
IPC分类号： H01B1300
CPC分类号： B81B3/0072 , B81B2201/014 , B81B2203/0118 , H01G5/18 , H01G5/38 , H01G5/40 , H01H1/50 , H01H59/0009 , H01P1/12
摘要： Methods for the design and fabrication of micro-electro-mechanical switches are disclosed. Two different switch designs with three different switch fabrication techniques are presented for a total of six switch structures. Each switch has a multiple-layer armature with a suspended biasing electrode and a conducting transmission line affixed to the structural layer of the armature. A conducting dimple is connected to the conducting line to provide a reliable region of contact for the switch. The switch is fabricated using silicon nitride as the armature structural layer and silicon dioxide as the sacrificial layer supporting the armature during fabrication. Hydrofluoric acid is used to remove the silicon dioxide layer with post-processing in a critical point dryer to increase yield.
摘要翻译：公开了微机电开关的设计和制造方法。提出了三种不同的开关制造技术的两种不同的开关设计，共有六种开关结构。每个开关具有多层电枢，其具有悬置的偏置电极和固定到电枢的结构层的导电传输线。导电凹坑连接到导线，为开关提供可靠的接触区域。该开关使用氮化硅作为电枢结构层和二氧化硅作为在制造期间支撑电枢的牺牲层制造。氢氟酸用于在临界点干燥器中进行后处理以去除二氧化硅层以提高产率。

4. 发明授权

US6046659A Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications 失效
标题翻译：用于微波和毫米波应用的宽带表面微加工微机电开关的设计和制造
公开(公告)号：US6046659A
公开(公告)日：2000-04-04
申请号：US080326
申请日：1998-05-15
申请人： Robert Y. Loo , Adele Schmitz , Julia Brown , Jonathan Lynch , Debabani Choudhury , James Foschaar , Daniel J. Hyman , Brett Warneke , Juan Lam , Tsung-Yuan Hsu , Jae Lee , Mehran Mehregany
发明人： Robert Y. Loo , Adele Schmitz , Julia Brown , Jonathan Lynch , Debabani Choudhury , James Foschaar , Daniel J. Hyman , Brett Warneke , Juan Lam , Tsung-Yuan Hsu , Jae Lee , Mehran Mehregany
IPC分类号： H01H1/50 , H01H59/00 , H01P1/12 , H01P1/10 , H01H57/00
CPC分类号： B81B3/0072 , H01G5/18 , H01G5/38 , H01G5/40 , H01H59/0009 , H01P1/12 , B81B2201/014 , B81B2203/0118 , H01H1/50
摘要： Methods for the design and fabrication of micro-electro-mechanical switches are disclosed. Two different switch designs with three different switch fabrication techniques are presented for a total of six switch structures. Each switch has a multiple-layer armature with a suspended biasing electrode and a conducting transmission line affixed to the structural layer of the armature. A conducting dimple is connected to the conducting line to provide a reliable region of contact for the switch. The switch is fabricated using silicon nitride as the armature structural layer and silicon dioxide as the sacrificial layer supporting the armature during fabrication. Hydrofluoric acid is used to remove the silicon dioxide layer with post-processing in a critical point dryer to increase yield.
摘要翻译：公开了微机电开关的设计和制造方法。提出了三种不同的开关制造技术的两种不同的开关设计，共有六种开关结构。每个开关具有多层电枢，其具有悬置的偏置电极和固定到电枢的结构层的导电传输线。导电凹坑连接到导线，为开关提供可靠的接触区域。该开关使用氮化硅作为电枢结构层和二氧化硅作为在制造期间支撑电枢的牺牲层制造。氢氟酸用于在临界点干燥器中进行后处理以去除二氧化硅层以提高产率。

5. 发明授权

US6069587A Multiband millimeterwave reconfigurable antenna using RF mem switches 失效
标题翻译：使用RF mem开关的多频带毫米波可重构天线
公开(公告)号：US6069587A
公开(公告)日：2000-05-30
申请号：US79805
申请日：1998-05-15
申请人： Jonathan Lynch , Stan Livingston , Jar J. Lee , Robert Y. Loo , Juan Lam , Adele Schmitz , Debabani Choudhury , Julia Brown , Daniel J. Hyman , Brett Warneke
发明人： Jonathan Lynch , Stan Livingston , Jar J. Lee , Robert Y. Loo , Juan Lam , Adele Schmitz , Debabani Choudhury , Julia Brown , Daniel J. Hyman , Brett Warneke
IPC分类号： H01Q1/38 , H01Q5/00 , H01Q9/04
CPC分类号： H01Q9/14 , H01Q1/38 , H01Q9/0407 , H01H2001/0084 , H01H59/0009
摘要： A multiband millimeterwave antenna system for communicating signals in multiple frequency bands is disclosed. A main antenna body is connected to antenna extensions by micro-electro-mechanical switches. By opening and closing the switches, the length of the antenna can be altered. The antenna is coupled to a microstrip feed line by an aperture. A series of matching stubs match the impedance of the feed line for the various signal frequencies.
摘要翻译：公开了一种用于在多个频带中传送信号的多频带毫米波天线系统。主天线体通过微机电开关连接到天线延伸。通过打开和关闭开关，天线的长度可以改变。天线通过孔耦合到微带馈电线。一系列匹配的短截线匹配各种信号频率的馈线的阻抗。

