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1. 发明申请

WO2011101613A1 METHOD AND APPARATUS FOR ION BEAM POLISHING 审中-公开
标题翻译：用于离子束抛光的方法和装置
公开(公告)号：WO2011101613A1
公开(公告)日：2011-08-25
申请号：PCT/GB2011/000169
申请日：2011-02-10
申请人： LANCASTER UNIVERSITY BUSINESS ENTERPRISES LIMITED , KOLOSOV, Oleg Victor , GRISHIN, Ilja
发明人： KOLOSOV, Oleg Victor , GRISHIN, Ilja
IPC分类号： G01N1/04 , G01N1/32 , H01J37/305
CPC分类号： H01J37/3053 , G01N1/32 , H01J2237/20
摘要： A method for forming a polished facet between an edge and a face of a sample, involves removing a first portion of the sample by directing an ion beam onto the edge adjacent the first portion along an ion beam axis to leave the polished facet. The ion beam axis lies on an ion beam plane oriented at a glancing incident angle, preferably from 1° to 30°, to a sample plane defined by and parallel to the first face. The ion beam is directed to flow from the edge towards the first face. Also disclosed is a sample preparation apparatus comprising a chamber adapted for evacuation with a sample holder adapted to hold a sample comprising a first face bounded by an edge, and an ion gun arranged to direct an ion beam along an ion beam axis towards the sample. The sample holder is configurable to position the sample relative to the ion beam such that a first portion of the sample is removable by the ion beam to leave a polished facet between the edge and the first face of said sample. The sample holder is configured to hold the sample whereby the ion beam axis lies on an ion beam plane oriented at an incident angle from 1° to 30° to a sample plane defined by and parallel to the first face of the sample.
摘要翻译：用于在样品的边缘和面之间形成抛光小面的方法包括通过沿着离子束轴将离子束引导到与第一部分相邻的边缘上以离开抛光小面来去除样品的第一部分。离子束轴位于以一瞥入射角取向的离子束平面，优选为1°至30°，至由第一面限定并平行于第一面的样品平面。离子束被引导从边缘流向第一面。还公开了一种样品制备装置，其包括适合于用适于使包含由边缘限定的第一面的样品的样品保持器进行抽真空的腔室，以及离子枪，其布置成沿离子束轴线朝向样品引导离子束。样品架可配置为相对于离子束定位样品，使得样品的第一部分可由离子束移除，以在所述样品的边缘和第一面之间留下抛光面。样品保持器构造成保持样品，由此离子束轴位于以与样品的第一面限定并平行的样品平面从1°至30°的入射角取向的离子束平面。

2. 发明公开

EP2537017A1 METHOD AND APPARATUS FOR ION BEAM POLISHING 有权转让
标题翻译：方法波兰语离子束和抛光样品
公开(公告)号：EP2537017A1
公开(公告)日：2012-12-26
申请号：EP11703917.2
申请日：2011-02-10
申请人： Lancaster University Business Enterprises Limited
发明人： KOLOSOV, Oleg Victor , GRISHIN, Ilja
IPC分类号： G01N1/04 , G01N1/32 , H01J37/305
CPC分类号： H01J37/3053 , G01N1/32 , H01J2237/20
摘要： A method for forming a polished facet between an edge and a face of a sample, involves removing a first portion of the sample by directing an ion beam onto the edge adjacent the first portion along an ion beam axis to leave the polished facet. The ion beam axis lies on an ion beam plane oriented at a glancing incident angle, preferably from 1° to 30°, to a sample plane defined by and parallel to the first face. The ion beam is directed to flow from the edge towards the first face. Also disclosed is a sample preparation apparatus comprising a chamber adapted for evacuation with a sample holder adapted to hold a sample comprising a first face bounded by an edge, and an ion gun arranged to direct an ion beam along an ion beam axis towards the sample. The sample holder is configurable to position the sample relative to the ion beam such that a first portion of the sample is removable by the ion beam to leave a polished facet between the edge and the first face of said sample. The sample holder is configured to hold the sample whereby the ion beam axis lies on an ion beam plane oriented at an incident angle from 1° to 30° to a sample plane defined by and parallel to the first face of the sample.

3. 发明授权

EP2537017B1 METHOD FOR ION BEAM POLISHING AND POLISHED SAMPLE 有权转让
标题翻译：方法波兰语离子束和抛光样品
公开(公告)号：EP2537017B1
公开(公告)日：2016-11-09
申请号：EP11703917.2
申请日：2011-02-10
申请人： Lancaster University Business Enterprises Limited
发明人： KOLOSOV, Oleg Victor , GRISHIN, Ilja
IPC分类号： G01N1/04 , G01N1/32 , H01J37/305
CPC分类号： H01J37/3053 , G01N1/32 , H01J2237/20

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