6. 发明授权

US6043727A Reconfigurable millimeterwave filter using stubs and stub extensions selectively coupled using voltage actuated micro-electro-mechanical switches 失效
标题翻译：可重新配置的毫米波滤波器使用电压致动的微机电开关选择性地耦合的短截线和短截线
公开(公告)号：US6043727A
公开(公告)日：2000-03-28
申请号：US79804
申请日：1998-05-15
申请人： Brett Warneke , Juan Lam , Adele Schmitz , Julia Brown , Darren Atkinson , Daniel J. Hyman , Robert Y. Loo
发明人： Brett Warneke , Juan Lam , Adele Schmitz , Julia Brown , Darren Atkinson , Daniel J. Hyman , Robert Y. Loo
IPC分类号： H01P1/203 , H01P7/00
CPC分类号： H01P1/2039 , H01G5/18 , H01G5/40
摘要： A reconfigurable filter system designed using micro-elecro-mechanical (MEM) switches is disclosed. The filter comprises a transmission line with one or more filter stubs coupled to the transmission line by MEM switches. The impedance of the filter system is altered by selectively opening and closing the MEM switches, which alters the filter characteristics of the filter system. Alternatively, the characteristics of the filter system are altered by using the MEM switches to selectively alter the length of filter stubs attached to the transmission line.
摘要翻译：公开了一种使用微电机（MEM）开关设计的可重构滤波器系统。滤波器包括传输线，其中一个或多个滤波器短截线通过MEM开关耦合到传输线。通过选择性地打开和关闭MEM开关来改变过滤系统的阻抗，这改变了过滤器系统的过滤特性。或者，通过使用MEM开关来选择性地改变附接到传输线的滤波器短线的长度来改变滤波器系统的特性。

7. 发明授权

US08049659B1 Firearm threat detection, classification, and location using wideband radar 有权
标题翻译：使用宽带雷达的火器威胁检测，分类和定位
公开(公告)号：US08049659B1
公开(公告)日：2011-11-01
申请号：US12426845
申请日：2009-04-20
申请人： Jacob Ryan Sullivan , Daniel J. Hyman
发明人： Jacob Ryan Sullivan , Daniel J. Hyman
IPC分类号： G01S13/78
CPC分类号： G01S7/412 , F41G3/14 , F41G3/147 , H01Q21/205
摘要： An aimed or aiming firearm can be detected before it is able to shoot. Wideband radar signals can be used to identify the barrel of a firearm when the radar antenna and barrel are aiming at or near each other. Signal processing correlates reflected signals to the characteristics of specific firearms of interest, and alerts the user when someone is pointing such a firearm at them. Modern wideband radar systems with fast signal processing speed can enable real-time detection of firearm threats in crowded and cluttered areas before they shoot, which has never before been possible. Related systems, apparatus, methods, and articles are also described.
摘要翻译：在能够射击之前，可以检测到瞄准枪瞄准枪。当雷达天线和炮筒瞄准或靠近对方时，宽带雷达信号可用于识别枪支的枪管。信号处理将反射的信号与感兴趣的特定火器的特征相关联，并且当有人向他们指示这样的枪支时警告用户。具有快速信号处理速度的现代宽带雷达系统可以实现在拥挤和凌乱的区域内实时检测火器威胁，而这些区域在拍摄之前，从未有过可能。还描述了相关系统，装置，方法和制品。

8. 发明授权

US08610622B2 Firearm threat detection, classification, and location using wideband radar 有权
标题翻译：使用宽带雷达的火器威胁检测，分类和定位
公开(公告)号：US08610622B2
公开(公告)日：2013-12-17
申请号：US13281296
申请日：2011-10-25
申请人： Jacob Ryan Sullivan , Daniel J. Hyman
发明人： Jacob Ryan Sullivan , Daniel J. Hyman
IPC分类号： G01S13/90
CPC分类号： G01S7/412 , F41G3/14 , F41G3/147 , H01Q21/205
摘要： An aimed or aiming firearm can be detected before it is able to shoot. Wideband radar signals can be used to identify the barrel of a firearm when the radar antenna and barrel are aiming at or near each other. Signal processing correlates reflected signals to the characteristics of specific firearms of interest, and alerts the user when someone is pointing such a firearm at them. Modern wideband radar systems with fast signal processing speed can enable real-time detection of firearm threats in crowded and cluttered areas before they shoot, which has never before been possible. Related systems, apparatus, methods, and articles are also described.
摘要翻译：在能够射击之前，可以检测到瞄准枪瞄准枪。当雷达天线和炮筒瞄准或靠近对方时，宽带雷达信号可用于识别枪支的枪管。信号处理将反射的信号与感兴趣的特定火器的特征相关联，并且当有人向他们指示这样的枪支时警告用户。具有快速信号处理速度的现代宽带雷达系统可以实现在拥挤和凌乱的区域内实时检测火器威胁，而这些区域在拍摄之前，从未有过可能。还描述了相关系统，装置，方法和制品。

9. 发明授权

US07355492B2 Electronically controlled hybrid digital and analog phase shifter 失效
标题翻译：电子控制混合数字和模拟移相器
公开(公告)号：US07355492B2
公开(公告)日：2008-04-08
申请号：US11094481
申请日：2005-03-31
申请人： Daniel J. Hyman , Roger T. Kuroda
发明人： Daniel J. Hyman , Roger T. Kuroda
IPC分类号： H01P1/18 , H03H7/20
CPC分类号： H03H7/20 , H01P1/18 , H03H17/08
摘要： The inventions presented herein provide a electronically controlled phase shifters that incorporate analog and digital phase shift architectures in a novel manner that realizes the best advantages of each architecture. This combination of complementary phase shift architectures provides the high-performance and low loss characteristics of switched digital phase shift architectures with the high resolution and precision of continuous analog phase shift architectures. The circuit embodiments are electronically controlled, which simplifies implementation of what is a complex circuit. The analog phase shift elements comprise electronically-tuned varactors, which provide fine resolution and enables the incorporation of active compensation for manufacturing variation before use or for environmental conditions during use.
摘要翻译：本文提出的发明提供了一种电子控制的移相器，其以新颖的方式并入模拟和数字相移架构，实现了每个架构的最佳优点。互补相移架构的这种组合提供了具有连续模拟相移架构的高分辨率和精度的开关数字相移架构的高性能和低损耗特性。电路实施例是电子控制的，其简化了什么是复杂电路的实现。模拟相移元件包括电子调谐的可变电抗器，其提供精细的分辨率，并且能够在使用之前或对于使用期间的环境条件下引入用于制造变化的主动补偿。

10. 发明申请

US20120038505A1 Firearm Threat Detection, Classification, and Location Using Wideband Radar 有权
标题翻译：使用宽带雷达的火器威胁检测，分类和定位
公开(公告)号：US20120038505A1
公开(公告)日：2012-02-16
申请号：US13281296
申请日：2011-10-25
申请人： Jacob Ryan Sullivan , Daniel J. Hyman
发明人： Jacob Ryan Sullivan , Daniel J. Hyman
IPC分类号： G01S13/04 , G01S13/42
CPC分类号： G01S7/412 , F41G3/14 , F41G3/147 , H01Q21/205
摘要： An aimed or aiming firearm can be detected before it is able to shoot. Wideband radar signals can be used to identify the barrel of a firearm when the radar antenna and barrel are aiming at or near each other. Signal processing correlates reflected signals to the characteristics of specific firearms of interest, and alerts the user when someone is pointing such a firearm at them. Modern wideband radar systems with fast signal processing speed can enable real-time detection of firearm threats in crowded and cluttered areas before they shoot, which has never before been possible. Related systems, apparatus, methods, and articles are also described.
摘要翻译：在能够射击之前，可以检测到瞄准枪瞄准枪。当雷达天线和炮筒瞄准或靠近对方时，宽带雷达信号可用于识别枪支的枪管。信号处理将反射的信号与感兴趣的特定火器的特征相关联，并且当有人向他们指示这样的枪支时警告用户。具有快速信号处理速度的现代宽带雷达系统可以实现在拥挤和凌乱的区域内实时检测火器威胁，而这些区域在拍摄之前，从未有过可能。还描述了相关系统，装置，方法和制品。

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